SLIDING PARTS

Abstract

By randomly arranging dimples provided on a sealing face, a sliding characteristic is improved in a wide range of a bearing characteristic number on the sealing face. A pair of sliding parts in which a plurality of dimples is arranged on at least one of sealing faces that relatively slide on each other is characterized in that each of the plurality of dimples is provided independently from the other dimples, and arranged in such a manner that the plurality of dimples having different opening diameters is randomly distributed.

Claims

1. A pair of sliding parts having sealing surfaces slidable relative to each other, wherein at least one of the pair of sliding parts is formed in an annular body, and a plurality of dimples is formed on the sealing surface of the at least one of the pair of sliding parts, the plurality of dimples includes dimples having a circular, oval, or oblong shape, the plurality of dimples is arranged randomly, and the plurality of dimples includes dimples arranged to communicate with an inner peripheral side of the sliding parts.

2. The sliding parts according to claim 1, wherein the plurality of dimples further includes dimples arranged to communicate with an outer peripheral side of the sliding parts.

3. The sliding parts according to claim 1, wherein the plurality of dimples is arranged in a single dimple formation region extending in a circumferential direction, and one end portion and the other end portion of the dimple formation region in the circumferential direction are separated from each other by a single seal face formed by the sealing surface.

4. The sliding parts according to claim 3, wherein a length of the dimple formation region in the circumferential direction is longer than a length of the seal face in the circumferential direction.

5. The sliding parts according to claim 1, wherein the plurality of dimples is arranged in a plurality of dimple formation regions, the plurality of dimple formation regions being arranged in a circumferential direction and separated from each other by a seal face formed by the sealing surface.

6. The sliding parts according to claim 5, wherein a length of each of the plurality of dimple formation regions in the circumferential direction is longer than a length of the seal face in the circumferential direction.

7. The sliding parts according to claim 5, wherein a dimple arrangement pattern is identical among the plurality of dimple formation regions.

8. The sliding parts according to claim 1, wherein at least one dimple of the dimples communicating with the inner peripheral side of the sliding parts is formed to be narrowed from a center side of the at least one dimple in an inner diameter direction of the sliding parts such that a damming portion is provided between an inside of the at least one dimple and the inner peripheral side of the sliding parts.

9. The sliding parts according to claim 8, wherein the damming portion is at least provided at a bottom portion of the at least one dimple.

10. The sliding parts according to claim 8, wherein the damming portion is at least provided at a side portion of the at least one dimple.

11. The sliding parts according to claim 2, wherein at least one dimple of the dimples communicating with the outer peripheral side of the sliding parts are formed to be narrowed from a center side of each of the at least one dimple in an outer diameter direction of the sliding parts such that a damming portion is provided between an inside of each of the at least one dimple and the outer peripheral side of the sliding parts.

12. The sliding parts according to claim 11, wherein the damming portion is at least provided at a bottom portion of the at least one dimple.

13. The sliding parts according to claim 11, wherein the damming portion is at least provided at a side portion of the at least one dimple.

14. A pair of sliding parts having sealing surfaces slidable relative to each other, wherein at least one of the pair of sliding parts is formed in an annular body, and a plurality of dimples is formed on the sealing surface of the at least one of the pair of sliding parts, the plurality of dimples includes dimples having a circular, oval, or oblong shape, the plurality of dimples is arranged randomly, and the plurality of dimples includes dimples arranged to communicate with an inner peripheral side of the sliding parts or dimples arranged to communicate with an outer peripheral side of the sliding parts.

15. The sliding parts according to claim 14, wherein the plurality of dimples is arranged in a single dimple formation region extending in a circumferential direction, and one end portion and the other end portion of the dimple formation region in the circumferential direction are separated from each other by a single seal face formed by the sealing surface.

16. The sliding parts according to claim 15, wherein a length of the dimple formation region in the circumferential direction is longer than a length of the seal face in the circumferential direction.

17. The sliding parts according to claim 14, wherein the plurality of dimples is arranged in a plurality of dimple formation regions, the plurality of dimple formation regions being arranged in a circumferential direction and separated from each other by a seal face formed by the sealing surface.

18. The sliding parts according to claim 17, wherein a length of each of the plurality of dimple formation regions in the circumferential direction is longer than a length of the seal face in the circumferential direction.

19. The sliding parts according to claim 17, wherein a dimple arrangement pattern is the same among the plurality of dimple formation regions.

20. The sliding parts according to claim 14, wherein at least one dimple of the dimples communicating with the inner peripheral side or the outer peripheral side of the sliding parts is formed to be narrowed from a center side of the at least one dimple in an inner diameter direction or an outer diameter direction of the sliding parts such that a damming portion is provided between an inside of the at least one dimple and the inner peripheral side or the outer peripheral side of the sliding parts.

21. The sliding parts according to claim 20, wherein the damming portion is at least provided at a bottom portion of the at least one dimple.

22. The sliding parts according to claim 20, wherein the damming portion is at least provided at a side portion of the at least one dimple.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0028] FIG. 1 is to illustrate one example of a sealing face of a sliding part according to an embodiment of the present invention: FIG. 1(a) is a plan view of the sealing face; FIG. 1(b) is an A-A sectional view; and FIG. 1(c) is a B-B sectional view;

[0029] FIG. 2 is a plan view of the sealing face showing dimples randomly arranged on the sealing face of the sliding part according to the embodiment of the present invention;

[0030] FIG. 3 is a chart showing diameter size distribution of the randomly arranged dimples according to the embodiment of the present invention;

[0031] FIG. 4 is a chart showing a relationship between a friction coefficient and a bearing characteristic number G obtained by a rotation sliding test; and

[0032] FIG. 5 is a schematic sectional view for illustrating a testing machine capable of measuring sliding torque, the testing machine used in the present test.

[0033] FIG. 6 is a partial plan view of a sealing surface of a sliding part of another embodiment of the present invention.

[0034] FIG. 7 is to illustrate dimples formed on the sealing surface illustrated in FIG. 6: FIG. 7A is a schematic enlarged plan view of the sealing surface; FIG. 7B is a B-B sectional view of FIG. 7A; FIG. 7C is a C-C sectional view of FIG. 7A; FIG. 7D is a D-D sectional view of FIG. 7A; FIG. 7E is an E-E sectional view of FIG. 7A; FIG. 7F is an F-F sectional view of FIG. 7A; and FIG. 7G is a side view of a main portion as viewed from an arrow G of FIG. 7A.

DESCRIPTION OF EMBODIMENTS

[0035] Hereinafter, with reference to the drawings, a mode for carrying out the present invention will be described and exemplified based on an embodiment. However, regarding size, material, shape, and relative arrangement of constituent parts described in the embodiment, and the like, there is no intention to limit the scope of the present invention only to those unless specifically and clearly described.

Embodiment

[0036] With reference to FIGS. 1 to 5, a sliding part according to the embodiment of the present invention will be described.

[0037] As shown in FIG. 1(a), a sliding part 1 is formed in an annular body. In general, a high pressure sealed fluid exists on one side of inner and outer peripheries of a sealing face S of the sliding part 1, and the atmosphere is on the other side.

[0038] This sealed fluid can be effectively sealed by using the sliding part 1. For example, this sliding part 1 is used for at least one of a pair of rotating and stationary sealing rings in a mechanical seal device. By closely placing a sealing face of the rotating sealing ring and the opposing sealing face of the stationary sealing ring, a sealed fluid that exists in one of inner and outer peripheries of the sealing faces is sealed.

[0039] The sliding part can also be utilized as a sliding part of a bearing that slides on a rotating shaft while sealing lubricating oil on one side in the axial direction of a cylindrical sealing face.

[0040] In the present example, a mechanical seal serving as one example of the sliding part will be described as an example. In the description, an outer peripheral side of the sliding part that forms the mechanical seal serves as a high pressure fluid side (sealed fluid side), and an inner peripheral side serves as a low pressure fluid side (atmosphere side). However, the present invention is not limited to this but can also be applied to a case where the high pressure fluid side and the low pressure fluid side are set the other way around. In FIG. 1, for convenience of description, a case where the high pressure sealed fluid exists on the outer peripheral side will be described.

[0041] In the example shown in the figures, a sectional shape of the sliding part 1 is a convex shape as shown in FIG. 1(c), and a top face thereof forms the flat sealing face S. A large number of dimples 2 as shown in FIG. 1(b) are independently provided on this sealing face S. These dimples 2 are provided not over the entire width in the radial direction of the sealing face S but in dimple formation regions 3 close to the high pressure fluid side. The dimple formation regions 3 communicate with the high pressure fluid side and are isolated from the low pressure fluid side by a flat seal face 4.

[0042] In the present example, the case where the dimples 2 are provided in the dimple formation regions 3 arranged equally and independently in the circumferential direction is shown. However, the present invention is not limited to this but the dimples may be provided continuously in the circumferential direction. In the present example, the sliding part 1 is made of silicon carbide (SiC).

[0043] In the present invention, the dimples are dents formed on the flat sealing face S, and a shape thereof is not particularly limited. For example, a planar shape of the dents includes various shapes such as a circular shape, an oval shape, an oblong shape, or a polygonal shape, and a sectional shape of the dents also includes various shapes such as a bowl shape or a square shape.

[0044] A large number of dimples 2 formed on the sealing face S have a function of holding part of a liquid placed between this sealing face S and the opposing sealing face that relatively slides on the above sealing face as a hydrodynamic lubricating liquid film so as to stabilize a lubricating liquid film.

[0045] FIG. 2 is a plan view of the sealing face showing the dimples randomly arranged on the sealing face of the sliding part according to the embodiment of the present invention. In FIG. 2, the same reference signs as the reference signs in FIG. 1 denote the same members as those in FIG. 1 and detailed description thereof will be omitted.

[0046] In FIG. 2, each of the plurality of dimples 2 formed on the sealing face is provided independently from the other dimples, and arranged in such a manner that the plurality of dimples having different opening diameters is randomly distributed. As a method of random distribution of the opening diameters of the dimples, in the present example, decision is made by using random numbers and the dimples are uniformly distributed on the sealing face. That is, setting is made in such a manner that the distribution of the dimples having different opening diameters is uniform over the entire sealing face.

[0047] One example of a method of processing the dimples on the sealing face will, be described as follows.

[0048] (1) Decide diameters and positions of holes formed on a metal mask by using random numbers.

[0049] (2) Form holes on the metal mask by means of laser processing according to the decided diameters and positions.

[0050] (3) Install the metal mask in which the holes are randomly formed on the sealing face of the target sliding part.

[0051] (4) Form the dimples on the sealing face by utilizing the holes of the metal mask by irradiation with a femtosecond laser from the upper side of the metal mask, ion etching, or the like. The dimples having different opening diameters are uniformly arranged on the sealing face in predetermined distribution.

[0052] FIG. 3 is a chart showing diameter size distribution of the randomly arranged dimples 2 according to the embodiment of the present invention.

[0053] In the present example, the opening diameters of the plurality of dimples 2 are distributed within a range from 30 to 100 m. More dimples 2 having smaller opening diameters are distributed in comparison to the dimples 2 having larger opening diameters.

[0054] Random distribution of the opening diameters of the plurality of dimples 2 is set in accordance with a bearing characteristic number G (fluid viscosityspeed/load) of the sealing face or the like. FIG. 3 shows one favorable example in the mixed dimples having the opening diameters of 30 to 100 m.

[0055] Specifications of sliding parts used in the embodiment and a comparative example are shown in Table 1 below.

[0056] In the embodiment, the mixed dimples in which the opening diameters of the dimples 2 are randomly distributed within a range from 30 to 100 m are used.

[0057] In the comparative example, single dimples in which the opening diameters of the dimples 2 of three types including 50 m, 75 m, and 100 m are uniformly distributed on the sealing face are used.

[0058] Further, 100 nm is adopted as depth of the plurality of dimples 2 in both the embodiment and the comparative example since a sliding characteristic at extremely low speed is preferable.

[0059] It should be noted that the depth of the plurality of dimples 2 is preferably set within a range from 50 to 100 nm from a viewpoint of reduction in a friction coefficient. However, in a case where importance is attached to the sliding characteristic at extremely low speed, the depth is preferably set within a range from 100 to 200 nm.

[0060] In order to obtain both sealing and lubricity at the same time, 40% is adopted as an area ratio of the plurality of dimples relative to the sealing face. However, the present invention is not limited to this but the area ratio may be 30 to 50%.

TABLE-US-00001 TABLE 1 Example Comparative Example Inner diameter of 18 mm 18 mm sealing face Width of sealing 1.8 mm 1.8 mm face Dimple area ratio 40% 40% Dimple opening 30 to 100 m 50 m, 75 m, diameter mixed 100 m Dimple depth 100 nm 100 nm

[0061] Test conditions of the embodiment and the comparative example are shown in Table 2 below.

TABLE-US-00002 TABLE 2 SiC (dimple processing) SiC Sliding material combination (no processing) Attachment load 25N Peripheral speed 0.0 m/sec .fwdarw. 10.0 m/sec Pressure 0.15 MPaG (outer peripheral side) Temperature 60 C. Sealed fluid JIS K2234LLC 50% water solution

[0062] FIG. 4 is a chart showing a relationship between the friction coefficient and the bearing characteristic number G obtained by a rotation sliding test.

[0063] In FIG. 4, in a rotation number range in the test, in the comparative example in which the opening diameters of the dimples are 50 m, 75 m, 100 m, it is found that within a range where a value of the bearing characteristic number G exceeds 7.610.sup.8, the greater the opening diameters of the dimples are, the more the friction coefficient is lowered. A fluid lubricity transition point (hereinafter, referred to as the Gc point) exists for each of the opening diameters of the dimples. In the comparative example of 50 m, 75 m, 100 m, it is found that the smaller the opening diameters of the dimples are, the more the Gc point is shifted to the lower G side and further the more the friction coefficient at the Gc point is lowered.

[0064] In the embodiment in which the opening diameters of the dimples are mixed from 30 to 100 m, within a range where the G value exceeds about 6.010.sup.8, the friction coefficient is almost the same as that of the diameter of 100 m, and within a range of 6.010.sup.8 or less, the Gc point is shifted to the lower G side and further the friction coefficient at the Gc point is lowered. It is found that there is an effect on the reduction in the friction coefficient in a wide rotation number range.

[0065] It should be noted that during the test, no leakage from the sealing face is generated in the present test.

[0066] Next, with reference to FIG. 5, a testing machine 10 capable of measuring sliding torque, the testing machine used in the present test will be described.

[0067] A main body part of the testing machine 10 includes a casing 13 that supports a stationary ring 11 in a non-rotation state via a spring 12, a rotating shaft 14 rotatably inserted in an inner periphery of this casing 13, and a rotating ring 15 supported on an outer periphery of this rotating shaft 14, the rotating ring facing the stationary ring 11 in the axial direction. A sealing target liquid L is enclosed into a sealed space surrounded by the rotating ring 15, the casing 13, and the rotating shaft 14.

[0068] As a characteristic of the present testing machine 10, hydrostatic gas bearings are adopted as bearing parts 16 on both sides, so that the sliding torque of the mechanical seal can be measured with high precision. The torque is measured by two kinds of methods including a torque meter 17 and a cantilever type load cell 18, so as to eliminate measuring errors by double-checking.

[0069] Operations and effects of the sliding part according to the embodiment of the present invention are as follows.

[0070] (1) In the rotation number range in the test, the comparative example in which the opening diameters of the dimples are 50 m, 75 m, 100 m has a tendency that within a range where the value of the bearing characteristic number G exceeds 7.610.sup.8, the greater the opening diameters of the dimples are, the more the friction coefficient is lowered, and the smaller the opening diameters of the dimples are, the more the fluid lubricity transition point (hereinafter, referred to as the Gc point) is shifted to the lower G side and further the more the friction coefficient at the Gc point is lowered. Meanwhile, in the embodiment in which the opening diameters of the dimples are mixed from 30 to 100 m, within a range where the G value exceeds about 6.010.sup.8, the friction coefficient is almost the same as that of the diameter of 100 m, and within a range of 6.010.sup.8 or less, the Gc point is shifted to the lower G side and further the friction coefficient at the Gc point is lowered. There is an effect on the reduction in the friction coefficient in a wide rotation number range.

[0071] (2) The depth of the plurality of dimples 2 is preferably set within a range from 50 to 1,000 nm from a viewpoint of the reduction in the friction coefficient. However, by setting the depth within a range from 100 to 200 nm, the sliding characteristic at extremely low speed can become preferable.

[0072] (3) By setting the area ratio of the plurality of dimples relative to the sealing face within a range from 30 to 50%, the sealing and the lubricity can be obtained at the same time.

[0073] The mode of the present invention is described with the above embodiment. However, specific configurations are not limited to these modes of the embodiment but modifications and additions within a range not departing from the gist of the present invention are also included in the present invention.

[0074] For example, the example that the sliding part is used for at least one of the pair of rotating and stationary sealing rings in the mechanical seal device is described in the above embodiment. However, the sliding part can also be utilized as a sliding part of a bearing that slides on a rotating shaft while sealing lubricating oil on one side in the axial direction of a cylindrical sealing face.

[0075] For example, the case where the high pressure sealed fluid exists on the outer peripheral side is described in the above embodiment. However, the present invention can also be applied to a case where the high pressure fluid exists on the inner peripheral side. In that case, the dimples are arranged to communicate with the inner peripheral side.

[0076] For example, the case where the opening diameters of the plurality of dimples are set within a range from 30 to 100 m and more dimples having smaller opening diameters are distributed in comparison to the dimples having larger opening diameters is described in the above embodiment. However, these show one preferable example and the present invention is not limited to these. It is important to randomly distribute and mix the plurality of dimples having different opening diameters. A ratio of the distribution may be set to the most relevant value in accordance with the bearing characteristic number G (fluid viscosityspeed/load) of the sealing face.

[0077] For example, the case where 100 nm is adopted as the depth of the plurality of dimples is described in the above embodiment. However, the present invention is not limited to this. The depth may be selected from a range from 50 to 1,000 nm. In order to make the sliding characteristic at extremely low speed become preferable, the depth is desirably set within a range from 100 to 200 nm.

[0078] For example, the case where 40% is adopted as the area ratio of the plurality of dimples relative to the sealing face from a viewpoint to obtain both the sealing and the lubricity at the same time is described in the above embodiment. However, the present invention is not limited to this but the area ratio may be set within a range from 30 to 50%.

[0079] FIGS. 6 and 7A to 7G are views of a sliding part of a second embodiment of the present invention. In description below, the embodiment illustrated in FIGS. 1 to 5 will be referred to as a first embodiment, and the embodiment illustrated in FIGS. 6 and 7A to 7G will be referred to as a second embodiment. Note that in the following description of the second embodiment, description of the same contents as those of the first embodiment will not be repeated for avoiding overlapping description, and differences will be mainly described.

[0080] In FIG. 6, a sliding part 21 is one of sliding parts formed in a pair of annular bodies having sealing surfaces Sd slidable relative to each other.

[0081] Either one of an inner peripheral side 26 or an outer peripheral side 27 of the sliding part 21 serves as a high pressure fluid side, and the other one of the inner peripheral side 26 or the outer peripheral side 27 serves as a low pressure fluid side. That is, as in the first embodiment, the inner peripheral side 26 of the sliding part 21 may serve as the low pressure fluid side, and the outer peripheral side 27 of the sliding part 21 may serve as the high pressure fluid side. Conversely, the inner peripheral side 26 of the sliding part 21 may serve as the high pressure fluid side, and the outer peripheral side 27 of the sliding part 21 may serve as the low pressure fluid side.

[0082] A plurality of dimples 22 is formed on the sealing surface Sd. As in the first embodiment illustrated in FIGS. 1 and 2, the plurality of dimples 22 includes dimples with different opening diameters, and is randomly arranged. Moreover, as in the first embodiment illustrated in FIG. 2B, the dimples 22 are separated from each other by a flat surface forming the sealing surface Sd without communicating with each other.

[0083] As illustrated in FIG. 6, the plurality of dimples 22 is arranged in a plurality of dimple formation regions 23 separated from each other by seal faces 24 formed on the sealing surface Sd and arranged in a circumferential direction. In other words, the plurality of dimple formation regions 23 and the plurality of seal faces 24 are alternately arranged in the circumferential direction.

[0084] A circumferential length is the same among the plurality of dimple formation regions 23, and is also the same among the plurality of seal faces 24. As illustrated in FIG. 6, a relationship of La>Lb is satisfied, where the circumferential length of the dimple formation region 23 is La and the circumferential length of the seal face 24 is Lb. Moreover, the plurality of dimple formation regions 23 is provided at equal intervals about the axis of the sliding part 21.

[0085] In the second embodiment, the plurality of dimple formation regions 23 is uniformized, and the circumferential length is the same among the plurality of seal faces 24. However, the present invention is not limited to above. The circumferential lengths La of the plurality of dimple formation regions 23 may be set to different lengths. Some of the plurality of dimple formation regions 23 may be set to different circumferential lengths, or all of the plurality of dimple formation regions 23 may be set to different lengths. As in the plurality of dimple formation regions 23, the circumferential lengths Lb of the plurality of seal faces 24 may be set to different lengths.

[0086] In FIG. 6, each dimple formation region 23 extends from an end portion of the sealing surface Sd on the outer peripheral side 27 to an end portion of the sealing surface Sd on the inner peripheral side 26. However, as in the first embodiment illustrated in FIG. 1, each dimple formation region 23 may be narrowed on the inner peripheral side 26 such that the dimple formation region 23 and the inner peripheral side 26 are separated from each other by the seal face 24. Conversely, the dimple formation region 23 may be narrowed on the outer peripheral side 27 such that the dimple formation region 23 and the outer peripheral side 27 are separated from each other by the seal face 24.

[0087] Moreover, in FIG. 6, an arrangement pattern of the dimples 22 varies among the dimple formation regions 23, but may be the same among the dimple formation regions 23. In this case, the effect of facilitating dimple formation and facilitating control of sealing performance can be expected.

[0088] Further, in FIG. 6, the plurality of dimple formation regions 23 is provided. Instead, a single dimple formation region 23 may be provided. For example, the dimple formation region 23 may be formed in an annular shape. In this case, the dimples 22 are continuously arranged in the circumferential direction. In this case, the seal face 24 may be formed on at least one of the sealing surfaces Sd on the outer peripheral side 27 and the inner peripheral side 26 of the dimple formation region 23.

[0089] A portion of the above-described annular dimple formation region 23 may be removed such that the dimple formation region 23 is formed in a C-shape extending in the circumferential direction. In this case, one end portion and the other end portion of the dimple formation region 23 in the circumferential direction are separated from each other by the seal face 24, and the circumferential length of the dimple formation region 23 is set longer than that of the seal face 24.

[0090] As illustrated in FIGS. 7A, 7C, 7F, and 7G, the plurality of dimples 22 includes dimples 22c, 22f arranged to communicate with the inner peripheral side 26 of the sliding part 21. In other words, the dimples 22c, 22f directly open on the inner peripheral side 26 at an inner peripheral surface 28 of the sliding part 21.

[0091] As illustrated in FIGS. 7A, 7B, and 7E, the plurality of dimples 22 includes dimples 22b, 22e arranged to communicate with the outer peripheral side 27 of the sliding part 21. In other words, the dimples 22b, 22e directly open on the outer peripheral side 27 at an outer peripheral surface 29 of the sliding part 21.

[0092] Since the dimples 22c, 22f communicating with the inner peripheral side 26 of the sliding part 21 are formed, the inner peripheral surface 28 of the sliding part 21 is directly connected to a recessed surface forming the dimples 22c, 22f. Thus, fluid positioned on the inner peripheral side 26 easily enters the dimples 22c, 22f, and a fluid supply to the sealing surface Sd is facilitated upon start up.

[0093] Similarly, since the dimples 22b, 22e communicating with the outer peripheral side 27 of the sliding part 21 are formed, the outer peripheral surface 29 of the sliding part 21 is directly connected to a recessed surface forming the dimples 22b, 22e. Thus, fluid positioned on the outer peripheral side 27 easily enters the dimples 22b, 22e, and a fluid supply to the sealing surface Sd is facilitated upon start up.

[0094] Of the plurality of dimples 22, other dimples than the dimple type, such as the dimples 22b, 22c, 22e, 22f, of directly opening on the inner peripheral side 26 or the outer peripheral side 27 of the sliding part 21 are typified by a dimple 22d in FIGS. 7A and 7D. As illustrated in FIG. 7A, the dimple 22d is in a circular shape. That is, the outline 39 of the dimple 22d is formed by an endless line, and the dimple 22d is in non-communication not only with the inner peripheral side 26 but also with the outer peripheral side 27 of the sliding part 21.

[0095] The sectional shape of the dimple 22 is typified as illustrated in FIG. 7D. As will be seen from this figure, the depth of the dimple 22 is smaller than the opening diameter of the dimple, and is in a so-called flat shape.

[0096] In FIGS. 6 and 7A to 7G, the plurality of dimples 22 is formed to include both of the dimples 22c, 22f arranged to communicate with the inner peripheral side 26 of the sliding part 21 and the dimples 22b, 22e arranged to communicate with the outer peripheral side 27. However, the present invention is not limited to above. The plurality of dimples 22 may be formed to include the type of dimples 22c, 22f and not to include the type of dimples 22b, 22e. Conversely, the plurality of dimples 22 may be formed not to include the type of dimples 22c, 22f and to include the type of dimples 22b, 22e.

[0097] In FIG. 7A, each dimple 22 is formed such that the outline 39 thereof is in the circular shape, but the outline 39 may be in an oval or oblong shape. Alternatively, dimples in two or three shapes may be combined together.

[0098] As illustrated in FIGS. 7A, 7F, and 7G, at least one dimple 22f of the dimples 22c, 22f communicating with the inner peripheral side 26 of the sliding part 21 is formed to be narrowed from the center side of the dimple 22f in an inner diameter direction of the sliding part 21. In other words, as illustrated in FIG. 7A, a relationship of W1>W2 and D1>D2 is satisfied, where the width of the dimple 22f in the vicinity of the center is W1, the depth of the dimple 22f in the vicinity of the center is D1, the width of the dimple 22f in the vicinity of the inner peripheral surface 28 of the sliding part 21 is W2, and the depth of the dimple 22f in the vicinity of the inner peripheral surface 28 of the sliding part 21 is D2. As a result, a damming portion 32 configured to partially dam fluid is provided between the inside of the dimple 22f and the inner peripheral side 26 of the sliding part 21.

[0099] Specifically speaking, in the present embodiment, the damming portion 32 is provided across both side portions 22fs and a bottom portion 22fb of the dimple 22f. That is, both side portions 22fs of the dimple 22f are narrowed from the center side of the dimple 22f in the inner diameter direction of the sliding part 21 (W1>W2), and in this manner, the damming portion 32 is provided across both side portions 22fs of the dimple 22f. Moreover, the bottom portion 22fb of the dimple 22f is narrowed from the center side of the dimple 22f in the inner diameter direction of the sliding part 21 (D1>D2), and in this manner, the damming portion 32 is also provided at the bottom portion 22fb of the dimple 22f. In the present embodiment, the damming portion 32 is provided across all of both side portions 22fs and the bottom portion 22fb of the dimple 22f, but the damming portion 32 may be provided only across part of these portions.

[0100] Meanwhile, as illustrated in FIGS. 7A and 7E, at least one dimple 22e of the dimples 22b, 22e communicating with the outer peripheral side 27 of the sliding part 21 is, as in the above-described dimple 22f, also formed to be narrowed from the center side of the dimple 22e in an outer diameter direction of the sliding part 21. As a result, a damming portion 34 configured to partially dam fluid is provided between the inside of the dimple 22e and the outer peripheral side 27 of the sliding part 21. As in the above-described damming portion 32, a bottom portion 22eb of the dimple 22e may be particularly narrowed from the center side of the dimple 22e in the outer diameter direction of the sliding part 21, and in this manner, the damming portion 34 may be provided at least at the bottom portion 22eb of the dimple 22e.

[0101] As described above, the damming portions 32, 34 are formed at the dimples 22e, 22f. Thus, as compared to the dimples 22b, 22c, less fluid flows into the dimples 22e, 22f from the inner peripheral side 26 or the outer peripheral side 27, and less fluid having flowed into the dimples 22e, 22f once flows out of the dimples 22e, 22f. Thus, a fluid lubrication state is easily brought, and a positive pressure and a negative pressure due to wedge action are generated. Specifically, in, e.g., a case where the opposing sliding part of the sliding part 21 relatively rotates in an R-direction of FIG. 7A, the positive pressure is, at the dimple 22f, generated on the upper side of FIG. 7A, and the negative pressure is generated on the lower side of FIG. 7A. At the dimple 22e, the positive pressure is also generated on the upper side of FIG. 7A, and the negative pressure is also generated on the lower side of FIG. 7A. Note that the above-described wedge action is described in U.S. Patent Application Publication No. 2014197600(A1) and 2014217676(A1).

[0102] As described above, the positive pressure and the negative pressure are generated at the dimples 22e, 22f, and the recessed surface forming the dimples 22e, 22f is a curved surface, a three-dimensional curved surface, a spherical surface, and (an inner surface of) an oval surface. Thus, a fluid flow in the dimples 22e, 22f turns into a vortical laminar or turbulent flow along such a curved surface. Due to such a vortical flow, a uniform radial flow on the sealing surface Sd is disturbed. This can reduce fluid leakage. As a result, much less fluid flows into the dimples 22e, 22f from the inner peripheral side 26 or the outer peripheral side 27, and much less fluid having flowed into the dimples 22e, 22f once flows out of the dimples 22e, 22f.

REFERENCE SIGNS LIST

[0103] 1 Sliding part

[0104] 2 Dimple

[0105] 3 Dimple formation region

[0106] 4 Seal face

[0107] 10 Testing machine

[0108] 11 Stationary ring

[0109] 12 Spring

[0110] 13 Casing

[0111] 14 Rotating shaft

[0112] 15 Rotating ring

[0113] 16 Bearing part

[0114] 17 Torque meter

[0115] 18 Load cell

[0116] 21 Sealing part

[0117] 22 Dimples

[0118] 23 Dimple formation region

[0119] 24 Seal face

[0120] 26 Inner peripheral side

[0121] 27 Outer peripheral side

[0122] 28 Inner peripheral surface

[0123] 32 Damping surface

[0124] 39 Outline

[0125] La Dimple formation region circumferential length

[0126] Lb Seal face circumferential length

[0127] S Sealing face

[0128] Sd Sealing surface