Thermoelement including a three-dimensional microstructure, and method for producing a thermoelement

Abstract

A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 m-200 m. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 m-100 m. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.

Claims

1. A thermoelement comprising: a plurality of adjacent, individually self-supporting longitudinally-extending micro-columns which are arranged physically separate from each other by a micro-column distance and substantially parallel to each other in a longitudinal direction, the micro-columns being made of amorphous metal or semimetal micro-column material, each of the micro-columns having an aspect ratio of from 20 to 1000 and a micro-column diameter of from 0.1 m to 200 m, wherein at least two of the plurality of micro-columns are formed respectively from different electrically conductive amorphous metal or semimetal micro-column materials; and a micro-column intermediate chamber arranged between adjacent micro-columns, the chamber having a width substantially equal to the micro-column distance between adjacent micro-columns, the micro-column distance being selected from 1 m to 100 m; wherein the micro-column intermediate chamber between adjacent micro-columns is at least partially filled with an intermediate chamber material to define an intermediate chamber layer; wherein the intermediate chamber layer extends longitudinally along only a partial portion of the longitudinal lengths of the micro-columns; and wherein the intermediate chamber layer is formed from an elastic, ceramic, or metal material and forms a common physical carrier that physically supports the plurality of micro-columns without additional structural support and wherein the thermoelement configured to detect thermal radiation.

2. The thermoelement as claimed in claim 1, wherein the micro-column diameter is selected from 0.3 m to 200 m.

3. The thermoelement as claimed in claim 1, wherein at least a portion of the micro-columns have a longitudinal height of from 50 m to 10 mm.

4. The thermoelement as claimed in claim 1, wherein the micro-columns have a longitudinal height of from 100 m to 1 mm.

5. The thermoelement as claimed in claim 1, wherein at least a portion of the micro-columns comprise at least two sections arranged along the longitudinal direction with different amorphous micro-column materials respectively forming the at least two sections.

6. The thermoelement as claimed in claim 1, wherein at least a portion of the micro-columns are at least partially enclosed with an enclosure material, and the micro-column material of the micro-columns and the enclosure material are different from each other.

7. The thermoelement as claimed in claim 1, wherein the micro-column intermediate chamber between adjacent micro-columns is at least partially filled with at least two intermediate chamber materials, and each of the intermediate chamber materials forms a coherent intermediate chamber layer.

8. The thermoelement as claimed in claim 1, wherein at least a portion of the micro-columns are partially hollow and have a micro-column cavity.

9. The thermoelement as claimed in claim 1, wherein at least a portion of the micro-columns have a micro-column diameter that varies along the longitudinal direction of the micro-columns.

10. The thermoelement as claimed in claim 1, wherein the intermediate chamber layer forming the common carrier for the plurality of micro-columns is formed of an elastomeric carrier material that is elastically deformable.

11. The thermoelement as claimed in claim 1, wherein a first portion of the micro-columns is attached to a first common carrier, a second portion of the micro-columns is attached to a second common carrier, the micro-columns attached to the first common carrier are arranged in the micro-column intermediate chambers formed by the micro-columns attached to the second common carrier, and the micro-columns attached to the second common carrier are arranged in the micro-column intermediate chambers formed by the micro-columns attached to the first common carrier.

12. The thermoelement as claimed in claim 11, wherein the micro-columns attached to the first common carrier are formed from a first micro-column material, and the micro-columns attached to the second common carrier are formed from a second micro-column material, different from the first micro-column material.

13. A method for producing a thermoelement, the method comprising: providing a template formed of an elastic, ceramic, or metal template material, the template having a three-dimensional template structure with a plurality of column-like template cavities arranged substantially parallel to each other in a longitudinal direction, wherein adjacent column-like template cavities are separated from each other by a micro-column distance of from 1 m to 100 m, the template being a substantial inverse to a micro-structure of a plurality of longitudinally-extending micro-columns each having an aspect ratio of from 20 to 1000 and a micro-column diameter of from 0.1 m to 200 m; inserting amorphous metal or semimetal micro-column material in the plurality of column-like template cavities so that the plurality of adjacent longitudinally-extending micro-columns are formed wherein; and removing a portion of the template material such that a remaining portion of the template material in the micro-column intermediate chambers between the micro-columns defines an intermediate chamber layer, and such that each micro-column extends longitudinally from the intermediate chamber layer; wherein the intermediate chamber layer extends longitudinally only partially along the longitudinal lengths of the micro-columns, such that the intermediate chamber layer forms a common physical carrier that physically supports a first longitudinal portion of each micro-column without additional structural support, and such that a second longitudinal portion of each micro-column extends from the intermediate chamber layer and is individually self-supporting; and wherein the thermoelement is configured to detect thermal radiation.

14. The method as claimed in claim 13, wherein inserting the amorphous metal or semimetal micro-column material comprises: introducing a starting material for the amorphous metal or semimetal micro-column material into the cavities; and converting the starting material for the amorphous metal or semimetal micro-column material into a microstructure material for the micro-columns.

15. The method as claimed in claim 13, wherein the elastic, ceramic, or metal template material comprises silicon.

16. A thermoelement comprising: a plurality of adjacent, individually self-supporting longitudinally-extending micro-columns which are arranged physically separate from each other by a micro-column distance and substantially parallel to each other in a longitudinal direction, the micro-columns being made of amorphous metal or semimetal micro-column material, each of the micro-columns having an aspect ratio of from 20 to 1000 and a micro-column diameter of from 0.1 m to 200 m, wherein at least two of the plurality of micro-columns are formed respectively from different electrically conductive amorphous metal or semimetal micro-column materials; and a micro-column intermediate chamber arranged between adjacent micro-columns, the chamber having a width substantially equal to the micro-column distance between adjacent micro-columns, the micro-column distance being selected from 1 m to 100 m; wherein the micro-column intermediate chamber between adjacent micro-columns is at least partially filled with an intermediate chamber material to define an intermediate chamber layer; wherein the intermediate chamber layer surrounds an outer circumference of each micro-column and extends longitudinally along a partial portion of the longitudinal length of each micro-column; and wherein the micro-columns extend beyond the intermediate chamber layer in both opposing longitudinal directions and wherein the thermoelement is configured to detect thermal radiation.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) These and other objects and advantages of the present invention will become more apparent and more readily appreciated from the following description of the preferred embodiments, taken in conjunction with the accompanying drawings of which:

(2) FIGS. 1 and 2 respectively show a micro-structure from the side.

(3) FIG. 3 shows a micro-structure in a perspective view.

(4) FIG. 4 shows the basic method for producing the micro-structure.

(5) FIG. 5 shows a method for filling template cavities of a template.

(6) FIG. 6 shows a method for the arrangement of a micro-structure on a carrier.

(7) FIG. 7 shows a micro-structure on an elastic carrier.

(8) FIG. 8 shows a method for producing a micro-structure with an intermediate chamber layer.

(9) FIGS. 9 and 10 show methods for producing micro-structures with structured micro-columns.

(10) FIG. 11 shows a method for producing a micro-structure comprising micro-columns with different micro-column materials.

(11) FIG. 12 shows methods for producing a micro-structure with hollow micro-columns.

(12) FIG. 13 shows a method for producing a micro-structure with which each of the micro-columns comprises a plurality of different micro-column materials.

(13) FIG. 14 shows a method with which a micro-structure is produced with different micro-structure regions.

(14) FIG. 15 shows a diagram with the dependence of the micro-column surface on the micro-column longitudinal extension with different micro-column diameters.

(15) FIG. 16 shows two adjacent micro-columns of a micro-structure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

(16) Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.

(17) The subject matter of the following examples is respectively a three-dimensional micro-structure 1 comprising a plurality of adjacent micro-columns 2 which are arranged at a distance from each other and substantially parallel in relation to the respective longitudinal extension 21 with at least one micro-column material 20 having respectively an aspect ratio in the region of 20 to 1000 and respectively a micro-column diameter 22 (see FIG. 16) in the region of 0.1 m to 200 m. A micro-column intermediate chamber 3 is present between adjacent micro-columns. The micro-column intermediate chamber has a micro-column distance 31 between adjacent micro-columns in the region of 1 m to 100 m.

(18) The micro-structure is connected to a carrier (substrate) 4, which is obtained from the template 5 used by the partial removal of the template material (FIG. 1). In an alternative embodiment, the micro-structure remains on a carrier 4, which, was connect to the template during the course of the production procedure. The template material is completely removed. The micro-structure remains on the carrier (FIGS. 2 and 3).

(19) The three-dimensional micro-structure is produced using the following steps (FIG. 4):

(20) a) the provision of a template 5 with template material 50, wherein the template has a three-dimensional template structure 51 with column-like cavities 52 which is substantially inverse to the micro-structure,

(21) b) the arrangement of micro-column material in the column-like cavities so that the micro-columns are formed and

(22) c) the at least partial removal of the template material.

(23) The starting point is a silicon wafer. This silicon wafer serves as a template. The template material is silicon. The PAECE method is used to introduce the template cavities into the silicon wafer. The template cavities are introduced with a cavity longitudinal extension 53 and a cavity diameter 54 corresponding to the micro-columns to be produced. The distances between the template cavities are selected in accordance with the distances between the micro-columns.

(24) Then, the column-like template cavities are filled with liquid micro-column material. An example of this process in shown in FIG. 5: the template with the template cavities is heated with the aid of the heating elements 501 and immersed in a reservoir 502 with liquid metal 503. Variation of an external pressure ensures that the liquid metal penetrates the template cavities. Then, the template with the filled template cavities is removed from the reservoir. The template cools down. As a result, the metal solidifies in the template cavities. The micro-columns are formed from the metal. The liquid metal serves as a starting material for the micro-column material. It is converted to the micro-column material (solid metal) by cooling.

EXAMPLE 1

(25) A micro-structure is produced on a carrier 4 (FIG. 6). For this, a template with a template structure with template cavities is provided in which, as described above, micro-columns with micro-column material are arranged. Then, a carrier is arranged thereon so that the micro-columns are connected to the carrier. Then, the template material is almost virtually completely removed. The micro-structure with the micro-columns arranged on the carrier remains.

(26) According to this example, the carrier is made of a rigid carrier material 41. The carrier material is a ceramic. In an alternative embodiment, the carrier material is a metal.

EXAMPLE 2

(27) In contrast to example 1, a carrier with elastomeric carrier material is used. The elastomeric carrier material is rubber. The carrier made of rubber is elastically deformable (FIG. 7).

EXAMPLE 3

(28) According to this example, intermediate chamber material 33 is arranged in the micro-column intermediate chambers. The intermediate chamber material forms an intermediate chamber layer 32, with the aid of which the micro-columns are held in a fixed manner, i.e. are held against each other.

(29) For this, following the formation of the micro-columns in the template cavities, the template material is partially removed (FIG. 8). Then, the intermediate chamber material is arranged in the intermediate chambers between the adjacent micro-columns such that the intermediate chamber layer is formed. Finally, the remaining template material is removed. The micro-structure, whose micro-columns are fixed by the intermediate chamber layer remains.

EXAMPLE 4

(30) A micro-structure with micro-columns is produced with structured micro-column surfaces 23. For this, a template is used with template cavities, which have a template cavity diameter along the template cavity longitudinal extension (FIG. 9).

(31) Following the arrangement of the corresponding micro-column material in the structured template cavities and the partial removal of the template material, the result is a micro-structure with micro-columns with structured micro-column surfaces. The remaining template functions as a carrier.

EXAMPLE 5

(32) A micro-structure is produced in which enclosures 27 are arranged at the ends 26 of the micro-columns (FIG. 10). Here, once again, the micro-column surfaces are structured. The enclosures are applied using a PVD method following the partial removal of the template material. The enclosures function as a functional layer 28. Depending upon the desired function, any functional layers with the most diverse functional materials 280 are applied. For example, a micro-structure with micro-columns, which are thickened at the ends, can be used as a connecting element. An interleaved arrangement of two such micro-structures creates a non-positive contact between the two micro-structures. Here, the micro-columns of one micro-structure protrude into the micro-column intermediate chambers of the other micro-structure and vice versa.

(33) In an alternative embodiment to this, the enclosures are applied by electrochemical deposition. For this, the micro-column material is electrically conductive. The micro-columns function for example as a cathode on the micro-column surfaces of which a metal such as copper is deposited electrochemically. In this case, the micro-structure is embodied as an electrode. This electrode can be used as a capacitor electrode of a capacitor.

EXAMPLE 6

(34) A micro-structure with micro-columns is produced with different micro-column materials 201 and 202 varying from micro-column to micro-column (FIG. 11). The micro-structure comprises micro-columns with micro-column material 201 and micro-columns with a further micro-column material 202 which differs from the micro-column material.

(35) For this, the template cavities are filled with different starting materials for the different micro-column materials. The outcome is that the respective template cavities which are not to be filled are covered.

(36) After the conversion of the starting material into the micro-column materials, the template material is again partially removed. The rest of the template remains as the carrier of a micro-structure with two groups of micro-columns with different micro-column materials.

EXAMPLE 7

(37) A micro-structure with micro-columns comprising micro-structure-cavities 29 is produced. The micro-structure comprises hollow needles (FIG. 12).

(38) For this, the template cavities are lined with the starting material of the micro-column material. The starting material is only arranged on a cavity surface. The following conversion of the starting material results in micro-columns comprising a micro-column wall made of the micro-column material. Otherwise, the micro-columns are hollow.

(39) Then, the template material is again partially removed. What remains is a micro-structure with micro-columns in the form of hollow needles, which are arranged on substrate made of the template material.

EXAMPLE 8

(40) A micro-structure is produced in which the individual micro-columns are made of different micro-column materials. Arranged along the micro-column longitudinal extension are a section 210 with micro-column material 201 and a further section 220 with a further micro-column material which is different from the micro-column material 202 (FIG. 13).

(41) Starting from the template 5, the template cavities are first filled from the open side with the starting material for one of the micro-column materials. After the conversion of the starting material into the corresponding micro-column material (Step 1301), template material is removed from the closed side of the template until the template cavities are exposed (Step 1302). Then, starting material for the further micro-column material differing from the micro-column material is poured in and converted into the corresponding micro-column material (Step 1303). Finally, the template material is again partially removed (Step 1304).

EXAMPLE 9

(42) This example represents a combination of the examples described above. A suitable sequence of the above-described steps enables the production of a micro-structure with different regions (FIG. 14): micro-columns 141, 142 with respectively only one type of micro-column material, but which are different from each other. In addition, the micro-columns 141 and 142 have different lengths. They have different micro-column longitudinal extensions. In addition, there are micro-columns 143, with different micro-column materials along their micro-column longitudinal extension. Finally, there are regions 144 in which no micro-columns at all are present.

(43) The procedure for the production of the described micro-structure is as follows: firstly, micro-columns with a first micro-column material are only arranged in selected template cavities (Step 141). For this, the template cavities in which these micro-columns are not to be arranged are covered. The open template cavities are filled with the starting material for the corresponding micro-column material.

(44) Following the conversion of the starting material into the micro-column material, template material is removed from the closed side (Step 142). The template cavities are exposed. The template cavities which are not to be filled with any starting material for the further micro-column material are now covered. After the conversion of this starting material into the further micro-column material (Step 143) and the subsequent partial removal of the template material (Step 144) a microstructure as described above is obtained with which the micro-columns are arranged on a substrate made of the template material.

(45) The described micro-structures are characterized by extremely large surfaces. This is made evident in FIG. 15. Here, the enlargement factor 151 is plotted against the micro-column longitudinal extension (152, needle length) for different micro-column diameters (needle diameters) and micro-column distances (needle-distances). The curve 153 refers to a micro-column diameter of 10 m and a micro-column distance of 5 m. The curves 154 and 155 refer to values of 5 m and 2.5 m and 2 m and 1 m respectively.

(46) The invention has been described in detail with particular reference to preferred embodiments thereof and examples, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention covered by the claims which may include the phrase at least one of A, B and C as an alternative expression that means one or more of A, B and C may be used, contrary to the holding in Superguide v. DIRECTV, 69 USPQ2d 1865 (Fed. Cir. 2004).