Valve with material having modifiable degree of penetrability
09874294 ยท 2018-01-23
Assignee
Inventors
- Remco Christiaan Den Dulk (Eindhoven, NL)
- Roel Penterman (Eindhoven, NL)
- MENNO WILLEM JOSE PRINS (ROSMALEN, NL)
Cpc classification
B01L3/50273
PERFORMING OPERATIONS; TRANSPORTING
F16K99/0001
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01L2200/0647
PERFORMING OPERATIONS; TRANSPORTING
B01L2200/12
PERFORMING OPERATIONS; TRANSPORTING
B01L2400/0677
PERFORMING OPERATIONS; TRANSPORTING
F16K99/0044
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B01L2200/10
PERFORMING OPERATIONS; TRANSPORTING
F16K99/0046
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Y10T29/49405
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
B01L3/502738
PERFORMING OPERATIONS; TRANSPORTING
B01L2300/0816
PERFORMING OPERATIONS; TRANSPORTING
B01L2300/161
PERFORMING OPERATIONS; TRANSPORTING
International classification
Abstract
The invention relates to a valve (2) for controlling a passage of particles from a first region (6) to a second region (7), wherein the valve (2) comprises a valve material (4) having a modifiable degree of penetrability and a valve region (16) comprising the valve material (4), wherein the valve region (16) and the valve material (4) are adapted such that the particles have to penetrate the valve material (4) if the particles pass the valve (2) for being transferred from the first region (6) to the second region (7). The degree of opening of the valve (2) can easily be controlled by modifying the degree of penetrability of the valve material (4), for example, by modifying the temperature of the valve material (4). Moreover, by penetrating the valve material (4) the particles can be separated from other elements like a fluid containing the particles.
Claims
1. A valve for controlling a passage of particles, contained in a fluid in a first region, from the first region to a second region, the valve comprising: a valve material having a modifiable degree of penetrability; and a valve region comprising the valve material, wherein the valve region and the valve material are adapted such that the particles penetrate the valve material and pass through the valve from the first region to the second region when the valve material is in a penetrable state, enabling separation of the particles from the fluid.
2. The valve as claimed in claim 1, wherein the valve further comprises a valve control unit for controlling the degree of penetrability of the valve material.
3. The valve as claimed in claim 2, wherein the valve control unit is adapted to control at least one of phase and viscosity of the valve material for controlling the degree of penetrability, and the valve material and the valve control unit are adapted such that the valve material is switchable between a solid state in which the degree of penetrability is reduced and a liquid state, corresponding to the penetrable state, in which the degree of penetrability is increased.
4. The valve as claimed in claim 1, wherein the valve material is adapted such that the degree of penetrability of the valve material is temperature dependent.
5. The valve as claimed in claim 1, wherein the valve material is at least one of hydrophobic or inert with respect to water.
6. The valve as claimed in claim 1, wherein the valve material is hydrophilic.
7. A multi-region device comprising: the first region and the second region; the valve as claimed in claim 1, arranged between the first region and the second region.
8. The multi-region device as claimed in claim 7, wherein the multi-region device comprises a layer having a surface with hydrophilic regions defining the first and second regions, wherein the valve region comprising the valve material is located between the hydrophilic regions.
9. A particles actuating device comprising: a multi-region device receiving region for receiving the multi-region device as claimed in claim 7; and means for actuating particles located in the first region to move in a direction of the second region when the multi-region device is located in the multi-region device receiving region, for transferring the particles from the first region to the second region through the valve.
10. The particles actuating device as claimed in claim 9, wherein the particles contained in the fluid in the first region comprise magnetic particles, and wherein the means for actuating the particles comprises a magnetic actuation unit configured to generate a moving magnetic field for moving the magnetic particles in the first region in the direction of the second region.
11. A method for manufacturing a valve for controlling a passage of particles, contained in a first region, from the first region to a second region, the method comprising: providing a valve region; and arranging a valve material, having a modifiable degree of penetrability, in the valve region and adapting the valve region and the valve material to enable the particles to penetrate the valve material and to pass through the valve from the first region to the second region when the valve material is in a penetrable state, for separating the particles from the fluid.
12. A method for manufacturing a multi-region device, the method comprising: providing the first region and the second region; and arranging the valve manufactured as claimed in claim 11 between the first region and the second region for controlling a passage of the particles from the first region to the second region.
13. The method as claimed in claim 12, wherein providing the first region and the second region, and arranging the valve between the first region and the second region comprise: providing a first layer comprising a surface having hydrophilic and hydrophobic regions; and providing water and the valve material on the surface such that the water is arranged at the hydrophilic regions and the valve material is arranged at the hydrophobic regions.
14. The method as claimed in claim 13, further comprising: providing at least one hole in one of the first layer or the second layer; and applying the valve material to the valve through the at least one hole.
15. The method as claimed in claim 14, further comprising: providing a channel perpendicular to a transfer direction of the particles at an end of the first layer at which the hole is arranged, the channel crossing the transfer direction and the particles being transferred through the channel by capillary forces.
16. A particles actuating device, comprising: a multi-region device comprising: a first region providing a fluid containing particles; a second region; and a valve between the first region and the second region, the valve comprising a valve region including a valve material having a modifiable degree of penetrability, the valve region and the valve material being configured such that the particles of the fluid pass through the valve from the first region to the second region when the valve material is in a penetrable state, enabling separation of the particles from the fluid; and means for actuating the particles located in the first region to move in a direction of the second region.
17. The particles actuating device as claimed in claim 16, wherein the multi-region device comprises a layer having a surface with hydrophilic regions defining the first and second regions, and a hydrophobic region defining the valve region.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF EMBODIMENTS
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(21) The multi-region device 1 comprises a first layer 11 being a glass or plastic substrate and an opposite second layer 12 also being a glass or plastic substrate.
(22) The multi-region device further comprises constraining elements 13 forming walls for constraining a fluid within the multi-region device 1. In this embodiment, the multi-region device 1 further comprises a further valve 3, wherein the layers 11, 12, the constraining elements 13 and the valves 2, 3 form several chambers defining the first region 6, the second region 7 and an analysing region 8.
(23) The second layer 12 comprises an inlet opening 26 allowing a fluid to be introduced into the first region 6 and an outlet opening 27 allowing a gas like air and/or the introduced fluid to leave the multi-region device.
(24) The valves 2, 3 comprise a valve material 4, 5 having a modifiable degree of penetrability, wherein the valve material 4, 5 is arranged within a valve region 16, 28 such that particles have to penetrate the valve material 4, 5, if the particles pass the valves 2, 3 for being transferred from the first region 6 to the second region 7 or from the second region 7 to the analysing region 8, respectively. Since the degree of penetrability of the valve material 4, 5 is modifiable and since the valve material 4, 5 is adapted such that particles have to penetrate the valve material 4, 5 if particles pass the valve 2, 3 for being transferred from the first region 6 to the second region 7 or from the second region 7 to the analysing region 8, the degree of opening of the valve 2, 3 can easily be controlled by modifying the degree of penetrability of the valve material 4, 5.
(25) Preferentially, a fluid comprising magnetic particles is introduced into the first region 6 of the multi-region device 1 through the inlet opening 26. Then the valve material 4 and also the valve material 5 are preferentially adapted and controlled such that a) the magnetic particles can penetrate the valve material for allowing the magnetic particles to be transferred from the first region 6 to the second region 7 and from the second region 7 to the analysing region 8, respectively, and that b) the fluid can substantially not penetrate the valve material 4 or the valve material 5. This allows separating the magnetic particles from the fluid present in the first region 6.
(26) The magnetic particles are preferentially actuated by a magnetic field, which forces the magnetic particles through the valve material 4, 5, if the degree of penetrability of the valve material 4, 5 is controlled such that the magnetic particles can penetrate the valve material 4, 5. The actuation of the magnetic particles by the magnetic field will be described in more detail further below.
(27) The degree of penetrability of the valve material 4, 5 is preferentially modifiable with respect to particles having a diameter between 3 nm and 10000 nm, further preferred between 10 nm and 5000 nm, and even further preferred between 50 nm and 3000 nm.
(28) The valves 2, 3 further comprise a valve control unit for controlling the degree of penetrability of the valve material 4, 5. The valve control unit can be completely integrated into the multi-region device or it can be integrated in another separate device like a particles actuating device, wherein the other external device and the multi-region device cooperate for controlling the degree of penetrability. Furthermore, a first part of the valve control unit can be integrated in the multi-region device and a further part of the valve control unit can be integrated in the further external device. A further external device being a particles actuating device, which comprises the valve control unit, is schematically and exemplarily shown in
(29) The particles actuating device 9 comprises a multi-region device receiving region 10 for receiving a multi-region device. In the situation shown in
(30) The particles actuating device 9 further comprises heating elements 17, 29 for modifying the temperature of the valve materials 2, 3. The heating elements 17, 29 are controlled by the control unit 18 such that the control unit 18 and the heating elements 17, 29 form a valve control unit. By controlling the temperature of the valve material 4, 5 at least one of the phase and of the viscosity of the valve material 4, 5 is controlled, thereby controlling the degree of penetrability of the valve material 4, 5 with respect to the magnetic particles.
(31) In this embodiment, the valve material 4, 5 and the valve control unit 17, 29, 18 are adapted such that the valve material 4, 5 is switchable between a solid state in which the degree of penetrability with respect to the magnetic particles is reduced and a liquid state, in which the degree of penetrability with respect to the magnetic particles is increased. Preferentially, in the solid state the magnetic particles and preferentially also a fluid, in which the magnetic particles might be dispensed, cannot penetrate the valve material 4, 5 and in the liquid state only the magnetic particles and not a fluid, in which the magnetic particles might be dispensed, can penetrate the valve material 4, 5.
(32) The valve material 4, 5 is in the solid state preferentially under storage temperatures, in particular, at/under room temperature of about 20 C. The valve material 4, 5 is preferentially meltable and is preferentially a wax like paraffin or polyethyleneglycol.
(33) Preferentially, the valve material 4, 5 is hydrophobic, in order to minimize the risk that an aqueous liquid can mix up with the valve material 4, 5, if the valve material 4, 5 is in the liquid state. In another embodiment, in which the multi-region device is adapted for being used with hydrophobic, in particular, oily, liquids, the valve material is preferentially made of a hydrophilic material, in order to minimize the risk of mixing the valve material with the hydrophobic and, in particular, oily liquids, if the valve material is in the liquid state.
(34) The valve material 4, 5 is preferentially chemically inert, i.e. the valve material 4, 5 does substantially not react with other elements contacting, in particular penetrating, the valve material 4, 5. This yields a long lifetime of the valve material 4, 5 and, thus, of the valves 2, 3.
(35) The particles actuating device 9 further comprises an analysing unit 21 for analysing the particles, which have finally reached the analysing region 8 of the multi-region device 1. The analysing unit 21 can, for example, be adapted to determine the amount or concentration of magnetic particles in the analysing region 8 optically or magnetically. Also the analysing unit 21 is preferentially controlled by the control unit 18.
(36) Referring again to
(37) The multi-region device 1 is preferentially a diagnostic device being preferentially compact, robust and adapted such that only a few user-aided steps are required. Preferentially, a user only needs to add a sample like a sample of blood or saliva to the multi-region device and all other reagents that might be necessary for analysing the sample, are already present in the multi-region device. The multi-region device is preferentially a cartridge being disposable such that the multi-region device is only used one time, whereas the particles actuating device can be used several times.
(38) If reagents have to be present in the multi-region device, these reagents are preferentially present in a dry form, because wet reagents carry the risk of leaking and drying out, in which case it is difficult to control the concentrations of the reagents in a final assay. Dry reagents do not move or leak out and can be very stable in the multi-region device.
(39) The valve material can be a fluid like a gas or a liquid, or a solid. A valve material being solid under storage temperatures like room temperature of about 20 C. and being solid in a state, in which the particles cannot penetrate the valve material, has the advantage that the entire multi-region device can be very stable, because the valve material generally does not evaporate, diffuse or creep. Furthermore, if, for example, oil would be used instead of a valve material which is generally solid and preferentially only liquid, if the magnetic particles should penetrate the valve material, initially the oil wets the hydrophobic as well as the hydrophilic regions. Therefore, a pressure would be required to fill the multi-region device by a sample and/or reagent fluids, because the oil needs to be displaced. Moreover, an autonomous filling by capillary forces would be very difficult or not possible.
(40) If the valve material is generally solid, the valve material can define capillary regions, in particular, capillary channels, which allow a sample fluid being forwarded within the multi-region by capillary forces for allowing an autonomous filling. In addition, the use of a valve material, which is generally solid and only in a liquid state if magnetic particles should penetrate the valve material, reduces the probability that dry reagents stored in the multi-region device are contaminated by the valve material. The valve material is therefore preferentially a material which is solid under storage temperatures of, for example, about 20 C. In particular, the valve material is preferentially a material, which is always solid and only liquid, if the particles should penetrate the valve material. Furthermore, the valve material is preferentially inert and immiscible with respect to the fluids, which are intended to be introduced into the multi-region device, in particular, with respect to water.
(41) In the liquid state the valve material has preferentially different values of viscosity, for example, the valve material can be in a high-viscous state and in a low-viscous state. The valve material is preferentially immiscible and inert with respect to water irrespective of the current viscosity value of the valve material. In a low-viscous state, in which the valve material has preferentially a viscosity of about 1000 mPa.Math.s (1000 cP), the valve material has in an example a low interfacial tension with water of about 0.06 N/m.
(42) The valve material can be a valve material of which the visco-elastic properties can be modulated. The valve material provides preferentially a switchable barrier material located in the multi-region device being, for example, a multi-chamber diagnostic device. The degree of penetrability of the valve material by actuated magnetic particles is controlled by a physical modulation. In particular, as already mentioned above, the valve material is preferentially a meltable substance like paraffin of which the visco-elastic property is modulated by controlling the temperature of the valve material.
(43) The valve material is, for example, a wax from the company Sigma-Aldrich. The valve material has preferentially a melting temperature, which is larger than 40 C., further preferred larger than 50 C. and even further preferred larger than 60 C. In an embodiment, the valve material has a melting temperature in the range of, for example, 44-46 C. or 53-57 C. In particular, the valve material is preferentially paraffin having a melting temperature in the range of 44-46 C. However, it is also possible to use a valve material having a lower melting temperature, for example, in order to be below a temperature at which reagents, which might be present within the multi-region device, evaporate or below a temperature at which sensitive material, which might be present within the multi-region device, is affected, like labile proteins. In an embodiment, the melting temperature is about 30 C. or smaller. A valve material having a small melting temperature allows to apply the heating for a short time only. For example, if a small melting temperature has to be reached, like, for example, 30 C., a melting of the valve material could be achieved in, for example, a few seconds. Thus, the valve could be switched in a very short time.
(44) The first layer of the multi-region device is preferentially a bottom part being a plastic or glass substrate. In an embodiment, the first layer is a microscope glass slide on which a self-assembled monolayer (SAM) of perfluorodecyl-tri-etoxysilane is applied. The SAM is partly removed by oxygen plasma treatment, leaving a pattern of hydrophilic regions, which can be regarded as hydrophilic chambers, as islands in a hydrophobic background. The second layer is preferentially a top part being preferentially a plastic or a glass substrate. In an embodiment, the top part is an untreated slide of PMMA. The constraining elements are preferentially formed by a double-sided tape arranged between the first layer and the second layer. The double-sided tape has preferentially a thickness of about 100 m. The valve material has preferentially been applied at a temperature above the melting temperature of the valve material, i.e. the valve material has preferentially been applied in a liquid state, while the hydrophilic chambers were filled with water. In particular, preferentially paraffin is applied at 50 C. as valve material, while the hydrophilic chambers are filled with water. In this way, the valve material only wets around the hydrophilic chambers. After cooling back to room temperature, the valve material solidifies and becomes opaque. A resulting distribution of different regions within a multi-region device is schematically and exemplarily shown in a top view in
(45) The distribution of different regions within the multi-region device 101 shown in
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(47) The magnetic beads have been transported from the first region 106 towards the third region 108. The region 106 contains a solution 122 of super-paramagnetic beads being the magnetic particles in a phosphate buffered saline buffer (PBS) puffer. The region 107 contains water 121 dyed with cosmenyl blue. The region 108 contains pure water 120 and the ensemble 123 of magnetic beads that has been transported.
(48) The heating performed by the heating elements, in particular, by the heating elements 17, 29, which are schematically and exemplarily shown in
(49) Although in the above described embodiments paraffin is preferentially used as valve material, instead of paraffin any other material can be used of which a physical property can be modulated or modified such that the degree of penetrability of the valve material with respect to particles like the above mentioned magnetic particles can be modulated or modified. The valve material can be a single substance or a mixture more than one substance. For example, the valve material can be a mixture of paraffin with one or more other substances. In an embodiment, a surfactant like Brij 72 can be added to paraffin to decrease the interfacial tension with respect to water. Furthermore, the valve material like paraffin can be mixed with agents to tune its properties, for example, its density, its surface tension, its heat capacity, its light absorption et cetera.
(50) The shape of the regions, in particular, the shape of the hydrophilic pattern, of the multi-region device can be adapted to facilitate capillary filling of the multi-region device and/or to facilitate crossing of the particles through the valve material of the valve of the multi-region device.
(51) The degree of penetrability of the valve material, in particular, the phase and/or the viscosity and/or the visco-elastic property, of the valve material can be modified before filling of the multi-region device with a sample fluid or after the multi-region device has been filled with the sample fluid.
(52) The valve is preferentially used in a multi-chamber micro fluidic device that requires a separation of chambers by a valve-like structure that is preferentially immiscible with water. More specifically, the valve is preferentially used in a multi-chamber microfluidic device for sample pre-treatment in nucleic-acid testing.
(53) The term valve refers to an element for controlling the movement of particles like magnetic particles at least from a first region to a second region, wherein the first region and the second region are separated by the valve. The valve is therefore a device for regulating and/or controlling the transport of particles like magnetic particles from a first region to a second region. The term valve is not limited to a device for regulating the flow of the fluid.
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(55) Although with respect to
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(57) In
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(60) Although in the above described embodiments certain numbers and shapes of hydrophilic and hydrophobic regions, in particular, of hydrophilic regions which are separated by hydrophobic valve regions, have been described, the invention is not limited to a certain shape and number of these regions. For example, the multi-region device can also have the shape and number of the hydrophilic regions 90, which are separated by hydrophobic valve regions 91, as exemplarily illustrated in
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(64) In step 801a first region and a second region are provided, preferentially, on a first layer being preferentially a substrate made of glass or plastic like a microscope glass slide. This provision of a first region and a second region is preferentially performed by providing the first layer with hydrophilic and hydrophobic regions on its surface, wherein the hydrophilic regions define the first and second regions. This provision of hydrophilic and hydrophobic regions is preferentially performed by applying a SAM of perfluorodecyl-tri-ethoxysilane on the first layer. Then, the SAM is partly removed by, for example, oxygen plasma treatment, leaving a pattern of hydrophilic regions as islands in a hydrophobic background, thereby creating hydrophilic and hydrophobic regions, which can also be regarded as hydrophilic and hydrophobic chambers.
(65) In step 802, a valve is provided having a valve material with a modifiable degree of penetrability, wherein the valve, i.e. the valve material, is arranged between the first region and the second region for controlling a passage of particles from the first region to the second region. This provision of the valve, i.e. of the valve material, is preferentially performed by providing water and the valve material on the hydrophilic and hydrophobic regions such that the water is arranged at the hydrophilic regions and the valve material is arranged at the hydrophobic regions. This provision of the water and the valve material is performed, while the valve material is in the liquid state. After the water has been arranged at the hydrophilic regions and the valve material in the liquid state has been arranged at the hydrophobic regions, the valve material is solidified for providing the solidified valve material in the hydrophobic regions for forming the valve between the hydrophilic regions defining the first and second regions.
(66) Although in the above described embodiments certain numbers of first and second regions and valves separating the first and second regions have been described, the invention is not limited to a certain number of valves and a certain number of first and second regions.
(67) Although in the embodiment described above with reference to
(68) Although in the embodiment described above with reference to
(69) Although in the above described embodiments the actuating forces are magnetic forces, in other embodiments other forces can be used for forcing the particles through the valve material, for example, electrical forces, capillary forces, et cetera.
(70) Although in an above described embodiment a self-assembled monolayer of perfluorodecyl-tri-ethoxysilane is applied on a substrate, wherein after this application the self-assembled monolayer is partly removed for generating a pattern of hydrophilic regions and hydrophobic regions, also other self-assembled monolayers are possible, for example, a self-assembled monolayer of perfluorodecyl-tri-chlorosilane is possible. Also other hydrophobic coatings can be patterned for generating hydrophilic and hydrophobic regions. Instead of a hydrophobic coating also a hydrophilic self-assembled monolayer or coating can be used, which is patterned for generating hydrophobic and hydrophilic regions.
(71) The analyzing unit can be any suitable sensor to detect a signal that results from materials transported by the particles. For example, biological material (e.g. targeted material or analyte) may have been transported by the magnetic particles. By the analyzing unit, the biological material can be directly detected on the magnetic particles, or it can be further labelled and then detected, or it can be further processed and then detected. Examples of further processing are that biological material is amplified, or biological material is tagged or labelled, or material is released from the particles into solution for solution processing and/or detection, or that the (bio)chemical or physical properties of the labels are modified to facilitate detection, or that an enzymatic process is used for signal amplification.
(72) The analyzing unit can also be any suitable sensor to detect the presence and/or concentration of magnetic particles on or near to a sensor surface, based on any property of the particles. For example, the analyzing unit can be adapted to detect the particles via magnetic methods (for example magneto-resistive, Hall, coils), optical methods (for example imaging, fluorescence, chemiluminescence, absorption, scattering, evanescent field techniques, surface plasma resonance, Raman et cetera.), sonic detection (for example surface acoustic wave, bulk acoustic wave, cantilever, quartz crystal et cetera.), electrical detection (for example conduction, impedance, and amperometric, redox cycling), and combinations thereof. If the magnetic particles are detected based on a magnetic property of the particles, the analyzing unit comprises preferentially a coil, a magneto-resistive sensor, a magneto-restrictive sensor, a Hall sensor, in particular, a planar Hall sensor, a flux-gate sensor, a SQUID, a magnetic resonance sensor or another magnetic sensor.
(73) The multi-region device and preferentially also the analyzing unit can be adapted to perform molecule based assays, e.g. for nucleic-acid or protein detection, but, in addition to molecule based assays, also larger moieties can be detected, for example cells, viruses, or fractions of cells or viruses, tissue extract etc. The detection can occur with or without scanning of a sensor element of the analyzing unit with respect to a biosensor surface of the multi-region device. Measurement data can be derived as an end-point measurement, as well as by recording signals kinetically or intermittently. The magnetic particles are preferentially labels labelling the elements, which have to be detected, wherein the magnetic particles can be detected directly by the sensing method, or the particles can be further processed prior to detection. An example of further processing is that materials are added to the particles or released from the particles, or that the (bio)chemical or physical properties of the particles or materials on the particles are modified to facilitate detection. The multi-region device and preferentially also the analyzing unit can be used with several biochemical assay types, for example, binding/unbinding assay, sandwich assay, competition assay, displacement assay, enzymatic assay, amplification assay, et cetera. The multi-region device and preferentially also the analyzing unit are suited for sensor multiplexing (i.e. the parallel use of different sensors and sensor surfaces), label multiplexing (i.e. the parallel use of different types of labels) and chamber multiplexing (i.e. the parallel use of different reaction chambers). The multi-region device and the analyzing unit can be used as rapid, robust, and easy to use point-of-care biosensor for small sample volumes. The analyzing region, which could be regarded, in an embodiment, as a reaction chamber, can be a disposable item, i.e. the multi-region device can be used as a disposable item, to be used with a compact reader, containing one or more magnetic field generating means and one or more detection means like the analyzing unit. The reader is, for example, the above described particles actuating device. The multi-region device and preferentially the analyzing unit can be used as an automated high-throughput testing. In this case, the multi-region device comprises the analyzing region and the multi-region device fits into a reusable reader for analyzing the particles.
(74) The particles have preferentially a diameter between 3 nm and 10000 nm, further preferred between 10 nm and 5000 nm, and even further preferred between 50 nm and 3000 nm.
(75) In the following two fabrication methods are described in connection with
(76) The
(77) A different structure of a valve with an alternative fabrication method is described in the following under
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(79) In the following examplary test results are described by means of
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(81) Other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed invention, from a study of the drawings, the disclosure, and the appended claims.
(82) In the claims, the word comprising does not exclude other elements or steps, and the indefinite article a or an does not exclude a plurality.
(83) A single unit or devices may fulfill the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.
(84) Any reference signs in the claims should not be construed as limiting the scope.