Pump module

Abstract

Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.

Claims

1. A pump module comprising: a flange, configured to be connected to an exterior of a vacuum apparatus in a vacuum-tight manner, an ion getter pump and a volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump, the NEG and the flange being arranged separately from each other, characterised in that the ion getter pump and the NEG are configured to be inserted into the vacuum apparatus while the ion getter pump is connected to the flange and the NEG is connected to the ion getter pump before the flange is connected to the exterior of the vacuum apparatus.

2. The pump module in accordance with claim 1, characterised in that a common lead-through for supply lines to the NEG and the ion getter pump is provided through the flange.

3. The pump module in accordance with claim 1, characterised in that the flange has a first side and an opposite, second side, the NEG and the ion getter pump being arranged on the first side and in particular protruding from the first side.

4. The pump module in accordance with claim 3, characterised in that in an installed state the first side faces the vacuum apparatus and the second side is in an installed state arranged outside the vacuum apparatus.

5. The pump module in accordance with claim 1, further comprising a second ion getter pump, the second ion getter pump being directly connected to the flange.

6. The pump module in accordance with claim 5, further comprising a second NEG directly connected to the second ion getter pump and the second NEG and the flange being arranged separately one from another.

7. The pump module in accordance with claim 1, characterised in that the ion getter pump is permanently connected to at least one of the flange and the NEG.

8. The pump module in accordance with claim 1, characterised in that the ion getter pump is detachably connected to at least one of the flange and the NEG.

9. A vacuum apparatus with a second flange, where the pump module in accordance with claim 1 is connected to the second flange.

10. The vacuum apparatus in accordance with claim 9, characterised in that the ion getter pump and the NEG both protrude into the vacuum apparatus at the second flange.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The invention will now be described below in further detail on the basis of preferred embodiments with reference to the attached Drawings.

(2) The Drawings show as follows:

(3) FIG. 1: a first embodiment of the pump module according to the invention and

(4) FIG. 2: a second embodiment of the pump module according to the invention.

(5) FIG. 3: a view from within a vacuum apparatus showing the first embodiment of the pump connected to the vacuum apparatus.

DETAILED DESCRIPTION

(6) As shown in FIG. 1, the pump module 10 according to the invention has a flange 12 with a first side 14 and a second side 16, which lies opposite the first side. As shown in FIG. 3, when the flange 12 is connected to a vacuum apparatus 30 (only partially shown) having a flange 32 (with hidden portions shown in dotted lines), the first side 14 faces the interior of vacuum apparatus 30 and is in particular exposed to the vacuum created inside the vacuum apparatus 30. The second side 16 is exposed to an atmospheric pressure and is arranged outside the vacuum apparatus 30. With the aid of known means such as screws and seals, the flange 12 is connected to the flange 32 of the vacuum apparatus 30 in a vacuum-tight manner.

(7) An ion getter pump 18 is connected to the first side 14 of the flange 12. A volume getter pump (NEG) 20 is arranged on that side of the ion getter pump 18 opposite to the flange 12 side. Flange 12 and NEG 20 are thus arranged at opposite ends of the ion getter pump. This means that NEG 20 is not directly connected to the flange 12, but rather indirectly by means of the ion getter pump 18. Thus, in the installed state of FIG. 3, ion getter pump 18 and NEG 20 protrude into the vacuum apparatus 30 and are so arranged therein to pump gases.

(8) The flange 12 further possesses a common lead-through 22, by means of which the high voltage supply line 40 for operation of the ion getter pump 18 as well as the low voltage supply line 42 for the heating element for regeneration of the NEG are led through. This means that only one lead-through is necessary, so that the number of potential leaks of the ultrahigh vacuum apparatus can be reduced.

(9) The diameter of the flange 12 can be kept small by virtue of the stacked or serial structure of NEG 20, ion getter pump 18 and flange 12, since the diameter of the flange or the diameter of the flange face 24, which is situated directly within the vacuum, corresponds exactly to, or is slightly greater than, the base area of the ion getter pump 18 or NEG 20. Thus, on installation as shown in FIG. 3, NEG 20 and ion getter pump 18 are introduced via a flange opening 34 in flange 32 and are attached securely to the vacuum apparatus by attachment of the flange 12 to the flange 32 of the vacuum apparatus 30.

(10) FIG. 2 shows a further embodiment. Here, on the first side 14 of the flange 12 a first ion getter pump 18.1 and a second ion getter pump 18.2 are arranged. In this case, the ion getter pumps 18 are directly connected to the flange. On that side of the respective ion getter pumps 18.1, 18.2 opposite to the flange 12 side NEG 20.1, 20.2 is respectively arranged. This means that the pump capacity of the pump module can easily be doubled. At the same time, a compact structure is maintained by the stacked or serial arrangement of ion getter pump 18 and NEG.

(11) Thus, a pump module is created which is compact in design and provides a combination of an ion getter pump and a NEG.

(12) Although elements have been shown or described as separate embodiments above, portions of each embodiment may be combined with all or part of other embodiments described above.

(13) Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are described as example forms of implementing the claims.