GLASS COMPOSITION

Abstract

A glass composition, wherein components thereof are represented by weight percentage, including: 50-70% of SiO.sub.2; 3-20% of B.sub.2O.sub.3; 11-25% of Al.sub.2O.sub.3; 1-15% of CaO; 0-10% of MgO. Through rational component design, the glass composition features excellent chemical stability, high UV light transmittance and transition temperature, so as to meet the requirements for carrier and packaging in semiconductor manufacturing process and to be applicable for semiconductor manufacturing field.

Claims

1. A glass composition, wherein components thereof are represented by weight percentage, comprising: 50-70% of SiO.sub.2; 3-20% of B.sub.2O.sub.3; 11-25% of Al.sub.2O.sub.3; 1-15% of CaO; 0-10% of MgO.

2. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, further comprising: 0-10% of SrO; and/or 0-10% of BaO; and/or 0-8% of ZnO; and/or 0-8% of Rn.sub.2O; and/or 0-8% of Ln.sub.2O.sub.3; and/or 0-5% of WO.sub.3; and/or 0-5% of ZrO.sub.2; and/or 0-5% of TiO.sub.2; and/or 0-5% of P.sub.2O.sub.5; and/or 0-1% of clarifying agent; the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3, and the clarifying agent is one or more of Sb.sub.2O.sub.3, CeO.sub.2, SnO.sub.2, and SnO.

3. The glass composition, wherein components thereof contain SiO.sub.2, B.sub.2O.sub.3, Al.sub.2O.sub.3, and alkaline-earth metal oxide, transition temperature T.sub.g of the glass composition is above 620 C., outer transmittance .sub.365 nm is above 70% at 365 nm, and the alkaline-earth metal oxide is one or more of MgO, CaO, SrO, and BaO.

4. The glass composition according to claim 3, wherein components thereof are represented by weight percentage, comprising: 50-70% of SiO.sub.2; and/or 3-20% of B.sub.2O.sub.3; and/or 11-25% of Al.sub.2O.sub.3; and/or 1-15% of CaO; and/or 0-10% of MgO; and/or 0-10% of SrO; and/or 0-10% of BaO; and/or 0-8% of ZnO; and/or 0-8% of Rn.sub.2O; and/or 0-8% of Ln.sub.2O.sub.3; and/or 0-5% of WO.sub.3; and/or 0-5% of ZrO.sub.2; and/or 0-5% of TiO.sub.2; and/or 0-5% of P.sub.2O.sub.5; and/or 0-1% of clarifying agent; the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3, and the clarifying agent is one or more of Sb.sub.2O.sub.3, CeO.sub.2, SnO.sub.2, and SnO.

5. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, and one or more of the following 7 conditions are satisfied: 1) Al.sub.2O.sub.3/B.sub.2O.sub.3 is 0.6-4.0; 2) CaO/SiO.sub.2 is 0.02-0.25; 3) (MgO+CaO)/B.sub.2O.sub.3 is 0.1-4.0; 4) CaO/(BaO+SrO+MgO) is 0.5-10.0; 5) (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is 0.02-0.7; 6) Rn.sub.2O/(MgO+CaO) is below 1.0; 7) Ln.sub.2O.sub.3/B.sub.2O.sub.3 is below 1.0, and the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, and the Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3.

6. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, and one or more of the following 7 conditions are satisfied: 1) Al.sub.2O.sub.3/B.sub.2O.sub.3 is 0.8-3.5; 2) CaO/SiO.sub.2 is 0.04-0.22; 3) (MgO+CaO)/B.sub.2O.sub.3 is 0.2-3.5; 4) CaO/(BaO+SrO+MgO) is 2.0-8.0; 5) (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is 0.04-0.6; 6) Rn.sub.2O/(MgO+CaO) is below 0.8; 7) Ln.sub.2O.sub.3/B.sub.2O.sub.3 is below 0.8, and the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, and the Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3.

7. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, and one or more of the following 7 conditions are satisfied: 1) Al.sub.2O.sub.3/B.sub.2O.sub.3 is 1.0-3.0; 2) CaO/SiO.sub.2 is 0.08-0.2; 3) (MgO+CaO)/B.sub.2O.sub.3 is 0.3-2.0; 4) CaO/(BaO+SrO+MgO) is 3.0-7.0; 5) (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is 0.05-0.5; 6) Rn.sub.2O/(MgO+CaO) is below 0.5; 7) Ln.sub.2O.sub.3/B.sub.2O.sub.3 is below 0.5, and the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, and the Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3.

8. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, and one or more of the following 7 conditions are satisfied: 1) Al.sub.2O.sub.3/B.sub.2O.sub.3 is 1.2-2.5; 2) CaO/SiO.sub.2 is 0.1-0.18; 3) (MgO+CaO)/B.sub.2O.sub.3 is 0.5-1.5; 4) CaO/(BaO+SrO+MgO) is 3.5-6.0; 5) (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is 0.08-0.3; 6) Rn.sub.2O/(MgO+CaO) is below 0.2; 7) Ln.sub.2O.sub.3/B.sub.2O.sub.3 is below 0.2, and the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, and the Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3.

9. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, in which: SiO.sub.2 is 54-68%; and/or B.sub.2O.sub.3 is 4-17%; and/or Al.sub.2O.sub.3 is 12-24%; and/or CaO is 2-13%; and/or MgO is 0.1-8%; and/or SrO is 0-5%; and/or BaO is 0-5%; and/or ZnO is 0-5%; and/or Rn.sub.2O is 0-5%; and/or Ln.sub.2O.sub.3 is 0-5%; and/or WO.sub.3 is 0-3%; and/or ZrO.sub.2 is 0-3%; and/or TiO.sub.2 is 0-2%; and/or P.sub.2O.sub.5 is 0-2%; and/or clarifying agent is 0-0.8%; the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3, and the clarifying agent is one or more of Sb.sub.2O.sub.3, CeO.sub.2, SnO.sub.2, and SnO.

10. The glass composition according to claim 1, wherein components thereof are represented by weight percentage, in which: SiO.sub.2 is 55-64%; and/or B.sub.2O.sub.3 is 6-15%; and/or Al.sub.2O.sub.3 is 14-20%; and/or CaO is 4-9.5%; and/or MgO is 0.5-5%; and/or SrO is 0-2%; and/or BaO is 0-2%; and/or ZnO is 0-3%; and/or Rn.sub.2O is 0-2%; and/or Ln.sub.2O.sub.3 is 0-2%; and/or WO.sub.3 is 0-1%; and/or ZrO.sub.2 is 0-1%; and/or TiO.sub.2 is 0-1%; and/or P.sub.2O.sub.5 is 0-1%; and/or clarifying agent is 0-0.5%; the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3, and the clarifying agent is one or more of Sb.sub.2O.sub.3, CeO.sub.2, SnO.sub.2, and SnO.

11. The glass composition according to claim 1, wherein the glass composition does not contain Ln.sub.2O.sub.3; and/or does not contain Rn.sub.2O; and/or does not contain ZnO; and/or does not contain ZrO.sub.2; and/or does not contain TiO.sub.2; the Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O, and Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3.

12. The glass composition according to claim 1, wherein thermal expansion coefficient .sub.20/300 C. of the glass composition is 2210.sup.7/K-4510.sup.7/K; and/or transition temperature T.sub.g is above 620 C.; and/or outer transmittance .sub.365 nm is above 70% at 365 nm; and/or acid resistance stability D.sub.A is above Class 3; and/or water resistance stability D.sub.W is above Class 3; and/or Young's modulus E is 60-90 GPa; and/or density is below 3.0 g/cm.sup.3.

13. The glass composition according to claim 1, wherein thermal expansion coefficient .sub.20/300 C. of the glass composition is 2810.sup.7/K-3710.sup.7/K; and/or transition temperature T.sub.g is 660-800 C.; and/or outer transmittance .sub.365 nm is above 85% at 365 nm; and/or acid resistance stability D.sub.A is Class 1; and/or water resistance stability D.sub.W is Class 1; and/or Young's modulus E is 70-78 GPa; and/or density is below 2.6 g/cm.sup.3.

14. A packaging material, made of the glass composition according to claim 1.

15. A packaging carrier, made of the glass composition according to claim 1.

Description

DETAILED DESCRIPTION

[0027] The implementations of the glass composition provided by the present invention will be described in detail below, but the present invention is not limited to the following implementations. Appropriate changes may be made within the scope of the purpose of the present invention for implementation. In addition, the repeated descriptions will not limit the aim of the invention although with appropriate omissions. In the following, the glass composition of the present invention is sometimes referred to as glass.

[Glass Composition]

[0028] In the following paragraphs, the range of components of the glass composition provided by the present invention will be described. If not specified herein, the content of each component and the total content are expressed in weight percentage (wt %) relative to the total glass materials converted into oxide composition. Converted into oxide composition therein refers to that the total weight of this oxide is taken as 100% when the oxide, compound salt and hydroxide, used as raw materials for the ingredients (components) of the glass composition provided by the present invention, are decomposed and transformed into oxides during melting.

[0029] Unless otherwise noted in specific circumstances, the numerical range listed herein includes upper and lower limits, and the words above and below include the endpoint values as well as all integers and fractions within the range, but not limited to the specific values listed when the range is limited. The term about as used herein refers to that formulations, parameters and other quantities as well as characteristics are not, and do not need to be, accurate, and may be approximate and/or greater or lower if necessary, reflecting tolerances, conversion factors, measurement errors, etc. And/or mentioned herein is inclusive. For example, A and/or B refers to only A, or only B, or both A and B.

[0030] SiO.sub.2 serves as a key component of the glass provided by the present invention. In the glass of the present invention, an appropriate amount of SiO.sub.2 can ensure higher water resistance and acid resistance of the glass, and meanwhile achieve high UV light transmittance. If the content of SiO.sub.2 is less than 50%, the water resistance, acid resistance and UV light transmittance of the glass are lower than the design requirements. If the content of SiO.sub.2 is higher than 70%, melting temperature of the glass will rise sharply, and thus it is not easy to obtain high-quality glass, and the thermal expansion coefficient of the glass will be lower than the design expectation. Therefore, the content of SiO.sub.2 in the present invention is confined to 50-70%, preferably 54-68%, more preferably 55-64%. In some implementations, it can comprise about 50%, 50.5%, 51%, 51.5%, 52%, 52.5%, 53%, 53.5%, 54%, 54.5%, 55%, 55.5%, 56%, 56.5%, 57%, 57.5%, 58%, 58.5%, 59%, 59.5%, 60%, 60.5%, 61%, 61.5%, 62%, 62.5%, 63%, 63.5%, 64%, 64.5%, 65%, 65.5%, 66%, 66.5%, 67%, 67.5%, 68%, 68.5%, 69%, 69.5% or 70% of SiO.sub.2.

[0031] B.sub.2O.sub.3 can the transform the glass structure to be dense in the glass, achieve higher water resistance and acid resistance, promote the decrease of high-temperature viscosity of the glass, and thus it is easier to obtain high-quality glass under low temperature. If the content of B.sub.2O.sub.3 is less than 3%, the above effect will not be obvious. If the content of B.sub.2O.sub.3 is higher than 20%, the water resistance and acid resistance of the glass will instead decrease. Therefore, the content of B.sub.2O.sub.3 is confined to 3-20%, preferably 4-17%, more preferably 6-15%. In some implementations, it can comprise about 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5%, 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5%, 15%, 15.5%, 16%, 16.5%, 17%, 17.5%, 18%, 18.5%, 19%, 19.5% or 20% of B.sub.2O.sub.3.

[0032] An appropriate amount of Al.sub.2O.sub.3 can adjust the Young's modulus of the glass and increase the thermal conductivity of the glass, and the above effect is obtained by comprising above 11% of Al.sub.2O.sub.3 in the present invention. If the content of Al.sub.2O.sub.3 is higher than 25%, the thermal expansion coefficient of the glass will decrease rapidly, the melting performance will deteriorate, and meanwhile devitrification is particularly easy to occur. Therefore, the content of Al.sub.2O.sub.3 is 11-25%, preferably 12-24%, more preferably 14-20%. In some implementations, it can comprise about 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5%, 15%, 15.5%, 16%, 16.5%, 17%, 17.5%, 18%, 18.5%, 19%, 19.5%, 20%, 20.5%, 21%, 21.5%, 22%, 22.5%, 23%, 23.5%, 24%, 24.5% or 25% of Al.sub.2O.sub.3.

[0033] In some implementations, by controlling the ratio of the content of Al.sub.2O.sub.3 to the content of B.sub.2O.sub.3, i.e., Al.sub.2O.sub.3/B.sub.2O.sub.3, within a range of 0.6-4.0, it is possible to obtain the desired thermal expansion coefficient and meanwhile enhance the light transmittance and inherent quality of the glass. Therefore, Al.sub.2O.sub.3/B.sub.2O.sub.3 is preferably 0.6-4.0, Al.sub.2O.sub.3/B.sub.2O.sub.3 is more preferably 0.8-3.5, Al.sub.2O.sub.3/B.sub.2O.sub.3 is further preferably 1.0-3.0, and Al.sub.2O.sub.3/B.sub.2O.sub.3 is more further preferably 1.2-2.5. In some implementations, the value of Al.sub.2O.sub.3/B.sub.2O.sub.3 is about 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95, 1.0, 1.05, 1.1, 1.15, 1.2, 1.25, 1.3, 1.35, 1.4, 1.45, 1.5, 1.55, 1.6, 1.65, 1.7, 1.75, 1.8, 1.85, 1.9, 1.95, 2.0, 2.05, 2.1, 2.15, 2.2, 2.25, 2.3, 2.35, 2.4, 2.45, 2.5, 2.55, 2.6, 2.65, 2.7, 2.75, 2.8, 2.85, 2.9, 2.95, 3.0, 3.05, 3.1, 3.15, 3.2, 3.25, 3.3, 3.35, 3.4, 3.45, 3.5, 3.55, 3.6, 3.65, 3.7, 3.75, 3.8, 3.85, 3.9, 3.95 or 4.0.

[0034] MgO can increase the chemical stability of the glass, and adjust the optical constant of the glass. If the content of MgO exceeds 10%, the thermal expansion coefficient of the glass will decrease, which is difficult to meet the design requirements. Therefore, the content of MgO is 0-10%, preferably 0.1-8%, more preferably 0.5-5%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of MgO.

[0035] CaO can increase the thermal stability and refractive index of the glass, and adjust the thermal expansion coefficient. The present invention obtains the above effect by comprising over 1% of CaO. On the other hand, if the content of CaO is higher than 15%, the devitrification resistance of the glass will deteriorate, and the Young's modulus will be beyond the design requirements. Therefore, the content of CaO is 1-15%, preferably 2-13%, more preferably 4-9.5%. In some implementations, it can comprise about 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5%, 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5% or 15% of CaO.

[0036] In some implementations of the present invention, by controlling the ratio of the content of CaO to the content of SiO.sub.2, i.e., CaO/SiO.sub.2, within a range of 0.02-0.25, it can enable the glass to obtain the desired transition temperature and meanwhile optimize the devitrification resistance of the glass. Therefore, CaO/SiO.sub.2 is preferably 0.02-0.25, CaO/SiO.sub.2 is more preferably 0.04-0.22, CaO/SiO.sub.2 is further preferably 0.08-0.2, and CaO/SiO.sub.2 is more further preferably 0.1-0.18. In some implementations, the value of CaO/SiO.sub.2 is about 0.02, 0.03, 0.04, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.11, 0.12, 0.13, 0.14, 0.15, 0.16, 0.17, 0.18, 0.19, 0.2, 0.21, 0.22, 0.23, 0.24 or 0.25.

[0037] In some implementations, by controlling the ratio of the total content of MgO and CaO(MgO+CaO) to the content of B.sub.2O.sub.3, i.e., (MgO+CaO)/B.sub.2O.sub.3, within a range of 0.1-4.0, it is possible to easily obtain the desired Young's modulus and meanwhile increase the chemical stability and light transmittance of the glass. Therefore, (MgO+CaO)/B.sub.2O.sub.3 is preferably 0.1-4.0, (MgO+CaO)/B.sub.2O.sub.3 is more preferably 0.2-3.5, (MgO+CaO)/B.sub.2O.sub.3 is further preferably 0.3-2.0, and (MgO+CaO)/B.sub.2O.sub.3 is more further preferably 0.5-1.5. In some implementations, the value of (MgO+CaO)/B.sub.2O.sub.3 is about 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9 or 4.0.

[0038] BaO can increase the refractive index and transition temperature of the glass, and optimize the stability and mechanical performance of the glass. If the content of BaO exceeds 10%, the density of the glass will increase, and the chemical stability will deteriorate. Therefore, the content of BaO is 0-10%, preferably 0-5%, more preferably 0-2%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of BaO.

[0039] The role of SrO is similar to that of BaO. If the content of SrO exceeds 10%, the thermal expansion coefficient of the glass will fail to meet the design requirements, and meanwhile the chemical stability of the glass will decrease sharply. Therefore, the content of SrO is below 10%, preferably below 5%, more preferably below 2%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of SrO.

[0040] In some implementations, by controlling the ratio of the content of CaO to the total content of BaO, SrO, and MgO(BaO+SrO+MgO), i.e., CaO/(BaO+SrO+MgO), within a range of 0.5-10.0, it can enable the thermal expansion coefficient of the glass to easily meet the design requirements, and meanwhile it can optimize the melting temperature of the glass, increase the light transmittance, and increase the chemical stability. Therefore, CaO/(BaO+SrO+MgO) is preferably 0.5-10.0, CaO/(BaO+SrO+MgO) is more preferably 2.0-8.0, CaO/(BaO+SrO+MgO) is further preferably 3.0-7.0, and CaO/(BaO+SrO+MgO) is more further preferably 3.5-6.0. In some implementations, the value of CaO/(BaO+SrO+MgO) is about 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.3, 1.5, 1.7, 2.0, 2.3, 2.5, 2.7, 3.0, 3.3, 3.5, 3.7, 4.0, 4.3, 4.5, 4.7, 5.0, 5.3, 5.5, 5.7, 6.0, 6.3, 6.5, 6.7, 7.0, 7.3, 7.5, 7.7, 8.0, 8.3, 8.5, 8.7, 9.0, 9.3, 9.5, 9.7 or 10.0.

[0041] In some implementations, by controlling the ratio of the total content of alkaline-earth metal oxides MgO, CaO, SrO, and BaO(MgO+CaO+SrO+BaO) to the total content of SiO.sub.2 and B.sub.2O.sub.3 (SiO.sub.2+B.sub.2O.sub.3), i.e., (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3), within a range of 0.02-0.7, it is possible to easily obtain the desired Young's modulus and meanwhile increase the chemical stability and transition temperature of the glass. Therefore, (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is preferably 0.02-0.7, (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is more preferably 0.04-0.6, (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is further preferably 0.05-0.5, and (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is more further preferably 0.08-0.3. In some implementations, the value of (MgO+CaO+SrO+BaO)/(SiO.sub.2+B.sub.2O.sub.3) is about 0.02, 0.03, 0.04, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.13, 0.15, 0.17, 0.2, 0.23, 0.25, 0.27, 0.3, 0.33, 0.35, 0.37, 0.4, 0.43, 0.45, 0.47, 0.5, 0.53, 0.55, 0.57, 0.6, 0.63, 0.65, 0.67 or 0.7.

[0042] ZnO can improve the chemical stability and reduce the thermal expansion coefficient in the glass. If the content of ZnO is excessive, the transition temperature of the glass will decrease rapidly, so that the glass is easy to soften and deform under high-temperature working environment, exerting a fatal effect on glass devices that need to work at high temperature. Therefore, the content of ZnO is below 8%, preferably below 5%, more preferably below 3%. In some implementations, it further preferably contains no ZnO. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of ZnO.

[0043] Rn.sub.2O(Rn.sub.2O is one or more of Li.sub.2O, Na.sub.2O, and K.sub.2O) can reduce the melting temperature and density of the glass. However, when the content of Rn.sub.2O is high, the transition temperature of the glass will decrease. On the other hand, when the glass comprising Rn.sub.2O is used as the carrier, alkali metal ions Li.sup.+, Na.sup.+, and K.sup.+ will enter the monocrystalline silicon substrate and pollute the chip circuit. Therefore, the content of Rn.sub.2O is confined to be below 8%, preferably below 5%, more preferably below 2%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of Rn.sub.2O.

[0044] In some implementations, by controlling the ratio of the content of Rn.sub.2O to the total content of MgO and CaO(MgO+CaO), i.e., Rn.sub.2O/(MgO+CaO), to be below 1.0, it is conducive to improving the chemical stability of the glass to obtain the desired thermal expansion coefficient. Therefore, Rn.sub.2O/(MgO+CaO) is preferably below 1.0, Rn.sub.2O/(MgO+CaO) is more preferably below 0.8, Rn.sub.2O/(MgO+CaO) is further preferably below 0.5, and Rn.sub.2O/(MgO+CaO) is more further preferably below 0.2. In some implementations, the value of Rn.sub.2O/(MgO+CaO) is about 0, greater than 0, 0.01, 0.05, 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95 or 1.0.

[0045] Ln.sub.2O.sub.3 (Ln.sub.2O.sub.3 is one or more of La.sub.2O.sub.3, Gd.sub.2O.sub.3, Y.sub.2O.sub.3, and Yb.sub.2O.sub.3) can increase the thermal expansion coefficient and refractive index of the glass. However, if the content of Ln.sub.2O.sub.3 is excessive, the devitrification resistance of the glass will decrease, and the Young's modulus and transition temperature will be difficult to meet the design requirements. Therefore, Ln.sub.2O.sub.3 is below 8%, preferably below 5%, more preferably below 2%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of Ln.sub.203.

[0046] In some implementations, by controlling the ratio of the content of Ln.sub.2O.sub.3 to the content of B.sub.2O.sub.3, i.e., Ln.sub.2O.sub.3/B.sub.2O.sub.3, to be below 1.0, it is possible to easily obtain the desired thermal expansion coefficient and meanwhile increase the chemical stability of the glass. Therefore, Ln.sub.2O.sub.3/B.sub.2O.sub.3 is preferably below 1.0, Ln.sub.2O.sub.3/B.sub.2O.sub.3 is more preferably below 0.8, Ln.sub.2O.sub.3/B.sub.2O.sub.3 is further preferably below 0.5, and Ln.sub.2O.sub.3/B.sub.2O.sub.3 is more further preferably below 0.2. In some implementations, the value of Ln.sub.2O.sub.3/B.sub.2O.sub.3 is about 0, greater than 0, 0.01, 0.05, 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95 or 1.0.

[0047] WO.sub.3 can increase the refractive index and mechanical strength of the glass. If the content of WO.sub.3 is high, the light transmittance and transition temperature of the glass will decrease. Therefore, the content of WO.sub.3 is confined to be below 5%, preferably below 3%, more preferably below 1%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of WO.sub.3.

[0048] ZrO.sub.2 can improve the devitrification resistance capacity in the glass, and meanwhile enhance the chemical stability of the glass. However, if the content of ZrO.sub.2 exceeds 5%, the thermal expansion coefficient of the glass will decrease significantly, which is difficult to meet the design requirements, and meanwhile the melting performance of the glass will decrease, the high-temperature viscosity will increase significantly, and the glass is prone to non-melting substances. Therefore, the content of ZrO.sub.2 is confined to be below 5%, preferably below 3%, more preferably below 1%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of ZrO.sub.2.

[0049] TiO.sub.2 can enhance the devitrification resistance and mechanical strength of the glass. If the content of TiO.sub.2 exceeds 5%, UV transmittance of the glass will decrease rapidly to make subsequent laser stripping difficult, and meanwhile the thermal expansion coefficient of the glass will decrease. Therefore, the content of TiO.sub.2 is below 5%, preferably below 2%, more preferably below 1%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of TiO.sub.2.

[0050] P.sub.2O.sub.5 is an optional component for improving the devitrification resistance of the glass. In particular, when the content of P.sub.2O.sub.5 is below 5%, the decrease in chemical stability of the glass can be suppressed. Therefore, the content of P.sub.2O.sub.5 is confined to be below 5%, preferably below 2%, more preferably below 1%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of P.sub.2O.sub.5.

[0051] The glass provided by the present invention comprises 0-1% of clarifying agent to increase the clarifying capability of the glass, and increase the bubble degree of the glass. The content of the clarifying agent is preferably 0-0.8%, more preferably 0-0.5%. The clarifying agent may comprise one or more of Sb.sub.2O.sub.3, CeO.sub.2, SnO.sub.2, and SnO, Because CeO.sub.2, SnO.sub.2, and SnO can seriously damage the UV transmittance of the glass when compared with Sb.sub.2O.sub.3, Sb.sub.2O.sub.3 is preferably used as the clarifying agent in the present invention. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.15%, 0.2%, 0.25%, 0.3%, 0.35%, 0.4%, 0.45%, 0.5%, 0.55%, 0.6%, 0.65%, 0.7%, 0.75%, 0.8%, 0.85%, 0.9%, 0.95% or 1% of clarifying agent.

[0052] Th, Cd, TI, Os, Be and Se oxides have been used in a controlled manner as a harmful chemical substance in recent years, which is necessary not only in the glass manufacturing process, but also in the processing procedure and disposal after the productization for environmental protection measures. Therefore, in the case of attaching importance to the influence on the environment, it is preferably not actually included except for the inevitable incorporation. As a result, the glass does not actually contain a substance that contaminates the environment. Therefore, the glass of the present invention can be manufactured, processed, and discarded even if no measure is taken as a special environmental countermeasure.

[0053] In order to achieve environmental friendliness, As.sub.2O.sub.3 and PbO are not contained in the glass of the present invention. Although As.sub.2O.sub.3 can eliminate bubbles and better prevent glass from coloring, the addition of As.sub.2O.sub.3 will increase the platinum erosion of glass on the furnace, especially on the platinum furnace, resulting in more platinum ions entering the glass. It brings a negative impact on the service life of the platinum furnace. PbO can significantly improve the high refractive index and high dispersion performance of the glass, but both PbO and As.sub.2O.sub.3 cause environmental pollution.

[0054] The terms not contained and 0% as used herein mean that the compound, molecule or element and the like are not intentionally added to the glass of the present invention as raw materials; however, as raw materials and/or equipment for the production of glass, there will be some impurities or components that are not intentionally added in small or trace amounts in the final glass, and this situation also falls within the protection scope of the present invention patent.

[0055] Hereinafter, the performance of the glass composition provided by the present invention will be described.

[0056] The acid resistance stability (D.sub.A) (powder method) of the glass composition is tested as per the method specified in GB/T 17129.

[0057] The acid resistance stability (D.sub.A) of the glass composition provided by the present invention is above Class 3, preferably above Class 2, more preferably Class 1.

[0058] The water resistance stability (D.sub.W) (powder method) of the glass composition is tested as per the method specified in GB/T 17129.

[0059] The water resistance stability (D.sub.W) of the glass composition provided by the present invention is above Class 3, preferably above Class 2, more preferably Class 1.

[0060] The thermal expansion coefficient (.sub.20/300 C.) of the glass composition is tested at 20-300 C. as per the method specified in GB/T 7962.16-2010.

[0061] In some implementations, the lower limit of the thermal expansion coefficient (.sub.20/300 C.) of the glass composition provided by the present invention is 2210.sup.7/K, preferably 2310.sup.7/K, more preferably 2510.sup.7/K, further preferably 2810.sup.7/K.

[0062] In some implementations, the upper limit of the thermal expansion coefficient (.sub.20/300 C.) of the glass composition provided by the present invention is 4510.sup.7/K, preferably 4010.sup.7/K, more preferably 3810.sup.7/K, further preferably 3710.sup.7/K.

[0063] The light transmittance mentioned in the present invention refers to the outer transmittance of 10 mm-thick glass sample at 365 nm, which is represented by .sub.365 nm and tested as per the method specified in GB/T 7962.12-2010.

[0064] In some implementations, the outer transmittance at 365 nm (.sub.365 nm) of the glass composition provided by the present invention is above 70%, preferably above 75%, more preferably above 80%, further preferably above 85%.

[0065] The transition temperature (T.sub.g) of the glass composition is tested as per the method specified in GB/T 7962.16-2010.

[0066] In some implementations, the transition temperature (T.sub.g) of the glass composition provided by the present invention is above 620 C., preferably above 640 C., more preferably above 650 C., further preferably 660-800 C.

<Young's Modulus>

[0067] The Young's modulus (E) of the glass composition is calculated according to the following formula:

[00001] $E = \frac{4 G^{2} - 3 {GV}_{T}^{2}}{G - V_{T}^{2}}$ [0068] Where, G=V.sub.s.sup.2 [0069] where: [0070] E refers to Young's modulus, Pa; [0071] G refers to shear modulus, Pa; [0072] V.sub.T refers to P-wave velocity, m/s; [0073] V.sub.S refers to S-wave velocity, m/s; [0074] refers to glass density, g/cm.sup.3.

[0075] In some implementations, the upper limit of the Young's modulus (E) of the glass composition provided by the present invention is 90 GPa, preferably 85 GPa, more preferably 80 GPa, further preferably 78 GPa.

[0076] In some implementations, the lower limit of the Young's modulus (E) of the glass composition provided by the present invention is 60 GPa, preferably 65 GPa, more preferably 68 GPa, further preferably 70 GPa.

[0077] The density (p) of the glass composition is tested as per the method specified in GB/T 7962.20-2010.

[0078] In some implementations, the density (p) of the glass composition provided by the present invention is below 3.0 g/cm.sup.3, preferably below 2.8 g/cm.sup.3, more preferably below 2.6 g/cm.sup.3.

[0079] The glass composition of the present invention, with the above excellent performance, can be widely used in the packaging field of electronic devices and photosensitive devices, and can also be used in the manufacture of glass elements and various equipment or instruments, such as imaging device, sensor, microscope, medical technology, digital projection, communication, optical communication technology/information transmission, optics/lighting in the automobile field, photolithography, excimer laser, wafer, computer chip, and integrated circuit and electronic device including such circuit and chip, or camera equipment and device used in the fields of on-board product, surveillance and security. It can be applied in the semiconductor packaging and semiconductor manufacturing process to make packaging material and/or packaging carrier, etc.

[Manufacturing Method]

[0080] The manufacturing method of the glass composition provided by the present invention is as follows: The glass of the present invention is made of conventional raw materials with conventional process. Use carbonate, nitrate, sulfate, hydroxide, oxide, fluoride, phosphate, and metaphosphate as raw materials, mix the ingredients according to the conventional method, and then feed the mixed furnace burden into a 1400-1600 C. smelting furnace for melting. Later, obtain homogeneous melted glass without bubbles and undissolved substances after clarification, stirring and homogenization, shape the molten glass in a mould and perform annealing. Those skilled in the art can appropriately select raw materials, process methods and process parameters according to actual needs.

Embodiment

[0081] The following non-limiting embodiments are provided in order to further clearly explain and illustrate the technical solution of the present invention. This embodiment obtains the glass composition with the composition shown in Tables 1 to 3 by the above manufacturing method of glass composition. In addition, the characteristics of each glass are measured by the test method described in the present invention, and the measurement results are shown in Tables 1 to 3.

TABLE-US-00001 TABLE 1 Embodiment (wt %) 1# 2# 3# 4# 5# 6# 7# SiO.sub.2 53.6 55.2 60.7 62.3 64.2 57.5 56.6 B.sub.2O.sub.3 8.2 11.45 8.7 11.7 10.48 14.3 13.1 Al.sub.2O.sub.3 22.5 20.6 18.4 15.4 11.5 21.5 15.6 MgO 3.6 2.5 2.1 0.4 1.7 0.8 1.2 CaO 11.5 9.6 10.0 8.5 8.0 5.8 10.4 SrO 0 0 0 0 0 0 2.0 BaO 0 0 0 1.5 0 0 0 ZnO 0 0 0 0 0 0 1.0 Li.sub.2O 0 0 0 0 0 0 0 Na.sub.2O 0 0 0 0 0 0 0 K.sub.2O 0 0 0 0 0 0 0 La.sub.2O.sub.3 0 0 0 0 0 0 0 Gd.sub.2O.sub.3 0 0 0 0 0 0 0 Y.sub.2O.sub.3 0 0 0 0 1.0 0 0 Yb.sub.2O.sub.3 0 0 0 0 0 0 0 WO.sub.3 0 0 0 0 1.0 0 0 ZrO.sub.2 0.5 0 0 0 0 0 0 TiO.sub.2 0 0 0 0 2.0 0 0 P.sub.2O.sub.5 0 0.5 0 0 0 0 0 Sb.sub.2O.sub.3 0.1 0.15 0.1 0.2 0.12 0.1 0.1 CeO.sub.2 0 0 0 0 0 0 0 SnO.sub.2 0 0 0 0 0 0 0 SnO 0 0 0 0 0 0 0 Total 100.0 100.0 100.0 100.0 100.0 100.0 100.0 Al.sub.2O.sub.3/B.sub.2O.sub.3 2.744 1.799 2.115 1.316 1.097 1.503 1.191 CaO/(BaO + SrO + MgO) 3.194 3.84 4.762 4.474 4.706 7.25 3.25 CaO/SiO.sub.2 0.215 0.174 0.165 0.136 0.125 0.101 0.184 (MgO + CaO)/B.sub.2O.sub.3 1.841 1.057 1.391 0.761 0.926 0.462 0.885 (MgO + CaO + SrO + BaO)/(SiO.sub.2 + B.sub.2O.sub.3) 0.244 0.182 0.174 0.141 0.13 0.092 0.195 Ln.sub.2O.sub.3/B.sub.2O.sub.3 0 0 0 0 0.095 0 0 Rn.sub.2O/(MgO + CaO) 0 0 0 0 0 0 0 .sub.20/300C(10.sup.7/K) 38 28 32 31 35 29 26 T.sub.g( C.) 675 668 682 675 670 674 665 .sub.365nm(%) 87.4 86.5 88.0 86.6 87.1 87.2 86.8 D.sub.A Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 D.sub.W Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 E(GPa) 70.5 72.4 70.7 72.6 73.2 75.5 70.6 (g/cm.sup.3) 2.37 2.41 2.45 2.38 2.40 2.46 2.38

TABLE-US-00002 TABLE 2 Embodiment (wt %) 8# 9# 10# 11# 12# 13# 14# SiO.sub.2 61.7 62.2 57.3 65.25 60.3 62.5 60.0 B.sub.2O.sub.3 8.7 8.4 16.5 5.9 9.7 10.5 14.1 Al.sub.2O.sub.3 18.2 17.2 16.87 12.2 18.0 17.2 15.7 MgO 2.5 0.6 1.4 4.0 2.2 1.3 1.4 CaO 8.8 9.3 7.8 12.5 8.6 8.4 7.2 SrO 0 0 0 0 0 0 0 BaO 0 2.2 0 0 0 0 0 ZnO 0 0 0 0 0 0 0 Li.sub.2O 0 0 0 0 0 0 0 Na.sub.2O 0 0 0 0 0 0 0 K.sub.2O 0 0 0 0 0 0 0 La.sub.2O.sub.3 0 0 0 0 0 0 1.5 Gd.sub.2O.sub.3 0 0 0 0 1.0 0 0 Y.sub.2O.sub.3 0 0 0 0 0 0 0 Yb.sub.2O.sub.3 0 0 0 0 0 0 0 WO.sub.3 0 0 0 0 0 0 0 ZrO.sub.2 0 0 0 0 0 0 0 TiO.sub.2 0 0 0 0 0 0 0 P.sub.2O.sub.5 0 0 0 0 0 0 0 Sb.sub.2O.sub.3 0.1 0.1 0.13 0.15 0.2 0.1 0.1 CeO.sub.2 0 0 0 0 0 0 0 SnO.sub.2 0 0 0 0 0 0 0 SnO 0 0 0 0 0 0 0 Total 100.0 100.0 100.0 100.0 100.0 100.0 100.0 Al.sub.2O.sub.3/B.sub.2O.sub.3 2.092 2.048 1.022 2.068 1.856 1.638 1.113 CaO/(BaO + SrO + MgO) 3.52 3.321 5.571 3.125 3.909 6.462 5.143 CaO/SiO.sub.2 0.143 0.15 0.136 0.192 0.143 0.134 0.12 (MgO + CaO)/B.sub.2O.sub.3 1.299 1.179 0.558 2.797 1.113 0.924 0.61 (MgO + CaO + SrO + BaO)/(SiO.sub.2 + B.sub.2O.sub.3) 0.161 0.171 0.125 0.232 0.154 0.133 0.116 Ln.sub.2O.sub.3/B.sub.2O.sub.3 0 0 0 0 0.103 0 0.106 Rn.sub.2O/(MgO + CaO) 0 0 0 0 0 0 0 .sub.20/300C(10.sup.7/K) 35 36 26 30 28 27 36 T.sub.g( C.) 672 671 680 673 674 670 672 .sub.365nm(%) 85.7 88.1 87.4 87.2 87.5 86.5 87.4 D.sub.A Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 D.sub.W Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 E(GPa) 74.5 72.8 73.0 75.1 78.2 72.4 72.1 (g/cm.sup.3) 2.42 2.46 2.32 2.35 2.42 2.41 2.47

TABLE-US-00003 TABLE 3 Embodiment (wt %) 15# 16# 17# 18# 19# 20# 21# SiO.sub.2 61.5 56.4 53.8 62.0 63.4 65.0 60.5 B.sub.2O.sub.3 11.8 17.3 15.28 9.8 7.7 10.3 10.2 Al.sub.2O.sub.3 14.6 18.8 23.4 12.5 14.2 13.7 18.4 MgO 2.4 1.0 1.2 0.8 0.2 2.2 1.0 CaO 9.6 6.4 6.2 12.0 11.4 8.7 7.4 SrO 0 0 0 1.0 0 0 0.25 BaO 0 0 0 1.8 3.0 0 0.25 ZnO 0 0 0 0 0 0 0 Li.sub.2O 0 0 0 0 0 0 0 Na.sub.2O 0 0 0 0 0 0 2.0 K.sub.2O 0 0 0 0 0 0 0 La.sub.2O.sub.3 0 0 0 0 0 0 0 Gd.sub.2O.sub.3 0 0 0 0 0 0 0 Y.sub.2O.sub.3 0 0 0 0 0 0 0 Yb.sub.2O.sub.3 0 0 0 0 0 0 0 WO.sub.3 0 0 0 0 0 0 0 ZrO.sub.2 0 0 0 0 0 0 0 TiO.sub.2 0 0 0 0 0 0 0 P.sub.2O.sub.5 0 0 0 0 0 0 0 Sb.sub.2O.sub.3 0.1 0.1 0.12 0.1 0.1 0.1 0 CeO.sub.2 0 0 0 0 0 0 0 SnO.sub.2 0 0 0 0 0 0 0 SnO 0 0 0 0 0 0 0 Total 100.0 100.0 100.0 100.0 100.0 100.0 100.0 Al.sub.2O.sub.3/B.sub.2O.sub.3 1.237 1.087 1.531 1.276 1.844 1.33 1.804 CaO/(BaO + SrO + MgO) 4 6.4 5.167 3.333 3.563 3.955 4.933 CaO/SiO.sub.2 0.156 0.113 0.115 0.194 0.18 0.134 0.122 (MgO + CaO)/B.sub.2O.sub.3 1.017 0.428 0.484 1.306 1.506 1.058 0.824 (MgO + CaO + SrO + BaO)/(SiO.sub.2 + B.sub.2O.sub.3) 0.164 0.1 0.107 0.217 0.205 0.145 0.126 Ln.sub.2O.sub.3/B.sub.2O.sub.3 0 0 0 0 0 0 0 Rn.sub.2O/(MgO + CaO) 0 0 0 0 0 0 0.238 .sub.20/300C(10.sup.7/K) 27 27 31 37 35 30 30 T.sub.g( C.) 669 674 672 675 678 674 675 .sub.365nm(%) 87.2 88.5 87.4 87.3 87.5 87.5 87.5 D.sub.A Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 D.sub.W Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 Class 1 E(GPa) 78.5 76.5 74.1 73.5 73.3 72.4 74.1 (g/cm.sup.3) 2.44 2.43 2.38 2.37 2.40 2.45 2.40

GLASS COMPOSITION

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Cpc classification

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B65D65/38

PERFORMING OPERATIONS; TRANSPORTING

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C03C3/095

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C03C4/0085

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C03C3/097

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C03C3/091

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C03C3/093

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International classification

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C03C3/097

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C03C3/091

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C03C3/093

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Abstract

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Description