WORKPIECE CONVEYANCE APPARATUS, CYLINDRICAL GRINDING APPARATUS, AND DEVIATION AMOUNT CORRECTION METHOD

Abstract

The workpiece conveyance apparatus includes a clamp mechanism including a pair of claw sections that clamps the workpiece, a turning mechanism configured to turn the clamp mechanism in a state of clamping the workpiece, and an X-ray apparatus configured to measure a crystal plane orientation of the workpiece clamped between a spindle pipe sleeve and a tail pipe sleeve of the cylindrical grinding apparatus main body in a state in which a center axis of the workpiece and a rotation axis of the cylindrical grinding apparatus main body coincide and output a correction value for correcting a deviation amount of a crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body.

Claims

1. A workpiece conveyance apparatus that conveys a columnar workpiece to be machined to a cylindrical grinding apparatus main body, the workpiece conveyance apparatus comprising: a clamp mechanism including a pair of claw sections that clamps the workpiece; a turning mechanism configured to turn the clamp mechanism in a state of clamping the workpiece; and an X-ray apparatus configured to measure a crystal plane orientation of the workpiece clamped between a spindle pipe sleeve and a tail pipe sleeve of the cylindrical grinding apparatus main body in a state in which a center axis of the workpiece and a rotation axis of the cylindrical grinding apparatus main body coincide and output a correction value for correcting a deviation amount of a crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body, wherein when the rotation axis of the cylindrical grinding apparatus main body is represented as an X axis, an axis orthogonal to the X axis is represented as a Y axis, and an axis orthogonal to a plane including the X axis and the Y axis is represented as a Z axis, the turning mechanism turns, around a axis passing a center of the workpiece clamped by the clamp mechanism and extending in the Z-axis direction, the clamp mechanism in the state of clamping the workpiece by an angle corresponding to the correction value.

2. The workpiece conveyance apparatus according to claim 1, wherein the clamp mechanism includes a claw section moving mechanism that moves the pair of claw sections in a direction in which the pair of claw sections approaches each other or a direction in which the pair of claw sections separates from each other; the claw section moving mechanism clamps the workpiece by, in the Y-axis direction, moving the pair of claw sections in a direction in which the pair of claw sections approaches each other and bringing the pair of claw sections into contact with an outer peripheral surface of the workpiece.

3. The workpiece conveyance apparatus according to claim 2, wherein the moving mechanism includes: a first moving mechanism configured to move the clamp mechanism in the Z-axis direction; a second moving mechanism configured to move the clamp mechanism and the first moving mechanism in the Y-axis direction; and a third moving mechanism configured to move the clamp mechanism, the first moving mechanism, and the second moving mechanism in the X-axis direction.

4. The workpiece conveyance apparatus according to claim 1, wherein the pair of claw sections respectively includes first contact sections that come into contact with lower parts of the workpiece when the pair of claw sections has moved in a direction in which the pair of claw sections approaches each other and second contact sections that come into contact with upper parts of the workpiece when the pair of claw sections has moved in the direction in which the pair of claw sections approaches each other.

5. The workpiece conveyance apparatus according to claim 4, wherein the pair of claw sections respectively includes taper surfaces opened in a V shape toward each other, the taper surfaces functioning as the first contact sections and the second contact sections.

6. The workpiece conveyance apparatus according to claim 1, wherein the moving mechanism moves the clamp mechanism with the workpiece clamped until the center axis of the workpiece and the rotation axis of the cylindrical grinding apparatus main body coincide between a spindle and a tail included in the cylindrical grinding apparatus main body.

7. The workpiece conveyance apparatus according to claim 6, wherein the moving mechanism further moves the clamp mechanism with the workpiece clamped until one end face of the workpiece abuts the spindle.

8. The workpiece conveyance apparatus according to claim 1, wherein the pair of claw sections clamps a center of length of the workpiece.

9. A cylindrical grinding apparatus comprising: a cylindrical grinding apparatus main body; and a workpiece conveyance apparatus configured to convey a columnar workpiece to be machined to the cylindrical grinding apparatus main body, the workpiece conveyance apparatus including: a clamp mechanism including a pair of claw sections that clamps the workpiece; a turning mechanism configured to turn the clamp mechanism in a state of clamping the workpiece; and an X-ray apparatus configured to measure a crystal plane orientation of the workpiece clamped between a spindle pipe sleeve and a tail pipe sleeve of the cylindrical grinding apparatus main body in a state in which a center axis of the workpiece and a rotation axis of the cylindrical grinding apparatus main body coincide and output a correction value for correcting a deviation amount of a crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body, wherein when the rotation axis of the cylindrical grinding apparatus main body is represented as an X axis, an axis orthogonal to the X axis is represented as a Y axis, and an axis orthogonal to a plane including the X axis and the Y axis is represented as a Z axis, the turning mechanism turns, around a axis passing a center of the workpiece clamped by the clamp mechanism and extending in the Z-axis direction, the clamp mechanism in the state of clamping the workpiece by an angle corresponding to the correction value.

10. A deviation amount correction method for correcting a deviation amount of the clamped workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body by using the workpiece conveyance apparatus according to claim 1, the deviation amount correction method comprising: a measurement step of measuring a crystal plane orientation of the workpiece clamped and located in a reference position in a state in which the spindle pipe sleeve of the cylindrical grinding apparatus main body is in contact with a top side end face of the columnar workpiece to be machined and the tail pipe sleeve of the cylindrical grinding apparatus main body is in contact with a bottom side end face of the workpiece and a crystal plane orientation of the workpiece rotated a predetermined angle from the reference position and outputting a correction value for correcting a deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body; and a deviation amount correction step of controlling the turning mechanism such that the deviation amount is eliminated.

11. The deviation amount correction method according to claim 10, wherein the measurement step and the deviation amount correction step are repeatedly executed until the deviation amount of the workpiece after the deviation amount correction step decreases to a set value or less.

12. The deviation amount correction method according to claim 10, wherein the deviation amount is a deviation angle of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body, and in the deviation amount correction step, the turning mechanism is controlled such that the clamp mechanism with the workpiece clamped turns by the deviation angle.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0052] FIG. 1 is a perspective view of a cylindrical grinding apparatus;

[0053] FIG. 2 is a perspective view of a workpiece;

[0054] FIG. 3 is a schematic configuration diagram of a cylindrical grinding apparatus main body;

[0055] FIG. 4A is a diagram illustrating a state in which the workpiece is clamped between a spindle unit (a spindle pipe sleeve) and a tail unit (a tail pipe sleeve) (a center axis of the workpiece and a rotation axis coincide);

[0056] FIG. 4B is a diagram illustrating a state in which the workpiece is clamped between the spindle unit (the spindle pipe sleeve) and the tail unit (the tail pipe sleeve) (the center axis of the workpiece deviates by an angle with respect to the rotation axis);

[0057] FIG. 5A is a diagram illustrating a situation in which the workpiece is clamped between the spindle pipe sleeve and the tail pipe sleeve in a state in which the center axis of the workpiece and the rotation axis coincide;

[0058] FIG. 5B is a diagram illustrating a situation in which the workpiece is clamped between the spindle pipe sleeve and the tail pipe sleeve in a state in which the center axis of the workpiece deviates by the angle with respect to the rotation axis;

[0059] FIG. 5C is a diagram illustrating a situation in which the workpiece is clamped between the spindle pipe sleeve and the tail pipe sleeve in a state in which the center axis of the workpiece deviates by the angle with respect to the rotation axis;

[0060] FIG. 6A is a diagram illustrating a situation in which a circular grinding unit is applying circular grinding or orientation flat machining to the workpiece;

[0061] FIG. 6B is a diagram illustrating a situation in which a notch unit is applying notching to the workpiece;

[0062] FIG. 7 is a perspective view of a workpiece conveyance apparatus;

[0063] FIG. 8 is a perspective view of a first movable frame (including an outer diameter measurement mechanism) and components (a second movable frame and the like) incidental to the first movable frame extracted from FIG. 7;

[0064] FIG. 9 is a perspective view (a perspective view at another angle in FIG. 8) of the first movable frame and the components (the second movable frame and the like) incidental to the first movable frame extracted from FIG. 7;

[0065] FIG. 10 is a perspective view of a third movable frame and components (a clamp mechanism and the like) incidental to the third movable frame extracted from FIG. 7;

[0066] FIG. 11 is an example of a turning mechanism (a motor for turning) that turns the clamp mechanism;

[0067] FIG. 12 is a perspective view of the clamp mechanism;

[0068] FIG. 13 is a schematic diagram illustrating a situation in which the workpiece is clamped by a pair of claw sections;

[0069] FIG. 14 is a perspective view of a sensor attached to the pair of claw sections;

[0070] FIG. 15 is a schematic diagram illustrating a situation in which the length of the workpiece is measured by the sensor attached to the pair of claw sections;

[0071] FIG. 16 is a system configuration diagram including a control apparatus;

[0072] FIG. 17 is a flowchart of an operation example of a cylindrical grinding apparatus;

[0073] FIG. 18 is a perspective view of the cylindrical grinding apparatus installed in a factory;

[0074] FIGS. 19A and 19B are diagrams for explaining an operation of the clamp mechanism;

[0075] FIGS. 20A and 20B are diagrams for explaining the operation of the clamp mechanism;

[0076] FIG. 21 is a diagram for explaining operations of the spindle unit and the tail unit;

[0077] FIGS. 22A and 22B are diagrams for explaining the operations of the spindle unit and the tail unit;

[0078] FIG. 23 is a flowchart of deviation amount measurement processing;

[0079] FIGS. 24A and 24B are diagrams illustrating the workpiece being rotated 90 degrees at a time;

[0080] FIG. 25 illustrates a situation in which the outer diameter measurement mechanism is measuring the outer diameter of a bottom side end face;

[0081] FIG. 26 is a table summarizing measurement values of workpieces measured as a result of the processing illustrated in FIG. 23;

[0082] FIG. 27 is a flowchart of deviation amount correction processing;

[0083] FIG. 28A is a diagram for explaining moving directions of movable frames of the cylindrical grinding apparatus;

[0084] FIG. 28B is a diagram for explaining moving directions of the movable frames of the cylindrical grinding apparatus in a modified example;

[0085] FIGS. 29A to 29C are diagrams for explaining a specific example 1 of the deviation amount correction processing;

[0086] FIGS. 30A to 30D are diagrams for explaining a specific example 2 of the deviation amount correction processing;

[0087] FIGS. 31A to 31C are diagrams for explaining a specific example 3 of the deviation amount correction processing;

[0088] FIGS. 32A to 32D are diagrams for explaining a specific example 4 of the deviation amount correction processing;

[0089] FIGS. 33A to 33E are diagrams for explaining a specific example 5 of the deviation amount correction processing;

[0090] FIGS. 34A to 34E are diagrams for explaining a specific example 6 of the deviation amount correction processing;

[0091] FIG. 35 is a flowchart of another operation example of the cylindrical grinding apparatus;

[0092] FIG. 36 is a perspective view illustrating a situation in which the workpiece is clamped between the spindle pipe sleeve (a spindle) and the tail pipe sleeve (a tail) in a state in which the center axis of the workpiece and the rotation axis of the cylindrical grinding apparatus main body coincide;

[0093] FIG. 37 is a flowchart of plane orientation measurement processing;

[0094] FIG. 38 is a diagram illustrating a situation in which an X-ray apparatus is irradiating the workpiece with an X ray and performing plane orientation measurement;

[0095] FIG. 39 is a flowchart of rotation angle/swing angle correction processing; and

[0096] FIG. 40 is a diagram illustrating a situation in which the X-ray apparatus is irradiating the workpiece with an X ray and performing plane orientation measurement.

DESCRIPTION OF EMBODIMENTS

First Embodiment

[0097] A cylindrical grinding apparatus 1 according to a first embodiment of the present disclosure is explained below with reference to the accompanying drawings. In the figures, corresponding components are denoted by the same reference numerals and signs and redundant explanation of the components is omitted.

[0098] FIG. 1 is a perspective view of the cylindrical grinding apparatus 1.

[0099] As illustrated in FIG. 1, the cylindrical grinding apparatus 1 includes a cylindrical grinding apparatus main body 100, a workpiece conveyance apparatus 200, and a control apparatus 300 that controls the cylindrical grinding apparatus main body 100 and the workpiece conveyance apparatus 200. In FIG. 1, a reference sign AX.sub.100 denotes a rotation axis (a machining axis) of the cylindrical grinding apparatus main body 100. The rotation axis is hereinafter referred to as rotation axis AX.sub.100.

[0100] First, a configuration example of a columnar workpiece W to be machined is explained.

[0101] FIG. 2 is a perspective view of the workpiece W.

[0102] The workpiece W is a monocrystalline silicon ingot (for example, a cylindrically ground silicon ingot) or a columnar workpiece (also called block) obtained by cutting the monocrystalline silicon ingot. The workpiece W includes a top side end face Wt and a bottom side end face Wb orthogonal to a center axis AX.sub.W of the workpiece W. Note that, as the workpiece W, workpieces having various diameters D and various lengths L (lengths in the center axis AX.sub.W direction of the workpiece W) can be used.

[0103] Subsequently, a configuration example of the cylindrical grinding apparatus main body 100 is explained.

[0104] FIG. 3 is a schematic configuration diagram of the cylindrical grinding apparatus main body 100.

[0105] In the following explanation, for convenience of explanation, X, Y, and Z axes are defined as illustrated in FIG. 1 and the like. The X axis extends in the same direction as the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 (the horizontal axis). The Y axis extends in a direction orthogonal to the X axis (the horizontal axis). The Z axis extends in a direction orthogonal to a plane including the X axis and the Y axis (the vertical axis).

[0106] The cylindrical grinding apparatus main body 100 is a publicly-known cylindrical grinding apparatus that can apply predetermined machining to the workpiece W to satisfy predetermined machining conditions. The machining conditions are conditions such as a grinding amount of the outer peripheral surface of the workpiece W and whether additional machining of a flat surface (OF), a slit (a notch) of a V shape or the like, and the like is performed. For example, an operator inputs the machining conditions via an operation apparatus 400. The predetermined machining is, for example, grinding of the outer peripheral surface of the workpiece W and additional machining of a flat surface (OF), a slit (a notch) of a V shape or the like.

[0107] As illustrated in FIG. 3, the cylindrical grinding apparatus main body 100 includes a spindle unit 110, a tail unit 120, a circular grinding unit 130, a notch unit 140, an X-ray apparatus 150 and the like.

[0108] The spindle unit 110 is installed in a state in which the spindle unit 110 is fixed to a floor surface. On the other hand, the tail unit 120 is installed in a state in which the tail unit 120 is capable of moving in the X-axis direction.

[0109] FIG. 4A illustrates a state in which the workpiece W is clamped between the spindle unit 110 (a spindle pipe sleeve 111) and the tail unit 120 (a tail pipe sleeve 121) (when the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide). FIG. 4B illustrates a state in which the workpiece W is clamped between the spindle unit 110 (the spindle pipe sleeve 111) and the tail unit 120 (the tail pipe sleeve 121) (when the center axis AX.sub.W of the workpiece W deviates by an angle with respect to the rotation axis AX.sub.100).

[0110] As illustrated in FIG. 4A, the workpiece W is clamped between the spindle unit 110 (the spindle pipe sleeve 111) and the tail unit 120 (the tail pipe sleeve 121).

[0111] At that time, a mating surface of the spindle pipe sleeve 111 and a rotating shaft rotated by a spindle motor 113 is formed in a spherical surface shape (see FIG. 4A). For that reason, as illustrated in FIG. 4B, even when the center axis AX.sub.W of the workpiece W is inclined by the angle with respect to the rotation axis AX.sub.100, the spindle pipe sleeve 111 rotates following the top side end face Wt of the workpiece W and comes into contact with (adheres to) the top side end face Wt.

[0112] Similarly, a mating surface of the tail pipe sleeve 121 and a rotating shaft rotated by a tail motor 123 is formed in a spherical surface shape (see FIG. 4A). For that reason, as illustrated in FIG. 4B, even when the center axis AX.sub.W of the workpiece W is inclined by the angle with respect to the rotation axis AX.sub.100, the tail pipe sleeve 121 rotates following the bottom side end face Wb of the workpiece W and comes into contact with (adheres to) the bottom side end face Wb.

[0113] As illustrated in FIG. 3, the spindle unit 110 includes the spindle pipe sleeve 111, a spindle body 112, and the spindle motor 113. The spindle pipe sleeve 111 is attached to the rotating shaft rotated by the spindle motor 113 around the rotation axis AX.sub.100. The spindle motor 113 is, for example, a servomotor.

[0114] The tail unit 120 includes the tail pipe sleeve 121, a tail body 122, and the tail motor 123. The tail pipe sleeve 121 is attached to the rotating shaft rotated by the tail motor 123 around the rotation axis AX.sub.100. The tail motor 123 is, for example, a servomotor. The spindle motor 113 and the tail motor 123 are controlled to rotate in synchronization with each other.

[0115] The workpiece W is desirably clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide (see FIG. 5A). However, the workpiece W is sometimes clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 do not coincide (see FIGS. 5B and 5C).

[0116] FIG. 5A illustrates a situation in which the workpiece W is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide. FIG. 5B illustrates a situation in which the workpiece W is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 in a state in which the center axis AX.sub.W of the workpiece W deviates by the angle with respected to the rotation axis AX.sub.100. FIG. 5B indicates that a center point CP (a center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100 and deviates by the angle around the center point CP. The deviation angle is corrected as explained below. Note that a rectangle A1 drawn by a dotted line in FIG. 5B represents the workpiece W in FIG. 5A.

[0117] Similarly, FIG. 5C illustrates a situation in which the workpiece W is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 in a state in which the center axis AX.sub.W of the workpiece W deviates by the angle with respect to the rotation axis AX.sub.100. FIG. 5C indicates the center point CP (the center point on the center axis AX.sub.W) of the workpiece W is not present on the rotation axis AX.sub.100 but is present in a position deviating by Y in the Y-axis direction from the rotation axis AX.sub.100 and deviates by the angle around the center point CP. The deviation angle and the deviation distance Y are corrected as explained below. Note that a rectangle A2 drawn by a dotted line in FIG. 5C represents the workpiece W in FIG. 5B.

[0118] Note that, in FIGS. 5B and 5C, Act represents the distance between the center of the top side end face Wt and the rotation axis AX.sub.100. On the other hand, cb represents the distance between the center of the bottom side end face Wb and the rotation axis AX.sub.100. AY can be calculated by ctcb. In the case of FIG. 5B, that is, when the center point CP (the center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100 (that is, the center point CP of the workpiece W is the true center), there is a relation of ct=cb. On the other hand, in the case of FIG. 5C, that is, when the center point CP (the center point on the center axis AX.sub.W) of the workpiece W is absent on the rotation axis AX.sub.100, there is a relation of ct>cb (or ct<cb).

[0119] The circular grinding unit 130 is an apparatus for applying circular grinding or orientation flat machining to the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 and is held by a circular grinding base 132. The circular grinding unit 130 includes a circular grinding stone 131 and a circular grinding motor 133 that rotates the circular grinding stone 131.

[0120] FIG. 6A is a diagram illustrating a situation in which the circular grinding unit 130 is applying the circular grinding or the orientation flat machining to the workpiece W.

[0121] The circular grinding stone 131 rotated by the circular grinding motor 133 cuts in the rotating workpiece W by an input and instructed grinding amount x1 and applies the circular grinding to the rotating workpiece W (a cylindrical grinding mode). On the other hand, the circular grinding unit 130 cuts in the not-rotating workpiece W by the input and instructed grinding amount x1 and applies the orientation flat machining to the not-rotating workpiece W (an orientation flat grinding mode).

[0122] The notch unit 140 is an apparatus for applying notching to the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 and is held by a notch frame 142. The notch unit 140 includes a notch grinding stone 141, a notch motor 143 that rotates the notch grinding stone 141 and the like.

[0123] FIG. 6B is a diagram illustrating a situation in which the notch unit 140 is applying the notching to the workpiece W. The notch grinding stone 141 rotated by the notch motor 143 cuts in the not-rotating workpiece W by an input and instructed grinding amount x2 and applies the orientation flat machining to the not-rotating workpiece W.

[0124] The X-ray apparatus 150 is an apparatus that measures a crystal plane orientation of the workpiece W and is provided to be capable of moving in the X-axis direction. As the X-ray apparatus 150, for example, a crystal orientation measurement apparatus (for example, type SU-021 manufactured by Toshiba IT & Control Systems Corporation) can be used. The crystal orientation measurement apparatus simultaneously measures an axial orientation of the workpiece W before cut plane orientation (axial orientation) wafer machining and a crystal orientation of a V notch.

[0125] Subsequently, a configuration example of the workpiece conveyance apparatus 200 is explained.

[0126] FIG. 7 is a perspective view of the workpiece conveyance apparatus 200.

[0127] As illustrated in FIG. 7, the workpiece conveyance apparatus 200 includes a fixed frame 210 supported by four vertical columns 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 to be capable of moving in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 to be capable of moving in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 to be capable of moving in the Z-axis direction, and a clamp mechanism 250 fixed to the third movable frame 240.

[0128] The fixed frame 210 is a rectangular frame configured by combining a pair of first frames 211a and 211b extending in the X-axis direction and a pair of second frames 212a and 212b extending in the Y-axis direction.

[0129] The four vertical columns 201 supporting the fixed frame 210 are respectively fixed to the floor surface by anchors (not illustrated) in a state in which the length in the Z-axis direction is adjusted by an adjusters (not illustrated) provided in vertical column bottoms such that the fixed frame 210 becomes horizontal. Note that the respective vertical columns 201 are fixed to the cylindrical grinding apparatus main body 100 by fastening members such as bolts.

[0130] As illustrated in FIG. 7, the first movable frame 220 is a rectangular frame configured by combining a pair of third frames 221a and 221b extending in the X-axis direction and a pair of fourth frames 222a and 222b extending in the Y-axis direction.

[0131] The first movable frame 220 is attached to the fixed frame 210 to be capable of sliding in the X-axis direction. Specifically, the first movable frame 220 is slidably attached to guide rails 223a and 223b extending in the X-axis direction provided on the upper surface of the fixed frame 210 (the first frames 211a and 211b).

[0132] A ball screw 224 extending in the X-axis direction coupled to the first movable frame 220 is regularly and reversely rotated by a driving motor 225 (for example, a servomotor) attached to the fixed frame 210 (the first frame 211a), whereby the first movable frame 220 moves in the X-axis direction along the guide rails 223a and 223b.

[0133] The guide rails 223a and 223b, the ball screw 224, and the driving motor 225 mainly configure a movable frame moving mechanism M.sub.220 that moves the first movable frame 220 in the X-axis direction. The movable frame moving mechanism M.sub.220 is an example of the first moving mechanism of the present disclosure.

[0134] FIG. 8 is a perspective view of the first movable frame 220 (including an outer diameter measurement mechanism 270) and components (the second movable frame 230 and the like) incidental to the first movable frame 220 extracted from FIG. 7.

[0135] As illustrated in FIG. 8, the outer diameter measurement mechanism 270 is provided in the first movable frame 220 (the fourth frame 222a).

[0136] The outer diameter measurement mechanism 270 is an apparatus that measures the outer diameter (the outer diameter of each of the top side end face Wt and the bottom side end face Wb) of the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121.

[0137] The outer diameter measurement mechanism 270 includes a rising and falling frame 271, measurement arms 272a and 272b, probes 273a and 273b, and a carriage 274 to which the rising and falling frame 271, the measurement arms 272a and 272b, and the probes 273a and 273b are attached.

[0138] The carriage 274 is slidably attached to a guide rail 275 extending in the Z-axis direction provided on the first movable frame 220 (the fourth frame 222a) side.

[0139] A ball screw (not illustrated) extending in the Z-axis direction coupled to the outer diameter measurement mechanism 270 is regularly and reversely rotated by a driving motor 276 (for example, a servomotor) attached to the first movable frame 220 (the third frame 221a) side, whereby the outer diameter measurement mechanism 270 (the probes 273a and 273b and the like) moves (rises and falls) in the Z-axis direction along the guide rail 275.

[0140] Although not illustrated, the outer diameter measurement mechanism 270 includes a first probe moving mechanism that moves one measurement arm 272a (and the probe 273a) in the Y-axis direction and a second probe moving mechanism that moves the other measurement arm 272b (and the probe 273b) in the Y-axis direction. The first probe moving mechanism and the second probe moving mechanism respectively include probe driving motors (for example, servomotors). The respective probe driving motors are controlled, whereby the respective probes 273a and 273b individually move in the Y-axis direction.

[0141] With the outer diameter measurement mechanism 270, the respective probes 273a and 273b individually move in the Y-axis direction and come into contact with the outer peripheral surface of the workpiece W to thereby be able to acquire the position (position data) of each of contact points. The control apparatus 300 executes a predetermined arithmetic operation based on the position (the position data) to thereby be able to measure (calculate), for example, the outer diameter of the workpiece W (the outer diameter of each of the top side end face Wt and the bottom side end face Wb of the workpiece W) clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121.

[0142] FIG. 9 is a perspective view (a perspective view at an angle different from the angle in FIG. 8) of the first movable frame 220 and the components (the second movable frame 230 and the like) incidental to the first movable frame 220 extracted from FIG. 7.

[0143] As illustrated in FIG. 9, the second movable frame 230 is a rectangular tubular frame extending in the Z-axis direction.

[0144] The second movable frame 230 is attached to the first movable frame 220 to be capable of sliding in the Y-axis direction. Specifically, the second movable frame 230 is slidably attached to guide rails 231a and 231b extending in the Y-axis direction provided on the upper surface of the first movable frame 220 (the fourth frames 222a and 222b).

[0145] A ball screw 232 extending in the Y-axis direction coupled to the second movable frame 230 is regularly and reversely rotated by a driving motor 233 (for example, a servomotor) attached to the first movable frame 220 (the fourth frame 222b), whereby the second movable frame 230 moves in the Y-axis direction along the guide rails 231a and 231b.

[0146] The guide rails 231a and 231b, the ball screw 232, and the driving motor 233 mainly configure a movable frame moving mechanism M.sub.230 that moves the second movable frame 230 in the Y-axis direction. The movable frame moving mechanism M.sub.230 is an example of the second moving mechanism of the present disclosure.

[0147] FIG. 10 is a perspective view of the third movable frame 240 and components (the clamp mechanism 250 and the like) incidental to the third movable frame 240 extracted from FIG. 7.

[0148] The third movable frame 240 is a rectangular tubular frame extending in the Z-axis direction and is disposed in the second movable frame 230 that is also the rectangular tubular frame extending in the Z-axis direction.

[0149] The third movable frame 240 is attached to the second movable frame 230 to be capable of sliding in the Z-axis direction. Specifically, the third movable frame 240 is slidably attached to guide rails 241a and 241b (see FIG. 10) extending in the Z-axis direction attached to one inner surface of the second movable frame 230 and guide rails (not illustrated) attached to the other inner surface.

[0150] A ball screw (not illustrated) extending in the Z-axis direction coupled to the third movable frame 240 is regularly and reversely rotated by a driving motor 242 (for example, a servomotor) attached to the second movable frame 230, whereby the third movable frame 240 (and the clamp mechanism 250 attached to the third movable frame 240) moves in the Z-axis direction along the guide rails 241a and 241b and the like.

[0151] The guide rails 241a and 241b, the ball screw (not illustrated), and the driving motor 242 mainly configure a movable frame moving mechanism M.sub.240 that moves the third movable frame 240 (and the clamp mechanism 250 attached to the third movable frame 240) in the Z-axis direction. The movable frame moving mechanism M.sub.240 is an example of the third moving mechanism of the present disclosure.

[0152] As illustrated in FIG. 10, the clamp mechanism 250 is attached to the lower end portion of the third movable frame 240 via a turning mechanism (a motor for turning 260).

[0153] The clamp mechanism 250 is attached to a buffer shaft stand base 245 to be capable of turning around a axis AX.sub. (see FIG. 11). The axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W clamped by the clamp mechanism 250 as explained below and extends in the Z-axis direction. FIG. 11 is an example of the turning mechanism (the motor for turning 260) that turns the clamp mechanism 250.

[0154] Specifically, the clamp mechanism 250 is attached in a state in which a rotating shaft of the motor for turning 260 (for example, a hollow shaft motor) fixed to a top plate 262 of the clamp mechanism 250 is fixed to the buffer shaft stand base 245. Accordingly, the motor for turning 260 fixed to the top plate 262 regularly and reversely rotates, whereby the clamp mechanism 250 turns a predetermined angle (for example, the angle ; see FIGS. 5B and 5C) with respect to the buffer shaft stand base 245 around the axis AX.sub.. The motor for turning 260 is an example of the turning mechanism of the present disclosure. Note that, as the turning mechanism, other driving mechanisms such as a worm gear, a wheel gear, and a general-purpose motor may be used instead of the motor for turning 260 (for example, the hollow shaft motor).

[0155] The buffer shaft stand base 245 to which the clamp mechanism 250 is attached as explained above is attached to a Z-axis stand base 243 to be capable of sliding in the X-axis direction. Specifically, a slide rail 244 extending in the X-axis direction provided on the upper surface of the buffer shaft stand base 245 is slidably engaged with the lower surface of the Z-axis stand base 243 fixed to the third movable frame 240. Accordingly, as explained below, when the workpiece W (the top side end face Wt) clamped by the clamp mechanism 250 (a pair of claw sections 251a and 251b) is pressed against the spindle pipe sleeve 111, the buffer shaft stand base 245 (and the clamp mechanism 250 attached to the buffer shaft stand base 245) slides in the X-axis direction with respect to the Z-axis stand base 243. Accordingly, when the workpiece W (the top side end face Wt) clamped by the clamp mechanism 250 (the pair of claw sections 251a and 251b) is pressed against the spindle pipe sleeve 111, an excessively large force is prevented from being applied to the clamp mechanism 250.

[0156] FIG. 12 is a perspective view of the clamp mechanism 250.

[0157] As illustrated in FIG. 12, the clamp mechanism 250 includes the pair of claw sections 251a and 251b that clamps the workpiece W and a claw section moving mechanism M.sub.250 that moves the pair of claw sections 251a and 251b in a direction in which the pair of claw sections 251a and 251b approaches each other or a direction in which the pair of claw sections 251a and 251b separates from each other.

[0158] One claw section 251a is attached to the lower end portion of the third movable frame 240 to be capable of sliding in the Y-axis direction. Specifically, one claw section 251a is fixed to the lower surface of one movable frame 254a slidably attached to guide rails 253a and 253b extending in the Y-axis direction provided on the lower surface of a frame 252 fixed to the lower end portion of the third movable frame 240.

[0159] Similarly, the other claw section 251b is also attached to the lower end portion of the third movable frame 240 to be capable of sliding in the Y-axis direction. Specifically, the other claw section 251b is fixed to the lower surface of the other movable frame 254b slidably attached to the guide rails 253a and 253b extending in the Y-axis direction provided on the lower surface of the frame 252 fixed to the lower end portion of the third movable frame 240.

[0160] Left and right coaxial ball screws (not illustrated) extending in the Y-axis direction coupled to the movable frames 254a and 254b, to which the pair of claw sections 251a and 251b is fixed, are regularly rotated by a driving motor 255 attached to the frame 252, whereby the pair of claw sections 251a and 251b moves, together with the movable frames 254a and 254b, along the guide rails 253a and 253b, in a direction (the Y-axis direction) in which the pair of claw sections 251a and 251b approaches each other. The left and right coaxial ball screws (not illustrated) coupled to the movable frames 254a and 254b, to which the pair of claw sections 251a and 251b is fixed, are reversely rotated by the driving motor 255, whereby the pair of claw sections 251a and 251b moves, together with the movable frames 254a and 254b, along the guide rails 253a and 253b, in a direction (the Y-axis direction) in which the pair of claw sections 251a and 251b separates from each other.

[0161] The guide rails 253a and 253b, the left and right coaxial ball screws (not illustrated), and the driving motor 255 mainly configure the claw section moving mechanism M.sub.250 that moves the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other or the direction in which the pair of claw sections 251a and 251b separates from each other.

[0162] FIG. 13 is a schematic diagram illustrating a situation in which the workpiece W is clamped by the pair of claw sections 251a and 251b.

[0163] As illustrated in FIG. 13, the pair of claw sections 251a and 251b respectively includes first contact sections 256a that come into contact with lower parts of the workpiece W and second contact sections 256b that come into contact with upper parts of the workpiece W. Specifically, the pair of claw sections 251a and 251b respectively includes taper surfaces opened in a V shape (a sectional shape taken along a YZ plane is a V shape) toward each other. The taper surfaces function as the first contact sections 256a and the second contact sections 256b. In the following explanation, the first contact sections 256a and the second contact sections 256b are referred to as taper surfaces 256a and 256b as well.

[0164] The pair of claw sections 251a and 251b is respectively made of synthetic resin or made of metal with the taper surfaces 256a and 256b covered with synthetic resin. Note that, when the workpiece W is a columnar workpiece other than the silicon ingot, the pair of claw sections 251a and 251b may be made of metal with the taper surfaces 256a and 256b not covered with synthetic resin.

[0165] The pair of claw sections 251a and 251b moves in the direction in which the pair of claw sections 251a and 251b approaches each other and clamps the workpiece W in a state in which the taper surfaces 256a and 256b are respectively in contact with the outer peripheral surface of the workpiece W (see FIG. 13).

[0166] With the pair of claw sections 251a and 251b, irrespective of the size of the diameter of the workpiece W, the workpiece W can be always clamped in a state in which the center axis AX.sub.W of the workpiece W is positioned in the same position.

[0167] FIG. 14 is a perspective view of a sensor attached to the pair of claw sections 251a and 251b.

[0168] A sensor for measuring the length L (see FIG. 2) of the workpiece W is attached to the pair of claw sections 251a and 251b. The sensor includes, as illustrated in FIG. 14, a light projector 257a attached to a lower part of one claw section 251a and a light receiver 257b attached to a lower part of the other claw section 251b. Note that, conversely, the light projector 257a may be attached to the lower part of the other claw section 251b and the light receiver 257b may be attached to the lower part of one claw section 251a.

[0169] FIG. 15 is a schematic diagram illustrating a situation in which the length L of the workpiece W is measured by the sensor attached to the pair of claw sections 251a and 251b.

[0170] With the sensor, it is possible to measure the length L of the workpiece W by, for example, as illustrated in FIG. 15, moving the clamp mechanism 250 (the light projector 257a and the light receiver 257b) in a thick arrow direction (the X-axis direction) above the workpiece W and respectively calculating a position p1 (a coordinate position in a three-dimensional coordinate system of the workpiece conveyance apparatus 200) where the workpiece W blocks light Ray (see FIG. 14) from the light projector 257a received by the light receiver 257b and a position p2 (a coordinate position in the three-dimensional coordinate system of the workpiece conveyance apparatus 200) where the light receiver 257b receives the light Ray (see FIG. 14) from the light projector 257a.

[0171] Subsequently, the control apparatus 300 is explained.

[0172] FIG. 16 is a system configuration diagram including the control apparatus 300.

[0173] Although not illustrated, the control apparatus 300 includes a processor, a RAM, and a ROM. As illustrated in FIG. 16, the driving motor 225 configuring the movable frame moving mechanism M.sub.220 that moves the first movable frame 220 in the X-axis direction, the driving motor 233 configuring the movable frame moving mechanism M.sub.230 that moves the second movable frame 230 in the Y-axis direction, the driving motor 242 configuring the movable frame moving mechanism M.sub.240 that moves the third movable frame 240 (and the clamp mechanism 250 attached to the third movable frame 240) in the Z-axis direction, the driving motor 255 configuring the claw section moving mechanism M.sub.250 that moves the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other or the direction in which the pair of claw sections 251a and 251b separates from each other, the motor for turning 260 that turns the clamp mechanism 250, the spindle unit 110 (the spindle motor 113), the tail unit 120 (the tail motor 123), the circular grinding unit 130 (the circular grinding motor 133), the notch unit 140 (the notch motor 143), the X-ray apparatus 150, the motor for turning 260, the outer diameter measurement mechanism 270 (the driving motor 276 and the probe driving motor), the operation apparatus 400, a pallet loader 500, and the sensor (the light projector 257a and the light receiver 257b) are electrically connected to the control apparatus 300.

[0174] The processor is, for example, a CPU. There is one processor in some cases and there are a plurality of processors in other cases. For example, the processor executes a program read in the RAM from the ROM to function as control means for controlling the driving motors 225, 233, 242, and 255, the spindle unit 110 (the spindle motor 113), the tail unit 120 (the tail motor 123), the circular grinding unit 130 (the circular grinding motor 133), the notch unit 140 (the notch motor 143), the X-ray apparatus 150, the motor for turning 260, the outer diameter measurement mechanism 270 (the driving motor 276 and the probe driving motor), and the like.

[0175] Subsequently, an operation example of the cylindrical grinding apparatus 1 having the configuration explained above is explained.

[0176] FIG. 17 is a flowchart of the operation example of the cylindrical grinding apparatus 1. FIG. 18 is a perspective view of the cylindrical grinding apparatus 1 installed in a factory. FIGS. 19A to 20B are diagrams for explaining an operation of the clamp mechanism 250. FIGS. 21, 22A, and 22B are diagrams for explaining operations of the spindle unit 110 and the tail unit 120.

[0177] In FIG. 18, reference signs AGV1 and AGV2 denote automated guided vehicles. Reference sign 500 denotes a pallet loader. In the following explanation, the automated guided vehicles and the pallet loader are referred to as automated guided vehicles AGV1 and AGV2 and the pallet loader 500.

[0178] The automated guided vehicle AGV1 conveys a pallet P1, on which a workpiece W to be machined (in FIG. 18, a workpiece W1) is placed, from a predetermined part in the factory where columnar workpieces having various diameters and various lengths (lengths in the center axis direction) are stored to the pallet loader 500 installed adjacent to the cylindrical grinding apparatus 1 and passes the workpiece W to the pallet loader 500 together with the pallet P1 (in FIG. 18, a workpiece W2 and a pallet P2) with publicly-known means.

[0179] The pallet loader 500 conveys the pallet P2 passed from the automated guided vehicle AGV1 to a predetermined standby position (in FIG. 18, a workpiece W3 and a pallet P3). The center axis AX.sub.W of the workpiece W (in FIG. 18, the workpiece W3) placed on the pallet P3 conveyed to the standby position extends in the X-axis direction.

[0180] An operation example of the cylindrical grinding apparatus 1 installed in the factory is explained with reference to FIG. 17 and the like.

[0181] First, the control apparatus 300 acquires information concerning the workpiece W to be machined (step S10). The information concerning the workpiece W to be machined is, for example, a diameter D (see FIG. 2) of the workpiece W to be machined and is stuck to a predetermined part of a pallet as a barcode. The information (the barcode) concerning the workpiece W to be machined is read, at timing when the pallet P1 is passed to the pallet loader 500, by a barcode reading apparatus (not illustrated) attached to a predetermined part of the pallet loader 500. The control apparatus 300 acquires the read information concerning the workpiece W to be machined. Note that the control apparatus 300 sometimes acquires information concerning the workpiece W to be machined transmitted from another apparatus.

[0182] Subsequently, the control apparatus 300 acquires machining conditions for the workpiece W to be machined (for example, a grinding amount of the outer peripheral surface of the workpiece W and whether additional machining of a flat surface (OF), a slit (a notch) of a V shape or the like is performed) (step S11). The operator inputs the machining conditions, for example, via the operation apparatus 400. The control apparatus 300 acquires the input machining conditions. Note that the control apparatus 300 sometimes acquires the machining conditions transmitted from another apparatus.

[0183] Subsequently, the control apparatus 300 measures the length L (see FIG. 2) of the workpiece W (step S11A). For example, as illustrated in FIG. 15, the control apparatus 300 moves the clamp mechanism 250 (the light projector 257a and the light receiver 257b) in a thick arrow direction (the X-axis direction) above the workpiece W. Accordingly, the control apparatus 300 measures the length L of the workpiece W by respectively calculating the position p1 (the coordinate position in the three-dimensional coordinate system of the workpiece conveyance apparatus 200) where the workpiece W (in FIG. 18, the workpiece W3) conveyed to the standby position blocks the light Ray (see FIG. 14) from the light projector 257a received by the light receiver 257b and the position p2 (the coordinate position in the three-dimensional coordinate system of the workpiece conveyance apparatus 200) where the light receiver 257b receives the light Ray (see FIG. 14) from the light projector 257a. This is implemented by the control apparatus 300 (the processor) executing a program read in the RAM from the ROM.

[0184] Subsequently, as illustrated in FIGS. 19A and 19B, the clamp mechanism 250 is moved to above the workpiece W (in FIG. 18, the workpiece W3) conveyed to the standby position (step S12).

[0185] Specifically, the control apparatus 300 moves the clamp mechanism 250 until, as illustrated in FIG. 19A, in the Y-axis direction, a center Pa between one claw section 251a and the other claw section 251b coincides with a vertical line V1 passing the center axis AX.sub.W of the workpiece W and, as illustrated in FIG. 19B, in the X-axis direction, a center Pb of the pair of claw sections 251a and 251b coincide with a vertical line V2 passing a center Pc of the workpiece W (the center of the length L of the workpiece W to be machined automatically measured in step S11A). This is implemented by the control apparatus 300 controlling the control motors (the servomotors) 225, 233, and 242.

[0186] Subsequently, as illustrated in FIG. 20A, in the Z-axis direction, the control apparatus 300 moves (lowers) the clamp mechanism 250 until the center Pa between one claw section 251a and the other claw section 251b coincides with the center axis AX.sub.W of the workpiece W (step S13). This is implemented by the control apparatus 300 controlling the driving motor 242. A moving distance d (a lowering distance; see FIG. 20A) of the clamp mechanism 250 at that time can be calculated based on the diameter D or the like of the workpiece W to be machined acquired in step S10.

[0187] Subsequently, as illustrated in FIG. 20B, the control apparatus 300 clamps the workpiece W by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W (step S14). This is implemented by the control apparatus 300 controlling the control motor (the servomotor) 255.

[0188] Subsequently, the control apparatus 300 conveys the workpiece W clamped as explained above to the cylindrical grinding apparatus main body 100 (between the spindle pipe sleeve 111 and the tail pipe sleeve 121) (step S15).

[0189] At that time, in the cylindrical grinding apparatus 1, for example, before the processing in step S10, a master workpiece (not illustrated) is set to be subjected to the same processing as steps S12 to S15 to move the clamp mechanism 250 with the master workpiece clamped such that a center axis AX.sub.MW of the master workpiece and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100.

[0190] For that reason, in step S15, as illustrated in FIG. 21, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.MW of the set master workpiece and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. This is implemented by the control apparatus 300 controlling the control motors (the servomotors) 225, 233, and 242. Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps, between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121), the workpiece W in the state in which the center axis AX.sub.MW of the set master workpiece and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (step S16).

[0191] Specifically, first, as illustrated in FIG. 22A, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped in the X-axis direction until the top side end face Wt of the workpiece W abuts the spindle pipe sleeve 111. This is implemented by the control apparatus 300 controlling the control motor (the servomotor) 225.

[0192] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 moves the tail unit 120 in the X-axis direction such that the tail pipe sleeve 121 abuts the bottom side end face Wb of the workpiece W and pressurizes the bottom side end face Wb with a sufficient force with respect to a workpiece weight and a machining external force. This is implemented by the control apparatus 300 controlling the tail motor 123. At that time, the control apparatus 300 measures (calculates) the length L of the workpiece W based on a position at a point in time when the tail pipe sleeve 121 comes into contact with the bottom side end face Wb of the workpiece W. The length L of the workpiece W measured here is measured more accurately than the length L of the workpiece W measured in step S11A. In the following explanation, the accurately measured length L is used as the length L of the workpiece W.

[0193] Subsequently, the control apparatus 300 unclamps the workpiece W from the pair of claw sections 251a and 251b (step S17). This is implemented by the control apparatus 300 controlling the control motor (the servomotor) 255.

[0194] Subsequently, the control apparatus 300 executes deviation amount measurement processing (step S17A).

[0195] FIG. 23 is a flowchart of the deviation amount measurement processing.

[0196] The deviation amount measurement processing is processing for measuring (calculating) a deviation amount (the deviation angle and the deviation distance Y; see FIGS. 5B and 5C) of the clamped workpiece W with respect to the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100.

[0197] The deviation amount measurement processing (steps S17A1 to S17A3) is executed n times for the workpiece W. In the following explanation, a case in which n is 2 is explained as an example. The operator inputs n (the number of times of measurement), for example, via the operation apparatus 400. The number of times n is input at any timing before the deviation amount measurement processing is executed. Note that n input in advance and stored in a predetermined storage unit may be used. Note that n only has to be an integer equal to or larger than 2. That is, a minimum value of n is 2. A maximum value of n is approximately 16 when practicality is considered.

[0198] When n is 2, the deviation amount measurement processing (step S17A1 to S17A3) is executed (executed twice in total) on each of the workpiece W (hereinafter described as workpiece W.sub.W3-W1) in a state illustrated in FIG. 24A (hereinafter referred to as origin state or origin position as well) and the workpiece W (see FIG. 24B; hereinafter described as workpiece W.sub.W2-W4) in a state rotated 180 degrees/n (here, 90 degrees) counterclockwise from the origin state.

[0199] First, the control apparatus 300 executes processing in step S17A1 and subsequent steps on the workpiece W.sub.W3-W1 in the origin state (see FIG. 24A).

[0200] That is, the control apparatus 300 measures the outer diameter of the top side end face Wt (step S17A1). Specifically, in the Z-axis direction, the control apparatus 300 lowers the outer diameter measurement mechanism 270 until the center between one probe 273a and the other probe 273b coincides with the rotation axis AX.sub.100 near the top side end face Wt of the workpiece W.sub.W3-W1. Subsequently, the control apparatus 300 moves the measurement arms 272a and 272b in a direction (the Y-axis direction) in which the measurement arms 272a and 272b approach each other. The control apparatus 300 thereby brings the probes 273a and 273b into contact with the outer peripheral surface near the top side end face Wt of the workpiece W.sub.W3-W1. The control apparatus 300 thereby acquires the position (position data) of each of contact points. The control apparatus 300 calculates, based on the position (the position data), a center position of the top side end face Wt of the workpiece W.sub.W3-W1 and a distance ct between the center position and the rotation axis AX.sub.100.

[0201] Subsequently, the control apparatus 300 measures the outer diameter of the bottom side end face Wb (step S17A2). FIG. 25 illustrates a situation in which the outer diameter measurement mechanism 270 is measuring the outer diameter of the bottom side end face Wb. Note that, in FIG. 25, for convenience of explanation, the workpiece W in an unclamped state is drawn. However, actually, the outer diameter measurement mechanism 270 measures the outer diameter of the top side end face Wt and the outer diameter of the bottom side end face Wb of the workpiece W.sub.W3-W1 in a state in which the spindle pipe sleeve 111 is in contact with the top side end face Wt and the tail pipe sleeve 121 is in contact with the bottom side end face Wb (that is, a clamped state).

[0202] Specifically, in the Z-axis direction, the control apparatus 300 lowers the outer diameter measurement mechanism 270 until the center between one probe 273a and the other probe 273b coincides with the rotation axis AX.sub.100 near the bottom side end face Wb of the workpiece W.sub.W3-W1 (see FIG. 25). Subsequently, the control apparatus 300 moves the measurement arms 272a and 272b in the direction (the Y-axis direction) in which the measurement arms 272a and 272b approach each other (see FIG. 25). The control apparatus 300 thereby brings the probes 273a and 273b into contact with the outer peripheral surface near the bottom side end face Wb of the workpiece W.sub.W3-W1. The control apparatus 300 thereby acquires the position (position data) of each of contact points. The control apparatus 300 calculates, based on the position (the position data), a center position of the bottom side end face Wb of the workpiece W.sub.W3-W1 and a distance cb between the center position and the rotation axis AX.sub.100.

[0203] Subsequently, the control apparatus 300 calculates a deviation amount based on a measurement value (position data) (step S17A3). Specifically, the control apparatus 300 calculates, as the deviation amount, the deviation angle and the deviation distance Y (see FIGS. 5B and 5C).

[0204] The angle is a deviation angle of the center axis AX.sub.W of the workpiece W with respect to the rotation axis AX.sub.100 (see FIGS. 5B and 5C). Y is a distance between the center point CP (a center point on the center axis AX.sub.W) of the workpiece W and the rotation axis AX.sub.100 (see FIG. 5C).

[0205] The deviation angle can be calculated as explained below.

[0206] As illustrated in FIG. 5A, in the case of a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide, a relation is ct=cb=0.

[0207] On the other hand, as illustrated in FIG. 5B, in the case of a state in which the center axis AX.sub.W of the workpiece W is inclined by the angle with respect to the rotation axis AX.sub.100 (the center point CP is present on the rotation axis AX.sub.100), a relation is ct=cb0. In this case, the deviation angle can be calculated by the following Expression 1.

[00001] $\begin{matrix} = (ct \frac{1}{2} L) \tan^{- 1} & (Expression 1) \end{matrix}$

[0208] As illustrated in FIG. 5C, in the case of a state in which the center axis AX.sub.W of the workpiece W is inclined by the angle with respect to the rotation axis AX.sub.100 (the center point CP is not present on the rotation axis AX.sub.100), a relation is ct>cb (or ct<cb). In this case as well, the deviation angle can be calculated as explained above.

[0209] Subsequently, the control apparatus 300 determines whether steps S17A1 to S17A3 have been executed n times (here, n=2) (step S17A4). When steps S17A1 to S17A3 have not been executed n times (step S17A4: No), the control apparatus 300 rotates the workpiece W 180 degrees/n (here, 90 degrees) (S17A5) and executes steps S17A1 to S17A3 on the workpiece W.sub.W2-W4 (see FIG. 24B) in the same manner as explained above (executes steps S17A1 to S17A3 for the second time).

[0210] When steps S17A1 to S17A3 have been executed n times (here, n=2) (step S17A4: Yes), the control apparatus 300 ends the processing illustrated in FIG. 23.

[0211] FIG. 26 is a table summarizing the measurement values ct, cb, , and BY (stored in the predetermined storage unit) of the workpieces W.sub.W3-W1 and W.sub.W2-W4 measured as a result of the processing illustrated in FIG. 23. In FIG. 26, measurement values ct.sub.W3-W1, cb.sub.W3-W1, .sub.W3-W1, and Y.sub.W3-W1 represent measurement values obtained by measuring the workpiece W.sub.W3-W1. Similarly, measurement values ct.sub.W2-W4, cb.sub.W2-W4, .sub.W2-W4, and Y.sub.W2-W4 represent measurement values obtained by measuring the workpiece W.sub.W2-W4.

[0212] Subsequently, referring back to FIG. 17, the control apparatus 300 determines whether the deviation amount measured in step S17A a set value (a predetermined threshold) (step S17B).

[0213] When a determination result in step S17B is No, the control apparatus 300 executes deviation amount correction processing (step S17C).

[0214] FIG. 27 is a flowchart of the deviation amount correction processing.

[0215] The deviation amount correction processing is processing for correcting the deviation amount (the deviation angle and the deviation distance Y; see FIGS. 5B and 5C) of the clamped workpiece W with respect to the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 measured in step S17A.

[0216] Specific examples 1 to 6 of the deviation amount correction processing are explained below.

Specific Example 1

[0217] FIGS. 29A to 29C are diagrams for explaining the specific example 1 of the deviation amount correction processing.

[0218] In the specific example 1, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 29A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 29B), the center axis AX.sub.W of the workpiece W deviates by the angle (.sub.W3-W1) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100.

[0219] On the other hand, when viewed from an direction of an arrow Ar2 (see FIG. 29B), the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide.

[0220] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 29C are obtained. In FIG. 29C, a measurement value .sub.W3-W1 surrounded by a circle represents a numerical value other than zero.

[0221] First, the control apparatus 300 clamps the workpiece W.sub.W3-W1 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W3-W1 (see FIGS. 29A and 29B) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W3-W1 in this way, the axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W3-W1 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0222] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0223] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation angle (.sub.W3-W1) around the axis AX.sub. such that the deviation angle (.sub.W3-W1) surrounded by the circle in FIG. 29C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W3-W1) is corrected.

[0224] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W3-W1 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0225] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the pair of claw sections 251a and 251b (step S17C5).

[0226] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0227] When a determination result in step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W3-W1 the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

Specific Example 2

[0228] FIGS. 30A to 30D are diagrams for explaining the specific example 2 of the deviation amount correction processing.

[0229] In the specific example 2, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 30A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 30B), the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide.

[0230] On the other hand, when viewed from a direction of an arrow Ar2 (see FIG. 30B), the center axis AX.sub.W of the workpiece W deviates by an angle (.sub.W2-W4) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100.

[0231] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 30C are obtained. In FIG. 30C, a measurement value .sub.W2-W4 surrounded by a circle represents a numerical value other than zero.

[0232] First, the control apparatus 300 rotates the workpiece W.sub.W3-W1 180 degrees/n (here, 90 degrees) counterclockwise from an origin state (see FIG. 30B) and changes the workpiece W.sub.W3-W1 to a state of the workpiece W.sub.W2-W4 as illustrated in FIG. 30D. This is implemented by the control apparatus 300 controlling the spindle motor 113 and the tail motor 123.

[0233] Subsequently, the control apparatus 300 clamps the workpiece W.sub.W2-W4 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W2-W4 (see FIG. 30D) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W2-W4 in this way, the axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W2-W4 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0234] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0235] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation angle (.sub.W2-W4) around the axis AX.sub. such that the deviation angle (.sub.W2-W4) surrounded by the circle in FIG. 30C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W2-W4) is corrected.

[0236] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W2-W4 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0237] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the pair of claw sections 251a and 251b (step S17C5).

[0238] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0239] When a determination result in step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W2-W4the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W2-W4 the set value is not satisfied, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

Specific Example 3

[0240] FIGS. 31A to 31C are diagrams for explaining the specific example 3 of the deviation amount correction processing.

[0241] In the specific example 3, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 31A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 31B), the center axis AX.sub.W of the workpiece W deviates by an angle (.sub.W3-W1) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is not present on the rotation axis AX.sub.100 but is present in a position deviating in the Y-axis direction by Y (Y.sub.W3-W1) from the rotation axis AX.sub.100.

[0242] On the other hand, when viewed from a direction of an arrow Ar2 (see FIG. 31B), the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide.

[0243] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 31C are obtained. In FIG. 31C, measurement values .sub.W3-W1 and Y.sub.W3-W1 surrounded by circles represent numerical values other than zero.

[0244] First, the control apparatus 300 clamps the workpiece W.sub.W3-W1 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W3-W1 (see FIGS. 31A and 31B) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W3-W1 in this way, the @ axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W3-W1 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0245] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0246] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation angle (.sub.W3-W1) around the axis AX.sub. such that the deviation angle (.sub.W3-W1) surrounded by the circle in FIG. 31C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W3-W1) is corrected.

[0247] At the same time, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation distance Y (Y.sub.W3-W1) such that the deviation distance Y (Y.sub.W3-W1) surrounded by the circle in FIG. 31C is eliminated. This is implemented by the control apparatus 300 controlling the driving motor 233. Accordingly, the distance Y (Y.sub.W3-W1) is corrected.

[0248] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W3-W1 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0249] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the pair of claw sections 251a and 251b (step S17C5).

[0250] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0251] When a determination result in step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W3-W1 the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

Specific Example 4

[0252] FIGS. 32A to 32D are diagrams for explaining the specific example 4 of the deviation amount correction processing.

[0253] In the specific example 4, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 32A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 32B), the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 coincide.

[0254] On the other hand, when viewed from a direction of an arrow Ar2 (see FIG. 32B), the center axis AX.sub.W of the workpiece W deviates by an angle (.sub.W2-W4) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is not present on the rotation axis AX.sub.100 but is present in a position deviating by Y (Y.sub.W2-W4) in the Z-axis direction from the rotation axis AX.sub.100.

[0255] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 32C are obtained. In FIG. 32C, measurement values .sub.W2-W4 and Y.sub.W2-W4 surrounded by circles represent numerical values other than zero.

[0256] First, the control apparatus 300 rotates the workpiece W.sub.W3-W1 180 degrees/n (here, 90 degrees) counterclockwise from an origin state (see FIG. 32B) and changes the workpiece W.sub.W3-W1 to a state of the workpiece W.sub.W2-W4 as illustrated in FIG. 32D. This is implemented by the control apparatus 300 controlling the spindle motor 113 and the tail motor 123.

[0257] Subsequently, the control apparatus 300 clamps the workpiece W.sub.W2-W4 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W2-W4 (see FIG. 32D) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W2-W4 in this way, the axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W2-W4 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0258] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0259] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation angle (.sub.W2-W4) around the axis AX.sub. such that the deviation angle (.sub.W2-W4) surrounded by the circle in FIG. 32C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W2-W4) is corrected.

[0260] At the same time, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation distance Y (Y.sub.W2-W4) such that the deviation distance Y (Y.sub.W2-W4) surrounded by the circle in FIG. 32C is eliminated. This is implemented by the control apparatus 300 controlling the driving motor 233. Accordingly, the distance Y (Y.sub.W2-W4) is corrected.

[0261] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W2-W4 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0262] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the pair of claw sections 251a and 251b (step S17C5).

[0263] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0264] When a determination result in step S17B is Yes, that is, when the deviation amount measured in step S17A for the workpiece W.sub.W2-W4 the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

Specific Example 5

[0265] FIGS. 33A to 33E are diagrams for explaining the specific example 5 of the deviation amount correction processing.

[0266] In the specific example 5, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 33A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 33B), the center axis AX.sub.W of the workpiece W deviates by the angle (.sub.W3-W1) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100.

[0267] On the other hand, when viewed from a direction of an arrow Ar2 (see FIG. 33B), the center axis AX.sub.W of the workpiece W deviates by the angle (.sub.W2-W4) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is present on the rotation axis AX.sub.100.

[0268] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 33C are obtained. In FIG. 33C, measurement values .sub.W3-W1 and .sub.W2-W4 surrounded by circles represent numerical values other than zero.

[0269] First, the control apparatus 300 clamps the workpiece W.sub.W3-W1 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W3-W1 (see FIGS. 33A and 33B) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W3-W1 in this way, the @ axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W3-W1 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0270] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0271] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation angle (.sub.W3-W1) around the axis AX.sub. such that the deviation angle (.sub.W3-W1) surrounded by the circle in FIG. 33C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W3-W1) is corrected as illustrated in FIG. 33D.

[0272] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W3-W1 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0273] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the pair of claw sections 251a and 251b (step S17C5).

[0274] Subsequently, the control apparatus 300 rotates the workpiece W.sub.W3-W1 180 degrees/n (here, 90 degrees) counterclockwise from a state illustrated in FIG. 33D and changes the workpiece W.sub.W3-W1 to a state of the workpiece W.sub.W2-W4, as illustrated in FIG. 33E.

[0275] Subsequently, as in step S17C1, the control apparatus 300 clamps the workpiece W.sub.W2-W4 with the clamp mechanism 250. The control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation angle (.sub.W2-W4) around the @ axis AX.sub. such that the deviation angle (.sub.W2-W4) surrounded by the circle in FIG. 33C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W2-W4) is corrected.

[0276] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W2-W4 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0277] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the pair of claw sections 251a and 251b (step S17C5).

[0278] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0279] When a determination result in step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W3-W1 the set value and the deviation amount measured again in step S17A for the workpiece W.sub.W2-W4 the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

Specific Example 6

[0280] FIGS. 34A to 34E are diagrams for explaining the specific example 6 of the deviation amount correction processing.

[0281] In the specific example 6, the workpiece W to be subjected to the deviation amount measurement processing (step S17A) and the deviation amount correction processing (step S17C) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 as illustrated in FIG. 34A. At that time, when viewed from a direction of an arrow Ar1 (see FIG. 34B), the center axis AX.sub.W of the workpiece W deviates by an angle (.sub.W3-W1) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is not present on the rotation axis AX.sub.100 but is present in a position deviating in the Y-axis direction by Y (Y.sub.W3-W1) from the rotation axis AX.sub.100.

[0282] On the other hand, when viewed from a direction of an arrow Ar2 (see FIG. 34B), the center axis AX.sub.W of the workpiece W deviates by an angle (.sub.W2-W4) with respect to the rotation axis AX.sub.100. The center point CP (the center point on the center axis AX.sub.W) of the workpiece W is not present on the rotation axis AX.sub.100 but is present in a position deviating in the Z-axis direction by Y (Y.sub.W2-W4) from the rotation axis AX.sub.100.

[0283] As a result of executing the deviation amount measurement processing (step S17A) on the workpiece W clamped as explained above, measurement values illustrated in FIG. 34C are obtained. In FIG. 34C, measurement values .sub.W3-W1, .sub.W2-W4, Y.sub.W3-W1, and Y.sub.W2-W4 surrounded by circles represent numerical values other than zero.

[0284] First, the control apparatus 300 clamps the workpiece W.sub.W3-W1 by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W.sub.W3-W1 (see FIGS. 34A and 34B) (step S17C1). In a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the workpiece W.sub.W3-W1 in this way, the axis AX.sub. passes the center (the center on the center axis AX.sub.W) of the workpiece W.sub.W3-W1 clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0285] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C2).

[0286] Subsequently, the control apparatus 300 executes reloading (step S17C3). That is, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation angle (.sub.W3-W1) around the axis AX.sub. such that the deviation angle (.sub.W3-W1) surrounded by the circle in FIG. 34C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W3-W1) is corrected.

[0287] At the same time, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W.sub.W3-W1 clamped by the deviation distance Y (Y.sub.W3-W1) such that the deviation distance Y (Y.sub.W3-W1) surrounded by the circle in FIG. 34C is eliminated. This is implemented by the control apparatus 300 controlling the driving motor 233. Accordingly, the distance Y (Y.sub.W3-W1) is corrected.

[0288] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W3-W1 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W3-W1) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0289] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W3-W1 from the pair of claw sections 251a and 251b (step S17C5).

[0290] Subsequently, the control apparatus 300 rotates the workpiece W.sub.W3-W1 180 degrees/n (here, 90 degrees) counterclockwise from a state illustrated in FIG. 34D and changes the workpiece W.sub.W3-W1 to a state of the workpiece W.sub.W2-W4, as illustrated in FIG. 34E.

[0291] Subsequently, as in step S17C1, the control apparatus 300 clamps the workpiece W.sub.W2-W4 with the clamp mechanism 250. The control apparatus 300 turns the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation angle (.sub.W2-W4) around the axis AX.sub. such that the deviation angle (.sub.W2-W4) surrounded by the circle in FIG. 34C calculated in step S17A3 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the angle (.sub.W2-W4) is corrected.

[0292] At the same time, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W.sub.W2-W4 clamped by the deviation distance Y (Y.sub.W2-W4) such that the deviation distance Y (Y.sub.W2-W4) surrounded by the circle in FIG. 34C is eliminated. This is implemented by the control apparatus 300 controlling the driving motor 233. Accordingly, the distance Y (Y.sub.W2-W4) is corrected.

[0293] Subsequently, as illustrated in FIG. 22B, the control apparatus 300 clamps the workpiece W.sub.W3-W1 between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S17C4). That is, first, the control apparatus 300 moves the clamp mechanism 250 with the workpiece W clamped such that the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide between the spindle pipe sleeve 111 and the tail pipe sleeve 121 included in the cylindrical grinding apparatus main body 100. Subsequently, the control apparatus 300 clamps the workpiece W after the movement between the spindle 101 (the spindle pipe sleeve 111) and the tail 102 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W after the angle (.sub.W2-W4) correction and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0294] Subsequently, the control apparatus 300 unclamps the workpiece W.sub.W2-W4 from the pair of claw sections 251a and 251b (step S17C5).

[0295] Subsequently, referring back to FIG. 17, the control apparatus 300 executes the processing in steps S17A and S17B again.

[0296] When a determination result in step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W.sub.W3-W1 the set value and the deviation amount measured again in step S17A for the workpiece W.sub.W2-W4 the set value, since this means that the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S18 and subsequent steps. On the other hand, when the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B changes to Yes.

[0297] Subsequently, the processing in step S18 and subsequent steps is explained.

[0298] That is, when the determination result in step S17B is Yes, the control apparatus 300 applies predetermined machining to the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 to satisfy the machining conditions acquired in step S11 (step S18). For example, the control apparatus 300 grinds the outer peripheral surface of the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121.

[0299] When the predetermined machining on the workpiece W to be machined (for example, grinding of the outer peripheral surface of the workpiece and additional machining of a flat surface (OF), a slit (a notch) of a V shape or the like) has been completed (step S19: Yes), the control apparatus 300 clamps the machined workpiece W with the clamp mechanism 250 as explained above and conveys the clamped machined workpiece W to a predetermine part (for example, in FIG. 18, a pallet P4) (step S20).

[0300] The pallet P4 on which the machined workpiece W (in FIG. 18, a workpiece W4) is placed is passed to the automated guided vehicle AGV2 together with the pallet P4 by, for example, publicly-known means (in FIG. 18, a workpiece W5 and a pallet P5).

[0301] The automated guided vehicle AGV2 conveys the pallet P5 on which the machined workpiece W (in FIG. 18, the workpiece W5) is placed to the next process.

[0302] As explained above, according to the present embodiment, it is possible to clamp the workpiece W between the spindle unit 110 (the spindle pipe sleeve 111) and the tail unit 120 (the tail pipe sleeve 121) in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0303] This is because the cylindrical grinding apparatus 1 includes the turning mechanism (the motor for turning 260) that turns, around the axis AX.sub. (passing the center of the workpiece W clamped by the clamp mechanism 250 and extending in the Z-axis direction), the clamp mechanism 250 in the state of clamping the workpiece W.

[0304] According to the present embodiment, workpieces W having various lengths can always be conveyed in a stable state.

[0305] This is because the clamp mechanism 250 moves until the center Pb of the pair of claw sections 251a and 251b coincides with the vertical line V2 passing the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined automatically measured in step S11A) (see step S12 and FIG. 19B) and the clamp mechanism 250 (the pair of claw sections 251a and 251b) clamps the center in the Y-axis direction of the workpiece W.

[0306] Subsequently, a modified example is explained.

[0307] FIG. 28A is a diagram for explaining moving directions of the movable frames 220, 230, and 240 of the cylindrical grinding apparatus 1. FIG. 28B is a diagram for explaining moving directions of the movable frames 220, 230, and 240 of the cylindrical grinding apparatus 1 in a modified example.

[0308] In the embodiment explained above, an example is explained in which, as illustrated in FIG. 28A, as the moving mechanism of the present disclosure, the movable frame moving mechanism M.sub.240 (an example of the first moving mechanism of the present disclosure) that moves the third movable frame 240 (and the clamp mechanism 250 attached to the third movable frame 240) in the Z-axis direction and is attached to the second movable frame 230, the movable frame moving mechanism M.sub.230 (an example of the second moving mechanism of the present disclosure) that moves the second movable frame 230 (the clamp mechanism 250 and the movable frame moving mechanism M.sub.240) in the Y-axis direction and is attached to the first movable frame 220, and the movable frame moving mechanism M.sub.220 (an example of the third moving mechanism of the present disclosure) that moves the first movable frame 220 (the clamp mechanism 250, the movable frame moving mechanism M.sub.230, and the movable frame moving mechanism M.sub.240) in the X-axis direction and is attached to the fixed frame 210 are used. However, the moving mechanism is not limited to this.

[0309] For example, as illustrated in FIG. 28B, as the moving mechanism of the present disclosure, the movable frame moving mechanism M.sub.240 (an example of the first moving mechanism of the present disclosure) that moves the third movable frame 240 (and the clamp mechanism 250 attached to the third movable frame 240) in the Z-axis direction and is attached to the second movable frame 230, the movable frame moving mechanism M.sub.230 (an example of the second moving mechanism of the present disclosure) that moves the second movable frame 230 (the clamp mechanism 250 and the movable frame moving mechanism M.sub.240) in the X-axis direction and is attached to the first movable frame 220, and the movable frame moving mechanism M.sub.220 (an example of the third moving mechanism of the present disclosure) that moves the first movable frame 220 (the clamp mechanism 250, the movable frame moving mechanism M.sub.230, and the movable frame moving mechanism M.sub.240) in the Y-axis direction and is attached to the fixed frame 210 may be used.

[0310] Another operation example of the cylindrical grinding apparatus 1 is explained below with reference to FIG. 35 and the like.

[0311] FIG. 35 is a flowchart of the other operation example of the cylindrical grinding apparatus 1. FIG. 36 is a perspective view illustrating a situation in which the workpiece W is clamped between the spindle pipe sleeve 111 (the spindle 101) and the tail pipe sleeve 121 (the tail 102) in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide.

[0312] In FIG. 36, a reference sign AX.sub.C denotes a crystal axis of the workpiece W that is a silicon crystal body (a monocrystal). The crystal axis is hereinafter referred to as crystal axis AX.sub.C. Note that crystal surfaces and the crystal axis AX.sub.C have meanings as described in a rectangle in FIG. 36.

[0313] As a result of steps S10 to S17C illustrated in FIG. 17, when the workpiece W is clamped between the spindle pipe sleeve 111 (the spindle 101) and the tail pipe sleeve 121 (the tail 102) in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (see FIG. 36), usually, the crystal axis AX.sub.C deviates with respect to the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100. Therefore, in order to correct the deviation, that is, in order to cause the crystal axis AX.sub.C and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 to coincide (substantially coincide), the processing illustrated in FIG. 35 is executed.

[0314] The processing illustrated in FIG. 35 is executed when steps S10 to S17C illustrated in FIG. 17 are executed, a determination result in step S17B is Yes, and the workpiece W is clamped between the spindle pipe sleeve 111 (the spindle 101) and the tail pipe sleeve 121 (the tail 102) in a state in which the center axis AX.sub.W of the workpiece W and the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide) (see FIG. 36).

[0315] First, the control apparatus 300 determines whether a temporary notch is present (step S30). This is implemented by, for example, irradiating the workpiece W with a laser from a laser sensor (not illustrated), rotating the workpiece 360, and finding presence or absence of a temporary notch (a notch groove). When a determination result in step S30 is No, the control apparatus 300 applies temporary notching to the workpiece W (step S31). Note that a part to which the temporary notching is applied is automatically determined based on a measurement result of the X-ray apparatus 150. The temporary notching is implemented by a notch unit 140.

[0316] Subsequently, the control apparatus 300 executes plane orientation measurement processing (step S32).

[0317] FIG. 37 is a flowchart of the plane orientation measurement processing.

[0318] The plane orientation measurement processing is processing for measuring (calculating) a deviation amount (an axial deviation rotation angle 8 and a swing angle ) of the crystal axis AX.sub.C with respect to the rotation axis AX.sub.100 of the cylindrical grinding apparatus main body 100.

[0319] The plane orientation measurement processing (steps S321 to S324) is executed n times on the workpiece W. In the following explanation, a case in which n is 2 is explained as an example. The operator inputs n (the number of times of measurement) via, for example, the operation apparatus 400. The number of times of measurement n is input at any timing before the plane orientation measurement processing is executed. Note that n input in advance and stored in a predetermined storage unit may be used. Note that n only has to be an integer equal to or larger than 2. That is, a minimum value of n is 2.

[0320] First, the control apparatus 300 rotates the workpiece W until a temporary notch N1 is located in a reference position (step S321).

[0321] Subsequently, the control apparatus 300 measures a plane orientation (step S322). This is implemented by the X-ray apparatus 150. The X-ray apparatus 150 irradiates an A surface (see FIG. 36) of the workpiece W located in the reference position as explained above with an X ray (toward the workpiece center WC) and performs plane orientation measurement. A figure at the left end in FIG. 38 and FIG. 40 are diagrams illustrating a situation in which the X-ray apparatus 150 is irradiating the workpiece W with the X ray and performing the plane orientation measurement. The plane orientation measurement is performed on the workpiece center WC because, since the workpiece center WC is present on the axis AX, in correction explained below, even if the clamp mechanism 250 in a state of clamping the workpiece W is turned around the axis AX, the distance between the clamp mechanism 250 and the X-ray apparatus 150 does not change. The X-ray apparatus 150 outputs a plane orientation and a correction value (a plane orientation and a correction value of a notch reference C surface) as measurement values for the A surface.

[0322] Subsequently, the control apparatus 300 determines whether step S322 has been executed n times (here, n=2) (step S323). When step S322 has not been executed n times (step S323: No), the control apparatus 300 rotates the workpiece W a predetermined angle (for example, 90 degrees) (S324), irradiates a B surface (see FIG. 36) of the workpiece W after the predetermined angle (for example, 90 degrees) rotation with an X ray (toward the workpiece center WC) (see a figure in the center in FIG. 38), and performs the plane orientation measurement (step S322) (executes the plane orientation measurement for the second time). The X-ray apparatus 150 outputs a plane orientation and a correction value (a plane orientation and a correction value of the notch reference C surface) as measurement values for the B surface.

[0323] When step S322 has been executed n times (here, n=2) (step S323: Yes), the control apparatus 300 calculates the axial deviation rotation angle and the swing angle based on measurement values in step S322 (step S325). The X-ray apparatus 150 outputs the calculated axial deviation rotation angle and the calculated swing angle . The axial deviation rotation angle is an angle formed by a straight line L1 passing the center axis AXW of the workpiece W and the temporary notch N1 and a straight line L2 passing the center axis AXW of the workpiece W and a regular notch (a regular notch planned part N2) (see FIG. 38). On the other hand, the workpiece W to be subjected to the swing angle correction processing (step S34) is clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121. When viewed from a direction of an arrow Ar3 (see FIG. 38), the crystal axis AXC of the workpiece W deviates by the swing angle with respect to the rotation axis AX100 (see FIG. 35).

[0324] Subsequently, referring back to FIG. 35, the control apparatus 300 determines whether the deviation amount (the swing angle ) measured in step S32 a set value (a predetermined threshold) (step S33).

[0325] When a determination result in step S33 is No, the control apparatus 300 executes rotation angle/swing angle correction processing (step S34).

[0326] The rotation angle/swing angle correction processing is processing for correcting the deviation amounts (the axial deviation rotation angle and the swing angle ) of the crystal axis AXC with respect to the rotation axis AX100 of the cylindrical grinding apparatus main body 100 measured (calculated) in step S32.

[0327] FIG. 39 is a flowchart of the rotation angle/swing angle correction processing.

[0328] First, the control apparatus 300 rotates the workpiece W until a deviation rotation angle of a plane orientation reaches the horizontal (step S341). That is, the control apparatus 300 rotates the workpiece W by a predetermine angle (270the axial deviation rotation angle ) until the regular notch (the regular notch planned part N2) is located in the reference position as illustrated at the right end in FIG. 38. The axial deviation rotation angle is a correction value for correcting a deviation amount of the regular notch (the regular notch planned part N2) with respect to the reference position.

[0329] Subsequently, the pair of claw sections clamps the workpiece (step S342). Specifically, the control apparatus 300 clamps the workpiece W by, in the Y-axis direction, moving the pair of claw sections 251a and 251b in the direction in which the pair of claw sections 251a and 251b approaches each other and bringing the pair of claw sections 251a and 251b (the taper surfaces 256a and 256b thereof) into contact with the outer peripheral surface of the workpiece W. As explained above, in a state in which the clamp mechanism 250 (the pair of claw sections 251a and 251b) is clamping the workpiece W, the axis AX passes the workpiece W (the center on the center axis AXW) clamped by the clamp mechanism 250 and extends in the Z-axis direction.

[0330] Subsequently, the control apparatus 300 unclamps the workpiece W from the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S343).

[0331] Subsequently, the control apparatus 300 moves the workpiece W to be in a position for correcting an angle of a plane orientation (step S344). Specifically, the control apparatus 300 turns the clamp mechanism 250 with the workpiece W clamped by a swing angle around the axis AX such that the swing angle calculated in step S325 is eliminated. This is implemented by the control apparatus 300 controlling the motor for turning 260. Accordingly, the deviation amount (the swing angle ) is corrected. The swing angle is a correction value for correcting a deviation amount of the crystal axis AXC of the workpiece W with respect to the rotation axis AX100 of the cylindrical grinding apparatus main body 100.

[0332] Subsequently, the control apparatus 300 clamps the workpiece W, the deviation amount (the swing angle ) of which has been corrected as explained above, between the spindle pipe sleeve 111 and the tail pipe sleeve 121 (step S345). Accordingly, the workpiece W is clamped between the spindle pipe sleeve 111 (the spindle 101) and the tail pipe sleeve 121 (the tail 102) in a state in which the crystal axis AXC and the rotation axis AX100 of the cylindrical grinding apparatus main body 100 coincide.

[0333] Subsequently, the control apparatus 300 unclamps the workpiece W from the pair of claw sections 251a and 251b (step S346).

[0334] Subsequently, referring back to FIG. 35, the control apparatus 300 executes the processing in steps S32 and S33 again.

[0335] When a determination result in step S33 is Yes, that is, the deviation amount (the swing angle ) measured again in step S32 for the workpiece Wa set value (a predetermined threshold), since this means that the crystal axis AXC and the rotation axis AX100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the control apparatus 300 executes processing in step S35 and subsequent steps. On the other hand, when the determination result in step S33 is No, the processing in steps S34 and S32 is repeatedly executed until the determination result in step S33 changes to Yes.

[0336] Subsequently, the processing in step S35 and subsequent steps is explained.

[0337] That is, when the determination result in step S33 is Yes, the control apparatus 300 applies circular grinding to the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121 to satisfy the machining conditions acquired in step S11 (step S35). That is, the control apparatus 300 grinds the outer peripheral surface of the workpiece W clamped between the spindle pipe sleeve 111 and the tail pipe sleeve 121. In circular grinding in FIG. 35, hatched regions represent regions to be circularly ground (ground). This is implemented by the circular grinding unit 130 (see FIG. 6A).

[0338] Subsequently, the control apparatus 300 applies notching (regular notching) to the workpiece (step S36). Note that a part to be subjected to the notching (the regular notch planned part N2) is determined based on a measurement result of the X-ray apparatus 150. The notching is implemented by the notch unit 140. Specifically, the control apparatus 300 further rotates the workpiece W 90 from a state at the right end of FIG. 38, causes the part to be subjected to the notching (the regular notch planned part N2) to face the notch unit 140, and applies the regular notch to the regular notch planned part N2 with the notch unit 140 (see FIG. 6B). Accordingly, it is possible to accurately form the regular notch in the workpiece W along the crystal axis AXC (in a direction perpendicular to crystal surfaces at both ends of the crystal axis AXC).

[0339] When the circular grinding and the notching (the regular notching) for the workpiece W are completed, the control apparatus 300 clamps the machined workpiece W with the clamp mechanism 250 as explained above and conveys the clamped machined workpiece W to a predetermined part (for example, in FIG. 18, the pallet P4) (step S37).

[0340] All of the numerical values described in the embodiment explained above are exemplifications. It goes without saying that appropriate numerical values different from the numerical values can be used.

[0341] The embodiment explained above is merely an exemplification in all aspects. The present disclosure is not limitedly interpreted by the description of the embodiment. The present disclosure can be implemented in other various forms without departing from the spirit or main characteristics of the present disclosure.

WORKPIECE CONVEYANCE APPARATUS, CYLINDRICAL GRINDING APPARATUS, AND DEVIATION AMOUNT CORRECTION METHOD

Assignee

Inventors

Cpc classification

Classification Explorer

B24B49/12

PERFORMING OPERATIONS; TRANSPORTING

Classification Explorer

B24B41/067

PERFORMING OPERATIONS; TRANSPORTING

Classification Explorer

B24B5/04

PERFORMING OPERATIONS; TRANSPORTING

International classification

Classification Explorer

B24B41/06

PERFORMING OPERATIONS; TRANSPORTING

Classification Explorer

B24B49/12

PERFORMING OPERATIONS; TRANSPORTING

Classification Explorer

B24B5/04

PERFORMING OPERATIONS; TRANSPORTING

Abstract

Claims

Description