MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STEERED HIGH-POWER LASER TRANSMITTER

Abstract

A steerable laser transmitter pairs a MEMS MMA with an optical amplifier to provide a high-power steered laser beam over a wide FOR. A single MEMS MMA may be positioned downstream of the optical amplifier. In a two-stage architecture, a MEMS MMA provides continuous fine steer upstream of the optical amplifier and a beam steerer, another MEMS MMA or a QWP and stack of switchable PGs, provides discrete coarse steering downstream. In the two-stage architecture, the upstream MEMS MMA is configured to limit its steering range to the acceptance angle of the optical amplifier, at most ±2°×±2°. The MEMS MMA may include piston capability to shape the wavefront of the beam.

Claims

1. A steered high-power laser transmitter, comprising: a laser system configured to emit a light beam; an optical amplifier oriented along an optical axis to amplify the light beam; and a first Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to steer the light beam.

2. The steered high-power laser transmitter of claim 1, wherein the first MEMS MMA is positioned downstream of the optical amplifier to steer the amplified light beam.

3. The steered high-power laser transmitter of claim 1, wherein the optical amplifier provides substantially uniform gain over a fine angular range no greater than ±2°×±2° about the optical axis, wherein said MEMS MMA is positioned upstream of the optical amplifier to steer light beam over the fine angular range, further comprising a beam steerer positioned downstream of the optical amplifier to discretely steer the amplified light beam in a coarse angular range of at least ±10°×±10°.

4. The steered high-power laser transmitter of claim 3, wherein the optical amplifier provides at least 10 dB optical gain with a uniformity of better than 3 dB over the fine angular range with an electrical-to-optical efficiency of at least 0.5.

5. The steered high-power laser transmitter of claim 3, wherein the optical amplifier comprises a crystal having a rotationally symmetric conical taper about the optical axis from an entrance face to a larger exit face, wherein an angle of taper from the entrance face to the larger exit face defines an acceptance angle of the amplifier that constrains the fine angular range.

6. The steered high-power laser transmitter of claim 3, further comprising: a linear polarizer configured to convert the light beam to linear polarized light; wherein the beam steerer comprises: a fixed quarter waveplate that converts the linearly polarized and amplified light beam to a circularly polarized and amplified light beam; and a stack of switchable polarization gratings (PGs) responsive to command signals to discretely steer the circularly polarized and amplified light beam in the coarse angular range.

7. The steered high-power laser transmitter of claim 3, wherein the beam steerer comprises a second MEMS MMA including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to discretely steer the amplified light beam in the coarse angular range.

8. The steered high-power laser transmitter of claim 1, wherein the first MEMS MMA is partitioned into a plurality of segments, each segment including a plurality of mirrors, and is responsive to command signals to tip and tilt the mirrors in each segment to steer a plurality of different light beams.

9. The steered high-power laser transmitter of claim 1, wherein the mirrors reflect light at different wavelengths such that the amplified light beam includes a plurality of different wavelengths.

10. The steered high-power laser transmitter of claim 1, wherein the first MEMS MMA includes a plurality of mirrors configured to tip, tilt and piston in 3 DOF to shape the light beam.

11. The steered high-power laser transmitter of claim 10, wherein said mirrors tip, tilt and piston to shape the light beam to perform one or more of the following: focus or collimate the light beam; adjust a size, divergence or intensity profile of the light beam; produce deviations in the wavefront of the light beam to compensate for atmospheric distortion; and adjust the phase and maintain a zero phase difference across the wavefront of the light beam.

12. The steered high-power laser transmitter of claim 10, wherein said mirrors tip, tilt and piston to produce deviations in the wavefront of the light beam.

13. A steered high-power laser transmitter, comprising: a laser system configured to emit a light beam; an optical amplifier oriented along an optical axis to amplify the collimated light; and a first Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) positioned downstream of the optical amplifier, said MEMS MMA including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to steer the amplified light beam.

14. The steered high-power laser transmitter of claim 13, wherein the first MEMS MMA is partitioned into a plurality of segments, each segment including a plurality of mirrors, and is responsive to command signals to tip and tilt the mirrors in each segment to steer a plurality of different amplified light beams.

15. The steered high-power laser transmitter of claim 13, wherein the mirrors reflect light at different wavelengths such that the amplified light beam includes a plurality of different wavelengths.

16. The steered high-power laser transmitter of claim 13, wherein the first MEMS MMA includes a plurality of mirrors configured to tip, tilt and piston in 3 DOF to shape the amplified light beam to perform one or more of the following: focus or collimate the amplified light beam; adjust a size, divergence or intensity profile of the amplified light beam; produce deviations in the wavefront of the amplified light beam to compensate for atmospheric distortion, and adjust the phase and maintain a zero phase difference across the wavefront of the amplified light beam.

17. A steered high-power laser transmitter, comprising: a laser system configured to emit a light beam; a linear polarizer configured to convert the light beam to linear polarized light; a first Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to steer the light beam about an optical axis in a fine angular range no greater than ±2°×±2°; an optical amplifier oriented along the optical axis, said amplifier providing substantially uniform gain over the fine angular range to amplify the light beam; a fixed quarter waveplate that converts the linearly polarized and amplified light beam to a circularly polarized and amplified light beam; and a stack of switchable polarization gratings (PGs) responsive to command signals to discretely steer the circularly polarized and amplified light beam in a coarse angular range of at least ±10°×±10°.

18. The steered high-power laser transmitter of claim 17, wherein the first MEMS MMA includes a plurality of mirrors configured to tip, tilt and piston in 3 DOF to shape the wavefront of the amplified light beam.

19. A steered high-power laser transmitter, comprising: a laser system configured to emit a light beam; a first Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to steer the light beam about an optical axis in a fine angular range no greater than ±2°×±2°; an optical amplifier oriented along the optical axis, said amplifier providing substantially uniform gain over the fine angular range to amplify the light beam; and a second MEMS MMA including a plurality of mirrors responsive to command signals to tip and tilt in two degrees-of-freedom (2 DOF) to discretely steer the amplified light beam in a coarse angular range of at least ±10°×±10°.

20. The steered high-power laser transmitter of claim 19, wherein at least one of the first and second MEMS MMA is partitioned into a plurality of segments, each segment including a plurality of mirrors, and responsive to command signals to tip and tilt the mirrors in each segment to steer a plurality of different amplified light beams.

21. The steered high-power laser transmitter of claim 19, wherein the mirrors reflect light at different wavelengths such that the amplified light beam includes a plurality of different wavelengths.

22. The steered high-power laser transmitter of claim 19, wherein at least one of the first and second MEMS MMA includes a plurality of mirrors configured to tip, tilt and piston in 3 DOF to shape the light beam to perform one or more of the following: focus or collimate the light beam; adjust a size, divergence or intensity profile of the light beam; produce deviations in the wavefront of the light beam to compensate for atmospheric distortion; and adjust the phase and maintain a zero phase difference across the wavefront of the light beam.

23. The steered high-power laser transmitter of claim 19, wherein at least one of the first and second MEMS MMA includes a plurality of mirrors configured to tip, tilt and piston in 3 DOF to shape the wavefront of the light beam.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0017] FIG. 1 is a block diagram of an embodiment of a two-stage MEMS MMA steered high-power laser transmitter;

[0018] FIG. 2 is a diagram illustrating the continuous fine steering of the first-stage and the discrete coarse steering of the second-stage over a wide FOR;

[0019] FIGS. 3A-3B are illustrations of a known embodiment of a Tip/Tilt/Piston (“TTP”) MEMS MMA and a single mirror actuated to tip, tilt and piston;

[0020] FIG. 4 is a diagram of an embodiment of an optical amplifier;

[0021] FIG. 5 is a diagram of the two-stage laser transmitter in which the first stage is a MEMS MMA capable of continuous fine steering and the second stage is a quarter-wave plate (QWP) and stack of switchable polarization gratings (PGs) capable of discrete coarse steering;

[0022] FIG. 6 is a diagram of the two-stage laser transmitter in which the first stage is a first MEMS MMA capable of continuous fine steering and the second stage is a second MEMS MMA capable of discrete coarse steering;

[0023] FIG. 7 is an embodiment of a single stage laser transmitter in which a MEMS MMA is positioned downstream of the optical amplifier to provide continuous fine steering over the wide FOR;

[0024] FIGS. 8A and 8B are embodiments in which the MEMS MMA is partitioned into multiple segments to steer multiple amplified spot beams and in which the mirrors reflect different wavelengths such that the one or more amplified spot beams include multiple different wavelengths; and

[0025] FIG. 9 is an illustration of using the piston capability of the mirrors to shape the light beam.

DETAILED DESCRIPTION OF THE INVENTION

[0026] The two-stage approach, comprising a non-mechanical beamsteerer such as a LCWG for continuous fine tuning over a 30°×8° or 50°×15° angular range, an optical amplifier and a switchable PG stack for discrete coarse tuning over an angular range of 120°×120° or more (U.S. Pat. No. 9,477,135) provides a high power laser transmitter that can be rapidly steered over a large FOR.

[0027] Non-mechanical beamsteering allows a significant reduction in the size, weight and power of the system, as only a small fraction of the FOR is illuminated at any instant in time. This reduces the required input power to the laser source, the size of the system, and removes the need for equipment that dissipates waste heat. However, the non-mechanical beamsteering waveguide and particularly the LCWG has been found to have a number of limitations, which may include, but are not limited to, steering a very narrow band of wavelengths about a center wavelength. Furthermore each material system e.g., substrates, coatings and liquid crystals, and voltage settings to steer the laser beam are unique to each center wavelength. Therefore to accommodate different wavelengths requires different LCWG devices and significant investment in materials, manufacturing, set-up and calibration etc. to design and field each device. The LCWG cannot manipulate the wavefront of the beam to, for example, focus the beam into a spot, to provide wavefront correction e.g. atmospheric distortion, or to compensate for path length differences across the beam. The LCWG can steer one and only one beam at the single wavelength. The LCWG cannot steer multiple beams of the same or different wavelengths. The LCWG is limited to receive the optical energy from a single optical source, it cannot combine the optical energy from multiple sources and focus that energy into a single focused optical beam to provide the active illumination. Furthermore, the LCWG must be positioned upstream (or before) the optical amplifier as the amplified light beam would far exceed the saturated power level of a LCWG.

[0028] Accordingly, various aspects and embodiments discussed herein provide an optical system configured to amplify and steer a high-power laser beam with the capability to manipulate the wavefront of the beam, to segment the beam into a plurality of independently steerable beams of the same or different wavelengths, while maintaining a reduced weight, size, and power consumption when compared to typical imaging systems. Various other advantages and benefits of the active imaging system and methods described herein are discussed below with reference to FIGS. 1-9.

[0029] Our solution is to pair a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) with an optical amplifier to provide a steered high-power, wide FOR laser transmitter capable of continuous fine steering and pointing without the spectral or other limitations of the LCWG. In a two-stage architecture, a first MEMS MMA upstream of the optical amplifier provides continuous fine steering and a beam steerer (e.g., either a second MEMS MMA or a SQP and stack of switchable PGs) down stream of the optical amplifier provides discrete coarse steering over a wide FOR. In a one-stage architecture, a MEMS MMA is placed downstream of the optical amplifier to provide continuous steering over the wide FOR. The MEMS MMA is capable of faster steering than the LCWG.

[0030] In an embodiment, the laser is configured to produce a light beam at a wavelength of 1.55 microns. The amplifier is Erbium (Er) doped to provide optical amplification of the 1.55 micron beam. Er:YAG, Er:Glass or similar amplifier configurations may be used. For different wavelengths, the reflective coatings on the mirrors can be formed to reflect the appropriate band and the amplifier can be doped with different dopants to provide gain.

[0031] Referring now to FIG. 1, in an embodiment of a two-stage architecture, a steerable laser transmitter 10 comprises a laser 12 configured to produce a light beam 14, an optional fold mirror 15, a first stage MEMS MMA 16 responsive to command signals 17 issued by a controller 18 to continuously steer the light-beam over a fine two-dimensional angular range 20 of no greater than ±2°×±2° and an optical amplifier 22 oriented along an optical axis 21 that provides substantially uniform gain over the angular range 20 (determined by the amplifier's acceptance angle). A second stage beam steerer 24, suitably positioned at the output of the amplifier, responsive to command signals 26 issued by controller 18 discretely steers the amplified light beam 14 over a coarse two-dimensional angular range 28 (greater than the amplifier's acceptance angle) of at least ±10°×±10° over a wide FOR.

[0032] Referring now to FIG. 2, box 40 represents the steering of the light beam by the first stage MEMS MMA over the fine two-dimensional angular range 20 (<=±2°×±2°). Each dot 42 represents the centroid of discrete coarse steering over the coarse two-dimensional steering range 29 by the second stage beam steerer. To maintain continuous steering over the wide FOR, the spacing of the dots is equal to the fine angular range. The collection of dots defines the coarse angular range. The total FOR is defined by the combination of the MEMS MMA and beam steerer.

[0033] As best shown in FIGS. 3A-3B, a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) 50 comprises a plurality of independently and continuously controllable mirrors 52 to re-direct optical radiation to focus and steer the optical beam(s). Each mirror is capable of at least “Tip” (rotation about an X-axis), “Tilt” (rotation about a Y-axis and “Piston” (translation along a Z-axis, perpendicular to the XY plane) where the X, Y and Z are orthogonal axes in a three-dimensional space. The Piston capability can be used generically speaking to “shape” the beam(s) that are reflected off of the MEMS MMA.

[0034] The MEMS MMA can support a diversity of wavelengths of light without changes to the material system or command signals (steering parameters) by proper configuration of reflective coatings 54 applied to the mirrors. The wavelengths may span the UV, Visible and IR bands. In one case, the mirrors may all have a broadband reflective coating in which case the spectral content of the amplified light beam is determined by the spectral output of the laser. In another case, case, the mirrors may all have a narrowband reflective coating at a particular wavelength. Changing this wavelength does not affect either the material system or steering parameters for the MEMS MMA. In yet another case, the mirrors may have narrowband reflective coatings at different wavelengths such that the amplified light beam includes a diversity of wavelengths.

[0035] The MEMS MMA can be partitioned into a plurality of segments, each including a plurality of mirrors to form and steer different light beams, adjust the size/power of a given light beam, and to combine multiple laser sources.

[0036] With a plurality of mirrors, the piston capability can be used to perform beam shaping functions such as to adjust the focus, collimation, size, divergence or intensity profile of the light beam, produce deviations in the wavefront of the light beam beam to compensate for atmospheric distortions, adjust phase to maintain a zero phase difference across the wavefront of the light beam, or to improve the formation and steering of the light beam by approximating a continuous surface across the micro-mirrors.

[0037] The MEMS MMA is preferably capable of tipping and tilting over range of at least −15°×+150 to steer over a range of +/−30°×30° and pistoning (translating) over a range of at least +/−15 microns (at least one-half wavelength in either direction) at a rate of at least 1 KHz (<1 millisecond). Piston is not required for basic steering of the light beam but allows for shaping of the beam. The MEMS MMA must have a sufficient number of mirrors, mirror size/resolution, fill factor, range of motion, response time, response accuracy and uniformity across the array.

[0038] One such MEMS MMA is described in U.S. Pat. No. 10,444,492 entitled “Flexure-Based, Tip-Tilt-Piston Actuation Micro-Array”, which is hereby incorporated by reference. As shown in FIGS. 1-3 of the '492 patent this MEMS MMA uses flexures to support each mirror at three fulcrum points (or vertices) of an equilateral triangle. The three different pairs of fulcrum points define three axes at 60 degrees to one another in the XY plane. Each mirror pivots about each axis to produce tip, tilt and piston in the XYZ space. This MEMS MMA is currently being commercialized by Bright Silicon technologies for “digitally controlling light.”

[0039] Referring now to FIG. 4, in an embodiment an optical amplifier 100 comprises a crystal 102 that is doped to amplify a laser beam 104 and tapered such that the amplifier's acceptance angle 106 approximately matches the fine two-dimensional angular range 108 of the first stage MEMS MMA. The crystal has a conical shape with both the entrance and larger exit faces 110 and 112, respectively, perpendicular to the optical axis 114. Alternately, exit face 112 could be tilted to provide anamorphic compression of the in-plane component of the beam to make the exit beam circular. One or more pump lasers 116 inject a pump beam 118 in a zig-zag approach from chamfered sections 119 of exit face 112 inwards. The entrance and exit faces are tapered to allow pump beam propagation through the amplifier without the structure of the pump lasers interfering with the steered laser beam 104. If the acceptance angle is too large, >±2°×±2°, the uniformity of optical gain and the efficiency of the amplifier will degrade. In an embodiment, the amplifier provides an optical gain of at least 10 dB with a uniformity of better than 3 dB and an efficiency of at least 0.5% over its acceptance angle.

[0040] Additionally, the amplifier surface is coated (or clad) 120 to reduce the effects of amplified spontaneous emission (ASE) 122 while confining the pump beam 118 inside the amplifier. The rotational symmetry of the conical amplifier reduces the effects of corner stresses when mounting the amplifier. Minimizing the depolarization helps maintain the overall transmitter efficiency. In this amplifier the gain is proportional to the length of the amplifier, which does not have a zig-zag propagation pattern.

[0041] Referring now to FIG. 5, in an embodiment of a steerable laser transmitter 200 a second stage beam steerer 202 includes a QWP 204 and a stack of switchable PGs 206. A laser 208 is configured to emit a light beam 210. A linear polarizer (LP) 212 such as a piece of glass at a specific angle e.g. a “Brewster Window” linearly polarizes the light beam 210. This is suitably positioned at the output of the laser but could potentially positioned anywhere upstream of the QWP 204.

[0042] Light beam 210 is suitably re-directed off of fold mirror 214 to a first stage MEMS MMA 216 responsive to command signals 218 issued by a controller 220 to continuously steer the light-beam over a fine two-dimensional angular range 222 of no greater than ±2°×±2°. An optical amplifier 224 oriented along an optical axis 226 amplifies light beam 210. The optical amplifier provides substantially uniform gain over the fine angular range 222 (determined by the amplifier's acceptance angle).

[0043] The fixed quarter waveplate (QWP) 204, suitably positioned at the output of the amplifier, converts the linear polarization of light beam 210 to a circular polarization. The QWP is suitably zero-order to reduce angular dependence and provide uniform retardance over the narrow steering range of the MEMS MMA. The switchable polarization grating (PG) stack 206 provides discrete steering over a coarse angular range 230 (greater than the amplifier's acceptance angle). The stack 206 comprises a plurality of polarization gratings (PGs) 232, each comprising an electrically controlled half waveplate (HWP) 234 and a grating 236 (passive or active). Application of voltage 238 to the electrically controlled HWP 235 turns the circular polarization of light beam 210 into either right-hand or left-hand polarization. The PG 232 deflects the different handedness into different exit angles. By controllably selecting the handedness one may controllably select the angular deflection.

[0044] In the depicted embodiment, an exit face 240 of the crystal is tilted with respect to an entrance face 242, which is perpendicular to the optical axis 226, to provide anamorphic compression to the elliptical portion of the in-plane beam to make the exit beam circular again. The PG stack 206 is tilted to match the tilt of the exit face. In another embodiment, the exit face is parallel to the entrance face and the exit beam is elliptical. The elliptical shape beam provides higher spatial resolution in-plane than the circular beam.

[0045] In certain systems, it may be useful for the output beam to have a fixed polarization. This requires a final HWP. In addition, it is usually desirable to have the output beam be linearly polarized. This requires adding a final fixed, and in this case zero-order, QWP.

[0046] Jihwan Kim et. al. section 3 “Single LCPG Steering Stage” and section 4 “Coarse Steerer Design Option” describes active and passive PG stages that can be cascaded to form a PG stack that provides discrete coarse steering over a wide FOR. A “stage” may comprise a switchable LC half waveplate and an active PG or a pair of switchable LC half waveplates and a pair of passive PGs. Liquid crystal polarization gratings can function as highly efficient beam steering elements, by deflecting all of the incident light into one of three diffraction orders. The incident laser beam must be circularly polarized.

[0047] Although it is known in the art that PGs operate in sine space, their contribution to the total angular FOR can be described to a first order using angles only. This invention does not claim any modifications to PGs and therefore doesn't need to precisely describe the PG according to their native sine space. Therefore two PGs of 8° and 6° deviation are referred to as having a 24° deviation, when the physical deviation is actually the sine of 8° plus the sine of 16°, or 24.5°.

[0048] In an active stage, when no voltage is applied, the LC half waveplate switches the handedness of the incident laser beam with a specific amplitude of external applied voltage. Without a specific amplitude of external applied voltage, it allows the incident laser beam to pass through without changing its polarization state. The LCPG diffracts RCP and LCP beams into the +1 and −1 orders respectively, with approximately 100% efficiency. The polarization sensitive diffraction of LCPGs can be used to select the steering direction into one of the first orders, by simply switching the LC half waveplate. The active LCPG can steer all of the incident laser beam into the zero-order under an applied voltage to provide three unique steering directions corresponding to the three diffraction orders.

[0049] Referring now to the inset portion of FIG. 5, a passive stage 250 includes two passive PGs 252, 254 and two variable LC half waveplates 256, 258 to essentially perform in the same manner as the active PG steering stage to steer the incident beam 210 to three different directions. The steering directions are determined by the voltage-states of the two LC half waveplates 256, 258, positioned in front of the two passive PGs. When both the waveplates are in the same state, the diffraction from the first PG is compensated by the second PG. When the waveplates are in opposite states, the incident laser beam can be diffracted into the positive or negative order.

[0050] A number of PG stages (active or passive) may be cascaded to provide discrete coarse steering. The diffraction angle of the first stage determines the resolution of the coarse steering.

[0051] In an embodiment, the amplifier has an acceptance angle of ±0.5° both in-plane and out-of-plane. The MEMS MMA provides continuous steering over the amplifier's acceptance angle of ±0.5°. A binary stack has 4 polarization gratings (where each PG is an active or passive stage) per axis (total of 8) with discrete states of ±0.5, ±1.0, ±2.0 and ±4.0. The first PG has the same steering range as the MEMS MMA for the transmitter to project a beam at 0°. For a MEMS MMA with a range of ±0.5° the first grating would be ±0.5°. Setting the grating at +0.5° supports projecting the beam from 0 to 10. Setting the grating at −0.5° supports projecting the beam from −1° to 0°. To steer 8°, the waveguide would be +0.5°, the first grating would be 0.5°, the second grating would be 1.0°, the third grating 2.0°, and the fourth grating 4.0° (0.5+0.5+1.0+2.0+4.0=8). The transmitter is capable of steering a high-power spot beam over a FOR of +8° with a resolution limited by the MEMS MMA. In one embodiment, the MEMS MMA steering provides steering resolution of approximately 17 micro radians.

[0052] In another embodiment, the amplifier has an acceptance angle of ±2.0° both in-plane and out-of-plane. The MEMS MMA provides continuous steering over ±2.0°. A binary stack has 4 polarization gratings per axis (total of 8) with discrete states of ±2.0°, ±4.0°, ±8.0° and ±16.0. The first PG needs to have the same steering as the MEMS MMA for the configuration to project a beam at 0°. For a MEMS MMA with a range of ±2.0° the first grating would be +2.0. Setting the grating at +2.0° supports projecting the beam from 0 to 4°. Setting the grating at −2.0° supports projecting the beam from −4° to 0°). To steer 30°, the waveguide would be +2.0°, the first grating would be 2.0°, the second grating would be 4.0, the third grating 8.0, the fourth grating 16.0 (2.0+2.0+4.0+8.0+16.0=32). The transmitter is capable of steering a high-power spot beam over a FOR of ±32° with a resolution of approximately 17 micro radians.

[0053] In another embodiment, the amplifier acceptance angles are not equal, ±2.0° in-plane and ±1.0° out-of-plane. The MEMS MMA provides continuous steering over ±2.0° in-plane and 1.0° out-of-plane. A stack has 4 polarization gratings in the in-plane axis with discrete states of 2.0°, ±4.0°, ±8.0° and ±16.0° and 5 polarization gratings in the out-of-plane axis with discrete states of ±1.0°, ±2.0°, ±4.0°, ±8.0° and ±16.0° for a total of 9. The first PG in each axis needs to have the same steering as the MEMS MMA for the configuration to project a beam at 0°. The transmitter is capable of steering a high-power spot beam over a FOR of ±32° with a resolution of approximately 17 micro radians.

[0054] Referring now to FIG. 6, in an embodiment of a steerable laser transmitter 300 a second stage beam steerer 302 includes a second MEMS MMA 304. A laser 306 is configured to emit a light beam 308. An optional fold mirror 310 re-directs light beam 308 to a first stage MEMS MMA 312 responsive to command signals 314 issued by a controller 316 to continuously steer the light-beam over a fine two-dimensional angular range 318 of no greater than ±2°×±2°. An optical amplifier 320 oriented along an optical axis 322 provides substantially uniform gain over the angular range 318 (determined by the amplifier's acceptance angle). The second MEMS MMA 304, suitably positioned at the output of the amplifier, responsive to command signals 324 issued by controller 316 discretely steers the amplified light beam 308 over a coarse two-dimensional angular range 326 (greater than the amplifier's acceptance angle) of at least ±10°×±10° over a wide FOR. Unlike the LCWG, the MEMS MMA can be positioned downstream of the optical amplifier as its power saturations levels are much higher. Cascading a pair of MEMS MMAs on either side of the optical amplifier also allows for faster steering speeds. The first stage MEMS MMA 312 only steers over the fine angular range so steering speeds can be increased. Although the second state MEMS MMA 304 must discretely steer over the coarse steering range, the rate of updates is less, hence the effective steering speed can be increased.

[0055] Referring now to FIG. 7, an embodiment of a steerable laser transmitter 400 includes a laser 402 that emits a light beam 404, an optical amplifier 406 oriented along an optical axis 405 that amplifies the light beam 404 and a MEMS MMA 408 positioned downstream of the optical amplifier to continuously steer the amplified light beam 404 over a wide FOR 409. Because of its much higher power saturation levels, fast steering and steering range, the MEMS MMA can handle the amplified power levels and provide all of the continuous steering over the FOR. The effective steering speeds may be slower than the cascaded MEMS MMA but only a single device is required. In this embodiment, an optional fold mirror 410 directs the amplified light beam onto the MEMS MMA 408, which is responsive to command signals 412 from a controller 414 to tip and tilt the mirrors to steer the amplified light beam.

[0056] As illustrated in FIGS. 8A-8C, responsive to command signals from the controller, a MEMS MMA 500 is partitioned into four segments 502, 504, 506 and 508 each including a plurality of mirrors 510 illuminated by a light beam 512. The mirrors in the different sections are provided with reflective coatings 514, 516, 518 and 520 at different wavelengths. In response to command signals, the MEMS MMA tips and tilts the mirrors 510 in each segment to independently form and steer optical beams 522, 524, 526 and 528 over the fine and/or coarse angular ranges in the wide FOR. The MEMS MMA may be configured to form a single beam including the diversity of spectral components.

[0057] As previously mentioned, the MMA's piston capability can be generally used to “shape” the light beam (or amplified light beam). As illustrated in FIG. 9, responsive to command signals a MEMS MMA 600 can adjust the piston 602 of mirrors 604 to induce deviations from a base curvature 606. This can be done to compensate for path length variation of the light beam (to maintain zero phase across the beam), to correct for atmospheric distortion or both. Adjustments for path length variation can be calibrated offline and stored in a lookup table (LUT) as a function of scan angle. Adjustments for atmospheric distortion are done in real-time during operation of the active imaging system. For wavefront correction, a source emits optical energy in a similar band to illumination e.g., SWIR a beam steerer scans the optical beam onto scene. A wavefront sensor measures the wavefront of the reflected beam to determine the effects of atmospheric distortion. A controller computes the requisite piston adjustments required to correct the wavefront and provides them as command signals to the MEMS MMA. In high quality, high performing active imaging systems, the ability to accurately remove the effects of path length variation and atmospheric distortion is critical to achieving useful imagery of the scene, and important features identified within the scene. Piston may also be used to adjust the focus, size, divergence or intensity profile of the light beam.

[0058] While several illustrative embodiments of the invention have been shown and described, numerous variations and alternate embodiments will occur to those skilled in the art. Such variations and alternate embodiments are contemplated, and can be made without departing from the spirit and scope of the invention as defined in the appended claims.