Method for providing a multilayer AFM layer in a read sensor

Abstract

A method provides a read sensor stack including an antiferromagnetic (AFM) layer, a pinned layer on the AFM layer, a free layer, and a nonmagnetic layer between the free and pinned layers. Providing the AFM layer includes depositing an AFM layer first portion at a first elevated temperature and at a rate of at least 0.1 Angstrom/second. This AFM layer first portion is annealed in-situ at at least one hundred degrees Celsius. An AFM sublayer is deposited at an elevated temperature and at a sublayer deposition rate of less than 0.1 Angstrom/second. The already-deposited portion of the AFM layer is annealed in-situ at at least one hundred degrees Celsius and less than five hundred degrees Celsius. The sublayer depositing and annealing steps may be repeated in order at least once to provide an AFM layer second portion that has multiple sublayers and is thinner than the AFM layer first portion.

Claims

1. A method for providing a magnetic read apparatus, the method comprising: depositing a first portion of an antiferromagnetic (AFM) layer, wherein the first portion is deposited at a first deposition rate, the first portion of the AFM layer having a first thickness; depositing a second portion of the AFM layer over the first portion, the second portion comprising a plurality of sublayers, wherein each of the plurality of sublayers is deposited at a sublayer deposition rate that is less than the first deposition rate, the second portion of the AFM layer having a second thickness that is less than the first thickness; annealing the first portion of the AFM layer before depositing the second portion of the AFM layer; and annealing each of the plurality of sublayers in between depositing two of the plurality of sublayers.

2. The method of claim 1 wherein the first thickness is not more than ninety percent of a total thickness of the AFM layer.

3. The method of claim 1 wherein depositing each of the plurality of sublayers comprises depositing at least one Angstrom and not more than five Angstroms of an AFM material.

4. The method of claim 3, further comprising depositing not more than three Angstroms of the AFM material.

5. The method of claim 1 wherein the first portion is deposited at a first deposition temperature and each of the plurality of sublayers is deposited at a second deposition temperature, and wherein the first deposition temperature and the second deposition temperature are within a temperature range.

6. The method of claim 1 wherein the annealing of each of the plurality of sublayers has an anneal time, the anneal time being not more than two hundred seconds.

7. The method of claim 1 wherein the annealing of each of the plurality of sublayers has an anneal time and the depositing of each of the plurality of sublayers has a deposition time, the anneal time not exceeding twice the deposition time.

8. The method of claim 1 wherein the first portion is annealed at a first annealing temperature and each of the plurality of sublayers is annealed at a second annealing temperature, wherein the first annealing temperature and the second annealing temperature are within a temperature range.

9. The method of claim 1 wherein the second thickness of the second portion of the AFM is not more than thirty Angstroms.

10. The method of claim 9 wherein the second thickness is at least seven Angstroms and not more than twenty Angstroms.

11. The method of claim 1, further comprising: depositing a ferromagnetic pinned layer on the AFM layer such that the ferromagnetic pinned layer and the AFM layer share an interface; depositing a nonmagnetic layer on the ferromagnetic pinned layer; and depositing a ferromagnetic free layer on the nonmagnetic layer.

12. The method of claim 11, further comprising: providing at least one side bias magnetic structure adjacent to the AFM layer, the ferromagnetic pinned layer, the nonmagnetic layer, and the ferromagnetic free layer.

13. The method of claim 1 wherein the first deposition rate does not exceed 0.3 Angstrom/second.

14. The method of claim 1 wherein the sublayer deposition rate is at least 0.01 Angstrom/second.

15. A method for providing a magnetic read apparatus, the method comprising: depositing a first portion of an antiferromagnetic (AFM) layer at a first deposition rate, the first portion of the AFM layer having a first thickness; annealing the first portion of the AFM layer; depositing a second portion of the AFM layer over the first portion after annealing of the first portion, the second portion comprising a plurality of sublayers and having a second thickness that is less than the first thickness, wherein each of the plurality of sublayers is deposited at a sublayer deposition rate that is less than the first deposition rate; annealing each of the plurality of sublayers after depositing each of the plurality of sublayers and before depositing a next sublayer; depositing a ferromagnetic pinned layer on the AFM layer such that the ferromagnetic pinned layer and the AFM layer share an interface; depositing a nonmagnetic layer on the ferromagnetic pinned layer; and depositing a ferromagnetic free layer on the nonmagnetic layer.

16. The method of claim 15 further comprising: providing at least one side bias magnetic structure adjacent to the AFM layer, the ferromagnetic pinned layer, the nonmagnetic layer, and the ferromagnetic free layer.

17. A method comprising: depositing a first portion of an antiferromagnetic (AFM) layer at a first deposition rate, the first portion having a first thickness; depositing a second portion of the AFM layer over the first portion at a second deposition rate that is less than the first deposition rate, wherein depositing the second portion comprises depositing a plurality of sublayers including a first sublayer, a second sublayer, a third sublayer, and a fourth sublayer, and wherein the second portion has a second thickness that is less than the first thickness; annealing the first portion after depositing the first portion and before depositing the second portion; and annealing each of the first sublayer, the second sublayer, the third sublayer, and the fourth sublayer after depositing each sublayer and before depositing a next sublayer.

18. The method of claim 1, wherein depositing the second portion over the first portion comprises depositing the second portion directly over the first portion.

Description

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS

(1) FIG. 1 depicts an ABS view of a conventional magnetic recording read apparatus.

(2) FIG. 2 is flow chart depicting an exemplary embodiment of a method for providing a magnetic recording read apparatus.

(3) FIG. 3 is flow chart depicting an exemplary embodiment of a method for providing an antiferromagnetic layer magnetic read apparatus.

(4) FIG. 4 is flow chart depicting an exemplary embodiment of a method for providing a read sensor in a magnetic read apparatus.

(5) FIGS. 5-11 depict ABS views of another exemplary embodiment of a portion of a magnetic read apparatus during fabrication.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

(6) While the various embodiments disclosed are applicable to a variety of data storage devices such as magnetic recording disk drives, solid-state hybrid disk drives, networked storage systems etc., for the sake of illustration the description below uses disk drives as examples.

(7) FIG. 2 is an exemplary embodiment of a method 100 for providing a magnetic read apparatus. For simplicity, some steps may be omitted, interleaved, combined, include multiple substeps and/or performed in another order unless otherwise specified. The method 100 is described in the context of providing a read apparatus that may be used in a magnetic recording disk drive. The method 100 may be used to fabricate multiple magnetic read apparatuses at substantially the same time. The method 100 may also be used to fabricate magnetic recording apparatuses usable in other data storage devices. The method 100 is described in the context of particular layers. A particular layer may include multiple materials and/or multiple sub-layers. The method 100 also may start after formation of other portions of the magnetic recording apparatus. For example, the method 100 may start after the bottom (e.g. leading) shield has been formed.

(8) An antiferromagnetic (AFM) layer that is a multilayer is provided, via step 102. The step of providing the AFM layer includes using multiple deposition steps separated by anneal steps. The deposition steps occur at elevated temperatures and at least two different deposition rates. As used herein, an elevated temperature is above room temperature and may be at least one hundred degrees Celsius. The AFM layer thus includes a first portion deposited at a higher deposition rate and a second portion deposited at lower deposition rate(s). For example, the step of providing the AFM layer includes depositing a first portion of the AFM layer at a first, elevated deposition temperature and a first deposition rate of at least 0.1 Angstrom/second. In some embodiments, the first deposition rate does not exceed 0.3 Angstrom/second. This first portion of the AFM layer is annealed after deposition is complete.

(9) The second portion of the AFM layer is provided on the first portion of the AFM layer. This second portion includes multiple sublayers and anneals. Each sublayer of the AFM layer is deposited at an elevated sublayer deposition temperature and a sublayer deposition rate. The sublayer may be an IrMn sublayer. However, in other embodiments other material(s) may be used. In addition, the AFM material(s) used for the second portion of the AFM layer might be different than the AFM material(s) used for the first portion of the AFM layer. The sublayer deposition rate is less than 0.1 Angstrom/second. In some embodiments, the sublayer deposition rate is at least 0.01 Angstrom/second. In some embodiments, each sublayer is deposited at substantially the same rate. However, in other embodiments, different sublayers may have different deposition rates. The deposition rate for the sublayer is less than the deposition rate for the first portion of the AFM layer. This low deposition rate may be accomplished by reducing the power for the deposition system and increasing the pressure of the gas. For example, a sputtering power may be reduced and/or gas pressure for the plasma may be increased to achieve the desired sublayer deposition rate. The sublayer is also thin. In some embodiments, the thickness of the sublayer is at least one Angstrom and not more than five Angstroms. In some such embodiments, the thickness of the sublayer does not exceed three Angstroms. An anneal is performed at an elevated sublayer anneal temperature after deposition of the sublayer. Note that the anneal not only anneals the sublayer but also any layer(s) below the sublayer. The steps of depositing a sublayer and annealing the sublayer and layer(s) below the sublayer are alternated until the second portion of the AFM layer is completed.

(10) The AFM layer formed in step 102 thus includes a first portion and a second portion. The first portion is deposited at a higher deposition rate and annealed. The second portion includes sublayers, each of which is deposited at a lower deposition rate and annealed. The sublayer anneal steps separate sublayer deposition steps. The first portion of the AFM layer has a first thickness. The second portion of the AFM layer has a second thickness that is less than the first thickness. In some embodiments, the first thickness is at least fifty percent of the total thickness of the AFM layer. In some cases, the thickness of the first portion of the AFM layer is greater than fifty percent and not more than ninety percent of the total thickness of the AFM layer.

(11) A ferromagnetic pinned layer is provided on the AFM layer, via step 104. The ferromagnetic pinned layer is closer to the second portion of the AFM layer. In some embodiments, the ferromagnetic pinned layer adjoins the second portion of the AFM layer. Step 104 may include depositing a multilayer that may include nonmagnetic layer(s). The ferromagnetic pinned layer may be a synthetic antiferromagnet (SAF) including two antiferromagnetically coupled ferromagnetic layers separated by a nonmagnetic spacer layer, such as Ru. Other multilayers might be formed in step 104. Alternatively, the ferromagnetic pinned layer may be a single layer.

(12) A nonmagnetic layer is provided on the ferromagnetic pinned layer, via step 106. Step 106 may include providing an insulating tunneling barrier layer, such as a crystalline MgO layer, a conductive layer or another nonmagnetic layer.

(13) A ferromagnetic free layer is deposited on the nonmagnetic layer, via step 108. The ferromagnetic free layer may be a single layer or a multilayer. Thus, a read sensor stack including the AFM layer, the ferromagnetic pinned layer, the nonmagnetic layer and the ferromagnetic free layer is formed in steps 102, 104, 106 and 108. Note that the read sensor stack may also include seed and/or capping layer(s).

(14) The read sensor is defined from the read sensor stack in at least a cross-track direction, via step 110. Step 110 may include forming a mask covering at least a portion of the read sensor stack used to form the read sensor and milling the exposed portions of the read sensor stack. In some embodiments, the read sensor stack may also be defined in the stripe height direction. Thus, the read sensor width in the cross-track direction and the read sensor maximum length in the stripe height direction perpendicular to the ABS may be defined. Fabrication may then be completed, via step 112. Step 112 may include providing side magnetic bias structures, providing a top (trailing) shield and lapping the read apparatus to define a media-facing surface, such as an air-bearing surface (ABS). In addition, a write apparatus, electronics and other components may be formed.

(15) Using the method 100, a read sensor having improved stability may be formed. It has been determined that the AFM layer provided in step 102 may have a higher blocking temperature (i.e. a higher magnetic ordering temperature) and a higher exchange field than the conventional AFM layer 22 depicted in FIG. 1. This is believed to be due to an improved crystal structure of at least the second portion of the AFM. Thus, the AFM layer provided using the method 100 may be more magnetically stable. As a result, the magnetic moment of the pinned layer provided in step 104 may be better fixed in place. The stability and performance of the read sensor being fabricated may thus be improved. As a result, read sensors that are usable in higher areal density memories may be formed. Furthermore, depositing the first portion of the AFM layer at a higher rate allows for the time to fabricate the AFM layer to be significantly reduced over an AFM layer that is fabricated in the same manner as the second portion only. Thus, manufacturability may be maintained while performance may be enhanced.

(16) FIG. 3 is an exemplary embodiment of a method 12 for providing an AFM layer of a magnetic read apparatus. For simplicity, some steps may be omitted, interleaved, combined, include multiple substeps and/or performed in another order unless otherwise specified. The method 120 is described in the context of providing a read apparatus that may be used in a magnetic recording disk drive. The method 120 may be used to fabricate the AFM layer(s) for multiple magnetic read apparatuses at substantially the same time. The method 120 is also described in the context of particular layers. A particular layer may include multiple materials and/or multiple sub-layers. The method 120 also may start after formation of other portions of the magnetic recording apparatus.

(17) A first portion of the AFM layer is deposited at a first, elevated deposition temperature and a first deposition rate, via step 122. The first portion of the AFM layer may be IrMn. The first deposition temperature is greater than one hundred degrees Celsius and less than five hundred degrees Celsius. In some embodiments, the first deposition temperature is at least two hundred degrees Celsius and not more than four hundred degrees Celsius. Thus, the deposition occurs at temperatures above room temperature. The deposition rate is at least 0.1 Angstrom/second. In some embodiments, the first deposition rate also does not exceed 0.3 Angstrom/second.

(18) This first portion of the AFM layer is annealed in-situ at a first anneal temperature of at least one hundred degrees Celsius, via step 124. In some embodiments, the first anneal temperature is at least two hundred degrees Celsius and not more than four hundred degrees Celsius. Because the anneal is carried out in-situ, the substrate (and thus the first portion of the AFM layer) need not be exposed to ambient environment outside the fabrication apparatus.

(19) A thin sublayer of the AFM layer is deposited at an elevated sublayer deposition temperature and a sublayer deposition rate, via step 126. The sublayer may be an IrMn sublayer. However, in other embodiments other material(s) may be used. In addition, the AFM material(s) used for the sublayer might be the same as or different from AFM material(s) used for the first portion of the AFM layer. The sublayer deposition temperature is greater than one hundred degrees Celsius and less than five hundred degrees Celsius. In some embodiments, the sublayer deposition temperature is at least two hundred degrees Celsius and not more than four hundred degrees Celsius. Thus, the temperature range for deposition of the sublayer and deposition of the first portion of the AFM layer are the same. The actual temperature used during the deposition of the sublayer can, but need not be, the same as the temperature used for the first portion of the AFM layer. The sublayer deposition rate is less than 0.1 Angstrom/second. In some embodiments, the sublayer deposition rate is at least 0.01 Angstrom/second. Thus, the deposition rate for the sublayer is less than the deposition rate for the first portion of the AFM layer. The sublayer is also thin. In some embodiments, the thickness of the sublayer is at least one Angstrom and not more than five Angstroms. In some such embodiments, the thickness of the sublayer does not exceed three Angstroms. Such thicknesses are significantly less than the thickness of the first portion of the AFM layer deposited in step 122.

(20) An in-situ sublayer anneal is performed at a sublayer anneal temperature after deposition of the sublayer, via step 128. Because the sublayer is on the first portion of the AFM layer, both the first portion of the AFM layer and the sublayer are annealed. Stated differently, any portion of the AFM layer that has already been deposited is annealed. Any structures formed before the AFM layer may also be annealed. The sublayer anneal temperature is at least one hundred degrees Celsius and less than five hundred degrees Celsius. In some embodiments, the sublayer anneal temperature is at least two hundred degrees Celsius and not more than four hundred degrees Celsius. Thus, the anneal temperature for the sublayer is in the same temperature range as the anneal temperature for the first portion of the AFM layer. The anneal temperature used for the sublayer may, but need not be, the same as the first anneal temperature used for the first portion of the AFM layer. The anneal may be carried out for an anneal time of not more than two hundred seconds. In some embodiments, the anneal time does not exceed twice the time taken to deposit the sublayer. In some cases, the anneal time and deposition time for the sublayer are substantially equal. However, other anneal times may be possible.

(21) The steps of depositing a sublayer (step 126) and annealing the sublayer and layer(s) below the sublayer (step 128) are repeated until the AFM layer is completed, via step 130. The AFM layer formed using the method 120 includes a first portion and a second portion. The first portion is deposited at a higher deposition rate and annealed in steps 122 and 124. The second portion includes sublayers, each of which is deposited at a lower deposition rate and annealed, with the anneal step separating sublayer deposition steps. This is carried out in steps 126, 128 and 130. The first portion of the AFM layer has a first thickness greater than the second thickness of the second portion of the AFM layer. In some embodiments, the first thickness is at least fifty percent of the total thickness of the AFM layer. For example, the AFM layer may be a total approximately sixty Angstroms thick. The second thickness of the second portion of the AFM layer is not more than thirty Angstroms. In some embodiments, the thickness of the second portion of the AFM layer may be significantly less. For example, the second portion of the AFM layer may be at least seven Angstroms and not more than twenty Angstroms thick. In some cases, the thickness of the first portion of the AFM layer is greater than fifty percent and not more than ninety percent of the total thickness of the AFM layer.

(22) Using the method 120, an AFM layer having a higher blocking temperature and a higher exchange field may be fabricated. This is believed to be due to an improved crystal structure of at least the second portion of the AFM. Thus, the AFM layer provided using the method 120 may be more magnetically stable. As a result, the magnetic moment a pinned layer magnetically coupled to the AFM layer may be better fixed in place. The stability and performance of the read sensor using the AFM layer may be improved. As a result, read sensors that are usable in higher areal density memories may be formed. Furthermore, depositing the first portion of the AFM layer at a higher rate allows for the time to fabricate the AFM layer to be significantly reduced over an AFM layer that only includes the second portion. Thus, manufacturability may be maintained while performance may be enhanced.

(23) FIG. 4 is a flow chart depicting an exemplary embodiment of a method 150 for providing a read sensor of a magnetic read apparatus. For simplicity, some steps may be omitted, interleaved, combined, include multiple substeps and/or performed in another order unless otherwise specified. FIGS. 5-11 depict ABS views of an exemplary embodiment of a magnetic recording read apparatus 200 during fabrication using the method 150. For clarity FIGS. 5-11 are not to scale and only portions of the read apparatus 200 are depicted. Referring to FIGS. 4-11 the method 150 is described in the context of providing a magnetic recording disk drive and a magnetic read apparatus 200. The method 150 may be used to fabricate multiple magnetic read apparatuses at substantially the same time. The method 150 may also be used to fabricate other magnetic recording apparatuses and/or other data storage devices. The method 150 is also described in the context of particular layers. A particular layer may include multiple materials and/or multiple sub-layers. The method 150 also may start after formation of other portions of the magnetic recording apparatus. For example, a shield 202 may have been provided.

(24) A first, thicker portion of the AFM layer is deposited at a first, elevated deposition temperature and a first, higher deposition rate, via step 152. Step 152 is analogous to step 122. The first portion of the AFM layer may be IrMn. The first deposition temperature may be in the ranges described above. Thus, the deposition occurs at temperatures above room temperature. The deposition rate is at least 0.1 Angstrom/second. In some embodiments, the first deposition rate also does not exceed 0.3 Angstrom/second. FIG. 5 depicts the magnetic read apparatus 200 after step 152 is performed. Thus, the first AFM portion 212 of the AFM layer 210 has been deposited on the shield 202.

(25) This first portion of the AFM layer is annealed in-situ at a first anneal temperature of at least one hundred degrees Celsius, via step 154. Step 154 is analogous to step 124.

(26) A thin sublayer of the AFM layer is deposited at an elevated sublayer deposition temperature and a sublayer deposition rate, via step 156. The sublayer may be an IrMn sublayer. However, in other embodiments other material(s) may be used. In addition, the AFM material(s) used for the sublayer might be the same as or different from AFM material(s) used for the first portion of the AFM layer. The sublayer deposition temperature may be in the ranges described above. Thus, the sublayer deposition occurs at temperatures above room temperature. The sublayer deposition rate is less than 0.1 Angstrom/second. In some embodiments, the sublayer deposition rate is at least 0.01 Angstrom/second. Thus, the deposition rate for the sublayer is less than the deposition rate for the first portion 212 of the AFM layer 210.

(27) FIG. 6 depicts the read apparatus 200 after step 156 has been performed. Thus, the first sublayer 214A of the AFM layer 210 has been formed. This sublayer 214A is part of the second portion 214 of the AFM layer 210. The sublayer 214A is thin. In some embodiments, the thickness of the sublayer 214A is at least one Angstrom and not more than five Angstroms. In some such embodiments, the thickness of the sublayer 214A does not exceed three Angstroms.

(28) An in-situ sublayer anneal is performed at a sublayer anneal temperature after deposition of the sublayer, via step 158. The anneal performed in step 158 is analogous to the anneal of step 128.

(29) Steps 156 and 158 are repeated until the AFM layer 210 is completed, via step 160. FIG. 7 depicts the magnetic read apparatus 200 after one additional iteration of steps 156 and 158 has been completed. Thus, a second sublayer 214B has been formed. FIG. 8 depicts the read apparatus 200 after step 160 has been completed. Thus, a third AFM sublayer 214C and a fourth AFM sublayer 214D have been formed. In other embodiments, a different number of sublayers may be fabricated. The AFM layer 210 thus includes a first portion 212 and a second portion 214. The second portion 214 includes multiple AFM sublayers 214A, 214B, 214C and 214D. The first portion 212 of the AFM layer 210 is thicker than the second portion 214. In some embodiments, the first thickness is at least fifty percent of the total thickness of the AFM layer. The thicknesses of the portions 212 and 214 of the AFM layer 210, the sublayers 212, 212, 212C and 212D and the AFM layer 210 may be in the ranges described above.

(30) A ferromagnetic pinned layer is provided directly on the AFM layer 210, via step 162. Step 162 is analogous to step 104 of the method 100. A nonmagnetic layer is provided on the ferromagnetic pinned layer, via step 164. Step 164 may be analogous to step 106. A ferromagnetic free layer is deposited on the nonmagnetic layer, via step 166. Step 166 may be analogous to step 108. FIG. 9 depicts the read apparatus 200 after step 166 has been performed. Thus, a pinned layer 220, a nonmagnetic layer 230 and a free layer 240 have been formed. The pinned layer 220 is exchange coupled to the second portion 214 of the AFM layer 210. Although not shown, seed and/or capping layer(s) may be provided.

(31) The read sensor is defined in a cross track direction and a stripe height direction, via step 168. Step 168 may be analogous to step 110. In addition, portions of step 168 may be carried out at different times. For example, the read sensor may be defined in a cross track direction, then other structures formed. For example, side magnetic bias structures may be provided. After these and optionally other structures are formed, the read sensor may be defined in the stripe height direction. FIG. 10 depicts the read apparatus 200 after step 168 is performed. Thus, the read sensor 250 having track width TW has been defined. Fabrication may then be completed. This may include providing side magnetic bias structures, providing a top (trailing) shield and lapping the read apparatus to define a media-facing surface, such as an air-bearing surface (ABS). In addition, a write apparatus, electronics and other components may be formed. FIG. 11 depicts the read apparatus 200 after fabrication is completed. Thus, insulating layers 252, side magnetic bias structures 254 and shield 256 have been provided. The read apparatus 200 has shield-to-shield spacing SS.

(32) Using the method 150, a read sensor 250 having improved stability may be formed. The AFM layer 210 may have an improved crystal structure, higher blocking temperature, and higher exchange field. Thus, the AFM layer 210 may be magnetically stable despite having a lower volume. As a result, the magnetic moment of the pinned layer 220 may be better fixed in place at higher areal densities (e.g. lower track widths and/or shield-to-shield spacings). The stability and performance of the read sensor 250 may thus be improved. As a result, the read sensor that are usable in higher areal density memories may be formed. Furthermore, depositing the first portion 212 of the AFM layer at a higher rate than the second portion 214 allows for the time to fabricate the AFM layer 210 to be significantly reduced over an AFM layer that is fabricated only using steps 156, 158 and 160. Thus, manufacturability may be maintained while performance may be enhanced.