LIGHT-EMITTING DIODE AND A METHOD FOR MANUFACTURING THE SAME
20170338375 ยท 2017-11-23
Inventors
Cpc classification
H01L2221/68336
ELECTRICITY
H01L2221/6834
ELECTRICITY
H10H20/0137
ELECTRICITY
H10H20/812
ELECTRICITY
H01L2221/68381
ELECTRICITY
International classification
H01L33/00
ELECTRICITY
Abstract
A method for manufacturing a light-emitting diode (LED) is provided. The method includes following steps. A LED wafer including a substrate and a plurality of light-emitting units formed thereon is provided. At least a portion of the substrate is removed. The LED wafer is fixed on an extensible membrane, wherein the light-emitting unit faces the extensible membrane. The LED wafer is broken to form a plurality of LED dices separated from each other, wherein each LED dice includes at least one light-emitting unit. The extensible membrane is expanded to make a distance between any two of the LED dices become larger.
Claims
1. A method for manufacturing a light-emitting diode (LED), comprising: providing a LED wafer comprising a substrate and a plurality of light-emitting units formed thereon; removing at least a portion of the substrate; fixing the LED wafer on an extensible membrane, wherein the light-emitting unit faces the extensible membrane; breaking the LED wafer to form a plurality of LED dices separated from each other, wherein each LED dice comprises at least one light-emitting unit; and expanding the extensible membrane to make a distance between any two of the LED dices become larger.
2. The method according to claim 1, further comprising pasting a fixing piece on a surface of the substrate, and the LED wafer is cut together with the fixing piece to form the LED dices before the step of fixing the LED wafer on the extensible membrane.
3. The method according to claim 2, further comprising removing the fixing piece after cutting the LED wafer.
4. The method according to claim 1, wherein the step of removing the portion of the substrate comprises a grinding step and a polishing step, and the substrate is thinned down to have a thickness smaller than or equal to 100 m.
5. The method according to claim 1, further comprising a waxing step for adhering the LED wafer to a crafting table.
6. The method according to claim 5, further comprising a dewaxing step for detaching the LED wafer from the crafting table.
7. The method according to claim 2, wherein the step of removing the fixing piece is implemented by irradiating a UV light on the fixing piece to decompose a viscose on the fixing piece and then removing the fixing piece from the LED dices.
8. The method according to claim 1, wherein after the step of removing the portion of the substrate, the substrate has a thickness 2-20 times larger than a thickness of the light-emitting unit.
9. A manufacturing method of light-emitting diode (LED), comprising: providing an LED wafer comprising a substrate and a light-emitting unit formed on the substrate; removing at least a portion of the substrate; pasting a fixing piece on a surface of the LED wafer; fixing the LED wafer to an extensible membrane, wherein the light-emitting unit faces the extensible membrane, and the LED wafer is disposed between the fixing piece and the extensible membrane, and the fixing piece, the LED wafer and the extensible membrane form a complex; breaking the LED wafer in the complex to form a plurality of LED dices; removing the fixing piece from the complex to remain the LED dices disposed on the extensible membrane; and expanding the extensible membrane to make a distance between any two of the LED dices become larger.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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[0016] In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the disclosed embodiments. It will be apparent, however, that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and devices are schematically shown in order to simplify the drawing.
DETAILED DESCRIPTION
[0017] Referring to
[0018] Step 11: an LED wafer 2 is provided, wherein the LED wafer 2 includes a substrate 21, and a light-emitting unit 22 covering the substrate 21. The substrate 21 can be a sapphire substrate, a gallium nitride (GaN) substrate, an aluminum nitride (AlN) substrate, a silicon substrate, or a silicon carbide (SIC) substrate. The substrate 21 is not limited to any specific type of substrate but is exemplified by a sapphire substrate in the present embodiment. The substrate 21 has a thickness around 430 m, and has a first side 211 and a second side 212 opposite to the first side 211.
[0019] The light-emitting unit 22, disposed on the first side 211 of the substrate 21, has an n-type semiconductor layer 221 disposed on the first side 211, a p-type semiconductor layer 222 disposed above the n-type semiconductor layer 221 at an interval, and a light-emitting layer 223 interposed between the n-type semiconductor layer 221 and the p-type semiconductor layer 222. Let the GaN LED be taken for example. The n-type semiconductor layer 221 and the p-type semiconductor layer 222 can be formed of an n-type GaN material and a p-type GaN material, respectively. The light-emitting layer 223, also referred as the active layer, can be formed of a multiple quantum well (MQW) structure. The light-emitting layer 223 can be formed of a material such as GaN, indium gallium nitride (InGaN), or aluminum gallium nitride (AlGaN). However, in the implementation of the present embodiment, the material of each layer of the light-emitting unit 22 is not limited to any specific restrictions. Besides, the LED wafer 2 further includes an electrode not illustrated in the diagram but connected to the light-emitting unit 22 to transmit an external power to the light-emitting unit 22, which converts an electric energy into an optical energy. Since the electrode is not the focus of improvement in the disclosure, detailed descriptions of the electrode are not disclosed here.
[0020] Step 12: the LED wafer 2 is processed by way of grinding until the substrate 21 has a thickness smaller than or equal to 100 m. Preferably, the thickness is smaller than or equal to 50 m. To be more specific, in the present step, the first side 211 of the substrate 21 faces downward and the second side 212 faces upwards, and a liquid wax having adhesion is coated on a surface of the light-emitting unit 22 for fixing the LED wafer 2 on a crafting table 3. The present step is also referred as the waxing step. Then, the second side 212 of the substrate 21 can be grinded by a grinder and then polished by a polisher until the substrate 21 has a thickness smaller than or equal to 100 m.
[0021] Step 13: a fixing piece 4 is pasted on a surface of the LED wafer 2. The fixing piece 4 of the present embodiment is a sheet whose surface has viscose and adhesion. The fixing piece 4 is adhered on the surface of the substrate 21 facing upwards.
[0022] Step 14: the LED wafer 2 is washed using a liquid such as acetone (ACE) or isopropanol (IPA) to dewax the surface of the LED wafer 2 facing the crafting table 3, and the LED wafer 2 is detached from the crafting table 3. The present step is also referred as the dewaxing step.
[0023] Step 15: the LED wafer 2 is fixed on an elastic membrane 5 (also referred as the blue film) which is surrounded by an expansion loop 51. One surface of the LED wafer 2 having the light-emitting unit 22 faces the elastic membrane 5, and the other surface of the LED wafer 2 having the fixing piece 4 faces outwards.
[0024] Step 16: the LED wafer 2 together with the fixing piece 4 are cut and broken, such that the LED wafer 2 forms a plurality of LEDs 20. Specifically, the LED wafer 2 is cut into a plurality of blocks by way of laser scribing according to a predetermined size. Then, by applying an instant impact on the LED wafer 2 along the trace of the cutting line, the blocks will separate from each other to form a plurality of LEDs 20. The present step is also referred as the breaking step.
[0025] Step 17: a UV light is projected on the fixing piece 4 to decompose the viscose, and then the fixing piece 4 is peeled from the LEDs 20.
[0026] Step 18: the elastic membrane 5 is pulled outwards and expanded towards the radial direction (such as the arrow direction indicated in the last step of
[0027] In the disclosure, the thickness of the substrate 21 is reduced to be smaller than or equal to 100 m. Or, the thickness of the substrate 21 is even reduced to be smaller than or equal to 50 m in an ultra-thinning process, such that the LED 20 can be miniaturized or thinned. Before the LED wafer 2 is removed from the crafting table 3 (that is, before the dewaxing step), the fixing piece 4 can be pasted on the LED wafer 2 to provide a supporting force to the LED wafer 2 to maintain the flatness of the wafer and avoid the wafer being warped due to residual stress. Moreover, the fixing piece 4 helps to enhance the structural strength of the LED wafer 2 and avoid the LED 20 being broken or damaged. For example, during the cutting step of the wafer, the breakage problem can be avoided, and the quality and reliability of the products can be increased. Furthermore, in the present embodiment, the UV light projected on the fixing piece 4 can decompose the viscose on the fixing piece 4, such that the fixing piece 4 can be peeled easily. The present removing step is simple and easy to implement.
[0028] Referring to
[0029] The range of the beam-divergence angle of the LED 20 preferably is between 115-140, and more preferably is between 115-130. Within the range of the beam-divergence angle, the light can be better centralized, and such design is advantageous to the situation requiring the light to be centralized. Moreover, the range of the beam-divergence angle disclosed above goes with a suitable thickness of the substrate 21. Referring to
TABLE-US-00001 TABLE 1 Substrate thickness 30 m 50 m 150 m 220 m 300 m 400 m Beam- 126 131 142 146 147 148 divergence angle
[0030] It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments. It is intended that the specification and examples be considered as exemplary only, with a true scope of the disclosure being indicated by the following claims and their equivalents.