Light emitting device having vertical structure and package thereof

Abstract

A light emitting device package can include a sub-mount having a first surface, a second surface, a bottom surface and a cavity; a first layer on the first surface; a second layer on the second surface; a third layer on the bottom surface; a light emitting device on the first layer and including a supporting layer including an anti-diffusion layer, a first electrode on the supporting layer, a semiconductor light emitting structure electrically connected to the first electrode, and a second electrode electrically connected to the semiconductor light emitting structure, in which the first and second electrodes electrically connect to the first layer and the second layer, respectively, and the semiconductor light emitting structure includes a light extraction structure; an ESD property improving diode on the second surface, electrically connected to the second layer and arranged a distance apart from the light emitting device, and a lens on the sub-mount.

Claims

1. A light emitting device package comprising: a sub-mount having a first surface, a second surface and a bottom surface; a first layer on the first surface of the sub-mount; a second layer on the second surface of the sub-mount; at least one third layer on the bottom surface of the sub-mount; a light emitting device on the first layer, the light emitting device comprising a supporting layer including an anti-diffusion layer, a first electrode on the supporting layer, a semiconductor light emitting structure electrically connected to the first electrode, and a second electrode electrically connected to the semiconductor light emitting structure, wherein the first electrode is electrically connected to the first layer and the second electrode is electrically connected to the second layer, wherein the semiconductor light emitting structure comprises a light extraction structure; an ESD property improving diode on the second surface such that the ESD property improving diode is electrically connected to the second layer, wherein the ESD property improving diode is arranged a distance apart from the light emitting device, and a lens on the sub-mount, wherein the lens is disposed on the light emitting device, wherein the first layer and the second layer include metal, wherein a height of the first surface is different from a height of the second surface, wherein a thickness of the light emitting device is thicker than a thickness of the ESD property improving diode, wherein at least one of the first layer and the second layer directly contacts the sub-mount, wherein the sub-mount has a cavity, the cavity having a bottom portion and an inclined portion, wherein the first layer is disposed on the bottom portion, wherein the at least one third layer is vertically overlapped with the first surface and the second surface and an upper surface of the at least one third layer is flush with the bottom surface, and wherein the sub-mount comprises ceramic material.

2. The light emitting device package of claim 1, further comprising a reflection plate disposed on a plurality of portions of the first layer and the second layer.

3. The light emitting device package of claim 1, wherein the semiconductor light emitting structure comprises a first conductive type semiconductor layer, a second conductive type semiconductor, and an active layer disposed between the first conductive type semiconductor layer and the second conductive type semiconductor layer.

4. The light emitting device package of claim 3, wherein a horizontal cross-sectional area adjacent to an upper surface of the semiconductor light emitting structure is different from a horizontal cross-sectional area adjacent to a lower surface of the semiconductor light emitting structure.

5. The light emitting device package of claim 1, wherein the first electrode is disposed between the first conductive type semiconductor layer and the supporting layer, and the second electrode is disposed over the second conductive type semiconductor layer.

6. The light emitting device package according to claim 1, wherein a height of the first surface is lower than a height of the second surface.

7. The light emitting device package according to claim 1, wherein the supporting layer comprises a metal.

8. The light emitting device package according to claim 1, further comprising an adhesion layer between the semiconductor light emitting structure and the supporting layer.

9. The light emitting device package according to claim 8, wherein the adhesion layer has a multilayer structure.

10. The light emitting device package according to claim 1, wherein the light extraction structure comprises at least one of an irregularity pattern, a photonic crystal, and a plurality of nano particles.

11. The light emitting device package according to claim 1, wherein the light extraction structure is an integral part of the semiconductor light emitting structure.

12. The light emitting device package according to claim 1, wherein the ESD property improving diode is a zener diode.

13. The light emitting device package according to claim 1, further comprising a passivation layer arranged on the semiconductor light emitting structure.

14. The light emitting device package according to claim 1, wherein the first electrode comprises at least one of two metals and a multilayer structure of at least two metal layers alternately arranged.

15. The light emitting device package according to claim 1, wherein the sub-mount includes AlN.

16. A light emitting device package comprising: a sub-mount having a first surface, a cavity and a bottom surface, the cavity has a bottom portion and an inclined portion; a first layer on the bottom portion of the cavity; a second layer on the first surface; at least one third layer on the bottom surface of the sub-mount; a light emitting device on the first surface, the light emitting device comprising a supporting layer including an anti-diffusion layer, a first electrode on the supporting layer, a semiconductor light emitting structure electrically connected to the first electrode, and a second electrode electrically connected to the semiconductor light emitting structure, wherein the first electrode is electrically connected to the first layer and the second electrode is electrically connected to the second layer, wherein the semiconductor light emitting structure comprises a light extraction structure; a zener diode on the first surface such that the zener diode is electrically connected to the second layer, wherein the zener diode is a distance apart from the light emitting device, and a lens on the sub-mount, wherein the lens is disposed on the light emitting device and vertically overlapped with the zener diode, wherein the first layer and the second layer include metal, wherein a height of the first surface is higher than a height of the bottom portion, wherein a thickness of the light emitting device is thicker than a thickness of the zener diode, wherein at least one of the first layer and the second layer directly contacts the sub-mount, wherein the supporting layer includes at least one of CU, Ni, Au and an alloy thereof, wherein the at least one third layer is vertically overlapped with the first surface and the bottom portion, and wherein the sub-mount is one of a planar sub-mount, a 3D sub-mount, and a 3D through hole interconnection (THI) sub-mount.

17. The light emitting device package according to claim 16, wherein the zener diode is disposed at a corner region of the bottom surface of the sub-mount.

18. The light emitting device package according to claim 16, further comprising a reflection plate disposed on a plurality of portions of the first layer and the second layer.

19. A light emitting device package comprising: a sub-mount having a first surface, a cavity and a bottom surface, the cavity has a bottom portion and an inclined portion; a first layer on the bottom portion of the cavity; a second layer on the first surface; a reflection plate disposed on a plurality of portions of the first layer and the second layer; a light emitting device on the first surface, the light emitting device comprising a supporting layer including an anti-diffusion layer, a first electrode on the supporting layer, a semiconductor light emitting structure electrically connected to the first electrode, and a second electrode electrically connected to the semiconductor light emitting structure, wherein the first electrode is electrically connected to the first layer and the second electrode is electrically connected to the second layer, wherein the semiconductor light emitting structure comprises a light extraction structure; a zener diode on the first surface such that the zener diode is electrically connected to the second layer, wherein the zener diode is a distance apart from the light emitting device; and a lens on the sub-mount, wherein the lens is disposed on the light emitting device and vertically overlapped with the zener diode, wherein the first layer and the second layer include metal, wherein a height of the first surface is higher than a height of the bottom portion, wherein a thickness of the light emitting device is thicker than a thickness of the zener diode, wherein at least one of the first layer and the second layer directly contacts the sub-mount, wherein the supporting layer includes at least one of CU, Ni, Au and an alloy thereof, and wherein the sub-mount is one of a planar sub-mount, a 3D sub-mount, and a 3D through hole interconnection (THI) sub-mount.

20. The light emitting device package according to claim 19, wherein at least one of the first layer or the second layer is disposed on the bottom surface of the sub-mount.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principle of the invention. In the drawings:

(2) FIGS. 1 to 18 are sectional view illustrating a first embodiment of the present invention, in which:

(3) FIG. 1 is a sectional view illustrating a process for forming a semiconductor layer;

(4) FIG. 2 is a sectional view illustrating an example of a process for forming a first electrode and a support layer;

(5) FIG. 3 is a sectional view illustrating another example of the process for forming the first electrode and support layer;

(6) FIG. 4 is a sectional view illustrating a laser scribing process;

(7) FIG. 5 is a sectional view illustrating a first example of a light emitting device chip;

(8) FIG. 6 is a sectional view illustrating a mesa etching process carried out after the formation of the semiconductor layer;

(9) FIG. 7 is a sectional view illustrating a process for forming the first electrode and a passivation layer;

(10) FIG. 8 is a sectional view illustrating a process for forming a metal support layer;

(11) FIG. 9 is a sectional view illustrating a second example of the light emitting device chip;

(12) FIG. 10 is a sectional view illustrating a trench etching process carried out after the formation of the semiconductor layer;

(13) FIG. 11 is a sectional view illustrating a third example of the light emitting device chip;

(14) FIG. 12 is a sectional view illustrating an example of bonding of the light emitting device chip to a sub-mount in accordance with the present invention;

(15) FIG. 13 is a schematic view illustrating an example of the sub-mount according to the present invention;

(16) FIG. 14 is a sectional view illustrating a circuit of the sub-mount according to the present invention;

(17) FIG. 15 is a sectional view illustrating a state in which a chip is attached to the sub-mount in accordance with the present invention;

(18) FIG. 16 is a sectional view illustrating a first example of the sub-mount according to the present invention;

(19) FIG. 17 is a sectional view illustrating a second example of the sub-mount according to the present invention;

(20) FIG. 18 is a sectional view illustrating a third example of the sub-mount according to the present invention; and

(21) FIG. 19 is a perspective view illustrating a light emitting device package manufactured in accordance with the present invention; and

(22) FIGS. 20 to 30 are sectional views illustrating a second embodiment of the present invention, in which:

(23) FIG. 20 is a sectional view illustrating a process for forming a semiconductor layer;

(24) FIG. 21 is a sectional view illustrating an example of a process for forming a first electrode;

(25) FIG. 22 is a sectional view illustrating a laser scribing process;

(26) FIG. 23 is a sectional view illustrating a fourth example of a light emitting device chip;

(27) FIG. 24 is a sectional view illustrating a mesa etching process carried out after the formation of the semiconductor layer;

(28) FIG. 25 is a sectional view illustrating a process for forming the first electrode and a passivation layer;

(29) FIG. 26 is a sectional view illustrating a process for forming a metal plate;

(30) FIG. 27 is a sectional view illustrating a fifth example of the light emitting device chip;

(31) FIG. 28 is a sectional view illustrating a trench etching process carried out after the formation of the semiconductor layer;

(32) FIG. 29 is a sectional view illustrating a sixth example of the light emitting device chip; and

(33) FIG. 30 is a sectional view illustrating another example of the bonding of the light emitting device chip to the sub-mount in accordance with the present invention.

DETAILED DESCRIPTION OF THE INVENTION

(34) Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

(35) The present invention may, however, be embodied in many alternate forms and should not be construed as limited to the embodiments set forth herein. Accordingly, while the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that there is no intent to limit the invention to the particular forms disclosed, but on the contrary, the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the claims.

(36) Like numbers refer to like elements throughout the description of the figures. In the drawings, the thickness of layers and regions are exaggerated for clarity.

(37) It will be understood that when an element such as a layer, region or substrate is referred to as being on another element, it can be directly on the other element or intervening elements may also be present. It will also be understood that if part of an element, such as a surface, is referred to as inner, it is farther to the outside of the device than other parts of the element.

(38) In addition, relative terms, such as beneath and overlies, may be used herein to describe one layer's or region's relationship to another layer or region as illustrated in the figures.

(39) It will be understood that these terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. Finally, the term directly means that there are no intervening elements. As used herein, the term and/or includes any and all combinations of one or more of the associated listed items.

(40) It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms.

(41) These terms are only used to distinguish one region, layer or section from another region, layer or section. Thus, a first region, layer or section discussed below could be termed a second region, layer or section, and similarly, a second region, layer or section may be termed a first region, layer or section without departing from the teachings of the present invention.

First Embodiment

(42) Hereinafter, a first embodiment of the present invention will be described with reference to the accompanying drawings.

(43) First, a method for manufacturing individual semiconductor light emitting device chips will be described.

(44) As shown in FIG. 1, in order to manufacture a light emitting device chip according to this embodiment, a semiconductor layer 20 having a multilayer structure is formed over a sapphire substrate 10, using a thin film growing method such as a hydride vapor phase epitaxy (HVPE) or a metal organic chemical vapor deposition (MOCVD) method. The HYPE method is advantageous in that it is possible to grow a thin film having a low impurity concentration, namely, a high purity, at a high growth rate of 50 to 100 m per hour.

(45) The growth of the semiconductor layer 20, which has a multilayer structure, can be achieved by first forming an n type GaN semiconductor layer over the substrate 10, forming an active layer over the n type GaN semiconductor layer, and forming a p type GaN semiconductor layer over the active layer.

(46) A first electrode 30 is then formed on the semiconductor layer 20, as shown in FIG. 2. The first electrode 30 is a p type electrode or an ohmic electrode. In this case, a transparent electrode may be used for the first electrode 30. The transparent electrode may be made of a transparent conductive oxide such as indium tin oxide (ITO).

(47) A separate support layer 40 may be formed over the first electrode 30, in order to achieve an enhancement in light emission efficiency and an improvement in bonding structure, and to provide a function for protecting or supporting the semiconductor layer 20. The support layer 40 may be made of a metal or a semiconductor containing silicon.

(48) The support layer 40 may include a reflection layer adapted to reflect light emerging from the active layer of the semiconductor layer 20, and thus, to achieve an enhancement in light emission efficiency, and an anti-diffusion layer formed over the reflection layer.

(49) The anti-diffusion layer is also called a under bump metallization (UBM) layer. Where plating is carried out over a reflection electrode, or a metal support layer is attached to the reflection electrode, a solder is mainly used. In this case, the solder may be diffused into the semiconductor layer 20 in a melted state, so that it may adversely affect light emission characteristics. The anti-diffusion layer functions to avoid such a phenomenon.

(50) In order to enable a chip to be bonded to a sub-mount, which will be described later, a plate made of a metal such as Cu, Ni, or Au may be subsequently formed on the anti-diffusion layer. For the same purpose, a semiconductor wafer or substrate made of, for example, Si, may be attached to the anti-diffusion layer.

(51) On the other hand, after the formation of the first electrode 30 over the semiconductor layer 20 formed over the substrate 10, an adhesion layer 41 having a single layer structure or a multilayer structure may be formed over the first electrode 30, for formation of the support layer 40, as shown in FIG. 3.

(52) In this case, the first electrode 30 may include a reflection film, or may be made of a material having a high reflectivity, to function as a reflection electrode.

(53) The adhesion layer 41 arranged on the first electrode 30 is a metal layer for bonding the support layer 40 to the first electrode 30. The adhesion layer 41 may have a single layer structure or a multilayer structure including two or more layers.

(54) The adhesion layer 41 may have a thickness corresponding to 2 to 10 times the thickness of the first electrode 30, in order to provide a sufficient bonding strength.

(55) The support layer 40 is bonded to the adhesion layer 41. The support layer 40 may be made of a semiconductor wafer or substrate containing Si.

(56) For the support layer 40, a metal plate may be used. The metal plate may be formed over the adhesion layer 41 in accordance with a plating process.

(57) Thereafter, a process for separating the chip structure fabricated as described above into individual unit device chips is carried out. As shown in FIG. 4, the substrate 10 is first thinned. Scribing is then carried out using a laser, to define regions corresponding to respective unit device chips. Thereafter, a cutting force is applied to the scribed portions of the chip structure in accordance with a mechanical method, thereby causing the chip structure to be separated into individual chips 100.

(58) On the other hand, in accordance with another method for manufacturing individual light emitting device chips, individual device chips may be fabricated using a mesa etching process carried out after the growth of the semiconductor layer 20 which has a multilayer structure, as shown in FIG. 6.

(59) In the mesa etching process, the semiconductor layer 20 grown over the substrate 10 is etched until the n type semiconductor layer is exposed in each device chip region.

(60) In this case, as shown in FIG. 7, a first electrode 30 is then formed. Subsequently, a passivation layer 50 is formed to protect the first electrode 30 and surfaces exposed in accordance with the etching process.

(61) Thereafter, a support layer 40 is formed, as shown in FIG. 8. The support layer 40 may include a reflection electrode, an anti-diffusion layer, and a metal plate made of a metal such as Cu, Ni, or Au.

(62) Subsequently, a process for thinning the substrate 10, performing laser scribing, and separating chips is carried out in the same manner as described above. Each separated chip 100 has a structure as shown in FIG. 9.

(63) Alternatively, device chips may be fabricated by performing, in place of the mesa etching process, a trench etching process in which the semiconductor layer 20 is etched until the substrate 10 is exposed, as shown in FIG. 10.

(64) The remaining processes are identical to those in the above-described case. Each chip 100, which is finally obtained, has a structure as shown in FIG. 11.

(65) As shown in FIG. 12, each chip 100 is bonded to a sub-mount 60 which is separately prepared. The bonding of the chip 100 is carried out such that the first electrode 30 or support layer 40 of the chip 100 is attached to a mounting portion 61 of the sub-mount 60. The first electrode 30 or support layer 40 is electrically connected to electrodes 62 and 63 formed at the mounting portion 61 of the sub-mount 60.

(66) A reflection plate 65 may be formed on a portion of each of the electrodes 62 and 63.

(67) For the sub-mount 60, a substrate made of Si, AlN ceramic, AlO.sub.x, Al.sub.2O.sub.3, or BeO, or a PCB substrate may be used. Zener diodes 64 may be formed at the sub-mount 60, to achieve an improvement in electrostatic discharge (ESD) property.

(68) When static electricity is generated in a device, a high voltage may be applied to the device. In this case, an electrostatic breakdown occurs, so that the characteristics of the device disappear. This phenomenon is called an ESD phenomenon. Such an ESD phenomenon occurs frequently in a procedure of assembling or handling the device in a manual manner or using equipment. Accordingly, it is important to enhance the characteristics of the device by optimizing the structure of the device for eliminating an internal current concentration phenomenon, and thus, achieving an improvement in ESD property (namely, an increase in the electrostatic resistance of the device at a higher voltage).

(69) In detail, such static electricity may be generated during a process for manufacturing a semiconductor, or during a process for mounting the manufactured semiconductor on a PCB.

(70) Static electricity is not always generated. Furthermore, although static electricity is generated, its quantity (voltage and current) is not constant. For this reason, for a quantitative test for static electricity, it is necessary to produce static electricity having constant voltage and current waveforms. For an international standard (for complete products) for standardized static electricity, there is IEC 61000-4-2, EIAJ, MIL STD, -883D, E (3015). The representative standard in Korea is KN61000-4-4 (Korean version of IEC 61000-4-2).

(71) The bonding of the chip 100 to the sub-mount 60 may be achieved using the following method.

(72) In accordance with one method, the unit device chip 100 is mounted on the sub-mount 60 using an adhesive. Thereafter, a pressure is thermally applied to the unit device chip 100, thereby bonding the unit device chip 100 to the sub-mount 60.

(73) In accordance with another method, the unit device chip 100 is aligned with the sub-mount 60, and is mounted on (brought into contact with) the sub-mount 60. Thereafter, bonding is carried out using a frictional heat generated in accordance with ultrasonic vibrations.

(74) In the latter case, the metal plate for the support layer 40 of the chip 100 may be made of Au, and Au balls may be arranged on an area facing the chip 100. When ultrasonic (U/S) bonding is carried out, it is possible to improve bonding characteristics, in particular, thermal characteristics.

(75) FIG. 13 illustrates an example of a 3D through hole interconnection (THI) sub-mount provided with zener diodes 64 to achieve an improvement in ESD property.

(76) As shown in FIG. 13, the sub-mount 60 includes a mount portion 61 to which a light emitting device chip is bonded. A pair of electrodes 62 and 63 are formed at the mounting portion 61. The electrode 62 is a positive electrode to come into contact with the first electrode 30 or support layer 40 of the chip 100, whereas the electrode 63 is a negative electrode to come into contact with a second electrode 70 of the chip 100 which will be described later. Of course, the electrodes 62 and 63 may be arranged at positions opposite to those of the above-described case. Also, the objects, to which the electrodes 62 and 63 are to be bonded, may be changed.

(77) When the zener diodes 64 are coupled to the chip 100 in such a manner that they are coupled to the electrodes 62 and 63 in opposite directions, to exhibit opposite polarities, respectively, a circuit shown in FIG. 14 is established.

(78) That is, in the circuit of FIG. 14, the zener diodes 64 are connected to the chip 100 in parallel in such a manner that the zener diodes 64 are connected to the electrodes 62 and 63 connected to the chip 100 in opposite directions, to exhibit opposite polarities, respectively. When an excessive voltage higher than a breakdown voltage of the zener diodes 64 is applied to the chip 100 in the circuit of FIG. 14, current flows through the zener diodes 64.

(79) As described above, it may be possible to reflect light emitted from the chip 100, using the reflection plate 65 which is separately provided at the mount portion 61 of the sub-mount 60, as described above.

(80) FIG. 15 illustrates light emitting device chips 100 respectively attached to a plurality of sub-mounts 60. The sub-mounts 60 are connected to one another, and form a planar structure. Chips 100 are then attached to the connected sub-mounts 60. Thus, a light emitting device package structure is completely fabricated. The light emitting device package structure is finally separated into individual packages which will be used.

(81) After completion of the bonding of the chip 100 to the sub-mount 60, the substrate 10 is separated from the semiconductor layer 20 by irradiating a laser to the bonded structure at the side of the substrate 10.

(82) That is, an eximer laser is irradiated to the substrate 10. The laser beam passes through the substrate 10, and locally generates heat at the interface between the substrate (sapphire substrate) 10 and the semiconductor layer 20. The generated heat resolves GaN into Ga and N.sub.2 gas at the interface between the sapphire substrate 10 and the GaN layer of the semiconductor layer 20. As a result, the sapphire substrate 10 is separated from the semiconductor layer 20. This process is called a laser lift off process.

(83) Since the separation of the substrate 10 is carried out under the condition in which each chip 100 has been separated from the package structure, but has been still attached to the associated sub-mount 60, it is possible to reduce the processing time and to maintain a superior thin film quality, as compared to the case in which the laser lift off process is carried out under the condition in which the chip 100 has not been separated from the package structure.

(84) This is because, although N.sub.2 gas generated during the laser irradiation is spread toward the semiconductor layer 20, thereby damaging the semiconductor layer 20, in the latter case, such N.sub.2 gas can be discharged out of the chip 100 at the boundary surfaces of the chip 100 under the condition in which the chip 100 has been separated from the package structure, but has been still attached to the sub-mount 60, as in the former case.

(85) After the separation of the substrate 10, a second electrode 70 is formed at a surface of the semiconductor layer 20 exposed in accordance with the separation of the substrate 10, as shown in FIGS. 16 to 18. A wire bonding process is then carried out to connect the second electrode 70 to the negative electrode 63 formed on the sub-mount 60 by a wire 71.

(86) In this case, the second electrode 70 may be an n type electrode.

(87) For the sub-mount 60, a planar sub-mount as shown in FIG. 16, a 3D sub-mount as shown in FIG. 17, or a 3D THI sub-mount as shown in FIG. 18 may be used.

(88) In the case using a planar sub-mount 60 shown in FIG. 16, the light emitting device chip 100 is bonded to electrodes 62 and 63 formed on an upper surface of the planar sub-mount 60. Zener diodes 64 may be formed beneath the electrodes 62 and 63, respectively.

(89) In the case using a 3D sub-mount shown in FIG. 17, the light emitting device chip 100 is bonded to the sub-mount 60, using a structure as shown in FIG. 12.

(90) On the other hand, in the case using a 3D THI sub-mount shown in FIG. 18, a through hole is formed between adjacent sub-mounts. A positive electrode 62 and a negative electrode 63 are then formed to extend along upper and lower surfaces of each sub-mount through the through hole. Zener diodes 64 are formed on the portions of the electrodes 62 and 63 arranged on the lower surface of each sub-mount.

(91) In order to achieve an enhancement in the light emission efficiency of the chip 100, a light extraction pattern, which may have various shapes, may be formed on a light emission surface of the chip 100.

(92) The pattern formation may be achieved using various methods. One method is a method using a patterned sapphire substrate (PSS). In accordance with this method, a patterned structure is formed on a sapphire substrate, in order to grow thin films for fabrication of a desired device.

(93) When the sapphire substrate 10 is separated after the fabrication of the device as described, an irregularity pattern enabling light to be effectively emitted is naturally formed at the light emission surface.

(94) In addition, it is possible to form a micro pattern on the light emission surface, using attachment of PBC (photonic crystals) or nano particles, or nano imprint.

(95) Meanwhile, a white light emitting device may be fabricated by coating phosphors, such as yellow phosphors, over the outer surface of the chip 100 after completion of the fabrication of the device.

(96) In this case, blue light emitted from the GaN-based light emitting device is emitted after being partially absorbed by the yellow phosphors, so that white light is emitted.

(97) The coating of yellow phosphors may be achieved using various methods, for example, a dispensing method, a screen printing method, or a molding method for an epoxy resin mixed with yellow phosphors.

(98) Thereafter, a filler is formed on the sub-mount 60. A lens 80 is then bonded to the sub-mount 60 over the chip 100. The resulting structure, which has been obtained after completion of the above-described processes carried out for a plurality of sub-mounts 60, is separated into individual devices. Thus, packaging of light emitting devices is completed.

Second Embodiment

(99) Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 20 to 30. No description may be given of the processes of the second embodiment identical to those of the first embodiment.

(100) First, a method for manufacturing individual semiconductor light emitting device chips will be described.

(101) As shown in FIG. 20, in order to manufacture a light emitting device chip according to this embodiment, a semiconductor layer 20 having a multilayer structure is formed over a sapphire substrate 10, using a thin film growing method such as a hydride vapor phase epitaxy (HVPE) or a metal organic chemical vapor deposition (MOCVD) method, after formation of a metal buffer layer 90 over the sapphire substrate 10.

(102) The growth of the semiconductor layer 20, which has a multilayer structure, can be achieved by first forming an n type GaN semiconductor layer over the substrate 10, forming an active layer over the n type GaN semiconductor layer, and forming a p type GaN semiconductor layer over the active layer.

(103) A first electrode 30 is then formed on the semiconductor layer 20, as shown in FIG. 21. The first electrode 30 is a p type electrode or an ohmic electrode, and has a reflection electrode function. Accordingly, the first electrode 30 can achieve an enhancement in light emission efficiency as it reflects light emitted from the active layer of the semiconductor layer 20. The first electrode 30 may be made of indium tin oxide (ITO).

(104) A separate support layer 40 may be formed over the first electrode 30. The support layer 40 may include an anti-diffusion layer 41. Where plating is carried out over the first electrode 30, or the support layer 40 is attached to the first electrode 30, a solder, which may be mainly used in this case, may penetrate into the semiconductor layer 20 in a melted state, so that it may adversely affect light emission characteristics. The anti-diffusion layer 41 functions to avoid such a phenomenon.

(105) In order to enable a chip to be bonded to a sub-mount, which will be described later, a plate 42 made of a metal such as Cu, Ni, or Au may be subsequently formed on the anti-diffusion layer 41. For the same purpose, a semiconductor substrate made of, for example, Si, may be attached to the anti-diffusion layer 41.

(106) Thereafter, a process for separating the chip structure fabricated as described above into individual unit device chips is carried out. As shown in FIG. 22, the substrate 10 is first thinned. Scribing is then carried out using a laser, to define regions corresponding to respective unit device chips. Thereafter, a cutting force is applied to the scribed portions of the chip structure in accordance with a mechanical method, thereby causing the chip structure to be separated into individual chips 100.

(107) On the other hand, in accordance with another method for manufacturing individual light emitting device chips, individual device chips may be fabricated using a mesa etching process carried out after the growth of the semiconductor layer 20 which has a multilayer structure, as shown in FIG. 24.

(108) In the mesa etching process, the semiconductor layer 20 grown over the substrate 10 is etched until the n type semiconductor layer is exposed in each device chip region.

(109) In this case, as shown in FIG. 25, a first electrode 30 is then formed. Subsequently, a passivation layer 50 is formed to protect the first electrode 30 and surfaces exposed in accordance with the etching process. Thereafter, a support layer 40 is formed, as shown in FIG. 26. The support layer 40 may include a metal plate made of a metal such as Cu, Ni, or Au.

(110) Subsequently, a process for thinning the substrate 10, performing laser scribing, and separating chips is carried out in the same manner as described above. Each separated chip 100 has a structure as shown in FIG. 27.

(111) Alternatively, device chips may be fabricated by performing, in place of the mesa etching process, a trench etching process in which the semiconductor layer 20 is etched until the substrate 10 is exposed, as shown in FIG. 28.

(112) The remaining processes are identical to those in the above-described case. Each chip 100, which is finally obtained, has a structure as shown in FIG. 29.

(113) As shown in FIG. 30, each chip 100 is bonded to a sub-mount 60 which is separately fabricated. The bonding of the chip 100 is carried out such that the first electrode 30 of the chip 100 is attached to electrodes 62 and 63 formed on a mounting portion 61 of the sub-mount 60.

(114) For the sub-mount 60, a substrate made of Si, AlN ceramic, AlO.sub.x, Al.sub.2O.sub.3, or BeO, or a PCB substrate may be used. Zener diodes 64 may be formed at the sub-mount 60, to achieve an improvement in electrostatic discharge (ESD) property. Also, a reflection plate 65 may be formed to achieve an enhancement in light emission efficiency.

(115) After completion of the bonding of the chip 100 to the sub-mount 60, the substrate 10 is separated from the semiconductor layer 20 by etching the metal buffer layer 90 of the chip 100.

(116) Thereafter, a second electrode is formed at a surface exposed in accordance with the separation of the substrate 10. A packaging process involving a wire bonding process is then carried out. This process is identical to that of the first embodiment.

(117) It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.