Method for manufacturing high-performance and low-power field effect transistor of which surface roughness scattering is minimized or removed

Abstract

Aspects of the present invention relate to a method for manufacturing a high-performance and low-power field effect transistor (FET) element of which surface roughness scattering is minimized or removed, comprising: a first step of etching a strained silicon substrate into a pin structure; a second step of stacking undoped SiGe thereon; a third step of etching the undoped SiGe; a fourth step of etching after performing lithography; a fifth step of stacking doped SiGe thereon; a sixth step of etching the doped SiGe after performing lithography; and a step of forming a transistor element by sequentially stacking an oxide and a gate metal on the doped SiGe and there is an effect of enabling the implementation of a Fin HEMT capable of having all of good channel controllability and a high on-current, which are advantages of a FinFET, and high electron mobility, which is an advantage of an HEMT.

Claims

1. A method for manufacturing a high-performance and low-power field effect transistor element of which surface roughness scattering is minimized or removed, the method comprising: forming a doped SiGe; a first step of etching a strained silicon on an insulator into a pin structure; a second step of stacking undoped SiGe on the strained silicon on the strained silicon having the pin structure; a third step of etching the undoped SiGe; a fourth step of lithographing and then, etching the undoped SiGe; a fifth step of stacking the doped SiGe on the undoped SiGe; a sixth step of etching the doped SiGe in the pin structure after performing lithography; and a seventh step of forming a transistor element by sequentially stacking an oxide and a gate metal on the doped SiGe etched in the pin structure.

2. The method for manufacturing a high-performance and low-power field effect transistor element of which surface roughness scattering is minimized or removed of claim 1, wherein the lithography includes all general semiconductor lithography technologies of photo-lithography or electronic beam lithography.

3. The method for manufacturing a high-performance and low-power field effect transistor element of which surface roughness scattering is minimized or removed of claim 1, wherein the oxide includes all of generally used insulating film materials of silicon oxide (SiO.sub.2) or hafnium oxide (HfO.sub.2).

4. The method for manufacturing a high-performance and low-power field effect transistor element of which surface roughness scattering is minimized or removed of claim 1, wherein the doped SiGe is used as a source/drain.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a perspective view illustrating a manufacturing process of a field effect transistor manufactured by a manufacturing method according to aspects of the present invention.

(2) FIG. 2 is an exploded perspective view of a field effect transistor manufactured by a manufacturing method according to aspects of the present invention.

(3) FIG. 3 is a plan view of the field effect transistor manufactured by the manufacturing method according to aspects of the present invention.

(4) FIG. 4 is a longitudinal cross-sectional view of the field effect transistor manufactured by the manufacturing method according to aspects of the present invention.

DETAILED DESCRIPTION

Best Mode

(5) Hereinafter, a preferred exemplary embodiment of a method for manufacturing a high-performance and low-power channel field effect transistor element of which surface roughness scattering according to the present invention is minimized or removed will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the exemplary embodiment set forth below, and may be embodied in various different forms. The present exemplary embodiments are just for rendering the description of the present invention complete and are set forth to provide a complete understanding of the scope of the invention to a person with ordinary skill in the technical field to which the present invention pertains.

(6) FIG. 1 is a perspective view illustrating a manufacturing process of a field effect transistor manufactured by a manufacturing method according to aspects of the present invention.

(7) As illustrated in FIG. 1, a high-performance and low-power channel field effect transistor element without or minimizing surface roughness scattering according to the present invention is first etched in a pin structure 4 by lithographing strained silicon 1 on an insulator (alternatively, a graded SiGe buffer layer) (a first step). The strained silicon technology as a design technology that forcibly detaches atoms of semiconductor silicon is a technology that electrons may more rapidly move when an atom is detached from another atom to increase performance of a semiconductor.

(8) Next, undoped SiGe 5 in which a dopant is not doped on the strained silicon having the pin structure is stacked (a second step).

(9) Next, the undoped SiGe 5 is etched (a third step).

(10) Next, the undoped SiGe 5 is etched by lithographing a pin (a fourth step).

(11) Next, doped SiGe 6 in which the dopant is doped on the strained silicon 1 on which undoped SiGe 5 is stacked is thickly stacked (a fifth step).

(12) Next, the strained silicon 1 is etched in a Fin structure 4 by lithographing the strained silicon 1 on which the undoped SiGe 5 and the doped SiGe 6 are stacked and the doped SiGe 6 is used as a source 7/a drain 8 (a sixth step).

(13) Next, the undoped SiGe 5 and the doped SiGe 6 are stacked and an oxide and a metal are sequentially stacked on the strained silicon 1 etched in the pin structure 4 to complete a field effect transistor element 10 of the present invention, which is implemented as a FinHEMT using the oxide (a seventh step).

Mode for Invention

(14) FIG. 2 is an exploded perspective view of a field effect transistor manufactured by a manufacturing method according to aspects of the present invention and FIG. 3 is a plan view of the field effect transistor manufactured by the manufacturing method according to aspects of the present invention.

(15) As illustrated in FIGS. 2 and 3, after the sixth step in which the strained silicon 1 on which the undoped SiGe 5 and the doped SiGe 6 are stacked is etched in the pin structure 4, while one side of the doped SiGe 6 is made of the source 7 and the other side of the doped SiGe 6 is made of the drain 8, the oxide 2 is stacked and a gate metal 9 is stacked throughout the oxide 2 to complete the field effect transistor element 10 of aspects of the present invention.

(16) FIG. 4 is a longitudinal cross-sectional view of the field effect transistor manufactured by the manufacturing method according to aspects of the present invention.

(17) As illustrated in FIG. 4, the field effect transistor 10 manufactured by the manufacturing method according to aspects of the present invention is configured by sequentially stacking the strained silicon 1 having the pin structure, the undoped SiGe 5, the doped SiGe 6, the oxide 2, and the gate metal 9.

(18) Leakage current between the doped SiGe 6 and the gate metal 9 is suppressed with the oxide 2 and electrons which are transferred from the doped SiGe 6 are collected in the strained silicon 1 channel to acquire fast electrons. Further, low contact resistance is acquired and the process procedure is simplified by using the thickly stacked doped SiGe 6 (one material) as the source/drain.

(19) The method for manufacturing a high-performance and low-power field effect transistor element of which surface roughness scattering is minimized or removed according to aspects of the present invention has been described as above with reference to the illustrated drawings, but the present invention is not limited by the exemplary embodiment and the drawings disclosed in the present specification and various modifications can be made by those skilled in the art within the scope of the technical spirit of the present invention, of course.

Industrial Applicability

(20) The present invention can be usefully used as a high-performance and low-power field-effect transistor element which can implement a FinHEMT capable of taking both the good channel controllability and the high on-current which are advantages of the FinFET and the high electron mobility which is the advantage of the HEMT.

(21) Further, aspects of the present invention can be usefully used as a high-performance and low-power field-effect transistor element capable of achieving the simple process procedure in spite of the HEMT structure by using the doped SiGe as the source/drain.