CHARGED PARTICLE FILTER

Abstract

A charged particle filter includes a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets positioned around the bore, with a gap between the two magnets, the two magnets each having a linear central section and two ends, each end forming a curved surface, the curved surface having an aspect ratio defined by a height in a range of between one tenth and ten times the gap between the two magnets, and a width in a range of between one tenth and ten times the gap.

Claims

1.-30. (canceled)

31. A charged particle filter comprising a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets separated by a gap each magnet having a substantially curved inner surface facing the opposing magnet, wherein a shape of each of the substantially curved inner surfaces is described by a trigonometric function.

32. The charged particle filter of claim 31, wherein the substantially curved inner surfaces have a radius of curvature in a range of between one tenth and ten times the gap between the two magnets.

33. The charged particle filter of claim 31, wherein the substantially curved inner surfaces have a radius of curvature in a range of between one half and two times the gap between the two magnets.

34. The charged particle filter of claim 31, wherein the gap between the two magnets is in a range of between 1 mm and 20 mm.

35. The charged particle filter of claim 31, wherein the gap between the two magnets is in a range of between 4 mm and 10 mm.

36. The charged particle filter of claim 31, wherein the magnets comprise permanent magnets.

37. The charged particle filter of claim 36, wherein the permanent magnets comprise a sintered neodymium-iron-boron (NdFeB) material.

38. A particle analyzer comprising: a charged particle filter including a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets separated by a gap each magnet having a substantially curved inner surface facing the opposing magnet, wherein a shape of each of the substantially curved inner surfaces is described by a trigonometric function; and a detector positioned upon the axis facing the detector end of the magnetic deflector.

39. The particle analyzer of claim 38, wherein the substantially curved inner surfaces have a radius of curvature in a range of between one tenth and ten times the gap between the two magnets.

40. The particle analyzer of claim 38, wherein the substantially curved inner surfaces have a radius of curvature in a range of between one half and two times the gap between the two magnets.

41. The particle analyzer of claim 38, wherein the gap between the two magnets is in a range of between 1 mm and 20 mm.

42. The particle analyzer of claim 38, wherein the gap between the two magnets is in a range of between 4 mm and 10 mm.

43. The charged particle filter of claim 38, wherein the magnets comprise permanent magnets.

44. The charged particle filter of claim 43, wherein the permanent magnets comprise a sintered neodymium-iron-boron (NdFeB) material.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] FIG. 1 is a schematic illustration of a prior art arrangement of components in the vicinity of a sample in a scanning electron microscope.

[0012] FIG. 2A is a schematic illustration of a side view of an exemplary charged particle filter.

[0013] FIG. 2B is a schematic illustration of a perspective front view of an exemplary charged particle filter.

[0014] FIG. 3A is a schematic illustration of a perspective side view of an end of a magnet including a cylindrical curved surface of an exemplary charged particle filter.

[0015] FIG. 3B is a schematic illustration of a perspective side view of an end of a magnet including a elliptical curved surface of an exemplary charged particle filter.

[0016] FIG. 3C is a schematic illustration of a perspective side view of an end of a magnet including a parabolic curved surface of an exemplary charged particle filter.

[0017] FIG. 3D is a schematic illustration of a perspective side view of an end of a magnet including a hyperbolic curved surface of an exemplary charged particle filter.

[0018] FIG. 3E is a schematic illustration of a perspective side view of a magnet including symmetrical cylindrical curved surfaces of an exemplary charged particle filter.

[0019] FIG. 3F is a schematic illustration of a perspective side view of an end of a magnet including a curved surface described by a cosine function of an exemplary charged particle filter.

[0020] FIG. 3G is a schematic illustration of a perspective side view of an end of a magnet including a curved surface described by a tangent function of an exemplary charged particle filter.

[0021] FIG. 3H is a schematic illustration of a perspective side view of an end of a magnet including a curved surface described by a secant function of an exemplary charged particle filter.

[0022] FIG. 3I is a schematic illustration of a perspective side view of an end of a magnet including a curved surface described by a cubic function of an exemplary charged particle filter.

[0023] FIG. 3J is a schematic illustration of a perspective side view of an end of a magnet including a curved surface that is convex with respect to the bore of an exemplary charged particle filter.

[0024] FIG. 4 is a schematic illustration of a perspective side view of a magnet including asymmetrical curved surfaces of an exemplary charged particle filter.

[0025] FIG. 5 is a schematic illustration of a perspective side view of an end of a magnet including a slanted surface of an exemplary charged particle filter.

[0026] FIG. 6 is a schematic illustration of a perspective side view of an end of a magnet including two curved surfaces of an exemplary charged particle filter.

[0027] FIG. 7 is a schematic illustration of a side view of an exemplary particle analyzer.

[0028] Like reference numerals refer to corresponding parts throughout the several views of the drawings.

DETAILED DESCRIPTION OF EMBODIMENTS

[0029] In the description of the invention herein, it is understood that a word appearing in the singular encompasses its plural counterpart, and a word appearing in the plural encompasses its singular counterpart, unless implicitly or explicitly understood or stated otherwise. Furthermore, it is understood that for any given component or embodiment described herein, any of the possible candidates or alternatives listed for that component may generally be used individually or in combination with one another, unless implicitly or explicitly understood or stated otherwise. Moreover, it is to be appreciated that the figures, as shown herein, are not necessarily drawn to scale, wherein some of the elements may be drawn merely for clarity of the invention. Also, reference numerals may be repeated among the various figures to show corresponding or analogous elements. Additionally, it will be understood that any list of such candidates or alternatives is merely illustrative, not limiting, unless implicitly or explicitly understood or stated otherwise. In addition, unless otherwise indicated, numbers expressing quantities of ingredients, constituents, reaction conditions and so forth used in the specification and claims are to be understood as being modified by the term about.

[0030] Accordingly, unless indicated to the contrary, the numerical parameters set forth in the specification and attached claims are approximations that may vary depending upon the desired properties sought to be obtained by the subject matter presented herein. At the very least, and not as an attempt to limit the application of the doctrine of equivalents to the scope of the claims, each numerical parameter should at least be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the subject matter presented herein are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical values, however, inherently contain certain errors necessarily resulting from the standard deviation found in their respective testing measurements.

[0031] In one embodiment shown in FIG. 2A, a charged particle filter 200 includes a magnetic deflector 210 having a bore 220 along an axis thereof passing through the magnetic deflector 210 from a sample end 230 to a detector end 240 of the magnetic deflector 210, and through which bore 220 charged particles pass when in use in an electron microscope 100. A comparison to an X-ray detector 105 using rectangular magnets is also shown in FIG. 2A. With the axis of the bore 220 at the same angle (30) with respect to the plane of the sample 101 as the axis of the bore 106, the distance C of detector end 240 of the magnetic deflector 210 to the sample 101 is less than the corresponding distance D of the detector 105 to the plane of the sample 101 at a distance E between the face of the detector 104 and the sample 101 without colliding with the final pole piece 104, which is highly advantageous for the reasons described above.

[0032] Turning to FIG. 2B, the magnetic deflector 210 of the charged particle filter 200 is formed from two magnets 250 and 260 positioned around the bore 220. In principle, the magnets could be electromagnets, although permanent magnets are considered to be more practical for the present application. A variety of magnetic materials are suitable for the two magnets 250 and 260, such as, for example, sintered neodymium-iron-boron (NdFeB) with a maximum energy product of 50 MGOe available from, for example, Dexter Magnetic Technology (Elk Grove Village, Ill.).

[0033] Turning back to FIG. 2B, the linear sections 280 and 281 of the two magnets 250 and 260, respectively, are located symmetrically with respect to the bore 220 and each have two ends 285, 295, and 286, 296, each end forming a curved surface around the bore 220, with a gap 270 between the two magnets 250 and 260. The linear central sections 280 and 281 are typically oriented parallel to the plane of the sample 101 (see FIG. 2A). The gap 270 between the two magnets 250 and 260 can be in a range of between 1 mm and 20 mm, such as a gap in a range of between 4 mm and 10 mm. In some embodiments, the gap 270 can be a gap of 1.5 mm, 2.0 mm, 2.5 mm, 3.0 mm, 3.5 mm, 4.0 mm, 4.5 mm, 5.0 mm, 5.5 mm, 6.0 mm, 6.5 mm, 7.0 mm, 7.5 mm, 8.0 mm, 8.5 mm, 9.0 mm, 9.5 mm, 10.0 mm, 10.5 mm, 11.0 mm, 11.5 mm, 12.0 mm, 12.5 mm, 13.0 mm, 13.5 mm, 14.0 mm, 14.5 mm, 15.0 mm, 15.5 mm, 16.0 mm, 16.5 mm, 17.0 mm, 17.5 mm, 18.0 mm, 18.5 mm, 19.0 mm, or 19.5 mm. In a specific embodiment, the gap 270 is 6.6 mm.

[0034] A plurality of shapes and combinations of shapes are suitable for the curved surfaces of the ends 285, 295, and 286, 296 of the two magnets 250 and 260, respectively. In the description of the curved surfaces and associated figures described below, when one end of a magnet is shown for clarity, the other end of the magnet can be formed from any one of the curved surfaces described herein, and the four ends 285, 295, and 286, 296 can be formed from different curved surfaces from one another, unless otherwise specified. As shown in FIG. 3A, the curved surface 310 has an aspect ratio defined by a height 315 in a range of between one tenth and ten times the gap 270 (shown in FIG. 2B) between the two magnets 250 and 260, and a width 325 in a range of between one tenth and ten times the gap 270. In some embodiments, the curved surface of one end 285, 295, or 286, 296 of each of the two magnets 250 and 260, respectively, is a conic section, such as a cylindrical curved surface 310, as shown in FIG. 3A, an elliptical curved surface 320, as shown in FIG. 3B, a parabolic curved surface 330, as shown in FIG. 3C, or a hyperbolic curved surface 340, as shown in FIG. 3D. The curved surfaces can be tangent to the linear central section 280, as shown in FIGS. 3A-3D, or offset from the linear central section (not shown). In some embodiments, the curved surface of both ends 285, 295, and 286, 296 of each of the two magnets 250 and 260, respectively, can be a conic section as described above.

[0035] In certain embodiments, the cylindrical curved surface 310 has a radius of curvature in a range of between one tenth and ten times the gap 270 between the two magnets 250 and 260, such as a radius of curvature in a range of between one half and two times the gap 270 between the two magnets 250 and 260. In the specific embodiment described above, the cylindrical curved surface 310 of both ends 285 and 295 has a radius of curvature of 12 mm, as shown in FIG. 3E (and a corresponding gap of 6.6 mm as described above).

[0036] In certain embodiments, the curved surface of one end 285, 295, or 286, 296 of the two magnets 250 and 260, respectively, is described by a trigonometric function, such as a curved surface 350 described by a cosine function, as shown in FIG. 3F, a curved surface 360 described by a tangent function, as shown in FIG. 3G, a curved surface 370 described by a secant function, as shown in FIG. 3H, and their respective inverse functions (sine, cotangent, cosecant). In some embodiments, the curved surface of both ends 285, 295, and 286, 296 of the two magnets 250 and 260, respectively, is described by a trigonometric function as described above. In some other embodiments, as shown in FIG. 3I, the curved surface 380 of one or both ends 285, 295, and 286, 296 of the two magnets 250 and 260, respectively, is described by a cubic function. In certain embodiments, the curved surface of one or both ends is described by a sum of two or more functions, such as a Fourier series of sine and cosine functions, or a power series function (ax+bx.sup.2+cx.sup.3+ . . . ). In another embodiment, shown in FIG. 3J, a curved surface 390 is convex with respect to the bore 220.

[0037] In some embodiments, as shown in FIG. 4, the curved surface 410 of one end 285, 286 of each of the two magnets 250 and 260, respectively, is described by a different function from the curved surface 420 of the other end 295, 296 of each of the two magnets 250 and 260, respectively. The two curved surfaces 410 and 420 can be described by any combination of the curved surfaces described above.

[0038] The surfaces of the ends of the two magnets forming the magnetic deflector can be formed from a plurality of surfaces. In another embodiment, a charged particle filter includes a magnetic deflector as described above, except that each of the two magnets 250 and 260 have one end 285, 296 or 286, 296, as shown in FIG. 5, that forms a slanted surface 510 around the bore. In some embodiments, both ends 285, 295, and 286, 296 form a slanted surface 510 around the bore. The slanted surface 510 can have a slope in a range of between 0.1 and 10.0, such as a slope in a range of between 0.5 and 2.0. In some embodiments, the slanted surface 510 can have a slope of 0.1, 0.2, 0.3, 0.4, 0.5, 1.0, 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, 5.0, 5.5, 6.0, 6.5, 7.0, 7.5, 8.0, 8.5, 9.0, 9.5, or 10.0.

[0039] In yet another embodiment, a charged particle filter includes a magnetic deflector as described above, except that each of the two magnets 250 and 260 have one end 285, 295, or 286, 296, as shown in FIG. 6, that forms two curved surfaces 610 and 620 around the bore. The two curved surfaces 610 and 620 can include a conic section, a trigonometric function, or any combination of curved surfaces described above. Curved surfaces including more than two curved surface segments, and including slanted surface segments as described above, are also suitable.

[0040] In still another embodiment shown in FIG. 7, a particle analyzer 700 includes a charged particle filter 200 as described above and a particle detector 710 positioned upon the axis facing the detector end 240 of the magnetic deflector 210. The particle analyzer 700 further includes a housing 720, a flux return 730, and a collimator 740. A variety of X-ray detectors are suitable for the particle detector 710, available from, for example, PN Detector (Munich, Germany).

Other Embodiments

[0041] A number of embodiments have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the disclosure. Accordingly, other embodiments are within the scope of the following claims.