FILTER STACK FOR A THOMSON PARABOLA SPECTROMETER
20230077828 · 2023-03-16
Inventors
Cpc classification
H01J49/466
ELECTRICITY
International classification
Abstract
A filter stack for a Thomson Parabola spectrometer, the filter stack having at least one filter foil of a filter material, wherein the filter foil is shaped to have stripes of a respective stripe size made of the filter material and gaps of a respective controlled gap size free of the filter material between the stripes or without gaps.
Claims
1. A filter stack for a Thomson Parabola spectrometer, the filter stack having at least one filter foil of a filter material, wherein the filter foil is shaped to have stripes of a respective stripe size made of the filter material, with gaps of a respective controlled gap size free of the filter material between the stripes or without gaps.
2. The filter stack according to claim 1, wherein: the stripes are parallel, or the stripes are curved and have a constant width, or the stripes are curved and have a varying width.
3. The filter stack according to claim 1, wherein the gaps are enclosed on at least three sides by the filter material.
4. The filter stack according to claim 1, wherein the stripe sizes and the gap sizes of the filter foil are configured to result in selectively filtering and not filtering at least one type of particle of a potential beam of particles with equal charge-over-mass ratio to be analyzed.
5. The filter stack according to claim 1, wherein the filter thickness in certain regions of the filter stack is changed to adjust the attenuation of the particle beam.
6. The filter stack according to claim 1, wherein the gaps are cut[A1] into the filter foil for the filter foil to be shaped to have the stripes and gaps.
7. The filter stack according to claim 1, wherein the filter stack further comprises a frame, the frame comprising at least one guiding pin, and the filter foil[A2] is configured to be assembled onto the frame, wherein the filter foil comprises at least one guiding opening for receiving the at least one guiding pin.
8. The filter stack according to claim 1, wherein the filter foil is made of a high voltage (HV)-compatible material.
9. A method of manufacturing a filter stack for a Thomson Parabola spectrometer according to claim 1, the method comprising the step of cutting a filter foil, so that the filter foil is shaped to have stripes of a respective stripe size made of the filter material and gaps of a respective controlled gap size free of the filter material between the stripes.
10. The method according to claim 9, wherein one or more additional holes are manufactured into the filter foils to be used for alignment purposes.
11. The method according to claim 9, wherein the cutting of the filter foil is a laser-cutting of the filter foil.
12. The method according to claim 9, further comprising determining the stripe sizes, stripe shapes and positions of the stripes, and gap sizes, gap shapes and positions of the gaps based on at least one of two types of charged particles with equal charge-over-mass ratio to be analyzed by the Thomson Parabola spectrometer, stopping ranges of the elements, and parameters of the Thomson Parabola spectrometer.
13. The method according to claim 12, wherein the stripe sizes, stripe shapes and the positions of the stripes, and gap sizes, gap shapes and the positions of the gaps are determined such that, according to the stopping ranges of the two types of charged particles with equal charge-over-mass ratio to be measured and the parameters of the Thomson Parabola spectrometer, the filter stack used with the Thomson Parabola spectrometer filters at least one of the elements to be measured.
14. The method according to claim 12, wherein the determining of the stripe sizes, the stripe shapes and positions of the stripes, and the gap sizes, gap shapes and positions of the gaps further includes considering a distribution of the stripes and gaps to be balanced regarding filtering and non-filtering parts of the filter based on an energy-position dispersion of the Thomson Parabola spectrometer.
15. A Thomson parabola method for analyzing a beam of particles, the beam comprising two types of charged particles with equal charge-over-mass ratio, using a Thomson Parabola spectrometer, the method comprising the steps of: filtering the beam of particles using a filter stack according to claim 1, and analyzing the beam of particles using a detector plate.
16. The filter stack according to claim 5, wherein the filter thickness of the filter stack is changed in the regions of the filter stack for filtering neutral particles.
17. The filter stack according to claim 6, wherein the gaps are laser-cut into the filter foil.
18. The filter stack according to claim 7, wherein the filter foil is a plurality of the filter foils, and each of the filter foils comprises at least one guiding opening for receiving the at least one guiding pin.
19. The filter stack according to claim 8, wherein the filter foil is made of a polymer.
20. The filter stack according to claim 19, wherein the filter foil is made of a thermoset polymer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Embodiments of the present disclosure, which are presented for better understanding the disclosed concepts, but which are not to be seen as limiting the claims, will now be described with reference to the figures in which:
[0009]
[0010]
[0011]
[0012]
[0013]
[0014]
[0015]
[0016]
DETAILED DESCRIPTION
[0017]
[0018] In particular,
[0019] A filter stack 1 according to embodiments of the present disclosure resolves this complication by allowing to filter the different particles with same charge-over-mass ratio such that the ambiguity can be resolved, thus allowing a TPS to be used also in such scenarios to provide reliable and detailed information about the different types of particles, for example, about the spectra. In other words, the filter stack 1 allows to resolve the “blindness” of the instrument to different ions with same charge-over-mass ratio. In very general terms, this is achieved since different particles with the same charge-over-mass ratio have different masses and accordingly are stopped by matter, i.e., the filter, differently. Therefore, the filter stack 1 can stop certain particle types while not stopping the other particle types, thereby differentiating between the particles. Furthermore, more than one filter stack 1 may be used in combination to extend this concept to more than two types of particles with the same charge-over-mass ratio. Such a scenario could be achieved by having a first filter stack 1 configured to transmit the two lightest ion species from the plasma mixture and a second filter stack 1 after the first stack, for example right behind it, that filter only the lightest ion species. In this way, three different curves could be measured and interpolated individually.
[0020]
[0021] That is, the filter stack 1 for a Thomson Parabola spectrometer may have at least one filter foil 10 of a filter material, wherein the filter foil 10 is shaped to have stripes 101 of a respective stripe size made of the filter material and gaps 102 of a respective controlled gap size free of the filter material between the stripes 101 or without gaps.
[0022] The sizes of the stripes 101 and the gaps 102 may be controlled in view of the goal to separate two types of particles with same charge-over-mass ratio as discussed elsewhere in this document.
[0023] In line with
[0024] As described above, the filter stack 1 according to an embodiment of the present disclosure may contain gaps 102 that are enclosed on at least three sides, preferably enclosed on all sides, by the filter material. More preferably, the gaps 102 are rectangularly shaped.
[0025] Regarding the manufacturing, the gaps 102 of a filter stack 1 according to an embodiment of the present disclosure are cut into the filter foil 10 for it to be shaped to have the stripes 101 and gaps 102. In particular, the use of a thermoset polymer as a foil material allows to use laser cutting. This allows for an easy and variable but also very precise production of the individual filter foils 10 and in consequence the filter stack 1 as a whole.
[0026] Moreover, the manufacturing method allows to position alignment holes 104 which can be used to precisely position the assembled filter stack 1 relative to the TPS, in particular using an alignment laser beam.
[0027] Moreover, the manufacturing method allows to make a conventional differential filter, i.e., with a stair-step thickness profile and with no gaps.
[0028] Moreover, the filter foil 10 may be made of a HV-compatible material, in particular of a polymer. Here, HV refers to high voltage; that is, the filter foil may be made of a high voltage compatible material. This may be particularly advantageous in scenarios of high voltages when compared to conventional filter using metals. Polymers are HV-compatible since they show little-to-no interaction with high voltages and thus are not affected by high voltages. An example for such a polymer is polyimide. A further advantage of using a polymer as filter material is that it can easily be used in laser-cutting, thus allowing for high precision manufacturing. High precision manufacturing may be particularly advantageous in small TPS instruments.
[0029] Furthermore and in line with the above, the present disclosure also provides a Thomson parabola method for analyzing a beam of particles, the beam comprising two types of charged particles with equal charge-over-mass ratio, using a Thomson Parabola spectrometer. The method comprises the steps of filtering the beam of particles using a filter stack 1 according to an embodiment of the present disclosure, and analyzing the beam of particles using a detector plate. As discussed above, the filter stack 1 can be used to resolve the “blindness” beyond charge-over-mass ratio and thus provide, for example, more resolved spectra.
[0030]
[0031]
[0032] In line with the above, the stripe sizes and the gap sizes of the filter foil 10 of a filter stack 1 according to an embodiment of the present disclosure are configured to result in selectively filtering and not filtering at least one type of particle of a potential beam of particles with equal charge-over-mass ratio to be analyzed.
[0033] In the case that the beam of particles also contains neutral particles that are not deflected by the magnetic field or the electric field of the TPS, these neutral particles are also part of the measured data. In some scenarios, this may lead to a very bright spot on the detector plane which might influence the quality of the measurement results. Accordingly, if this data is not of particular interest, it may be appropriate to filter it out. Accordingly, in an embodiment of the present disclosure, the filter thickness in certain regions of the filter stack 1 is changed to adjust the attenuation of the particle beam, preferably in the regions of the filter stack 1 filtering neutral particles. In other words, by providing a filter foil 10 with high thickness where the neutral particles are expected, the flux of these neutral particles may be adjusted before reaching the detector plate. Moreover, this may also filter out X-ray radiation, which may be a relevant background radiation as well.
[0034]
[0035] More specifically,
[0036] Furthermore,
[0037] Next,
[0038] This configuration shown in
[0039] From this, it can be understood that in an embodiment of the present disclosure the method of analyzing the beam further comprises determining the shapes, sizes and positions of the stripes 101 and the shapes, sizes and positions of the gaps 102 based on at least one of two types of charged particles with equal charge-over-mass ratio to be analyzed by the Thomson Parabola spectrometer, stopping ranges of the elements, and parameters of the Thomson Parabola spectrometer.
[0040] Moreover, according to a further embodiment of the present disclosure in the method of analyzing the beam the stripe sizes and the positions of the stripes 101 and the gap sizes and the positions of the gaps 102 may be determined such that, according to the stopping ranges of the two types of charged particles with equal charge-over-mass ratio to be measured and the parameters of the Thomson Parabola spectrometer, the filter stack 1 used with the Thomson Parabola spectrometer filters at least one of the elements to be measured.
[0041] In addition, in a further embodiment of the present disclosure, the determination of the stripe sizes and positions of the stripes 101 and the determination of the gap sizes and positions of the gaps 102 may further include considering a distribution of the stripes 101 and gaps 102 to be balanced regarding filtering and non-filtering parts of the filter based on the energy-position dispersion of the Thomson Parabola spectrometer.
[0042] It is clear that this procedure described in the context of the above
[0043]
[0044]
[0045] Accordingly, in a filter stack 1 according to the present disclosure, the filter stack 1 further comprises a frame 11, the frame preferably comprising at least one guiding pin 111, and the filter foil 10, preferably a plurality of the filter foils 10, is configured to be assembled onto the frame 11, in particular in that each of the filter foils 10 comprises at least one guiding opening 112 for receiving the at least one guiding pin 111.
[0046]
[0047] Accordingly, the present disclosure also comprises a method of manufacturing a filter stack 1 for a Thomson Parabola spectrometer, in particular according to any of the filter stacks 1 discussed elsewhere in this document, the method comprising the step of cutting a filter foil 10, so that the filter foil 10 is shaped to have stripes 101 of a respective stripe size made of the filter material and gaps 102 of a respective controlled gap size free of the filter material between the stripes. Moreover, the cutting of the filter foil 10 may be a laser-cutting of the filter foil 10.
[0048]
[0049]
[0050] Although detailed embodiments have been described, these only serve to provide a better understanding of the present disclosure and are not to be seen as limiting to the claims.
[0051] The various embodiments described above can be combined to provide further embodiments. These and other changes can be made to the embodiments in light of the above-detailed description. In general, in the following claims, the terms used should not be construed to limit the claims to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled.