Device for Precision Displacement

Abstract

A device for performing a precision movement comprising a plate composed of piezoelectric material and comprising electrodes which are provided at mutually opposite and preferably parallel planes, are connectable to a controlled voltage source having electrical voltage and in this case bring about a change in the form and/or mass of the plate is characterized in that at least one of the electrodes is designed in an elastic fashion to form a base module.

Claims

1. A device for performing a precision movement, comprising: a plate made of a piezoelectric material; electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode, a device bottom; a first console extending at right angles to the device bottom; and a T-shaped second console having a crossbeam portion with the top layer thereon and a web portion adjacent to the crossbeam portion at right angles thereto, wherein at least one of the electrodes is a portion of an elastic base module, the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, and the base module is arranged between the web portion of the second console and the first console in a manner that permits the second console to be displaced relative to the first console in response to application of voltage to the based module.

2. The device according to claim 1, wherein the first console is formed in a U-shape with at least one leg of the first console extending at right angles to the device bottom on a side of the second console web portion opposite the base module, and a further base module having a same orientation of crystal axes as the base module is arranged between the at least one leg of the first console on the opposite side of the web portion of the second console and the web portion of the second console such that the plates of the base modules move all in the same direction when voltage is applied.

3. A device for performing a precision movement, comprising: a plate made of a piezoelectric material; electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode, a device bottom; an L-shaped first console extending at right angles to the device bottom and having at least one first portion extending parallel to the device bottom; a U-shaped second console having two parallel U-shaped legs interconnected by a U-shaped web portion arranged at right angles to the device bottom, wherein wherein at least one of the electrodes is a portion of an elastic base module, the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, a first leg of the two U-shaped legs closest to the device bottom extends parallel to the first portion of the first console between the device bottom and the first portion, a second leg of the two U-shaped legs the second U-shaped leg extends parallel to the first portion of the first console on a side of the first portion facing away from the device bottom, the base module is arranged between the first leg of the second console and the first portion of the first console that is parallel to the device base, and a further base module having the same orientation of crystal axes as the base module is arranged between a side of the second leg of the two U-shaped legs facing away from the device bottom and the top layer such that a movement of the plates parallel to the first portion of the first console and the two U-shaped legs occurs in a same direction at right angles thereto when voltage is applied.

4. A device for performing a precision movement, comprising: a plate made of a piezoelectric material; electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode, a device bottom; a first console extending at right angles to the device bottom; and a T-shaped second console having a crossbeam portion with the top layer thereon and a web portion adjacent to the crossbeam portion at right angles thereto, wherein at least one of the electrodes is a portion of an elastic base module, the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes, an intermediate layer is arranged between the top layer and a top side of a topmost layer of the base module electrodes facing the top layer, temperature coefficients of expansion of the device bottom and the intermediate layer correspond to one another, and a plurality of base modules having the same orientation of crystal axes are arranged between the device bottom and the intermediate layer at an intermediate distance between each of the plurality of base modules in a direction parallel to the device bottom.

5. The device according to claim 4, wherein a mark is attached to top layer.

6. The device according to claim 4, wherein at least one gap is formed between at least one intermediate space between pairs of the plurality of base modules through the intermediate layer and the top layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0042] FIG. 1 shows the general view of the device in a schematic and simplified fashion.

[0043] FIG. 2 shows the stages of the operation of the plate made of a piezoelectric material and the deformation of the form thereof when a displacement is made in the direction of the parallel plane of the electrodes.

[0044] FIG. 3 shows the general view of the device in the embodiment of the development in a schematic and simplified fashion.

[0045] FIG. 4 shows the general view of the device in the embodiment according to FIG. 3 including two plates made of a piezoelectric material in a schematic and simplified fashion.

[0046] FIG. 5 is a view of the device of a further embodiment.

[0047] FIG. 6 is a view of the device of yet another embodiment.

[0048] FIG. 7 shows the general view of the device in a last embodiment of the invention in a schematic and simplified fashion.

DETAILED DESCRIPTION

[0049] Example 1. The device for precision movement (FIG. 1) contains a bottom 1, to which a group of plates made of a piezoelectric material 2 is attached, said plates being separated by electrodes 3 and forming a base module 10 each. A reading or protecting area or plane 4 can be applied to the upper fixed, non-elastic electrode 3.1 of the upper plate. The lowermost plate 2 is also fixed to the bottom 1 via a fixed, non-elastic electrode 3.2.

[0050] A piezoelectric material can be any material, also a polycrystalline one. However, the use of monocrystals having a low degree of hysteresis and creep strain is most useful. It is thus possible to use monocrystals of lithium niobate, strontium-barium-niobate, barium-sodium-niobate and other crystals having a piezo effect. Elastic electrodes 3 having a thickness below 0.5 m are applied to two opposite sides of the plate 2 by known methods. It is most suitable to use Cr, Cu or In as an electrode material. A reading or protecting layer or plane 4 made of sapphire or of a diamond-like material is applied to the surface of the upper one of the electrodes.

[0051] The device is used as follows:

[0052] At first, the dependence of the change in the dimensions of the device for precision movement on the voltage which is applied to the electrodes, is polarized identically and has the same value is measured, i.e. a scaling diagram is produced. A scaling diagram is produced by applying a determination voltage to the electrodes of the device and by measuring the corresponding displacement of the reading or protecting layer or plane 4 of the group of piezoelectric plates in the form of the base module.

[0053] The displacement is measured according to known methods by means of the region 3D of a laser-assisted interferometric system for measuring nano movements (on the basis of an atomic force microscope and three laser interferometers).

[0054] In order to measure a displacement of the rectangular area relative to the electrodes, the device must be arranged in the system for measuring nano movements. The microscopic probes have to be approached to the face of the device at a distance at which the stabilization system operates. It is necessary to apply a voltage to the device and measure the distance by which the plane 4 of the device has been displaced when the voltage is applied. Then, the value of the applied voltage has to be changed and the value of the displacement of the surface of the device has to be measured again.

[0055] As a result of several measurements of the displacement, which are made with various voltage values, a results table showing the experimental measurements is to be drafted on the basis of which a scaling diagram is drafted that shows the dependency of the value regarding the displacement of the area of the device in the direction of the rectangular area of the electrodes on the value of the applied voltage.

[0056] Different measuring apparatuses can be scaled by means of the device according to the invention.

[0057] For scaling any groups (e.g. of a probe microscope) along the normal relative to the investigated area, the recommended device for precision measurement is placed therein. For example, if a scanning probe microscope shall be scaled, the device has to be arranged on a corresponding table of a scanning probe microscope, and it is required to plot the marking of the probes on the face of the device to the distance of the distance (at the order of 0.5 nm) between the upper probe and the face, where the stabilization system operates. The stabilization of the probe can be determined by stabilizing the tunneling current (when operating under tunneling microscope conditions) or by stabilizing the value of the force which acts on the probes (when operating under atomic force microscope conditions). The stabilization of the distance is determined by means of an electron control system which produces the congruence of the signals of the measuring instruments with the predetermined values and the control signals.

[0058] When the tested measuring instrument is scaled in the vertical, a fixed voltage is applied to the electrodes of the device for precision movement, which ensures the displacement in the vertical. Here, the area of the device is displaced by a value which is determined according to the scaling table. The stabilization system of the distance ensures a corresponding displacement of the probe to the distance to which the area of the pattern is displaced. The value of the probe displacement is measured by the measuring instrument of the probe microscope. In this way, the value of the display of the measuring instruments of the probe microscope, which measure the distance and on which the probe is displaced, is compared with the corresponding value of the distance, which is taken from the scaling curve to which the area of the device is displaced. Then, the voltage which is applied to the device is changed and the measuring operation is repeated. As a result of measurements made several times with different voltage values, a table is drafted and reflects the ratio of the displacement value of the device and the device display of the probe microscope which measured the probe movement.

[0059] Example 2. The device for precision movement (FIG. 3) contains a bottom 1, to which a plate 2 made of a piezoelectric material is connected. According to the invention, also only non-elastic fixed electrodes 3, 3.2 are applied to the plate thereby forming the base module (10). The plate 2 is connected to the bottom 1 by means of the console 6. The fixed, non-elastic electrode 3.2 is connected to the vertical area thereof. The second electrode 3 of the plate is attached to the second console 5 (T-shaped in the drawing) to which the reading area 4 is attached.

[0060] Any known material, also polycrystalline one, can be used as a piezoelectric material. However, it is most useful to use monocrystals having a low degree of hysteresis and creep strain. Thus, it is possible to use monocrystals of lithium niobate, tantalum-lithium, strontium-barium-niobate, barium-sodium-niobate and others which show the piezo effect. Electrodes 3 made of Cr, Cu or In are applied to two opposite plates 2 according to known methods.

[0061] The device operates as follows: When a voltage from a source is applied to electrodes 3 (not shown in the drawings), the plate 2 made of a piezoelectric material is deformed as shown in FIG. 2. As a result, the T-shaped console 5 is moved up or down in relation to the bottom 1, depending on the applied voltage.

[0062] Example 3. The device for precision movement (FIG. 4) contains a bottom 1 to which two identical plates 2 made of a piezoelectric material are connected. According to the invention, also only non-elastic fixed electrodes 3, 3.2 are applied to the plates. The connection of the plates 2 to the bottom 1 is determined by means of identical consoles 6. Each of these plates is connected to the vertical areas of the consoles via one of its fixed electrodes 3.2. The plates are connected to the second console 5 (T-shaped in the drawing) via the second electrodes 3 which are disposed between the plates. The reading area 4 is attached to the consoles.

[0063] The device operates as follows: When a voltage from a source is applied to the electrodes 3 (not shown in the drawings), the plates 2 made of a piezoelectric material are deformed as shown in FIG. 2. As a result, the T-shaped console 5 is moved up or down in relation to the bottom 1, depending on the polarity of the applied voltage.

[0064] The device is used as described in example 1.

[0065] Example 4. The device for precision movement (FIG. 5) contains a bottom 1 to which two or more identical plates 2 made of a piezoelectric material are connected. According to the invention, also only fixed non-elastic electrodes are applied to the plates thereby forming one base module 10 each. The connection of the plates 2 to the bottom 1 is defined by means of an L-shaped console 6. The first (lower) plate 2 is attached to the upper electrode on the lower horizontal area 6.1 of the first console. The lower electrode is connected to the upper horizontal area 7.2 of the lower head piece or the lower first U-shaped leg of the U-shaped console 7. Here, the lower electrode of a second (upper) plate 2 (further base module 10) made of a piezoelectric material is provided at the upper area 7.3 of the upper head piece or the upper second U-shaped leg of the second console 7, said base module 10 being identical to the first one and the reading area 4 being disposed on the upper electrode thereof. The piezoelectric material in the plates must be oriented in such a way that the lower and upper plates must be displaced in one and the same direction, namely in the direction of the area of the electrodes, when a voltage is applied to the electrodes thereof

[0066] The device operates as follows: When a voltage from a source is applied to the electrodes 3 (not shown in the drawings), the plates 2 made of a piezoelectric material are deformed, and this is why the reading area 4 is displaced to the side. The device is used as described in example 1.

[0067] Example 5. The device for precision movement (FIG. 6) contains a bottom 1 to which a group of piezoelectric plates 2 spaced from one another via an intermediate space 11 is connected. According to the invention, each plate is also only equipped with non-elastic fixed electrodes thereby forming a base module 10. An intermediate layer 8 is disposed above the plates and is made of a material having a temperature coefficient of expansion that corresponds to the temperature coefficient of expansion of the material of the bottom 1.

[0068] The device operates as follows: When a voltage from a source is applied to the electrodes (not shown in the drawings), the plates 2 made of a piezoelectric material are deformed and the reading area 4 is displaced upwards, downwards or horizontally, depending on the material and orientation of the axes of the crystal lattice, and depending on the polarity of the applied voltage. The device is used as described in example 1.

[0069] Example 6. The device for precision movement (FIG. 7) contains a bottom 1, to which a group of piezoelectric plates 2 spaced from one another via an intermediate space 11 is connected. According to the invention, each of the plates is also only equipped with fixed non-elastic electrodes thereby forming a base module 10. The intermediate layer 8 is disposed above the plates which are separated through a gap 12 and which accommodate the reading areas 4. The intermediate layer consists of a material having a temperature coefficient which is identical to the temperature coefficient of expansion of the material of bottom 1.

[0070] The device operates as follows:

[0071] When a voltage from a source is applied to the electrodes of the plates 2, the reading areas 4 are displaced in different directions in relation to the bottom 1.

[0072] The piezo plates are displaced parallel to one another within each base module. Different directions of displacement of the reading areas 4 among one another are possible:

[0073] The reading areas of the second group are displaced towards the bottom 1 at right angles in opposite directions; or they are displaced parallel to the bottom in opposite directions. The reading areas 4 of the groups can also be displaced in directions at right angles to one another (one parallel to the bottom and the second at right angles). The device is used as described in example 1.

[0074] The foregoing disclosure has been set forth merely to illustrate the invention and is not intended to be limiting. Since modifications of the disclosed embodiments incorporating the spirit and substance of the invention may occur to persons skilled in the art, the invention should be construed to include everything within the scope of the appended claims and equivalents thereof.