Method for operating a machine for microlithography

Abstract

The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includes the following steps: creating a database in which a cause is in each case assigned to different combinations of these symptoms, automatically recording the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine and automatically assigning a cause to the problem on the basis of the recorded symptoms and the database.

Claims

1. A method for operating a machine for microlithography which has a multiplicity of machine components, wherein malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includes the following steps: a) creating or modifying, using one or more computers, a database having information about causes of problems of the machine and information about combinations of symptoms, in which a cause is in each case assigned to different combinations of these symptoms, in which each symptom describes the corresponding malfunction of one or more components of the machine for microlithography during the operation of the machine for microlithography, and the database is stored in a storage device; b) automatically recording, using the one or more computers, the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine; and c) automatically assigning, using the one or more computers, a cause to the problem on the basis of the recorded symptoms and the database.

2. The method according to claim 1, wherein the creation or modification of a database in step a) is implemented taking account of failure probabilities of the machine components.

3. The method of claim 2 in which the creation or modification of a database in step a) is implemented taking account of malfunctions of the machine components that occurred in the past.

4. The method according to claim 1, wherein the creation or modification of a database in step a) is implemented taking account of malfunctions of the machine components that occurred in the past.

5. The method according to claim 1, wherein a combination of symptoms which is present in the database and which best describes a group of recorded symptoms is determined within the scope of step c) of automatically assigning a cause to the problem.

6. The method according to claim 1, wherein the automatic assignment of a cause in step c) is implemented taking account of the temporal sequence of the symptoms that occurred within the predetermined time interval, depending on a user prescription.

7. The method according to claim 1, wherein, when a malfunction of the machine component occurs, information is automatically provided to help an operator find this machine component.

8. The method according to claim 7, wherein this provision of information is implemented by transmitting a multi-part information item for leading an operator to the machine component step-by-step.

9. The method according to claim 1, wherein the method further includes the following steps: creating a further database in which a multiplicity of service processes are linked to one another in respect of respectively suitable temporal sequences; and outputting a temporal sequence for working through these service processes on the basis of this further database as a reaction to a user-side input of a desired combination of service processes to be carried out.

10. The method according to claim 9, wherein the output step comprises the output of a temporal sequence of these service processes and further service actions to be carried out in combination with these service processes.

11. The method according to claim 9, wherein said method further includes the step of: outputting one or more service processes that should be carried out within a time interval in reaction to a user-side input of an available time interval for carrying out service processes.

12. The method according to claim 11, wherein this output is implemented with the prescription of a temporal sequence that should be observed when carrying out these service processes.

13. The method according to claim 1, wherein the machine for microlithography is a mask inspection apparatus for inspecting microlithographic masks.

14. A method for operating a machine for microlithography which has a multiplicity of machine components, wherein malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein, when a malfunction of a machine component occurs, information is automatically provided, using a head-mounted computing device having a see-through display that shows the information in an augmented reality format, or a tablet computer having a display that shows the information in an augmented reality format, to help an operator find this machine component by way of transmitting a multi-part information item from the head-mounted computing device or the tablet computer to the operator for leading the operator to the machine component step-by-step; wherein the method further comprises: creating or modifying a database in which a multiplicity of service processes are linked to one another in respect of respectively suitable temporal sequences; and outputting a temporal sequence for working through these service processes on the basis of the database as a reaction to a user-side input of a desired combination of service processes to be carried out.

15. The method of claim 14 in which the machine for microlithography comprises a mask inspection apparatus for inspecting microlithographic masks.

16. A method for operating a machine for microlithography, which has a multiplicity of machine components, wherein the method includes the following steps: creating or modifying a database in which a multiplicity of service processes are linked to one another in respect of respectively suitable temporal sequences; and outputting a temporal sequence for working through these service processes on the basis of the database as a reaction to a user-side input of a desired combination of service processes to be carried out, in which outputting a temporal sequence comprises outputting a temporal sequence of these service processes and further service actions to be carried out in combination with these service processes.

17. The method of claim 16, further comprising outputting one or more service processes that should be carried out within a time interval in reaction to a user-side input of an available time interval for carrying out service processes.

18. The method of claim 16 in which the machine for microlithography comprises a mask inspection apparatus for inspecting microlithographic masks.

19. A method for operating a machine for microlithography, which has a multiplicity of machine components, wherein the method comprises: creating or modifying a database in which a multiplicity of service processes are linked to one another in respect of respectively suitable temporal sequences; outputting a temporal sequence for working through these service processes on the basis of the database as a reaction to a user-side input of a desired combination of service processes to be carried out; and outputting one or more service processes that should be carried out within a time interval in reaction to a user-side input of an available time interval for carrying out service processes.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) In the Figures:

(2) FIGS. 1-4 show schematic illustrations for explaining exemplary embodiments of the present invention.

DETAILED DESCRIPTION

(3) Initially, one possible embodiment of the method according to the invention is explained in more detail below with reference to the flowchart illustrated in FIG. 1A.

(4) One of the goals of this method according to the invention is, in a complex machine for microlithography, which may be a mask inspection apparatus for inspecting microlithographic masks (in particular microlithographic masks designed for operation in the EUV), to identify as quickly as possible a cause that is responsible for a problem when said problem occurs during the operation of the machine in order thus in turn to be able to introduce suitable corrective measures as quickly as possible. Examples of problems that may occur in a complex machine for microlithography include a cooling water leakage that could, e.g., at the same time be responsible for other critical failures in other critical components such as the mask handling system, the EUV source and the vacuum system. Since all those systems can also send out or register critical errors, in all three cases the machine can register multiple critical errors and it may not be clear what the origin is.

(5) According to the invention, this identification is not based merely on a single error message (e.g., produced by one of the machine components) within the machine but instead on a combination of error messages or other symptoms (e.g., failure of a display, state change in a component, etc.).

(6) To this end, a database is initially created in a first step S110, in which different combinations of such symptoms and error messages are each assigned to a cause that is responsible for the relevant problem. For example, when the problem is that the vacuum system fails, the cause may be a failure in the cooling system, but the same problem of a failure of the vacuum system may also be caused by a faulty vacuum pump unrelated to the cooling system. The creation of this database can be based on pooling experience gained in the past (e.g., to the effect of what combinations of symptoms could ultimately be traced back to what cause), wherein, further, it is also possible to take account of failure probabilities of individual machine components (e.g., on the basis of manufacturer specifications or empirical values).

(7) As soon as a specific problem now occurs during the operation of the machine for microlithography (step S120), symptoms (such as error messages of individual machine components, for example) are recorded, according to the invention, over a predetermined time interval (e.g., defined on part of the user). The machine is capable of determining that a problem has occurred even if the user may be responsible for it, but it is not necessarily able to determine what the root cause was. Subsequently, a cause of the problem that occurred during the operation of the machine is identified taking account of the assignments already present in the database, depending on the combination of symptoms recorded within the time interval in the process (step S140).

(8) The output of a cause as a result of the method according to the invention can also be implemented if no 100% correspondence is found between the captured symptom combination and the symptom combinations stored in the database. For example, in an exemplary scenario in which eight error messages and two further symptoms have occurred within the predetermined time interval and there is a lack of complete correspondence in the database, it is possible to output the cause for which the best correspondence arises (e.g., at least a correspondence in nine of the ten symptoms). In this way, it is also possible to successfully process scenarios in which novel symptom combinations or symptom combinations that have not occurred previously are present or in which it is not possible to establish a complete correspondence with the database (e.g., on account of input errors).

(9) In an exemplary scenario illustrated in FIG. 1B, an incidence, for example, occurs after the machine was started up, said incidence being characterized in the example by the occurrence of ten errors, two warnings and a component state change within a user-defined time interval. Examples of component state change include a change in the vacuum system state from “vented” to “roughing vacuum” to “high vacuum”, or a change of the mask handling system from “initialization” to “standby/ready for operation” to “actively moving.” This “fingerprint” of the incidence is automatically compared to the database, whereupon a user interface displays the appropriate results, or causes that come into question, in a suitable sequence which arises from the implemented comparison and the respective correspondence with the symptom combinations stored in the database.

(10) Even after the machine component that is a cause for a problem that has occurred during the operation of the machine has been identified, actually finding this component may still require an unjustifiably long period of time if the machine is very complex. To make it easier to find a specific machine component, e.g., the machine component identified in the above-described method, it is possible—as elucidated in the schematic illustration of FIG. 2—to automatically provide a multi-part information item for leading an operator to the relevant machine component step-by-step.

(11) To this end, a plurality of images (e.g., three images) can be produced on appropriate displays in a specific exemplary embodiment, the first image directing the operator to one of a plurality of regions within the machine (on the basis of an appropriate coarse subdivision), a second image showing the machine components present immediately adjacent to the machine component to be found and a third image showing the machine component itself (e.g., a valve or a temperature sensor with a specific ID number). In FIG. 2, the block 200 represents the entire machine, the blocks 210, 220, 230, . . . represent the coarse subdivision thereof into a plurality of regions and the blocks 211, 212, 213, . . . represent the respective machine components present within the region 210.

(12) As a result, the operator is successively led to the machine component to be found and initially learns about the approximate position thereof (e.g., arrangement in a specific cabinet), subsequently, learns about more specific positioning thereof (e.g., within a certain level in this cabinet or in the vicinity of certain other machine components) and finally obtains an image of the machine component itself. The image may also contain a 3-D model.

(13) FIG. 3 shows a flowchart for explaining a method in a further embodiment of the invention.

(14) According to FIG. 3, a database is once again initially created (step S310), a multiplicity of service processes (e.g., maintenance, repairs or software updates) being linked with one another in respect of suitable temporal sequences in said database. As a reaction to the input of a desired combination of service processes to be carried out or the input of an available time interval (step S320 and S340, respectively), a suitable temporal sequence for working through service processes is output in step S330 and S350, respectively. In step S320, the input of the desired combination of service processes to be carried out can be provided by both the machine and the user or by the user alone. The required combination of service processes to be carried out may be defined by the predefined maintenance actions as well as the current machine state with respect to possible required repairs and software updates.

(15) In S340, the input of the available time interval is provided by the user. In an example, 10 service processes are required to be performed. The total required time for all 10 services processes is 5 hours and the user only has 3 hours. The system determines that processes 1-6 can be performed within the 3 hours. Then the remaining 4 service processes can be performed at a later time, and the system would provide instructions to the user which service processes can be performed in the allotted time.

(16) FIG. 4 shows a flowchart for explaining a method in a further embodiment of the invention.

(17) According to FIG. 4, a database is once again initially created, a multiplicity of service processes (e.g., maintenance, repairs or software updates) being linked with one another in respect of suitable temporal sequences by virtue of said service processes being assigned to certain machine states (hardware and software) that the machine has to adopt before the actual service action can be carried out. Here, the changes between various machine states form independent service actions.

(18) The most expedient temporal sequences of pending service processes can be derived directly from the topology of this flowchart and the data in respect of duration, urgency, etc., that are stored in the database in relation to these processes. The problem is analogous to that of a travelling salesman problem, and so existing problem solutions can be used in the optimization of the temporal sequences of pending service processes.

(19) This is a very much simplified example which has a few machine states and transitions for the purposes of elucidating the principles. It is also possible to take account of a multiplicity of machine states, which can be networked among themselves as required, in the case of complex machines such as mask inspection apparatuses. Additionally, the number of considered service actions can be several thousand, for example. In this case, it may be helpful to select, e.g., different forms or colours for states (e.g., S410) and different types of service actions such as repairs (e.g., S440), maintenance (e.g., S430), software updates (e.g., S450) or reconfiguration between machine states (e.g., S420) within the scope of the graphical representation of the totality of all actions and states. It is also possible to highlight the urgency, frequency or duration of service actions using colours (e.g. “Repair 2” & “Maintenance 4”) so that this already directs the view to the essential actions in the overall overview. Hence, a service technician is better able to identify expedient alternatives for the automatic selection and sequence of service actions to be carried out.

(20) In some implementations, the machine for microlithography includes a computer module to assist in implementing the processes described in this document, such as enabling the user to generate a database in which a cause is in each case of malfunction of a machine component assigned to different combinations of the symptoms, automatically recording the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine, and automatically assigning a cause to the problem on the basis of the recorded symptoms and the database. The computer module can include one or more data processors for processing data, one or more storage devices for storing data, such as one or more databases, and/or one or more computer programs including instructions that when executed by the computer module causes the computer module to carry out the processes. The computer module can include one or more input devices, such as a keyboard, a mouse, a touchpad, and/or a voice command input module, and one or more output devices, such as a display, and/or an audio speaker. The computer module can show graphical user interfaces on the display to assist the user of the machine for microlithography in generating the databases, and showing the multi-part information item for leading the user to a particular machine component that needs to be fixed or replaced.

(21) In some implementations, a manufacturer or supplier of the machine for microlithography may already know the relationships between the causes of some generic problems and different combinations of the symptoms, and have information (e.g., multi-part information) for helping an operator solve the problems, e.g., information for finding the machine components that need to be repaired or replaced, and/or information about procedures for repairing or replacing the machine components. In this case, when the machine is shipped to a customer (e.g., operator of the machine), the computer module of the machine already includes an initial database having information relevant to solving the generic problems. The computer module is configured to provide a user interface that allows the customer (e.g., operator of the machine) to modify, update, or otherwise customize the database to add more information for solving additional problems specific to the customer. In some implementations, the machine for microlithography is shipped to the customer without an initial database, and the customer (e.g., operator of the machine) creates a new database having relevant information.

(22) In some implementations, the computer module can be located external to the machine for microlithography. The computer module can communicate with the machine for microlithography through a data bus or a network, such as a local area network or the Internet. For example, the computer module can be implemented using one or more cloud computer servers. In some implementations, some of the data processing is performed at a computer module integrated with the machine for microlithography, and some of the data processing is performed at an external computer module.

(23) In some implementations, information is provided to the user using a head-mounted computing device having a see-through display that shows the information in an augmented reality format, in which the information is overlaid on actual objects. For example, when the user views the machine for microlithography through the see-through display, one of a plurality of regions within the machine is highlighted on the display. As the user moves closer to and looks toward the region, machine components present immediately adjacent to the machine component to be found are highlighted on the display. As the user moves closer to and looks towards the machine components immediately adjacent to the machine component to be found, the machine component to be found itself is highlighted on the display. This allows the user to quickly find the machine component that needs to be repaired or replaced.

(24) In some implementations, information is provided to the user using a tablet computer having a display that shows the information in an augmented reality format, in which the information is overlaid on images of actual objects. For example, the user may hold the tablet in front of the machine for microlithography, a camera of the tablet captures images of the machine for microlithography, shows images of the machine for microlithography on the tablet display, and highlights one of a plurality of regions within the machine on the tablet display. As the user moves closer to and holds the tablet computer closer to the region, images of the region within the machine are shown on the tablet display, and the machine components present immediately adjacent to the machine component to be found are highlighted on the tablet display. As the user moves closer to and holds the tablet computer closer to the machine components immediately adjacent to the machine component to be found, images of the machine components immediately adjacent to the machine component to be found are shown on the tablet display, and the machine component to be found itself is highlighted on the tablet display. This allows the user to quickly find the machine component that needs to be repaired or replaced. In some implementations, the computer module can include digital electronic circuitry, computer hardware, firmware, software, or any combination of the above, configured to carry out the method steps described above. The features related to processing of data can be implemented in a computer program product tangibly embodied in an information carrier, e.g., in a machine-readable storage device, for execution by a programmable processor; and method steps can be performed by a programmable processor executing a program of instructions to perform functions of the described implementations by operating on input data and generating output. Alternatively or in addition, the program instructions can be encoded on a propagated signal that is an artificially generated signal, e.g., a machine-generated electrical, optical, or electromagnetic signal, that is generated to encode information for transmission to suitable receiver apparatus for execution by a programmable processor.

(25) In some implementations, the operations associated with processing of data described in this document can be performed by one or more programmable processors executing one or more computer programs to perform the functions described in this document. A computer program can be written in any form of programming language, including compiled or interpreted languages, and it can be deployed in any form, including as a stand-alone program or as a module, component, subroutine, or other unit suitable for use in a computing environment.

(26) For example, the computer module is configured to be suitable for the execution of a computer program and can include, by way of example, both general and special purpose microprocessors, and any one or more processors of any kind of digital computer. Generally, a processor will receive instructions and data from a read-only storage area or a random access storage area or both. Elements of a computer include one or more processors for executing instructions and one or more storage area devices for storing instructions and data. Generally, a computer will also include, or be operatively coupled to receive data from, or transfer data to, or both, one or more machine-readable storage media, such as hard drives, magnetic disks, magneto-optical disks, or optical disks. Machine-readable storage media suitable for embodying computer program instructions and data include various forms of non-volatile storage area, including by way of example, semiconductor storage devices, e.g., EPROM, EEPROM, and flash storage devices; magnetic disks, e.g., internal hard disks or removable disks; magneto-optical disks; and CD-ROM and DVD-ROM discs.

(27) In some implementations, the processes for operating a machine for microlithography described above can be implemented using software for execution on one or more mobile computing devices, one or more local computing devices, and/or one or more remote computing devices. For instance, the software forms procedures in one or more computer programs that execute on one or more programmed or programmable computer systems, either in the mobile computing devices, local computing devices, or remote computing systems (which may be of various architectures such as distributed, client/server, or grid), each including at least one processor, at least one data storage system (including volatile and non-volatile memory and/or storage elements), at least one wired or wireless input device or port, and at least one wired or wireless output device or port.

(28) In some implementations, the software may be provided on a medium, such as a CD-ROM, DVD-ROM, or Blu-ray disc, readable by a general or special purpose programmable computer or delivered (encoded in a propagated signal) over a network to the computer where it is executed. The functions may be performed on a special purpose computer, or using special-purpose hardware, such as coprocessors. The software may be implemented in a distributed manner in which different parts of the computation specified by the software are performed by different computers. Each such computer program is preferably stored on or downloaded to a storage media or device (e.g., solid state memory or media, or magnetic or optical media) readable by a general or special purpose programmable computer, for configuring and operating the computer when the storage media or device is read by the computer system to perform the procedures described herein. The inventive system may also be considered to be implemented as a computer-readable storage medium, configured with a computer program, where the storage medium so configured causes a computer system to operate in a specific and predefined manner to perform the functions described herein.

(29) While this specification contains many specific implementation details, these should not be construed as limitations on the scope of any inventions or of what may be claimed, but rather as descriptions of features specific to particular embodiments of particular inventions. Certain features that are described in this specification in the context of separate embodiments can also be implemented in combination in a single embodiment. Conversely, various features that are described in the context of a single embodiment can also be implemented in multiple embodiments separately or in any suitable subcombination.

(30) Similarly, while operations are depicted in the drawings in a particular order, this should not be understood as requiring that such operations be performed in the particular order shown or in sequential order, or that all illustrated operations be performed, to achieve desirable results. Moreover, the separation of various system components in the embodiments described above should not be understood as requiring such separation in all embodiments.

(31) Even though the invention has been described on the basis of specific embodiments, numerous variations and alternative embodiments are apparent to a person skilled in the art, for example by combination and/or exchange of features of individual embodiments. Accordingly, it goes without saying for the person skilled in the art that such variations and alternative embodiments are concomitantly encompassed by the present invention, and the scope of the invention is restricted only within the meaning of the appended patent claims and the equivalents thereof.