Stirring apparatus of ingot casting furnace
09708727 ยท 2017-07-18
Assignee
Inventors
- Lu-Chung Chuang (Hsinchu, TW)
- Chih-Chieh Yu (Hsinchu, TW)
- Wen-Chieh Lan (Hsinchu, TW)
- Jiunn-Yih Chyan (Hsinchu, TW)
- I-Ching Li (Hsinchu, TW)
- Wen-Ching Hsu (Hsinchu, TW)
Cpc classification
Y10T117/1024
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
C30B15/30
CHEMISTRY; METALLURGY
C30B11/06
CHEMISTRY; METALLURGY
Abstract
A stirring apparatus of an ingot casting furnace includes a rotating shaft and at least one fin. The fin is provided onto the rotating shaft, and has a first edge, a second edge of unequal length provided correspondingly, and a third edge connecting the first and the second edges. The rotating shaft can be driven to rotate, which consequently drives the at least one fin to stir materials in a crucible. The length of the first edge is different from that of the second edge in order for the materials in the crucible can be mixed with dopants more uniformly during the stirring process to produce ingots of stable quality.
Claims
1. A stirring apparatus of an ingot casting furnace, wherein the ingot casting furnace includes a crucible, a dome, and a transmission rod; the crucible is provided for housing liquid materials for casting the ingot; the dome is provided for housing dopants which can be vaporized; the transmission rod is connected to the dome with an end thereof for moving the dome; the stirring apparatus comprising: a support connected to an inner wall of the dome with two ends thereof; a rotating shaft having two ends, wherein one of the two ends is fixed to the support, the other one of the two ends is provided outside the dome and extends into the crucible; at least one fin provided on the other one of the two ends of the rotating shaft, wherein the at least one fin has a first edge and a second edge which correspond to each other, and have unequal lengths.
2. The stirring apparatus of claim 1, wherein the at least one fin has a third edge away from the rotating shaft; two ends of the third edge are respectively connected to the first edge and the second edge; the first edge and the second edge are parallel to each other, and the length of the first edge is greater than the length of the second edge.
3. The stirring apparatus of claim 2, wherein the third edge has at least one straight segment.
4. The stirring apparatus of claim 2, wherein the third edge has at least one curved segment.
5. The stirring apparatus of claim 1, wherein the at least one fin has a third edge away from the rotating shaft; two ends of the third edge are respectively connected to the first edge and the second edge; the first edge and the second edge are parallel to each other, and the length of the first edge is less than the length of the second edge.
6. The stirring apparatus of claim 5, wherein the third edge has at least one straight segment.
7. The stirring apparatus of claim 5, wherein the third edge has at least one curved segment.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
(1) The present invention will be best understood by referring to the following detailed description of some illustrative embodiments in conjunction with the accompanying drawings, in which
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DETAILED DESCRIPTION OF THE INVENTION
(8) As shown in
(9) The furnace body 10 includes a thermal insulating cover 12, a crucible 14, and a plurality of heaters 16, wherein the crucible 14 is provided for housing silicon materials in liquid state, and the heaters 16 are installed around the crucible 14 to heat the crucible 14 to keep the silicon materials inside staying in liquid state. The thermal insulating cover 12 is provided above the crucible 14 for heat preservation, which ensures the subsequent process of crystal growth performed smoothly. The doping jar 20 includes a dome 22 and a container 24, wherein the container 24 is provided inside the dome 22, and houses dopants which can be vaporized. The vaporized dopants are supposed to be mixed into the silicon materials in the crucible 14. The driving device 30 includes a transmission rod 32 and a motor 34, wherein the transmission rod 32 is connected to the dome 22 with an end thereof. The motor 34 drives the transmission rod 32 to move the dome 22 along with the container 24.
(10) The stirring apparatus 40 of the first preferred embodiment includes a rotating shaft 42 and four fins 44. However, there can be more or fewer fins 44 in practice to meet different requirements. The rotating shaft 42 is hung in the dome 22 with a support 46. The fins 44 are integrally connected on a surface of the rotating shaft 42, and are radially arranged. By definition, each of the fins 44 has a first edge 44a, a second edge 44b, and a third edge 44c on an outline thereof, wherein the first edge 44a and the second edge 44b are parallel to each other, and a length of the first edge 44a is greater than a length of the second edge 44b. The third edge 44c has a curved segment in the first preferred embodiment, and two ends of the third edge 44c are respectively connected to the first edge 44a and the second edge 44b. In other words, most of the distances between a central axis L of the rotating shaft 42 to any points on the third edge 44c of each of the fins 44 are different.
(11) As shown in
(12) Several preferred embodiments which provide the same function are described below. As shown in
(13) A stirring apparatus 60 of the third preferred embodiment of the present invention is shown in
(14) In addition, the fins in the aforementioned embodiments are made of quartz, which are easy to be manufactured and installed.
(15) It is worth mentioning that, as proved by experiments and shown in
(16) It must be pointed out that the embodiments described above are only some preferred embodiments of the present invention. All equivalent structures which employ the concepts disclosed in this specification and the appended claims should fall within the scope of the present invention.