μ-LED, μ-LED device, display and method for the same

Abstract

The invention relates to various aspects of a μ-LED or a μ-LED array for augmented reality or lighting applications, in particular in the automotive field. The μ-LED is characterized by particularly small dimensions in the range of a few μm.

Claims

1. A light guide arrangement, comprising: a μ-display; and a projection optics; wherein the μ-display comprises a matrix with pixels for emission of visible light and wherein each pixel comprises several μ-LEDs with spectrally different light emission; wherein each pixel is assigned a separate collimation optics preceding the projection optics; and wherein the collimation optics are configured in such a way that enlarged and overlapping intermediate images of the μ-LEDs of the respective pixel are generated in the beam path in front of the projection optics.

2. The light guide arrangement according to claim 1, wherein the intermediate images of the μ-LEDs of the respective pixel generated by the collimation optics overlap each other over at least 70%, 80% or 90% of their intermediate image area.

3. The light guide arrangement according to claim 1, wherein the intermediate images of the μ-LEDs are virtual intermediate images.

4. The light guide arrangement according to claim 1, wherein the collimation optics is arranged between the μ-LEDs of each pixel and the projection optics.

5. The light guide arrangement according to claim 1, wherein the μ-LEDs of each pixel occupy not more than 30%, or not more than 15% or not more than 10% of a pixel area.

6. The light guide arrangement according to claim 1, wherein the μ-LEDs are configured as color converted μ-LEDs or as VCSELs or as edge-emitting laser diodes and optionally have illuminated optical waveguide end pieces.

7. The light guide arrangement according to claim 1, wherein the collimation optics are designed such that a total area of the overlapping intermediate images of the μ-LEDs of a respective pixel corresponds to at least 70%, 80%, or 90% of a pixel area.

8. The light guide arrangement according to claim, 1 wherein the collimation optics comprise a holographic optical element (HOE) and/or a refractive optical element (ROE) and/or a diffractive optical element (DOE).

9. The light guide arrangement according to claim, 1 wherein radiation emitted by the projection optics is directed directly or indirectly onto a display.

10. The light guide arrangement according to claim 1, in which the μ-LEDs of at least one pixel are each formed by horizontally arranged microrods having an active zone.

11. The light guide arrangement according to claim 1, in which the μ-LEDs of at least one pixel are each formed by at least one antenna slit structure having an active area arranged in a rectangular opening with dimension in the range of half a wavelength.

12. The light guide arrangement according to claim 1, in which the μ-LEDs of at least one pixel are each formed by a pair of emitting elements with a converter material arranged therebetween.

13. The light guide arrangement according to claim 1, in which the μ-LEDs of at least one pixel each comprise quantum well intermixing in an edge region of an active layer of the μ-LED.

14. The light guide arrangement according to claim 1, in which the matrix comprises a light-shaping structure arranged at least partially in a semiconductor material of the μ-LEDs of the pixels.

15. The light guide arrangement according to claim 1, further comprising a drive unit arranged in a substrate, including current drivers or current sources, wherein the μ-display is arranged on the substrate and the pixels are electrically connected to the current drivers or the current sources.

16. The light guide arrangement according to claim 1, in which a plurality of pixels of the matrix each have a microlens arranged above the μ-LEDs.

17. The light guide arrangement according to claim 1, in which a plurality of pixels of the matrix comprises a reflecting structure surrounding one or more pixels of the plurality of pixels, which surrounds the μ-LEDs of the pixel.

18. The light guide arrangement according to claim 1, in which at least some of the pixels of the matrix comprise a redundant μ-LED.

19. The light guide arrangement according to claim 1, in which the matrix comprises a plurality of μ-LED base modules or a μ-display.

20. The light guide arrangement according to claim 1, in which the pixels of the array comprise an optoelectronic device or a μ-LED array.

21. A projection unit including a light guide arrangement according to claim 1 configured to produce an image in an augmented reality display unit, a virtual reality display unit and/or on a head-up display.

22. A light guide arrangement comprising: a pixel array, in particular for a display in polar coordinates, which: has a plurality of light emitting devices, μ-LEDs, μ-LED arrays or μ-LED modules which are arranged in at least one line starting from a starting point on an axis through the starting point, wherein the plurality of pixel elements have a height and a variable width such that the width of the pixel elements substantially increases from the starting point; or comprising a μ-display and a projection optics, wherein the μ-display comprises a matrix with pixels for emission of visible light and wherein each pixel comprises several μ-LEDs with spectrally different light emission; and wherein each pixel is assigned a separate collimation optics preceding the projection optics, wherein the collimation optics are configured in such a way that enlarged and overlapping intermediate images of the μ-LEDs of the respective pixel are generated in the beam path in front of the projection optics; or comprising: a light-emitting device comprising at least two light-emitting elements, including μ-LEDs, which emit light of two different colors; an elongated first light guide to guide light of a first color and having an output part; an elongated second light guide to guide light of a second color and having an output portion; a first coupling element disposed adjacent to the first light guide and configured to reflect the light of the first color into the elongated first light guide; and a second coupling element disposed adjacent to the second light guide and configured to reflect the light of the second color into the elongated second light guide.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) In the following section, some of the above-mentioned and summarized aspects are explained in more detail using various explanations and examples.

(2) FIG. 1A shows a diagram illustrating some requirements for so-called μ-displays or micro-displays of different sizes with respect to the field of view and pixel pitch of the μ-display;

(3) FIG. 1B shows a diagram of the spatial distribution of rods and cones in the human eye;

(4) FIG. 1C shows a diagram of the perceptual capacity of the human eye with assigned projection areas;

(5) FIG. 1D is a figure showing the sensitivity of the rods and cones over the wavelength;

(6) FIG. 2A is a diagram illustrating some requirements for microdisplays of different sizes in terms of the field of view and the angle of collimation of a pixel of the μ-display;

(7) FIG. 2B illustrates an exemplary execution of a pixel arrangement to illustrate the parameters used in FIGS. 1A and 2A;

(8) FIG. 3A shows a diagram illustrating the number of pixels required depending on the field of view for a specific resolution;

(9) FIGS. 3B-1 and 3B-2 are a table of preferred applications for μ-LED arrays;

(10) FIG. 4A shows a principle representation of a μ-LED display with essential elements for light generation and light guidance;

(11) FIG. 4B shows a schematic representation of a μ-LED array with similar μ-LEDs;

(12) FIG. 4C is a schematic representation of a μ-LED array with μ-LEDs of different light colors;

(13) FIG. 5 is an example of a pair of glasses for advanced reality functionality that uses a μ-display to illustrate various aspects and basic principles;

(14) FIG. 6 shows a first embodiment of a light guiding concept of a curved light surface according to some aspects of the proposed concept;

(15) FIG. 7 shows an enlarged partial view for the embodiment of the light guide concept with separate μ-LEDs on a non-planar IC substrate;

(16) FIG. 8 represents a third embodiment of a light guide with a monolithic pixelated chip according to further aspects;

(17) FIG. 9 shows a fourth embodiment of a lighting system with some aspects;

(18) FIG. 10 is a further development of one of the above embodiment according to some aspects of the concept presented;

(19) FIG. 11 is another embodiment of the example of FIG. 7, with additional light-shaping structures;

(20) FIG. 12 is a supplement to the embodiment of FIG. 10, where a photonic structure is arranged in the beam path;

(21) FIG. 13 shows a further embodiment based on the example in FIG. 9;

(22) FIG. 14A shows a further embodiment based on the example in FIG. 9;

(23) FIG. 14B shows a top view of an embodiment of a step-shaped substrate;

(24) FIG. 15 is an embodiment with a reflective circumferential structure around the optochip;

(25) FIG. 16 combines nanorods arranged on its curved surface of a substrate with control;

(26) FIG. 17A shows a matrix with RGB pixels, which has a high fill factor;

(27) FIG. 17B is a schematic representation of the beam guidance in a conventional projection unit;

(28) FIG. 18 shows an embodiment of an implemented matrix with RGB pixels, which has a small fill factor according to some aspects of the proposed concept;

(29) FIGS. 19A and 19B show a top view and a cross-sectional view of a combined embodiment with features of the embodiment examples of FIG. 18;

(30) FIGS. 20A and 20B show top views of further versions of a matrix with RGB pixels, realized by μ-LED arrangements according to some of the concepts presented here;

(31) FIG. 21 shows another embodiment of an executed matrix with RGB pixels, which has a small fill factor according to some aspects;

(32) FIG. 22 illustrates a top view of an embodiment of a matrix with a light-shaping structure arranged on it;

(33) FIG. 23 shows a schematic representation of a projection unit according to some aspects of the proposed principle;

(34) FIG. 24 shows a schematic representation of the generation of an intermediate image by the projection unit of the previous figure;

(35) FIG. 25 shows the chromatic phase function of the collimation optics of FIG. 23;

(36) FIG. 26 shows a metal lens of collimating optics according to some embodiments of the proposed concept;

(37) FIG. 27 shows a schematic side view of a monolithic array with several integrated μ-LEDs to illustrate some aspects of the proposed concept;

(38) FIG. 28 shows an example of an arrangement for beam guidance according to some aspects of the presented concept, which takes into account the different spatial resolution of the eye;

(39) FIG. 29 are schematic illustrations for a beamline device in the arrangement of the previous figure;

(40) FIG. 30 shows another embodiment of a beamline arrangement to explain further aspects of the concept presented;

(41) FIG. 31 is a further embodiment of an arrangement for beam guidance that takes into account the different resolving power of the human eye;

(42) FIG. 32 shows a representation of a μ-display for the application illustrated in FIG. 30;

(43) FIG. 33A illustrates different possibilities of a μ-display for generating light in a beam guiding device according to the proposed concept

(44) FIG. 33B is another possibility to combine a beam delivery device with a μ-display embodiment;

(45) FIG. 33C shows a chromatic cube as it can be used in some applications and in which the light-emitting surfaces can be formed with the versions of μ-displays disclosed here;

(46) FIGS. 34A and 34B show various embodiments of beam systems which can be placed upstream, downstream or integrated into the imaging optics of the device of FIG. 29, 30 or 31;

(47) FIG. 35 shows a schematic diagram for a first embodiment of a light field display according to some aspects of the proposed principle;

(48) FIG. 36 illustrates the assembly of the first halftone image and the second halftone image to form a halftone image projected onto the retina;

(49) FIG. 37 shows second pixel images with hexagonal outline;

(50) FIGS. 38A to 38B show an adjustment optic with a switchable Bragg grating according to some aspects of the proposed concept;

(51) FIG. 39 is a view of an adjustment optic with an Alvarez lens arrangement suitable for a light field display according to the proposed principle;

(52) FIG. 40 shows an adjustment optic with a Moire lens arrangement suitable for a light field display according to the proposed principle;

(53) FIG. 41 shows an embodiment of a dynamic eye movement detection device and a control device for the adjustment optics of a light field display according to the proposed concept;

(54) FIG. 42 shows several examples of a one-dimensional pixel array according to some aspects of another concept;

(55) FIG. 43 is an example to illustrate the rotation of the pixel row according to some aspects of the proposed concept;

(56) FIG. 44 shows another embodiment of a pixel array to illustrate a new light generation and guidance concept;

(57) FIG. 45 illustrates an embodiment of a pixel matrix with two pixel arrays according to the proposed principle;

(58) FIG. 46 shows a third embodiment of a pixel array with several rows of different colors to illustrate a new light generation and guidance concept;

(59) FIG. 47 shows another embodiment of a pixel array with rows for the different colors according to the proposed principle;

(60) FIGS. 48A and 48B show a cross-section of the pixel row of FIG. 47 with a photonic structure on a substrate and a top view of it;

(61) FIGS. 48C and 48D show another embodiment of a pixel row, which is configured with redundant μ-LEDs;

(62) FIGS. 49A and 49B show examples of embodiments of a pixel array with several subpixels of different size and frequency according to the proposed principle;

(63) FIG. 50 shows another embodiment of a pixel matrix in which three rows of pixels of different colors are offset from each other;

(64) FIG. 51 is an embodiment of an optical system for generating an image according to some aspects of the proposed concept of a one-dimensional pixel array;

DETAILED DESCRIPTION

(65) Augmented reality is usually generated by a dedicated display whose image is superimposed on reality. Such device can be positioned directly in the user's line of sight, i.e. directly in front of it. Alternatively, optical beam guidance elements can be used to guide the light from a display to the user's eye. In both cases, the display may be implemented and be part of the glasses or other visually enhancing devices worn by the user. Google's™ Glasses is an example of such a visually augmenting device that allows the user to overlay certain information about real world objects. For the Google™ glasses, the information was displayed on a small screen placed in front of one of the lenses. In this respect, the appearance of such an additional device is a key characteristic of eyeglasses, combining technical functionality with a design aspect when wearing glasses. In the meantime, users require glasses without such bulky or easily damaged devices to provide advanced reality functionality. One idea, therefore, is that the glasses themselves become a display or at least a screen on or into which the information is projected.

(66) In such cases, the field of vision for the user is limited to the dimension of the glasses. Accordingly, the area onto which extended reality functionality can be projected is approximately the size of a pair of spectacles. Here, the same, but also different information can be projected on, into or onto the two lenses of a pair of spectacles.

(67) In addition, the image that the user experiences when wearing glasses with augmented reality functionality should have a resolution that creates a seamless impression to the user, so that the user does not perceive the augmented reality as a pixelated object or as a low-resolution element. Straight bevelled edges, arrows or similar elements show a staircase shape that is disturbing for the user at low resolutions.

(68) In order to achieve the desired impression, two display parameters are considered important, which have an influence on the visual impression for a given or known human sight. One is the pixel size itself, i.e. the geometric shape and dimension of a single pixel or the area of 3 subpixels representing the pixel. The second parameter is the pixel pitch, i.e. the distance between two adjacent pixels or, if necessary, subpixels. Sometimes the pixel pitch is also called pixel gap. A larger pixel pitch can be detected by a user and is perceived as a gap between the pixels and in some cases causes the so-called fly screen effect. The gap should therefore not exceed a certain limit.

(69) The maximum angular resolution of the human eye is typically between 0.02 and 0.03 angular degrees, which roughly corresponds to 1.2 to 1.8 arc minutes per line pair. This results in a pixel gap of 0.6-0.9 arc minutes. Some current mobile phone displays have about 400 pixels/inch, resulting in a viewing angle of approximately 2.9° at a distance of 25 cm from a user's eye or approximately 70 pixels/° viewing angle and cm. The distance between two pixels in such displays is therefore in the range of the maximum angular resolution. Furthermore, the pixel size itself is about 56 μm.

(70) FIG. 1A illustrates the pixel pitch, i.e. the distance between two adjacent pixels as a function of the field of view in angular degrees. In this respect, the field of view is the extension of the observable world seen at a given moment. This is because human vision is defined as the number of degrees of the angle of view during stable fixation of the eye.

(71) In particular, humans have a forward horizontal arc of their field of vision for both eyes of slightly more than 210°, while the vertical arc of their field of vision for humans is around 135°. However, the range of visual abilities is not uniform across the field of vision and can vary from person to person.

(72) The binocular vision of humans covers approximately 114° horizontally (peripheral vision), and about 90° vertically. The remaining degrees on both sides have no binocular area but can be considered part of the field of vision.

(73) Furthermore, color vision and the ability to perceive shapes and movement can further limit the horizontal and vertical field of vision. The rods and cones responsible for color vision are not evenly distributed.

(74) This point of view is shown in more detail in FIGS. 1B to 1D. In the area of central vision, i.e. directly in front of the eye, as required for Augmented Reality applications and partly also in the automotive sector, the sensitivity of the eye is very high both in terms of spatial resolution and in terms of color perception.

(75) FIG. 1B shows the spatial density of rods and cones per mm.sup.2 as a function of the fovea angle. FIG. 1C describes the color sensitivity of cones and rods as a function of wavelength. In the central area of the fovea, the increased density of cones (L, S and M) means that better color vision predominates. At a distance of about 25° around the fovea, the sensitivity begins to decrease and the density of the visual cells decreases.

(76) Towards the edge, the sensitivity of color vision decreases, but at the same time contrast vision by means of the rods remains over a larger angular range. Overall, the eye develops a radially symmetrical visual pattern rather than a Cartesian visual pattern. A high resolution for all primary colors is therefore required, especially in the center. At the edge it may be sufficient to work with an emitter adapted to the spectral sensitivity of the rods (max. sensitivity at 498 nm, see FIG. 1D and the sensitivity of the eye).

(77) FIG. 1C shows the different perceptual capacity of the human eye by means of a graph of the angular resolution A relative to the angular deviation a from the optical axis of the eye. It can be seen that the highest angular resolution A is in an interval of the angular deviation a of +/−2.5°, in which the fovea centralis 7 with a diameter of 1.5 mm is located on the retina 19. In addition, the position of the blind spot 22 on the retina 19 is sketched, which is located in the area of the optic nerve papilla 23, which has a position with an angular deviation a of about 15°.

(78) The eye compensates this non-constant density and also the so-called blind spot by small movements of the eye. Such changes in the direction of vision or focus can be counteracted by suitable optics and tracking of the eye.

(79) Furthermore, even with glasses, the field of vision is further restricted and, for example, can be approximately in the range of 80° for each lens.

(80) The pixel pitch in FIG. 1A on the Y-axis is given in μm and defines the distance between two adjacent pixels. The various curves C1 to C7 define the diagonal dimension of a corresponding display from 5 mm to approximately 35 mm. For example, curve C1 corresponds to a display with the diagonal size of 5 mm, i.e.

(81) a side length of approximately 2.25 mm. For a field of view of approximately 80°, the pixel pitch of a display with a diagonal size of 5 mm is in the range of 1 μm. For larger displays like curve C7 and 35 mm diagonal size, the same field of view can be implemented with a pixel pitch of approximately 5 μm.

(82) Nevertheless, the curves in FIG. 1A illustrate that for larger fields of view, which are preferred for extended reality applications, very high pixel densities with small pixel pitch are required if the well-known fly screen effect is to be avoided.

(83) One can now calculate the size of the pixel for a given number of pixels, a given field of view and a given diagonal size of a μ-display.

(84) Equation 1 shows the relationship between dimension D of a pixel, pixel pitch pp, number N of pixels and the edge length d of the display. The distance r between two adjacent pixels calculated from their respective centers is given by
r=d/2+pp+d/2.
D=d/N−pp
N=d/(D+pp)  (1)

(85) Assuming that the display (e.g. glasses) is at a distance of 2.54 cm (1 inch) from the eye, the distance r between two adjacent pixels for an angular resolution of 1 arcminute as roughly estimated above is given by
r=tan( 1/60°)*30 mm
r=8.7 μm

(86) The size of a pixel is therefore smaller than 10 μm, especially if some space is required between two different pixels. With a distance, r between two pixels and a display with the size of 15 mm×10 mm, 1720×1150 pixels can be arranged on the surface.

(87) FIG. 2B shows an arrangement, which has a carrier 21 on which a large number of pixels, 20 and 20a to 20c are arranged. Pixels 20 arranged side by side have the pixel pitch pp, while pixels 20a to 20c are placed on carrier 21 with a larger pixel pitch pp. The distance between two pixels is given by the sum of the pixel pitch and half the size for each adjacent pixel. Each of the pixels 20 is configured so that its illumination characteristic or its emission vector 22 is substantially perpendicular to the emission surface of the corresponding LED.

(88) The angle between the perpendicular axes to the emission surface of the LED and the beam vector is defined as the collimation angle. In the example of emission vector 22, the collimation angle of LEDs 20 is approximately zero. LED 20 emits light that is collinear and does not widen significantly.

(89) In contrast, the collimation angle of the emission vector 23 of the LED pixels 20a to 20c is quite large and in the range of approximately 45°. As a result, part of the light emitted by LED 20a overlaps with the emission of an adjacent LED 20b.

(90) The emission of the LEDs 20a to 20c is partially overlapping, so that its superposition of the corresponding light emission occurs. In case the LEDs emit light of different colors, the result will be a color mixture or a combined color. A similar effect occurs between areas of high contrast, i.e. when LED 20a is dark while LED 20b emits a certain light. Because of the overlap, the contrast is reduced and information about each individual position corresponding to a pixel position is reduced.

(91) In displays where the distance to the user's eye is only small, as in the applications mentioned above, a larger collimation angle is rather annoying due to the effects mentioned above and other disadvantages. A user is able to see a wide collimation angle and may perceive displayed objects in slightly different colors blurred or with reduced contrast.

(92) FIG. 2A illustrates in this respect the requirement for the collimation angle in degrees against the field of view in degrees, independent of specific display sizes. For smaller display sizes such as the one in curve C1 (approx. 5 mm diagonal), the collimation angle increases significantly depending on the field of view.

(93) As the size of the display increases, the collimation angle requirements change drastically, so that even for large display geometries such as those illustrated in curve C7, the collimation angle reaches about 10° for a field of view of 100°. In other words, the collimation angle requirements for larger displays and larger fields of view are increasing. In such displays, light emitted by a pixel must be highly collimated to avoid or reduce the effects mentioned above. Consequently, strong collimation is required when displays with a large field of view are to be made available to a user, even if the display geometry is relatively large.

(94) As a result of the above diagrams and equations, one can deduce that the requirements regarding pixel pitch and collimation angle become increasingly challenging as the display geometry and field of view grow. As already indicated by equation 1, the dimension of the display increases strongly with a larger number of pixels. Conversely, a large number of pixels is required for large fields of view if sufficient resolution is to be achieved and fly screens or other disturbing effects are to be avoided.

(95) FIG. 3A shows a diagram of the number of pixels required to achieve an angular resolution of 1.3 arc minutes. For a field of view of approximately 80°, the number of pixels exceeds 5 million. It is easy to estimate that the size of the pixels for a QHD resolution is well below 10 μm, even if the display is 15 mm×10 mm. In summary, advanced reality displays with resolutions in the HD range, i.e. 1080p, require a total of 2.0736 million pixels. This allows a field of view of approximately 50° to be covered. Such a quantity of pixels arranged on a display size of 10×10 mm with a distance between the pixels of 1 μm results in a pixel size of about 4 μm.

(96) In contrast, the table in FIGS. 3B-1 and 3B-2 shows several application areas in which μ-LED arrays can be used. The table shows applications (use case) of μ-LED arrays in vehicles (Auto) or for multimedia (MM), such as automotive displays and exemplary values regarding the minimum and maximum display size (min. and max. size X Y [cm]), the pixel density (PPI) and the pixel pitch (PP [μm]) as well as the resolution (Res.-Type) and the distance of the viewer (Viewing Distance [cm]) to the lighting device or display. In this context, the abbreviations “very low res”, “low res”, “mid res” and “high res” have the following meaning:

(97) TABLE-US-00001 very low res pixel pitch approx. 0.8-3 mm low res Pixel pitch approx. 0.5-0.8 mm mid res Pixel pitch approx. 0.1-0.5 mm high res Pixel pitch less than 0.1 mm

(98) The upper part of the table, entitled “Direct Emitter Displays”, shows inventive applications of μ-LED arrays in displays and lighting devices in vehicles and for the multimedia sector. The lower part of the table, titled “Transparent Direct Emitter Displays”, names various applications of μ-LED arrays in transparent displays and transparent lighting devices. Some of the applications of μ-displays listed in the table are explained in more detail below in the form of embodiments.

(99) The above considerations make it clear that challenges are considerable in terms of resolution, collimation and field of view suitable for extended reality applications. Accordingly, very high demands are placed on the technical implementation of such displays.

(100) Conventional techniques are configured for the production of displays that have LEDs with edge lengths in the range of 100 μm or even more. However, they cannot be automatically scaled to the sizes of 70 μm and below required here. Pixel sizes of a few μm as well as distances of a few μm or even less come closer to the order of magnitude of the wavelength of the generated light and make novel technologies in processing necessary.

(101) In addition, new challenges in light collimation and light direction are emerging. Optical lenses, for example, which can be easily structured for larger LEDs and can also be calculated using classical optics, cannot be reduced to such a small size without the Maxwell equations. Apart from this, the production of such small lenses is hardly possible without large errors or deviations. In some variants, quantum effects can influence the behaviour of pixels of the above-mentioned size and have to be considered. Tolerances in manufacturing or transfer techniques from pixels to sub mounts or matrix structures are becoming increasingly demanding. Likewise, the pixels must be contacted and individually controllable. Conventional circuits have a space requirement, which in some cases exceeds the pixel area, resulting in an arrangement and space problem.

(102) Accordingly, new concepts for the control and accessibility of pixels of this size can be quite different from conventional technologies. Finally, a focus is on the power consumption of such displays and controllers. Especially for mobile applications, a low power consumption is desirable.

(103) In summary, for many concepts that work for larger pixel sizes, extensive changes must be made before a reduction can be successful. While concepts that can be easily up scaled to LEDs at 2000 μm for the production of LEDs in the 200 μm range, downscaling to 20 μm is much more difficult. Many documents and literature that disclose such concepts have not taken into account the various effects and increased demands on the very small dimensions and are therefore not directly suitable or limited to pixel sizes well above 70 μm.

(104) In the following, various aspects of the structure and design of μ-LED semiconductors, aspects of processing, light extraction and light guidance, display and control are presented. These are suitable and designed to realize displays with pixel sizes in the range of 70 μm and below. Some concepts are specifically designed for the production, light extraction and control of μ-LEDs with an edge length of less than 20 μm and especially less than 10 μm. It goes without saying, and is even desired, that the concepts presented here can and should be combined with each other for the different aspects. This concerns for example a concept for the production of a μ-LED with a concept for light extraction. In concrete terms, a μ-LED implemented by means of methods to avoid defects at edges or methods for current conduction or current constriction can be provided with light extraction structures based on photonic crystal structures. Likewise, a special drive can also be realized for displays whose pixel size is variable. Light guidance with piezoelectric mirrors can be realized for μ-LEDs displays based on the slot antenna aspect or on conventional monolithic pixel matrices.

(105) In some of the following embodiments and described aspects, additional examples of a combination of the different embodiments or individual aspects thereof are suggested. These are intended to illustrate that the various aspects, embodiments or parts thereof can be combined with each other by the skilled person. Some applications require specially adapted concepts; in other applications, the requirements for the technology are somewhat lower. Automotive applications and displays, for example, may have a longer pixel edge length due to the generally somewhat greater distance to a user. Especially there, besides applications of extended reality, classical pixel applications or virtual reality applications exist. This is in the context of this disclosure for the realization of μ-LED displays, whose pixel edge length is in the range of 70 μm and below, also explicitly desired.

(106) A general illustration of the main components of a pixel in a μ-display is shown schematically in FIG. 4A. It shows an element 60 as a light generating and light emitting device. Various aspects of this are described in more detail below in the section on light generation and processing. Element 60 also includes basic circuits, interconnects, and such to control the illumination, intensity, and, when applicable, color of the pixel. Aspects of this are described in more detail in the section on light control. Apart from light generation, the emitted light must be collimated. For this purpose, many pixels in microdisplays have such collimation functionality in element 60. The parallel light in element 63 is then fed for light guidance into some optics 64, for further shaping and the like.

(107) Light collimation and optics suitable for implementing pixels for microdisplays are described in the section on light extraction and light guidance.

(108) The pixel device of FIG. 4A illustrates the different components and aspects as separate elements. An expert will recognize that many components can be integrated into a single device. In practice, the height of a μ-display is also limited, resulting in a desired flat arrangement.

(109) For light extraction and light guiding there are basically two possibilities. In the first case, the eye of a user is directly in line with the direction of radiation of a display. In such a case, the light generated by the display can be radiated directly, collimated, enlarged or reduced. However, no more complex light guidance is necessary. This type of generation and guidance is often found in display applications, including the automotive sector. Also in applications to augmented reality, using glasses can make use of this principle. The display is implemented directly into the glasses and thus the glasses themselves are used as a semi-transparent screen. Of course, this also requires the implementation of control circuits and connection possibilities with transparent material.

(110) However, in some applications a light guide arrangement necessary for light guidance, since the light-generating display is located outside a user's field of vision or at least not directly in front of it. Google's Glass™ is an example of such an application.

(111) FIG. 5 illustrates an example where the display is not within the line of sight of the eye; that is, the light generated by the display must be directed through the glasses to the eye. In FIG. 5, a μ-display 45, which has a light-generating element LED and an optical system 44 placed in front of the light path, is placed in a position outside the field of vision of the eye. The light-generating element LED is one of the structures presented above. It is substantially one or more small displays with μ-LED pixels or subpixels thereof. A control is done by the concepts also presented here. In case of a monolithic display, the control can be implemented directly in the carrier. The μ-LED display is placed on the carrier and electrically connected to it.

(112) In the case of spectacles, the μ-display is located on the temples close to the hinge. The μ-display in this example emits light of the primary colors red, blue and green parallel to a feed element, which is built as a sandwich structure using elements 41, 43g, 43b, 42, 43r and 43b. The feed element has a first light guide 41 made of a transparent material. A reflective input element 43g is mounted on the sidewall of the light guide and opposite incident light to reflect the green portion of the light of the μ-display and guide it through the light guide 42. In some variants, the incident light has an angle of 0° to 45° with respect to the surface of the corresponding light guide. In the illustrated example, the angle of light incidence is approximately 70° in relation to the surface of the light guide.

(113) Another reflective coupler 43b is either on or on element 43g to couple the blue component into the second light guide 42. Finally, the last reflective element 43r is positioned on the second light guide 42 to reflect the red portion of the μ-display into the second light guide. To this extent, the reflective elements 43 are adapted to couple the corresponding light portion into the light guides 41 and 42. Reflective coupling elements allow light to be coupled into light guides even if incident light hits the light guide at a large angle, e.g. approximately 70° to 90° as in FIG. 5. The first and second light guides are spaced apart using spacers 47 at both ends of the light guides.

(114) The light guides 41 and 42 are both elongated and arranged parallel to each other. They can be part of the glasses, for example. Total reflection in both light guides prevents the light (the green part and the red or blue part) from being coupled out of the light guide. The light is guided to an area in the light guide that is covered by the reflective out-coupling elements 46r, 46b and 46g. All these areas are arranged on the same side as the areas of the corresponding reflective elements 43g, 43b and 43r. Coupling element 46r is arranged on the second light guide 42 and is configured to couple out the red portion of the light from the second light guide and direct the portion to the eye. Elements 46b and 46g comprise the same functionality for the blue and green portions so that all three light portions are substantially parallel and directed to the eye.

(115) The couplers 43 are implemented using, for example, mirrors and the like, which are reflective for a certain portion of the light but otherwise transparent. For the purpose of reflection, the couplers can change the refractive index so that light is reflected. In a similar way, the change of refractive index between air and the light guide leads for example to the light inside the guide. The light is coupled out in a similar way. If the light of different colors is essentially parallel and overlapping, the corresponding coupling element(s) should be stacked on top of each other. However, the stacking should occur in such a way that the coupling element absorbs or reflects undesired portions of the light. In some variants, MEMS mirrors can be used to direct the light coming from the display to the user's eye. In this example, the output coupler 46 is mounted directly on the light guide.

(116) FIG. 6 shows an example of a light guide, in which a suitable beam guidance is achieved using a foveated display. FIG. 6 proposes an illumination arrangement of, for example, a μ-display, comprising a light-emitting optoelectronic element 1 and an optical device 6 for beam conversion or beam-shaping of the electromagnetic radiation generated by the light-emitting optoelectronic element 1. In this context, a light-emitting optoelectronic element 1 comprises a plurality of μ-LEDs, which emit light of one color in operation. The light-emitting optoelectronic element is designed so that the μ-LEDs emit different colors. As subpixels, three μ-LEDs form part of an entire pixel. The light-emitting optoelectronic element thus contains a large number of such pixels.

(117) The optical device 6 represents a system optic 19 in the form of an imaging projection optic 20 and comprises in the beam path successively a plane-parallel lens 21 and a first aspherical lens 22 and a second aspherical lens 23, which realize an image of the light-emitting optoelectronic element 1.

(118) Furthermore, FIG. 6 shows that the light-emitting optoelectronic element 1 comprises several emission regions 3.1, 3.2 arranged in matrix form. These each comprise one or more μ-LEDs (for different colors). Optionally, the μ-LEDs can already include primary optics 12. These primary optics can contain converter elements, decoupling structures or photonic crystals to achieve a certain beam-shaping already at light emission. Each of the emission areas 3.1, 3.2 is assigned a main beam direction 4.1 and 4.2. For at least partial compensation of the field curvature arising in the optical device, the centers 7 of the emission areas 3.1, 3.2 are arranged on a curved surface 5, which, for the present embodiment, forms a spherical segment 24 with an associated spherical center 30 on the optical axis 10 of the optical device 6.

(119) For a possible dimensioning, a radius R of 10 mm is selected for a light-emitting optoelectronic element 1 with a diameter D of 3.7 mm for the curved surface 5 for the arrangement of the emission zones 3.1, 3.2 and a material with a refractive index of at least 1.6 and a thickness in the direction of the optical axis 10 of at least twice the diameter D is required for the plane-parallel lens 21 of the optical device 1 following in the beam path.

(120) FIG. 7 shows an enlarged partial view of an example of an illumination arrangement with a light-emitting optoelectronic element 1 comprising several emission regions 3.1-3.5 formed by apertures of the primary optics of separate optochips 17.1-17.5 in the form of μ-LEDs. An arrangement of the separate optochips 17.1-17.5 on a non-planar IC substrate 16 is shown so that the centers 7 of the emission regions 3.1-3.5 are located on a concave curved surface 5. Each of the emission regions 3.1-3.5 forms a Lambert radiator 11 to which a main beam direction 4.1-4.5 is assigned, whereby due to the nonplanar IC substrate in the form of a spherical segment 24 facing the optical device 6, the main beam directions 4.1-4.5 comprise a common point of intersection on the optical axis 10 of the optical device 6. By means of primary optical elements 12 (cf. FIG. 6) the Lambertian emission of the emission regions 3.1-3.5 can be transformed into a non-Lambertian emission, in particular into an emission with a narrower aperture angle.

(121) FIG. 8 shows an enlarged partial view of a design alternative with an optical device 6, which is only shown in a sectional view, and a flat IC substrate 28 with a schematically simplified control device 25, which typically includes driver components and interface and memory elements. A monolithically pixelated optochip 14 is arranged on the flat IC substrate 28, which comprises a light-emitting optoelectronic element 1 manufactured in a common process and having several emission regions 3.1-3-5 lying on a concavely curved surface 5 of a region 15 of the chip 14, which are each formed by a converter element 13. Corresponding to the previous embodiment, the main radiation directions 4.1-4.5 of the emission regions 3.1-3.5 are at an angle to each other and intersect on the optical axis 10 of the optical device 6.

(122) FIG. 9 shows a fourth embodiment of an illumination device with a light-emitting optical element 1, comprising a stepped IC substrate 29, separate optochips 17.1-17 being mounted on concentrically arranged ring surfaces 8.1, 8.2, 8.3 of the stepped IC substrate 29.5 formed by μ-LEDs 11 are arranged in such a way that the centers 7 of the emission regions 3.1-3.5 formed by primary optical elements 12 of the respective μ-LEDs 11 lie on a concavely curved surface 5, while the main beam directions 4.1-4.5 the emission regions 3.1-3.5 comprise a coincident orientation. Consequently, the distances of the separate optochips 17.1-17.5 to the plane-parallel lens 21 of the optical device 6 and thus the beam cross-section in the widening beam path in front of the optical device 6 differ if they are arranged on different ring planes 8.1-8.3.

(123) FIG. 10 shows a further development of the invention based on the variant shown in FIG. 9, whereby a likewise concavely curved collimating optical element 18 is additionally arranged between the centers 7 of the emission zones 3.1-3.5 arranged on a concavely curved surface 5 and the plane-parallel lens 21 of the optical device 6. For the version shown, the collimating optical element 18 comprises a curved pinhole 26 and a curved microlens arrangement 27, which form a radiation angle filter. The functional components of the collimating optical element 18 can be assigned to one or more emission ranges 3.1-3.5. For a version not shown in detail, each functional component of the collimating optical element 18 serves to pre-collimate several emission ranges 3.1-3.5 belonging to one pixel and radiating with different colors.

(124) FIG. 11 shows an addition wherein the optochips 17.1 to 17.5 are designed as μ-LED arrays with an additional light-shaping structure on the upper side of the emission surface. This improves light guidance and changes the radiation characteristics of the individual optochips. The light-shaping structure, which is for example a photonic crystal in a semiconductor material of the optochip, results in a higher directionality of the emitted light. The light-forming structure can be formed in different ways.

(125) FIG. 13 shows a further embodiment based on the example in FIG. 10, in which the light-forming structure 31 is arranged in the optical path of the optochips. It has several areas 30, 31 and 32 with a periodic change of the refractive index. In particular, the regions are formed by holes in the material of structure 31, which produces the periodic variation of the refractive index. The holes for areas 30 and 32 are not perpendicular to the surface of the structure, but are etched at an angle to it. This etching thus causes a directional dependence of the holes and thus the variation of the refractive index. Correspondingly, such an arrangement produces a shaping of the light in the area shown in the upper section of FIG. 13. Areas 30 and 32 are configured in such a way that they collimate incident light and emit it again in a directed manner at an angle defined by the direction of the holes. Only in area 33 is light collimated. This special design of the photonic structure results in an essentially parallel beam of light.

(126) The embodiment of FIG. 12 is based on the example of FIG. 9, which also forms a light-shaping structure, but the width varies and follows the shape or surface of body 1.

(127) FIGS. 14A and B show another design in cross-sectional view and top view. In this case, μ-LED modules 3a, 3b and 3c are arranged as described above on the concentrically arranged surfaces 8.1, 8.2 and 8.3 of the stepped IC substrate, which are made up of several base modules. In a top view, this is shown in more detail by means of another embodiment, where the stepped substrate comprises rectangular stepped surfaces. In the central i.e. “deepest” area 8.1 a μ-LED module consisting of 4×5 base modules is arranged. In the next area 8.2 some more μ-LED modules are shown. This can be a 2×8 module, but also have a different shape. Finally, the last section is partly already equipped with a 1×13 module.

(128) In addition to photonic structures, other light shaping measures can also be provided directly on the substrate 29. FIG. 15 shows such an example. In this case, a reflective structure 20 is arranged around each emission range 3.1 to 3.5 or around each optochip 17.1 to 17.4. The reflective structure 20 extends over the height of the emission surface so that light emitted at a flat angle is deflected laterally by the reflective structure. The reflective structure is formed with features from this application. For example, the optochips may be arranged in cavities in each annular surface, the reflective structure 20 forming part of the walls of the cavities.

(129) FIG. 16 shows a combination of the embodiment based on the example in FIG. 8, with a large number of nanorods arranged on the surface, for example those with a structure similar to the examples in FIGS. 26 to 29. These are individually contacted and controlled by the control circuit 28.

(130) A plurality of different projection units are known in the art, with which images can be displayed in specifically defined image planes according to requirements.

(131) FIG. 17A shows a top view of a RGB emitter array with an optoelectronic lighting device 1 according to the state of the art, which is designed as a matrix with RGB pixels 40 emitting red, green or blue light. The RGB-Pixel 40 are characterized by a high fill factor. This means that a large part of the area 5 of the individual RGB pixel 40 is used as light-emitting area.

(132) FIG. 17B shows a schematic diagram of beam guidance in projection units with projection optics 7. Projection optics 7 comprises all 3 lenses shown in FIG. 17B, including the lens or plate 52. It can be seen that the radiation emitted by the individual RGB pixels 40 is not collimated. As shown in FIG. 17B, only the rays emitted by the RGB pixels 40 with an angle of radiation between +45° and −45° reach the elements of projection optics 7, which are arranged downstream of plate 52. Since the RGB pixels 40 emit light in accordance with Lambert's law of radiation, without collimation of the radiation, therefore, part of the radiation emitted by the RGB pixels 40 cannot be used for image generation, which ultimately means a loss of efficiency.

(133) FIG. 18 shows a schematically simplified top view of an optoelectronic lighting device 1 with a proposed designed RGB emitter array according to some aspects disclosed here with six pixels, whereby the assigned pixel area 5 is shown for the exemplary pixel 2.1 provided with reference signs. Pixel 2.1 comprises separately applied μ-LEDs 3.1, 3.2, 3.3 forming subpixels, which are adapted as μ-LEDs and which emit red, green and blue light for the embodiment shown. The individual pixels 2.1 are characterized by a small fill factor so that only a comparatively small part of the pixel area 5 is occupied by the μ-LEDs 3.1, 3.2, 3.3. Otherwise, the μ-LEDs 3.1, 3.2, 3.3 are arranged in such a way that a comparatively large distance is formed between the individual light-emitting areas of the subpixels. On the one hand, the μ-LEDs 3.1, 3.2, 3.3 or the μ-LEDs are arranged at a distance from the edge of the pixels 2.1 so that optical and/or electrical crosstalk between adjacent pixels 2.1 does not occur. On the other hand, the μ-LEDs 3.1, 3.2, 3.3 are also arranged within the individual pixels 2.1 in such a way that optical and electrical crosstalk between the individual semiconductor lighting devices 3.1, 3.2, 3.3 of a pixel 2.1 can be prevented or at least minimized. The arrangement of the individual μ-LEDs 3.1, 3.2, 3.3 takes into account the radiation characteristics and the light output required to produce the desired images. In addition, a reflective elevation 2.4 can be designed, as shown here in the upper leftmost pixel. A transparent cover electrode can also be attached. Details of this are disclosed in this application.

(134) FIG. 19A shows a complementary embodiment based on the example of FIG. 18, where the pixels are arranged in rows and columns, each pixel having a total of three sub-pixels formed by respective μ-LEDs 3.1, 3.2 and 3.3. The individual μ-LEDs have different sizes depending on their emitting color. μ-LED 3.2 for the green color has the largest area, since the human eye is particularly sensitive to the color green. The μ-LED 3.1 for the red color and the μ-LED 3.3 for the blue color are arranged adjacent to the μ-LED 3.2 and have a significantly smaller size in comparison. A reflective structure 2.1 is arranged around the μ-LEDs. This has a sloping side surface on which a reflective layer 21 is deposited.

(135) FIG. 19B shows the cross-sectional view along the XX-axis for a single pixel. The individual μ-LEDs 3.1, 3.3.2 and 3.3 are designed as vertical LEDs and each have a contact surface on their underside. Each contact surface is electrically connected to a contact area 3.11, 3.22 and 3.33 in a planar substrate 3. A further contact on the light-emitting side of each μ-LED is connected to a conductive cover electrode. The cover electrode is in turn connected to the conductive metallic and reflective structure 29 on all sides of the pixel. The reflective structure completely surrounds the μ-LEDs 3.1 to 3.3 and comprises a dielectric support 29 on the planar substrate 3, on which a reflective metal 21 is deposited. This extends over the upper side of the structure 29 and is in electrical contact with the top electrode and along the sidewalls and a partial area of the backplane substrate 3. The metal 21 is electrically insulated from the backplane substrate 3 by the electrical structure 29. Due to the large reflection range through the reflective layer 21, light emerging from the side is reflected and radiated upwards.

(136) In the illustration shown in FIG. 19B the μ-LED 3.1 for the red light is partly behind the μ-LED 3.3 for the blue light. The contact areas 3.11 to 3.3 are designed accordingly, so that positioning the individual μ-LEDs on the surface of the backplane substrate 3 is simplified.

(137) FIG. 20A shows a top view of another embodiment, in which a pixel element with several subpixels is realized by horizontally arranged μ-rods. The horizontally arranged rods correspond to the different embodiments shown in this application. For each pixel, a common contact level 21 is provided on the backplane substrate, which on the one hand contacts the reflective metallic structure and on the other hand is connected to a common terminal of each μ-LED 3.1-3.3. For individual control of each μ-LED, the respective other contact area of this μ-LED is coupled to a contact area on the surface of the backplane substrate. This contact area is designed larger than the diameter or width of the respective μ-LED, thus simplifying positioning. In the design of the top row shown in FIG. 20A, two μ-LEDs 3.2 in the form of μ-rods are provided for the color green. The μ-rods 3.1 are used to generate a red light, the μ-rods 3.3 to generate a blue light.

(138) As already explained, the different widths of the μ-rods cause a color emission during operation. Accordingly, the μ-rod 3.3 has the largest width for the blue color, the μ-rod 3.1 the smallest width. It is planned to design the contact areas on the surface of the backplane substrate for individual control of the μ-rods with the same size in each case. This provides additional flexibility in the assembly of the individual pixels.

(139) In the top row shown here, two rods are provided for the green color. Alternatively, however, the existing color space can be expanded, for example by configuring the μ-rods differently for the green color. Such an example is realized in the lower row in the left pixel with the two Rods 3.2a and 3.2b. Here the prod 3.2b shows a slightly different green color emission compared to the two Rods 3.2a. Thus, the color space in the green area is extended. Another aspect is shown in the lower row, and concerns the different sensitivity of the human eye to different colors. In order to achieve an increased number of color gradations or to prevent failure or defects, for example, an embodiment may provide several μ-rods of one color in or for the pixel. In the right pixel of the lower line, this is represented by an additional green μ-rod and an additional red μ-rod. These redundant μ-rods can be placed on the pixel if necessary, i.e. if a defect is present. For this purpose the contact areas, 3.11 and 3.22 are configured accordingly.

(140) Another version shows the middle pixel of FIG. 20A. In this version, the contact areas for the individual control of the rods are combined so that all green and all red rods are controlled simultaneously. In this respect, a parallel connection of the three green and two red elements shown here is achieved for both green and red μ-rods. The contact areas on the surface of the backplane substrate 3 are larger, so that a simplified and more flexible positioning can be achieved.

(141) In addition to the rods shown here, other embodiments of such a pixel with different fill factors are also conceivable. FIG. 20B shows a version with μ-LEDs 3.1 to 3.2 in the so-called bar shape presented in this application. As already explained, a converter material 3.15 is arranged between two light-emitting bar-shaped elements 3.14 and thus forms a μ-LED. As shown, three μ-LEDs 3.2 for the green color are arranged in the top row of each pixel. Depending on the application, one of these μ-LEDs can be designed as a redundant μ-LED to replace a defective μ-LED if necessary. Alternatively, it can be designed with a different green color to extend the color space. The bottom row of pixels in FIG. 20B contains one μ-LED 3.3 for the blue color and two μ-LEDs 3.2 for the red color.

(142) FIG. 21 shows a top view of a matrix formed by RGB pixels, which forms an optoelectronic lighting device 1 of a proposed projection unit. As an example, a pixel area 5 of pixel 2.2 is shown dashed. The pixel 2.2 comprises three sub-pixel forming semiconductor lighting devices 3.1, 3.2, 3.3, which emit red, green or blue light and which are arranged in the form of a triangle on the surface 5 of the pixel 2.2. This embodiment may also be surrounded by a reflective layer. Another aspect at this point would be an embodiment as described above, in which the pixel emits light from the back, i.e. through the substrate, as shown schematically in FIG. 221.

(143) Depending on the application, the matrix of pixels with μ-LEDs of a small form factor presented here can be supplemented by a light-shaping or even light-converting structure. FIG. 22 shows a top view of such an embodiment. In this case, a light-shaping structure with areas 33 and 34 is arranged on the matrix. The areas 34 are configured as pillars or columns or holes in the transparent layer 33 covering the matrix. The refractive index of layer 33 is different from that of the columns 34 or holes 34. This results in a periodic variation of the refractive index in the two spatial directions as shown in the top view. In this way, a photonic structure or a two-dimensional photonic crystal is formed above the matrix of individual μ-LEDs and pixels. The light of at least one wavelength can thus be shaped appropriately by selecting the periodicity accordingly. In addition, the columns or holes or even the μ-LEDs forming the subpixels can be arranged above one another. In this way, the holes or columns form a light guide, which can lead to an improvement of the radiation characteristic, an increased decoupling efficiency or an improved directionality.

(144) Furthermore, FIG. 23 shows a schematic view of the different components of a proposed projection unit. Such a projection unit has an optoelectronic lighting device 1, with matrix-forming pixels 2.1, 2.2, which have a low fill factor and each comprise μ-LEDs 3.1, 3.2, 3.3, which emit light of different colors, namely red, green and blue light. According to some suggested aspects, for each pixel 2.1, 2.2 a collimation optics 6.1, 6.2 is provided which collimates the light emitted by the μ-LEDs 3.1, 3.2, 3.3 and images it into a preferably virtual intermediate image 8.1, 8.2. With the aid of a projection optical system 7, the intermediate image 8.1, 8.2 of the μ-LEDs 3.1, 3.2, 3.3 is directed onto a display, screen or other display unit, which may also be the windscreen of a motor vehicle, which is not shown individually, in order to produce an image which can be perceived by the observer in the desired size, orientation and distance.

(145) Furthermore, FIG. 24 shows the proposed location correction, which leads to an overlay of the enlarged virtual intermediate images 8.1, 8.2 of the μ-LEDs 3.1, 3.2, 3.3. Consequently, the collimation optics 6.1, 6.2 is designed in such a way that the size of the intermediate images 8.1, 8.2 of the μ-LEDs 3.1, 3.2, 3.3 essentially corresponds to the size of the respective pixel 2.1, 2.2 and additionally the different positions and sizes of the μ-LEDs 3.1, 3.2, 3.3 are largely compensated for the superimposition of the intermediate images 8.1, 8.2. Preferably the intermediate images 30.1, 30.2, 30.3 of the μ-LEDs 3.1, 3.2, 3.3 overlap over at least 85% and preferably over at least 95% of their intermediate image area. The intermediate images 30.1, 30.2, 30.3 of the μ-LEDs 3.1, 3.2, 3.3 may also overlap over at least 70%, 80% or 90% of their intermediate image area. It is also preferred that the total area of the overlapping intermediate images 30.1, 30.2, 30.3 of the μ-LEDs 3.1, 3.2, 3.3 of the respective pixel 2.1, 2.2 corresponds to at least 80% and preferably at least 90% of the pixel area 5. The total area of the overlapping intermediate images 30.1, 30.2, 30.3 of the μ-LEDs 3.1, 3.2, 3.3 of the respective pixel 2.1, 2.2 may correspond to at least 70%, 80% or 90% of the pixel area 5.

(146) The collimation optics 6.1, 6.2 assigned to each individual pixel 2.1, 2.2 can be achieved by means of a holographic optical element (HOE), a refractive optical element (ROE) or a diffractive optical element (DOE). FIG. 25 shows the necessary chromatic phase function 12, 13, 14 of the collimation optics 6.1, 6.2, 6.3 for the three different μ-LEDs 3.1, 3.2, 3.3 of the respective pixel 2.1, 2.2. The upper graphic shows the chromatic phase function 12 for the μ-LED 3 emitting red light, the middle graphic shows the phase function 13 of the collimation optics 6.1, 6.2 for the green light emitting μ-LED 3.2 and the lower graphic shows the necessary chromatic phase function 14 of the collimation optics 6.1, 6.2 for the blue light emitting μ-LED 3.3.

(147) FIG. 26 shows an embodiment for which the collimation optics 6 is realized with the help of a meta-lens 15. Such a meta-lens 15 can be designed to produce either a refractive optical element or a diffractive optical element. It is advantageous for such meta-lenses 15 to have at least two spaced-apart regions, which have been structured in different ways. It is conceivable, for example, that in a first region of the meta-lenses a grid-like structure is provided, while the second region of such a meta-lens 15 comprises a circular structure. It is advantageous if the meta-lens 15 has a binary structure and/or is made of a dielectric material at least in some areas. A further aspect on FIG. 296 results when taking into account that the column structure can be arranged periodically or quasi-periodically. This results in an area with a periodic variation of the refractive index.

(148) FIG. 27 shows the side view of a monolithic optochip containing the optoelectronic lighting device 1 for a projection display configured in accordance with the invention. The optochip has a silicon substrate 9 on which the individual pixels 2 with the sub-pixels provided therein are located. In order to supply the optochip with the necessary electrical energy, it has a power connection 11 and suitable conductor paths. The power supply and control of the individual light-emitting pixels 2 is provided by a CMOS array 10. Light generation at the subpixels is realized with LEDs, preferably μ-LEDs, which emit blue or ultraviolet light that is converted into light with the required color with the aid of suitable converter elements or suitable converter material.

(149) On the surface of the optochip, there are pixels 2, in which subpixels 50 are arranged, each emitting red, green and blue light. The individual subpixels 50 each form a pixel 2 with a low fill factor, so that the individual light-emitting areas within a pixel 2 only occupy a part of the area of pixel 2 in comparison to the areas that do not emit any light, and are sufficiently spaced from one another in such a way that optical and electrical crosstalk between the individual subpixels 50 and between adjacent pixels 50 is reliably prevented or at least considerably minimized.

(150) The pixels 2, each formed by three subpixels 50, are each assigned a collimation optic, not shown in detail in FIG. 27, which causes collimation of the radiation emitted by the subpixels 3 and spatial correction. According to the invention, the collimation optics produce 6 intermediate images of the subpixels 50 whose size corresponds to the size of a pixel 2. In addition, the collimation optics must be designed in such a way that the different positions and sizes of the individual sub-pixels in the intermediate image are compensated. In addition to the design with a monolithic optochip shown in FIG. 27, it is also conceivable to arrange different chips, each having one or a plurality of pixels or subpixels, on a common substrate and to contact them electrically. Preferably, the subpixels 50 of pixel 2 are formed by LEDs, which emit light with the required color, especially red, green or blue light. In principle, it is conceivable here to use LEDs that directly emit light with the desired color and/or convert the light emitted by LEDs, especially blue light, into light with the required color with the aid of suitable converter elements and converter materials. It is also conceivable to design the subpixel 50 as superluminescent diodes, VCSELs or edge-emitting lasers. It is also conceivable to implement the individual subpixel 50s by means of fiber optic cable end pieces that conduct light with the appropriate color.

(151) In addition to the above version, the different resolution capabilities of the eye can also be taken into account by producing images of different resolution and directing them to the retina of a user.

(152) As already mentioned, the central part of the fovea is dominated by the cones, whereas the rods are present over a larger angular range. Likewise, the increased cone density (L, S and M cones) means that better color vision predominates, as the three different types of cones (L or also red, S or also green and M or also blue cones) register different color valences. Towards the edge, the sensitivity of color vision is reduced in accordance with the lower cone density, but at the same time contrast vision is maintained over a larger angular range by means of the rods, which are still active at low light intensity and are therefore responsible for night vision. FIGS. 1B and 1D illustrate this relationship. Overall, a radially symmetrical visual pattern is thus formed for the eye. A high resolution of an image for all primary colors is required, especially in the center. At the edge it may be sufficient to generate an image resolution adapted to the spectral sensitivity of the rods (max. sensitivity at 498 nm, see FIG. 1B).

(153) Small movements of the eye and a change in the direction of vision or focus can be counteracted by suitable optics and tracking of the eye.

(154) The optoelectronic device 1 of FIG. 28 comprises a μ-display or more generally an optoelectronic imager 2 for generating at least a first and a second image, and an imaging optic 3. The imaging optic 3 is adapted to project a first image of the first image with a first resolution onto a first region 4 of a retina 6 of the eye of a user and to project a second image of the second image with a second resolution onto another, second region 5 of the retina 6, the first resolution being different from the second resolution.

(155) For this purpose, imaging optics 3 comprises a beam steering device 7, which comprises a movable mirror 7a. The mirror 7a, when appropriately positioned, directs light rays L4a of the first image, for example to the first region 4a of the retina 6, to produce the first image and, after adjustment of its position, directs the light rays L5a of the second image, for example to the second region 5a of the retina, to produce the second image. In the present case, the movable mirror 7a is tiltable about two axes, whereby the area illuminated on the retina can be adjusted in both vertical and horizontal directions.

(156) Furthermore, the imaging optics 3 comprises a beam-shaping device 8, which focuses the light rays of the first and second image on the respective area of the retina. The light rays L4a of the first image are focused more strongly than the light rays L5a of the second image.

(157) Since both the first and the second image are produced by only one imaging device 2, and since this imaging device 2 has a certain total number of pixels, the first and the different second resolution of the first and second image on the retina 6 is only produced by the different focusing of the light beams of the first image L4a and the light beams of the second image L5a by the beam-shaping device 8. The resolution of the first and the second image results from the ratio of the pixel number of the imaging device 2 and the area of the respective image on the first and second regions 4a, 5a of the retina 6, respectively.

(158) Since a high resolution of a projected image on the retina is only necessary in the area of center 4, the first region 4a with the first and higher resolution is closer to the center of retina 6 than the second region 5b with the second, lower resolution.

(159) In the case of a retina 6 of an eye of a user of the optoelectronic device 1, which is to be assumed to be as round as possible, closer to the center essentially means that the center of the first region 4a, viewed in the radial direction, is closer to the center of the retina 6 than the center of the second region 5a. This means in particular that the resolution of the first and second images on the retina 6 is adapted to the higher receptor density at the center of the retina 6.

(160) Since the optoelectronic device 1 comprises only one image generator 2 according to the embodiment of FIG. 28, the first image and second image and further images are displayed on the image generator one after the other in time. As a result, an overall image composed of the at least one first and one second image, i.e. a scene or a frame on the retina, is generated by a scanning process. The user only perceives the overall image due to the rapid sequence of the individual images. Scanning in this context means that the first and second image and possibly further, subsequent images are projected onto the areas of the retina one after the other, so that within a scene the entire surface of the retina is essentially completely illuminated by the images.

(161) A marginal area 5 of the retina can be composed of several areas (e.g. area 5a), which are illuminated with images of the same resolution. Similarly, a central area 4 can be composed of several areas (e.g. area 4a) that are illuminated by images with the same higher resolution. Between the edge region 5 and the central region 4 it is also possible that at least one intermediate region 10 is formed, which is composed of several regions (e.g. 10a) and is illuminated with images with the same resolution. The edge region 5 and the at least one intermediate region 10 each largely form a ring which is illuminated by several images. The central area 4, on the other hand, largely forms a circle, which is also illuminated by several images. Illuminated areas of the retina may overlap. Preferably, however, the overlapping of areas is kept to a minimum. For example, less than 50% of the areas of the regions overlap, or less than 25% of the area of the regions, or less than 10% of the area of the regions.

(162) Since the individual images are projected onto the retina so quickly one after the other, the result is, as mentioned above, a “total image” composed of the individual images within a scene on the retina, which is perceived by the eye as one image. Typical image repetition frequencies are 60 or 120 Hz and the display duration per frame is a fraction of a frame, whereby 2 to 100 partial images, preferably 5 to 50 partial images, are displayed per frame.

(163) Optionally, an additional lens 9 can be placed between the imager 2 and the movable mirror 7a in order to focus the light beams L emitted by the imager and direct them to the movable mirror 7a.

(164) FIG. 29 shows two possible designs of the beam-shaping device 8, which can be either a classical lens with curved surfaces or a segmented lens. A different focusing of the first and second image with a classical lens is achieved in that a stronger focusing occurs under a light incidence with a small angle to the optical axis than with beams with a larger angle to the optical axis.

(165) The segmented lens, on the other hand, consists of several smaller lenses (mini-lens array) that focus to different degrees. Lenses 8a are installed close to the optical axis of the system, which reduce the image considerably, whereas lenses 8b, 8c project the image onto a larger area of the retina 6. As an alternative to a classical lens, the beam-shaping device 8 can also be designed as a flat optical element, for example as a meta-lens. Especially in case of segmentation, this offers the advantage that individual areas can be structured directly adjacent or smooth transitions between areas of different lens properties are possible. For the overall system, the use of a flat optical element for beam-shaping can enable a compact design.

(166) The optoelectronic device 1 of FIG. 30 differs from the optoelectronic device 1 of FIG. 28 in particular in that the movable mirror 7a is designed to tilt only about one axis. Furthermore, the beam-shaping device 8 can be formed from several optical elements, for example lenses 8a, 8b with different imaging properties. By tilting the movable mirror 7a, the at least one first and one second image generated by the imaging device 2 is sequentially projected onto the respective areas of the retina 6. The areas result as concentric circles that overlap in their center. The following two options are possible for the image formation of an “overall image”:

(167) Each point on retina 6 is illuminated by only one projected image. In other words, for N images, the imager produces N−1 times a ring-shaped image with a dark central area, which is projected onto the retina 6.

(168) Alternatively, at least one image generated by the imaging device can also be projected onto the entire retina, whereby, viewed in the radial direction, at least one second image in the center of the retina is projected onto the central region of the retina 6 with a higher focus and thus higher resolution than the first image, and thus the cumulative stimulation of the at least two images corresponds to a desired target value. In practice, this means that the basic stimulation that applies to a larger area of the retina is produced at low magnification and details are produced at higher magnification settings by additional stimulation. For this purpose, the image content is analysed by the electronics of a system with regard to the spatial variation and broken down into partial images corresponding to the different magnification scales.

(169) The optoelectronic device 1 of FIG. 31 differs from the optoelectronic device of FIG. 30 in that the beam steering device 7 has no movable mirrors but comprises at least two fixed beam steering elements 7a/b. In addition, the optoelectronic device 1 comprises at least two image generators 2a, 2b, which at least substantially simultaneously generate a first and a second image. The first beam steering element 7a directs the light rays L of the first image and the second beam steering element 7b directs the light rays of the second image in the direction of the retina 6. By an appropriately selected design of the beam steering elements 7a/b, the images of the at least one first and one second image are focused in a different manner on the retina 6, resulting in a different resolution of the two areas. An additional beam-shaping device is not necessary for this embodiment.

(170) The areas on the retina 6 result, as already for the design of the optoelectronic device 1 of FIG. 30, as concentric circles overlapping in their center. The following two options, among others, are possible for the image formation of an “overall image”:

(171) Each point on retina 6 is illuminated by only one projected image. With N imaging devices and correspondingly with N simultaneously generated images, N−1 imaging devices generate a ring-shaped image with a dark central area, which is projected onto the retina 6.

(172) Alternatively, the image generated by at least one imaging device illuminates the entire retina, whereby, viewed in the radial direction, at least one second image generated by a second imaging device is projected in the center of the retina onto the central region of the retina 6 with a higher focus and thus higher resolution than the first image. The cumulative stimulation of the at least two images may correspond to a desired target value. In practice, this means that the basic stimulation that applies to a larger area of the retina is produced at low magnification and details are produced at higher magnification settings by additional stimulation. For this purpose, the image content is analysed by the electronics of a system with regard to spatial variation and is broken down into partial images that correspond to the different magnification scales.

(173) The at least two beam steering elements 7a/b may, for example, be formed by fixed mirrors or have glass fibres.

(174) With this embodiment, the imaging optics 3 can be made much simpler in comparison to the embodiments of FIGS. 28 and 30. Nevertheless, by using several imaging devices, an adapted resolution can be achieved on each area of the retina.

(175) The various configurations of a beamline as shown in FIGS. 28 to 31 can be combined in any way, inter alia, with the various μ-displays and display devices disclosed in this application. FIGS. 32 to 33C show different configurations. In FIG. 32, light guide arrangement 3 is combined with a μ-display as shown in the configuration in FIG. 90. The μ-display 2 comprises a plurality of pixels arranged in rows and columns, each of which comprises a sub-pixel in the form of a μ-LED. The subpixels 3a, 3b and 3c are designed to emit and guide light of different colors. They are each surrounded by a reflective structure so that light emitted from the side is emitted upwards. To improve directionality, i.e. directional emission, a light-shaping structure is applied to the μ-display and in particular above the individual pixels. This comprises periodic areas with different refractive indices. For this purpose, a transparent material 33 is deposited on the upper side of each pixel and each μ-LED and periodic holes 34 are formed in it. The resulting structure thus forms a 2-dimensional photonic crystal, whereby the light emitted by the μ-LEDs is directed over the periodicity and radiated upwards in the form of a combined light beam L.

(176) Such collimation has the advantage that a more precise positioning on the retina of an observer is achieved by the mirror 7a and the lens system 8.

(177) FIG. 33A shows a further embodiment in this respect. Instead of a μ-display with μ-LEDs with different color emission arranged on it, three different μ-displays are provided. Each individual μ-display P1, P2 or P3 comprises a large number of individual μ-LEDs arranged in rows and columns, each of which can be individually controlled to emit a specific color. The individual μ-displays P1, P2 and P3 thus generate a combined light beam, which falls on one of the mirrors 7r, 7g and 7b respectively. The mirrors redirect the light beam and guide it via a lens system Lr, Lg and Lb to the retina of an observer. In other words, the actual colored image is not already generated on the μ-display, but by the 3 different mirrors on the retina of the viewer. The individual color information is thus available separately for each pixel and is only assembled on the retina of the observer. Compared to a μ-display with the subpixels of each color, this embodiment has the advantage that the size requirements of each μ-LED are slightly reduced. In contrast, there is of course a larger space requirement.

(178) The individual μ-displays P1, P2 and P3 are realized in this embodiment by 3 different designs. It goes without saying, however, that only one embodiment can be used for each individual μ-display. For example, the μ-display P1 for the red light comprises a plurality of horizontal μ-rods, which are contacted on the surface and can be individually controlled. In this design, the μ-rods are each monochrome, i.e. designed to emit red light. Accordingly, the other μ-displays P2 and P3 could also be equipped with such μ-rods to emit green and blue light respectively. Such a μ-display with horizontally aligned μ-rods of different colors is already shown in various other embodiments and can also be realized here with the shown light guide arrangement.

(179) Furthermore, in the representation of FIG. 33A, the μ-display P2 for the green light is implemented with an antenna slot structure according to the proposed concept disclosed in this application. The antenna slot structure comprises 2 antenna slots arranged in parallel for each individual green pixel. On the one hand, the parallel arrangement allows a higher intensity and also allows compensating for possible defects by the redundant arrangement of two antenna slots per pixel. In addition, as shown in this embodiment, the emitted green light is linearly polarized due to the parallel arrangement of the antenna slots. In this respect, such an antenna slot structure as μ-display for each color would also be suitable for generating three-dimensional images on the retina of a user. In such a case, for example, the antenna slot structure for the μ-displays of the other eye could be arranged 90° offset. The lens systems Lb, Lg and Lr could possibly have switchable polarization filters.

(180) A third version of a possible μ-display is realized by the μ-display P3. This comprises a plurality of monolithically integrated pixels of one color each, arranged in rows and columns. All μ-displays shown here can be equipped with further measures for light coordination and light shaping. For example, photonic structures of the surface or other light forms of the elements such as microlenses are conceivable.

(181) A further concept based on the embodiment of FIG. 32 and a μ-LED arrangement according to FIG. 33A shows the embodiment of FIG. 33B. The embodiment is adapted with 2 μ-displays 2a and 2b each, which contain a large number of monolithically integrated μ-LEDs. Each subpixel can be controlled individually. As explained in the embodiment for FIG. 32, the light emitted by the μ-displays 2a and 2b is deflected by the two mirror systems 7a and 7b either to the central area of the eye of the fovea or to the more decentralized area 5. Accordingly, if the μ-displays 2a and 2b are configured in the same way, the resolution in the fovea 4 area is higher than in the central area 5 due to the μ-display 2b and the mirror system 7b.

(182) Finally, FIG. 33C shows a different embodiment in this respect with a dichroic cube. The dichroic cube comprises 2 semi-reflecting surfaces perpendicular to each other. On three sides of the dichroic cube, there is a μ-display of a plurality of μ-LEDs arranged in rows and columns. Each μ-display is designed to emit one color. In the example shown in FIG. 33C, the lower μ-display is used to emit a blue light, the right μ-display to emit a green light beam and the left μ-display to emit red light. The respective red and green light beams hit the surfaces of the dichroic cube in an angle and are deflected onto a lens system. In contrast, the two surfaces of the dichroic cube are transparent to the blue light, so that it hits the lens system directly.

(183) FIGS. 34A and 34B show two possible embodiments of beam systems 11, which can be arranged downstream of a respective imaging optics 3 of the device of FIG. 28, 30 or 31. The respective beam system 11 can thus be arranged between the imaging optics 3 and the eye.

(184) The beam system 11 of FIG. 34A comprises an objective lens system 12a and an eyepiece lens system 12b, which are arranged successively in the beam path between the imaging optics 3 and the retina 6 in order to direct the light rays L to the retina 6 following the imaging optics 3. Since the light path of the light rays L crosses in the beam system 11, the objective lens system 12a produces an upside down and laterally reversed real intermediate image 13 of the projected image. By means of the eyepiece lens system 12b (principle of a magnifying glass), this intermediate image 13 of the projected image is viewed magnified.

(185) The beam system 11 of FIG. 34B, on the other hand, comprises only one lens system 12, which is arranged in the beam path between the imaging optics 3 and the retina 6 in order to direct the light rays L to the retina 6 in the wake of the imaging optics 3. Correspondingly, no real intermediate image 13 of the projected image is produced in this lens system 11, but the projected image is merely viewed enlarged or reduced.

(186) In a variant not shown, the respective beam system 11 could also be arranged between the imaging device 2, 2a, 2b and the imaging optics 3.

(187) It may be intended that the imaging optics 3 are integrated in the beam system 11. With reference to FIG. 34A, the imaging optics 3 could, for example, be in the plane of the intermediate image 13. It may be provided that a pair of lenses of lens system 12b shown in FIG. 34A, which at least substantially defines the magnification, is spatially segmented (or at least one of the two lenses), and that the imaging optics 3 lies between the spatially separated segments of a lens. Alternatively, the imaging optics 3 can also lie between the two lenses of the lens pair shown.

(188) Also in the variant according to FIG. 34B, the shown lens pair of lens system 12 could include imaging optics 3, either as an additional element in between or as a modification of one or both lenses of the lens pair.

(189) An alternative design to transfer images to or into the eye of a user is achieved by a Light field display which creates an image within the eye by direct retinal projection. FIG. 35 shows a first version of a light field display 1 according to some of the principles presented here, which is explained below for the components assigned to a user eye. Binocular optics not shown in detail accordingly show a symmetrical double arrangement of the outlined components.

(190) Shown in FIG. 35 is an optoelectronic device 2 and an optics module 4 that create a retinal projection 5 of a raster image 3 in a user's eye 6. The optoelectronic device 2 comprises a first imaging unit 10 with a first μ-display 12 and a second imaging unit 11 with a second μ-display 13. Both μ-displays are designed as μ-LED array with a plurality of μ-LEDs in rows and columns. The μ-LEDs are organized as pixels, with each pixel having three subpixels of different color. In other words, each μ-LED is designed to emit one color and is individually addressable and controllable.

(191) For the embodiment shown, optics module 4 has a collimation optics 14 and a projection optics 17 with a free-form lens 18, which produce a first raster sub-image 8 of the first imaging unit 10 on the retina 19 of the user's eye 6. The first raster sub-image 8 is created over a large area.

(192) For the imaging of the second imaging unit 11, an adjustment optic 15 is available in optics module 4, which is arranged within the collimation optic 14 for the present embodiment. For other embodiments not shown in detail, the adjusting optics 15 can be located between the collimation optics 14 and the projection optics 17 or at least partly in a waveguide 16 of the projection optics 17.

(193) The second raster sub-image 9 of the second imaging unit 11 is projected onto a local area of the retina 19 with the fovea centralis 7, in which the most precise optical perception can be achieved due to the high surface density of the visual cells, which are exclusively designed as cones for photo-optical vision. A higher resolution is selected for the second raster subimage 9 than for the first raster sub-image 8.

(194) FIG. 1C shows the different perceptual capacity of the human eye by means of a graph of the angular resolution A relative to the angular deviation a from the optical axis of the eye. The highest angular resolution A is in a region of the fovea centralis 7 with a diameter of 1.5 mm on the retina 19, which covers an angle of about +/−2.5° around the center (0°). In addition, there is a blind spot 22 on the retina 19 at an angle of about −15°. FIG. 1C also illustrates the local limitation of the second projection area 21 of the light field display 1 for the high-resolution second raster sub-image 9 and the larger first projection area 20.1, 20.2 for the first raster sub-image 8 with a lower resolution.

(195) FIG. 36 illustrates the assembly of the first sub-image 8 and the second sub-image 9 to form the halftone image 3 projected onto the retina 19. For the first raster sub-image 8, an activated first pixel image 24.1 with a relatively low resolution is sketched with a solid line. In addition, two non-activated and dashed first pixel images 24.2, 24.3 of the first raster sub-image 8 are shown, whereby the representation in these areas assigned to the fovea centralis 7 is replaced by an arrangement of second pixel images 25.1, 25.2, which are part of the higher-resolution second raster sub-image 9. In order to keep an overlap area of the two sub-images 8, 9 as small as possible, individual second pixel images 25.3 can also be switched off for the advantageous design shown by an appropriate control of the second imaging unit 11.

(196) FIG. 37 shows that the contours of the pixel images may differ from the rectangular shape. Shown is a hexagonal version of the second pixel images 25.4-25.10, which allows a high surface density. Techniques to produce such μ-LEDs are disclosed in this application.

(197) FIGS. 38A and 38B show a possible design of the adjustment optics 15.1, 15.2 with the help of which the relative position of the retinal projection 5 of the second halftone image 9 can be adjusted in relation to the retinal projection 5 of the first halftone image 8. Shown is a version with a switchable Bragg grating 26, which has a holographically produced pattern 27 with liquid crystal areas 28.1-28.n in a polymer matrix 29. FIG. 38A shows the state with an electric field oriented in a first direction and an undeflected optical path 30.1 and FIG. 38B shows the state with an electric field oriented in a second direction perpendicular to the first direction and a resulting deflected optical path 30.2.

(198) An alternative embodiment of the adjustable optics 15.2 with an adjustable Alvarez lens assembly 31 is shown in FIG. 39. This comprises a double arrangement with phase plates each having a surface relief, which can be moved relative to each other in the x and y direction for beam adjustment. A special type of adjustable optics 15.3 with rotating Alvarez lenses, called Moire lens array 32, is shown in FIG. 40.

(199) FIG. 41 shows a further embodiment of the proposed light field display 1 with a measuring device 34 to determine the position of the fovea centralis. For this purpose, a user eye 6 is illuminated by means of an IR illuminator 33 and an image of the retina 19 is taken. In the example shown, the second halftone image 9 (cf. FIG. 35) is dynamically adjusted so that the measuring device 34 is part of an eye movement detection device 35 with which the direction of vision of the user can be followed. By means of a control device 36 connected to the eye movement detection device 35, the adjusting optic 15 is controlled in such a way that the second halftone image 9 of the second imaging unit 10 is held in the area of the fovea centralis, while the first halftone image 8 of the first imaging unit 11 remains stationary in relation to the optoelectronic device 2. In addition, the control device 36 is connected to a prediction device 37 in which a model of eye movement fed by the displayed image data D is calculated.

(200) In addition to the concepts presented here for the production and structuring of μ-LEDs and μ-Displays or modules, a special concept of such a module is introduced in the form of a imaging element with a variable pixel density.

(201) The inventors take advantage of the fact that the human eye does not see equally well everywhere in its full range of vision, both in terms of color perception and spatial resolution. Thus, an imaging element only needs to have as good a resolution as is required for the respective areas in the eye.

(202) FIG. 42 shows examples of a linear pixel array comprising a single row of a plurality of μ-LEDs arranged side by side, or a monolithic LED array in which pixels in the μm range can be individually controlled. The row comprises a starting point A, to which the individual pixels P of the row are connected along the axis X. These pixels are optoelectronic components, which are set as μ-LEDs along the row or as monolithic integrated components, possibly also in segments. Each pixel has a fixed height h, but variable width 1 and comprises at least one light-emitting element, for example a μ-LED. The pixels are arranged centrally around the axis X, and the pixels with the smallest width are closest to the starting point A. In the embodiment shown, the pixels widen with a fixed predetermined function, for example a linear function. The number of pixels in the row corresponds to the resolution of the display to be shown. In other designs, the widening in width 1 can follow the course of the sensitivity of the rods and cones of the eye. Thus, some adjacent pixels have the same width, others have a different width. Another possibility is a group widening, i.e. a number of pixels along the axis comprise the same width or dimension, a second group adjacent to it has a larger width. The latter way can be implemented as a monolithic component in groups or segments.

(203) In the second example, the pixels increase both in width 1 and height h with increasing distance from the starting point. The change is chosen in such a way that a suitable rotation through an optical system results in a visual impression in which the pixels are each located on points of circles without any gaps between them. The number of pixels in the row can be in the range of several hundred pixels, but it can be less than an HD resolution of 1980 pixel points per row.

(204) In an example, about 150 pixels with the smallest width are arranged in one row from the starting point. The width can be 5 μm, for example. Then follows another group of 150 pixels with a pixel size of 10 μm. Two further groups with pixel sizes of 20 μm and 30 μm and a number of 100 pixels or 50 pixels follow. This results in a total length of the row of about 5750 μm. However, with approximately the same effective visual resolution for the eye, the number of pixels is significantly reduced to 500, which leads to a simpler and more cost-effective production.

(205) In this context, it should be emphasized that the width between adjacent pixels is not always different, but can also be the same. In some cases, a pixel can also have a smaller dimension than an adjacent pixel closer to the starting point. However, the expression “width substantially increasing from the starting point” means that the width of the pixels increases with distance over a larger number of pixels. The width, and possibly also the height, therefore generally increases for pixels with a greater distance from the starting point, even though isolated pixels with neighboring pixels may comprise the same dimension. Thus, the above-mentioned execution of a segmental widening also falls under the above-mentioned expression.

(206) Using imaging optics, an image can now be generated by rotating the pixel array around the starting point. For this purpose, the pixel array itself is not rotated, but the light stripes generated by the pixel array are shifted in fixed periods with an imaging optics, so that the impression of a rotation around the starting point is created. If this offset occurs, fast enough, the inertia of the visual processing results in the impression of an image. The number of individual steps may or may not depend on the height of the individual pixels. Depending on the image, the period can also be selected in such a way that a certain overlapping area results, especially in the high resolution area of the eye.

(207) FIG. 43 shows a schematic representation of such a rotation. In contrast to the pixel row in FIG. 42, the height of each pixel is also varied here and the height of the pixels increases with increasing distance from the starting point. This can be done in two ways. First, the height of the pixels can actually be changed. Another way is to place an aperture above the pixel row so that the aperture widens. Thus, each pixel resembles a trapezium rather than a square or rectangle. Thus, when the pixel row is rotated around the starting point, the step size for each pixel remains essentially constant and the “rotated” pixels lie “next to each other”. The height of a pixel can be approximately determined by Hpixel>=2 d/nπ where d is the distance from the starting point to the pixel and n is the number of steps for a 360° rotation. If the height of the pixels is selected to be larger, there will be an overlap between pixels during the rotation.

(208) FIG. 44 shows another embodiment in which the pixel array is symmetrically arranged along the X-axis around a center point that represents the starting point A. The advantage of this arrangement is that the imaging optics need only rotate the array by 180° to produce a complete image.

(209) FIG. 45 shows an embodiment of a pixel matrix with two pixel arrays arranged perpendicular to each other. The two pixel arrays have a common center point around which the pixel density is greatest, i.e. the pixels have the smallest size. During operation, the two pixel arrays generate a light cross along the axes X and X2, which can be rotated by a downstream optical system to generate a complete image. The arrangement with two, or in alternative embodiments also several pixel arrays, allows a simpler design of the optics. In the example shown here, the optics is configured to rotate the generated light cross by only 90°, so the pixel array is rotationally symmetrical by 90°.

(210) FIG. 46 shows another aspect concerning the color perception of the eye. In the embodiment shown, several rows are arranged one above the other with subpixels of different colors. A column of subpixels of the colors thus forms one pixel. The subpixels of each pixel of each row are, for example, formed in the different basic colors R(Red), G(Green) and B(Blue). The rows of the different colors are arranged in a row “one above the other” along the axis. For example, the middle green row G is located centrally on the X-axis of the row, a red row R and a blue row B are adjacent to the first row with the green subpixels G on both sides of the axis. In the example, the arrangement and especially the pixel density is the same for each row.

(211) FIG. 47 shows an alternative embodiment in which pixels P and their subpixels of different colors are arranged in a single row. The pixel row is arranged symmetrically around the starting point A. In the example, the subpixels of each pixel P have different colors but the same width. The width between the pixels increases continuously. The pixels in the row that are further out, that is, those that are further away from point A, also have a greater width. Alternatively, it can also be taken into account that the rods and cones in the eye also have different relative color sensitivity at the same angle from the center of vision. In order to compensate for this, the subpixels of different colors are also designed with different widths, i.e. with different dimensions. If the current through the pixels remains constant, there is a different brightness of the color, so that the user has the impression of equally bright colors at the respective location.

(212) FIG. 48A shows a further embodiment in cross-sectional representation of a pixel row according to the proposed principle. The mirror device arranged above the pixel row can be rotated in 2 axes and can thus generate a circular image with different resolution for the user, as already presented in this application. The pixel row itself is arranged on a carrier substrate 20, which comprises different contact areas KB and K. In addition to the contact areas KB and K, the substrate 20 also includes drive electronics, driver circuits, and power supply for the electrical supply of the pixel array and the individual μ-LEDs. The contact areas KB are designed differently depending on the size of the pixel of the pixel row arranged above. This simplifies positioning and contacting of the respective μ-LEDs of a pixel P of the pixel row. In this embodiment, a pixel P is made up of 3 subpixels R, G and B each with one μ-LED each. A central subpixel with one of the colors blue B is arranged rotationally symmetrically around the axis A. It has twice the size of the adjacent green and red subpixels G and R.

(213) As shown, the pixels P and the corresponding subpixels R, G and B and the μ-LEDs show an increasing size with increasing distance from the rotation axis A. For example, the μ-LEDs of the subpixels B, G2 and R of the outer pixels P are significantly larger than the μ-LEDs of the pixels adjacent around the central axis A. In addition, the μ-LEDs of the green subpixels G1 and G2 have larger dimensions compared to the other μ-LEDs of the same pixel as the distance from the rotation axis A increases. This is useful because the eye reacts more sensitively to the green color and thus the green color also dominates in peripheral vision.

(214) The shown μ-LEDs are configured as vertical μ-LEDs. For this purpose, they have a common connection contact on the side facing away from the substrate 20, which is electrically connected to the contacts K on the outside. A light-shaping structure in the form of a photonic crystal with the areas 33 and 34 is applied to the upper side of this transparent cover electrode. The areas 33 and 34 produce a variation of the refractive index and thus cause a collimation of the light emitted by the μ-LEDs.

(215) The pixel row proposed according to this concept can be realized with μ-LEDs of different shapes and designs. FIG. 48B shows an embodiment in which the individual sub-pixels of each pixel are implemented in the form of so-called bars using μ-LEDs. A converter material is arranged between a pair of μ-LEDs. At a greater distance from the central subpixel with the color blue B, the μ-LEDs emitting a green color are designed larger. This aspect considers the already mentioned increased sensitivity of the human eye in the green range.

(216) FIG. 48C shows a different embodiment. For each individual subpixel of a color, a matrix of 2×2 μ-LEDs is provided, which are electrically separated from each other but optically connected. Thus, 2 essential aspects can be realized. On the one hand, this design allows defective μ-LEDs to be sorted out and replaced by working μ-LEDs. This is shown for example in the right area in the bottom row with a red subpixel, which is marked as defective as shown. The marked defective red μ-LED is replaced by another μ-LED in the red subpixel. Additionally further outside, a different intensity and radiation characteristic can be achieved by switching on additional μ-LEDs in the respective subpixel. This is indicated by the μ-LEDs of the green subpixel G1 and G2.

(217) The structure shown in FIG. 48C comprises 4 μ-LEDs for each subpixel, some of which may be designed as redundant μ-LEDs. In a different configuration, the matrix can also be a 2×1 matrix, with only a single row of 2 μ-LEDs per pixel. The decreasing resolution capabilities of the eye outside of an area of the fovea can be taken into account by enlarging the μ-LEDs. FIG. 48D shows the cross-sectional representation through the pixel structure of FIG. 48 shown in top view. The embodiments of these μ-LEDs with optical and electrical separating elements 16 as well as electrical separating elements 20 is already explained in this application in the embodiment of FIG. 133.

(218) Finally, the two embodiments in FIGS. 49A and 49B take into account that the sensitivity of the eye to recognize colors also depends on the angle of vision and the distance to the center of the fovea, respectively. The dependence of sensitivity is expressed by the fact that further outside, i.e. at a greater distance from the center, the eye no longer comprises as many cones that react to the colors red and blue. Here the rods for the color green predominate. Correspondingly, a variable, i.e. different density is proposed for the respective pixels or subpixels of green color. While near the starting point A the subpixels of different color are distributed essentially equally in the three rows, the row with the pixels for the color green predominates with increasing distance.

(219) In FIG. 49A, the greater number of pixels of green is achieved by placing the first row of green subpixels centrally along the X-axis, with essentially all pixel positions occupied. The other two rows R, B with the red and blue pixels are placed above and below the first row. Near the central starting point A, the pixel positions in all three rows are occupied. With increasing distance, however, not all positions in the second row R and the third row B are occupied, i.e. some positions for the red and blue pixels remain unoccupied. The occupancy density of the second and third rows decreases compared to the first row. This result in a lower number of red and blue pixels compared to the green pixels. In other words, the second and third rows are thus “shorter” than the first row.

(220) In the alternative embodiment of FIG. 49B, the pixels of different colors are arranged along the X-axis similar to the embodiment of FIG. 47. Close to the starting point, the pixels of rows R, G and B are equally distributed. As the distance increases, the density of pixels in rows R and B decreases, so that the pixels of the color green predominate in row G. At greater distances from the starting point A, the pixel row G with the green basic color then predominates.

(221) It should be explicitly mentioned at this point that the different aspects and examples can also be combined with each other to create a desired arrangement that makes sense for the respective application. This also, but not only, concerns the combination of rows and pixels in the respective rows, i.e. combinations that relate to spatial resolution and color sensitivity.

(222) FIG. 50 shows another embodiment of a pixel matrix in which three rows R, G, and B are offset from each other with pixels of different colors. The three rows have a common center A, and the angle between individual adjacent rows is 60°. Each row R, G, and B has pixels of the same color. In addition, the widths of the individual pixels of each row are different (not shown here) to account for the different sensitivity. The staggered arrangement makes the realization easier, because the μ-LEDs of each row can be manufactured independently from the μ-LEDs of other rows. By rotating the resulting image by means of an optical system by 180°, an approximately circular colored image is generated. In addition to this arrangement, the rows have different “lengths”. Furthermore, the pixel density of the individual rows of different color is also different. The row with the green color has the highest pixel density, because the eye reacts most sensitive to this. In the outer area, the pixel width of the rows R and B is increased, i.e. the spatial resolution is reduced there. In addition, rows R and B are somewhat shorter because the color sensitivity of the eye is reduced so much near the maximum distance that red and blue colors are no longer perceived.

(223) FIG. 51 schematically shows an implementation of an imaging optic to convert an imaging element with a variable pixel density into a virtual image. The imaging element is a single pixel row with different subpixels that are designed to deliver a color. In addition to this pixel row, other imaging elements disclosed here can also be provided. The virtual image is created by a fast rotation of the light emitted by the pixel array with several pixels in the user's eye. In particular, the pixel array generates a strip of light that corresponds to an image row in polar coordinates. The light is bundled by a first lens L1 and directed to a first mirror S1. The first mirror S1 can be tilted around two axes that are perpendicular to each other, so it can deflect the light strip around these two axes.

(224) The light deflected by the first mirror is directed via another lens L2 to a second mirror S2. This second mirror can also be tilted around two axes arranged perpendicular to each other. This functionality is exemplified in the figure by the two arrows. A third lens L3 focuses the generated light strip onto the user's eye. The light strip is now rotated by a slight periodic tilting of the mirrors S1 and S2. The tilting can be realized with MEMS or piezoelectric elements. With each rotation, the image and color information desired at the new position is also radiated from the PA pixel array. Due to the inertia of the eye, a sufficiently fast rotation creates the impression of a circular image. The point of rotation in image Bi, for example, is placed in the focal point or direction of vision of the eye. A change in the direction of view can be detected by eye-tracking measures. The mirrors S1 and S2 can then follow the rotation point and deflect the image so that the rotation point is again in the focus of the eye.

(225) Each of the three lenses can be optional. Likewise, measures other than lenses or mirrors, or other combinations of such optics, may be provided to produce the desired effect.

(226) In the following, various devices and arrangements as well as methods for manufacturing, processing and operating as items are again listed as an example. The following items present different aspects and implementations of the proposed principles and concepts, which can be combined in various ways. Such combinations are not limited to those listed below:

(227) 684. Optical fibre device, comprising:

(228) a light-emitting device comprising at least two light-emitting elements, in particular μ-LEDs, which emit light of two different colors;

(229) an elongated first light guide to guide light of a first color and having an output part;

(230) an elongated second light guide to guide light of a second color and having an output portion;

(231) a first coupling element disposed adjacent to the first light guide and configured to reflect the light of the first color into the elongated first light guide;

(232) a second coupling element disposed adjacent to the second light guide and configured to reflect the light of the second color into the elongated second light guide.

(233) 685. Light guide device according to item 684, further comprising:

(234) a third launching member mounted opposite the second launching member and adjacent the elongated second light guide, the third launching member being configured to reflect light of a third color into the elongated second light guide.

(235) 686. Light guide device according to any of items 684 to 685, wherein the first coupling element is transparent to light of a color different from the first color.

(236) 687. Light guide device according to object 685, the second coupling element being transparent to light of the third color.

(237) 688. Light guide device according to any of the preceding items, wherein the light of different colors has an angle of incidence between 45° and 90° with respect to the surface of the respective light guide

(238) 689. Light guide device according to any of the preceding items, where light of the third color has a wavelength greater than the light of the second color

(239) 690. Light guide device according to any of the preceding items, wherein at least one of the first and second coupling elements is arranged on a sidewall of the respective elongated light guide.

(240) 691. Light guide device according to any of the preceding items, wherein the first and second elongated light guides are substantially parallel to each other.

(241) 692. Light guide device according to any of the preceding items, further comprising spacer elements for spacing the first and second elongated light guides apart.

(242) 693. Light guide device according to any of the preceding items, further comprising

(243) a first decoupling element arranged on the output part of the elongated first light guide for decoupling light of the first color;

(244) a second out-coupling element arranged on the output part of the elongated second light guide to couple out light of the second color.

(245) 694. Light guide device according to item 693, further comprising:

(246) a third out-coupling element arranged on the elongated second light guide opposite the second out-coupling element to couple out light of the third color.

(247) 695. Light guide device according to one of the objects 693 to 694, wherein the first decoupling element is transparent to light of the second and/or the third color.

(248) 696. Light guide device according to any of items 693 to 695, wherein the second output coupler is transparent to light of the third color or the third output coupler is transparent to light of the second color.

(249) 697. Lighting device comprising a light-emitting optoelectronic element and an optical device for beam conversion of the electromagnetic radiation generated by the light-emitting optoelectronic element

(250) wherein said light-emitting optoelectronic element comprises a plurality of emission regions arranged in a matrix form; and wherein each emission region is assigned a main beam direction; and

(251) at least part of the emission zones are arranged in such a way that the centers of the emission regions lie on a curved surface.

(252) 698. Lighting arrangement according to item 697, characterized in that the curved surface has a concave curvature.

(253) 699. Lighting arrangement according to any of the preceding items, characterized in that the main directions of radiation of the emission regions are at an angle to each other.

(254) 700. lighting arrangement according to any of the preceding items, characterized in that there are emission regions with a coinciding main beam direction, which are arranged on different planes at a different distance in the main beam direction from the optical device.

(255) 701. lighting arrangement according to any of the preceding items, characterized in that the curved surface forms a spherical segment, the associated spherical center lying on the optical axis of the optical device,

(256) or in that the curved surface has the shape of at least a portion of a rotated conical section, in particular an ellipsoid, paraboloid or hyperboloid.

(257) 702. Lighting arrangement according to any of the preceding items, characterized in that the emission regions whose centers are located on the curved surface, each form Lambert radiators.

(258) 703. Lighting arrangement according to any of the preceding items, characterized in that at least one of the emission regions is the aperture of a primary optical element associated with a μ-LED or of a converter element associated with a μ-LED.

(259) 704. Lighting arrangement according to any of the preceding items, characterized in that the emission regions whose centers lie on a curved surface are part of a monolithic pixelated optochip.

(260) 705. Lighting arrangement according to item 704, in which the monolithic pixelated optochip has a plurality of μ-LEDs arranged in rows and columns.

(261) 706. Lighting arrangement according to any of the preceding items, in which the emission regions constitute the surface of a coupling-out structure, and which comprises a photonic crystal or photonic structure for beam-shaping.

(262) 707. Lighting arrangement according to any of the preceding items characterized in that the emission regions, whose centers lie on a curved surface, are assigned to separate μ-LEDs arranged on a non-planar IC substrate.

(263) 708. Lighting arrangement according to any of the preceding items, characterized in that the optical device comprises a system optic and between the system optic and the emission areas there is a curved collimating optical element or several nonplanarly arranged collimating optical elements.

(264) 709. Lighting arrangement according to any of the preceding items, characterized in that the optical device comprises a system optic, which forms an imaging projection optic.

(265) 710. Lighting arrangement according to any of the preceding items, in which the light-emitting optoelectronic element has a layer comprising a plurality of drive elements, in particular current sources for individual drive of each of the emission areas.

(266) 711. Method of producing an illumination assembly comprising a light-emitting optoelectronic element and an optical device for beam conversion of the electromagnetic radiation generated by the light-emitting optoelectronic element; wherein

(267) the optoelectronic element comprises a plurality of emission regions arranged in matrix form;

(268) characterised in that

(269) at least part of the emission regions are arranged in such a way that the centers of the emission regions lie on a curved surface.

(270) 712. Method according to item 711, characterized in that separate μ-LEDs are arranged on a non-planar IC substrate to create the emission regions.

(271) 713. Method according to any of the preceding items, characterized in that at least one of the emission regions is formed by the aperture of a primary optic associated with a μ-LED or a converter element associated with a μ-LED.

(272) 714. Light guide arrangement comprising a μ-display and a projection optics, wherein the μ-display comprises a matrix with pixels for emission of visible light and wherein each pixel comprises several μ-LEDs with spectrally different light emission; and wherein each pixel is assigned a separate collimation optics preceding the projection optics,

(273) characterised in that

(274) the collimation optics are configured in such a way that enlarged and overlapping intermediate images of the μ-LEDs of the respective pixel are generated in the beam path in front of the projection optics.

(275) 715. Light guide arrangement according to item 714, characterized in that the intermediate images of the μ-LEDs of the respective pixel generated by the collimation optics overlap each other over at least 70%, 80% or 90% of their intermediate image area.

(276) 716. Light guide arrangement according to item 714 or 715, characterized in that the intermediate images μ-LEDs are virtual intermediate images.

(277) 717. Light guide arrangement according to any of the preceding items, characterized in that the collimation optics is arranged between the μ-LEDs of a pixel and the projection optics.

(278) 718. Light guide arrangement according to any of the preceding items, characterized in that the μ-LEDs of a pixel occupy not more than 30%, particularly preferably not more than 15% and most particularly preferably not more than 10% of the pixel area.

(279) 719. Light guide arrangement according to any of the preceding items, characterized in that the μ-LEDs are configured as color converted μ-LEDs or as VCSELs or as edge-emitting laser diodes and optionally have illuminated optical waveguide end pieces.

(280) 720. Light guide arrangement according to any of the preceding items, characterized in that the collimation optics are designed such that the total area of the overlapping intermediate images of the μ-LEDs of the respective pixel corresponds to at least 70%, 80% or 90% of the pixel area.

(281) 721. Light guide arrangement according to any of the preceding items,

(282) characterized in that the collimation optics comprise a holographic optical element (HOE) and/or refractive optical element (ROE) and/or a diffractive optical element (DOE).

(283) 722. Light guide arrangement according to any of the preceding items,

(284) characterised in that the radiation emitted by the projection optics is directed directly or indirectly onto a display.

(285) 723. Light guide array according to any of the preceding items, in which each pixel comprises a μ-LED array according to any of the preceding items.

(286) 724. Light guide arrangement according to any of the preceding items, in which each pixel comprises a μ-LED following one of the preceding objects.

(287) 725. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel are each formed by a horizontally arranged microrod according to any of the preceding items.

(288) 726. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel are each formed by at least one antenna slit structure according to any of the preceding items.

(289) 727. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel are each formed by a pair of emitting elements with a converter material arranged therebetween according to any of the preceding items.

(290) 728. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel each comprise quantum well intermixing in an edge region of an active layer of the μ-LED.

(291) 729. Light guide arrangement according to any of the preceding items, in which the matrix comprises a light-shaping structure, in particular a photonic crystal, which is in particular arranged at least partially in a semiconductor material of the μ-LEDs of the pixels.

(292) 730. Light guide arrangement according to any of the preceding items, further comprising a drive unit arranged in a substrate, in particular with current drivers or current sources according to any of the following items, wherein the μ-display is arranged on the substrate and the pixels are electrically connected to the current drivers or current sources.

(293) 731. Light guide arrangement according to any of the preceding items, in which a plurality of pixels of the matrix each have a microlens arranged above the μ-LEDs.

(294) 732. Light guide arrangement according to any of the preceding items, in which a plurality of pixels of the matrix has a reflection structure limiting the pixels, in particular with features according to any of the preceding items, which surrounds the μ-LED of the pixel.

(295) 733. Light guide arrangement according to any of the preceding items, in which at least some of the pixels of the matrix have a redundant μ-LED.

(296) 734. Light guide arrangement according to any of the preceding items, in which the matrix comprises a plurality of μ-LED base modules or a μ-display.

(297) 735. Light guide array according to any of the preceding items according to any of the preceding items, in which the pixels of the array comprise an optoelectronic device or a μ-LED array.

(298) 736. Use of a projection unit according to any of the preceding items to produce an image in an augmented reality display unit, a virtual reality display unit and/or on a head-up display.

(299) 737. Light guide arrangement comprising:

(300) at least one optoelectronic imaging device, in particular a μ-display for generating at least a first image and a second image, and

(301) at least one imaging optic adapted to project a first image of the first image at a first resolution onto a first region of a retina of a user and to project a second image of the second image at a second resolution onto another, second region of the retina, the first resolution being different from the second resolution.

(302) 738. Light guide arrangement according to item 737, characterized in that

(303) the first region is closer to the center of the retina than the second region and that

(304) the first resolution is higher than the second resolution

(305) 739. Light guide arrangement according to any of the preceding items, characterized in that

(306) the imaging optics comprises beam steering means which directs light rays of the first image onto the first region and light rays of the second image onto the second region.

(307) 740. Light guide arrangement according to any of the preceding items, characterized in that

(308) the imaging optics comprise at least one beam-shaping device which focuses the light beams of the first image more strongly than the light beams of the second image.

(309) 741. Light guide arrangement according to item 740,

(310) characterised in that

(311) the beam-shaping device comprises at least a first beam-shaping element and a second beam-shaping element, the first beam-shaping element focusing the light beams of the first image and the second beam-shaping element focusing the light beams of the second image.

(312) 742. Light guide arrangement according to any of the preceding items, characterized in that

(313) the beam steering device for steering the beam has at least one movable and/or fixed mirror.

(314) 743. Light guide arrangement according to any of the preceding items, characterized in that

(315) the beam steering device for steering the beam comprises at least one and preferably at least two glass fibres.

(316) 744. Light guide arrangement according to any of the preceding items, characterized in that

(317) the first and the second image are temporarily displayed one after the other, especially on the same imager.

(318) 745. Light guide arrangement according to any of the preceding items, characterized in that

(319) the first and second images are displayed at least substantially simultaneously, in particular on at least two different display devices.

(320) 746. Light guide arrangement according to any of the preceding items, characterized in that

(321) said at least one optoelectronic imager is formed by a μ-display with a plurality of μ-LED arrays, in particular according to any of the preceding items or a monolithic pixelated array.

(322) 747. Light guide arrangement according to any of the preceding items, characterized in that the second region concentrically encloses the first region.

(323) 748. Light guide arrangement according to any of the preceding items, in which the at least one optoelectronic imager comprises at least one matrix of pixels formed by a μ-LED arrangement according to any of the preceding items.

(324) 749. Light guide device according to any of the preceding items, in which the at least one optoelectronic imager comprises a matrix of pixels formed by one or more μ-LED according to any of the preceding items.

(325) 750. Light guide arrangement according to any of the preceding items, wherein the μ-LEDs of a pixel are each formed by a horizontally arranged microrod according to any of the preceding items, or wherein the μ-LEDs of a pixel are each formed by at least one antenna slot structure according to any of the preceding items.

(326) 751. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel are each formed by a pair of emitting elements with a converter material arranged therebetween according to any of the preceding items.

(327) 752. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel each have a quantum well intermixing in an edge region of an active layer of the μ-LED, in particular quantum well intermixing.

(328) 753. Light guide arrangement according to any of the preceding items, further comprising a drive circuit according to any of the subsequent items, which is implemented in a substrate from which the μ-display is arranged.

(329) 754. Light guide arrangement according to any of the preceding items, in which the μ-display of the at least one optical imager comprises a matrix with a light-shaping structure, in particular a photonic crystal.

(330) 755. Light guide arrangement according to item 754, in which the light-shaping structure is at least partially arranged in a semiconductor material of the μ-LEDs of the pixels of the at least one optical imager.

(331) 756. Light guide arrangement according to any of the preceding items, in which the plurality of pixels of the at least one optical imager each have a microlens arranged above the μ-LEDs of each pixel.

(332) 757. Light guide arrangement according to any of the preceding items, in which the plurality of pixels of the at least one optical imager has a reflection structure delimiting the pixels, in particular with features according to any of the preceding items, which surrounds the μ-LED of each pixel.

(333) 758. Light guide arrangement according to any of the preceding items, in which a first and a second optical imaging device, each comprising a μ-display, formed with μ-LED arrays, optoelectronic devices or μ-LEDs according to any of the preceding items.

(334) 759. Light guide arrangement according to any of the preceding items, in which at least some pixels of the matrix have a redundant μ-LED.

(335) 760. Light guide arrangement according to any of the preceding items, wherein the matrix comprises a plurality of μ-LED base modules or a μ-display.

(336) 761. Light guide arrangement according to any of the preceding items, in which the pixels of the array comprise an optoelectronic device or a μ-LED array.

(337) 762. Use of a light guide arrangement according to any of the preceding items to produce an image in an augmented reality display unit, a virtual reality display unit and/or on a head-up display.

(338) 763. Light guide arrangement comprising:

(339) at least three μ-displays, each comprising a matrix of pixels arranged in rows and columns, each with at least one μ-LED, configured to emit a light of a main wavelength

(340) a projection unit, which is arranged in a beam path of each μ-display and is designed to project images generated by the μ-displays in overlapping manner onto an image plane, the image plane being in particular a retina of an observer.

(341) 764. Light guide arrangement according to item 763, characterized in that the projection unit comprises a lens or a mirror mounted in at least one axis for each μ-display.

(342) 765. Light guide arrangement according to any of the preceding items, in which at least one glass fibre are used to direct the light of the displays onto the projection unit.

(343) 766. Light guide arrangement according to any of the preceding items, further comprising a collimation optics, which is configured to generate enlarged and overlapping intermediate images of the μ-LEDs of the respective pixel in the beam path in front of the projection optics.

(344) 767. Light guide arrangement according to any of the preceding items, wherein the matrix comprises a plurality of μ-LED base modules or a μ-display.

(345) 768. Light guide array according to any of the preceding items, in which the pixels of the array comprise an optoelectronic device or a μ-LED array.

(346) 769. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel are each formed by a horizontally arranged microrod or by at least one antenna slot structure or by a pair of emitting elements with a converter material arranged therebetween according to any of the preceding items.

(347) 770. Light guide arrangement according to any of the preceding items, further comprising a light-shaping structure on the pixels of each μ-display, wherein the light-shaping structure is a microlens or a photonic structure.

(348) 771. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel comprise a reflective lateral surface.

(349) 772. Light guide arrangement according to any of the preceding items, in which a drive circuit is provided in a substrate, which comprises at least one current driver circuit or a supply circuit, in particular according to any of the subsequent items for supplying at least one pixel, the μ-display being arranged on the substrate.

(350) 773. Light guide arrangement with

(351) a dichroic cube;

(352) three μ-displays with a matrix of pixels arranged in rows and columns, one μ-display of which is arranged substantially parallel to one side of the dichroic cube;

(353) a light-emitting surface on the dichroic cube.

(354) 774. Light guide arrangement according to item 773, in which the μ-displays with the matrix of pixels arranged in rows and columns comprise an optoelectronic device or a μ-LED arrangement.

(355) 775. Light guiding arrangement according to any of the preceding items, in which the pixels each comprise μ-LEDs formed by horizontally arranged microrods or by at least one antenna slot structure or by a pair of emitting elements with a converter material arranged therebetween according to any of the preceding items.

(356) 776. Light guide arrangement according to any of the preceding items objects, further comprising a light-shaping structure on the pixels of each μ-display, wherein the light-shaping structure is a microlens or a photonic structure.

(357) 777. Light guide arrangement according to any of the preceding items, in which the μ-LEDs of a pixel comprise a reflective side surface.

(358) 778. Light guide arrangement according to any of the preceding items, further comprising collimation optics, which are designed to produce enlarged and superimposed intermediate images of the respective μ-display in the beam path according to the dichroic cube.

(359) 779. Light guide arrangement according to any of the preceding items, in which the light-shaping structure is at least partially arranged in a semiconductor material of the μ-LEDs of the pixels of the at least one optical imager.

(360) 780. Light guide arrangement according to any of the preceding items, further comprising a drive unit arranged in a substrate, in particular with current drivers or current sources according to any of the subsequent items, wherein the μ-display is arranged on the substrate and the pixels are electrically connected to the current drivers or current sources.

(361) 781. System, comprising:

(362) a light guide arrangement according to any of the preceding items, and

(363) a control unit for controlling the image generator or the imaging optics of the optoelectronic device, in particular in such a way that projected images of a frame of images, in particular comprising the first and second image, on the retina produce a coherent overall image.

(364) 782. System according to item 781, in which fuse elements are electrically coupled to at least some of the μ-LEDs or pixels of the μ-displays, the at least some of the μ-LEDs or pixels forming redundant elements and the fuse elements activating the redundant elements or deactivating them when not required.

(365) 783. System according to any of the preceding items, comprising supply drivers, or control units having characteristics based on any of the subsequent items.

(366) 784. System according to any of the preceding items, in which the control unit is implemented in a substrate on which the μ-display is arranged and electrically connected to the control unit

(367) 785. Light field display comprising:

(368) an optoelectronic device, in particular a μ-display for generating a raster image;

(369) an optics module, for direct retinal projection of the raster image into a user's eye;

(370) characterised in that

(371) said optoelectronic device comprises a first imaging unit generating a first raster sub-image and a second imaging unit generating a second raster sub-image;

(372) wherein the raster image (or halftone image) comprises the first raster sub-image and the second raster sub-image; and the optics module comprises an adjustment optic for the retinal projection of the second raster sub-image onto the fovea centralis in the viewer's eye; and

(373) wherein the retinal projection of the second raster sub-image has a higher resolution than that of the first raster sub-image.

(374) 786. Light field display according to item 785, characterized in that the adjusting optics is configured in such a way that the relative position of the retinal projection of the second raster sub-image can be adjusted with respect to the retinal projection of the first raster sub-image.

(375) 787. Light field display according to any of the preceding items, characterized in that the retinal projection of the second raster sub-image in the user eye has a smaller spatial extension than the retinal projection of the first raster subimage.

(376) 788. Light field display according to any of the preceding items, characterized in that the adjusting optics comprises a switchable Bragg grating.

(377) 789. Light field display according to any of the preceding items, characterized in that the adjusting optics comprises an adjustable Alvarez lens arrangement.

(378) 790. Light field display according to item 789, characterized in that the adjusting optics comprises a Moire lens arrangement.

(379) 791. Light field display according to any of the preceding items, characterized in that a collimation optic is arranged in the beam path of the first imaging unit and/or the second imaging unit.

(380) 792. Light field display according to item 791, characterised in that the adjusting optics is at least partially arranged in the collimating optics.

(381) 793. Light field display according to any of the preceding items, characterized in that the adjusting optics is arranged at least partially between the collimating optics and a waveguide.

(382) 794. Light field display according to any of the preceding items, characterized in that the adjusting optics are arranged at least partially in a waveguide.

(383) 795. Light field display according to any of the preceding items, characterized in that the first imaging unit and/or the second imaging unit comprises a μ-LED array having a plurality of μ-LEDs.

(384) 796. Light field display according to any of the preceding items, characterized in that the first imaging unit and/or the second imaging unit comprises a matrix of a plurality of μ-LED base modules or a μ-display.

(385) 797. Light field display according to any of the preceding items, characterized in that the first imaging unit and/or the second imaging unit comprise a matrix of optoelectronic device arranged in rows and columns or μ-LED arrangements.

(386) 798. Light field display according to any of the preceding items, characterized in that the first imaging unit and/or the second imaging unit comprises a matrix with a light-forming structure, wherein the light-forming structure is a microlens or a photonic structure.

(387) 799. Light field display according to item 798, in which the light-shaping structure is at least partially arranged in a semiconductor material of the μ-LEDs of the pixels of the at least one optical imager.

(388) 800. Light field display according to any of the preceding items, further comprising a drive circuit according to any of the following items, which is implemented in a substrate on which the μ-display is arranged.

(389) 801. Light field display according to any of the items 795 to 800, characterized in that the μ-LEDs comprise arrangements in which the μ-LEDs of a pixel comprise a reflective side surface.

(390) 802. Light field display according to any of the items 795 to 801, characterized in that at least some of the μ-LEDs form arrays or μ-LEDs form redundant elements which are separated from adjacent μ-LED arrays or μ-LEDs by electrically insulating but optically crosstalking elements.

(391) 803. Light field display according to any of the items 795 to 802, characterized in that the μ-LED arrangements are configured to be of different sizes depending on the color, or that a total area of the μ-LED arrangements or μ-LEDs of a pixel is smaller than the area of the pixel, in particular only 50% to 70% of the area of the pixel.

(392) 804. Light field display according to any of the preceding items, characterized in that the light field display comprises a measuring device for determining the position of the fovea centralis.

(393) 805. Light field display according to any of the preceding items, characterized in that the light field display comprises an eye movement detection device and a control device for dynamic tracking of the adjustment optics for the retinal projection of the second raster sub-image onto the fovea centralis.

(394) 806. Method of operating a light field display according to any of the preceding items, characterized in that a first raster sub-image is imaged onto the retina of a user and a second raster sub-image, which has a higher resolution than that of the first raster sub-image, is imaged at least onto the fovea centralis in the user's eye.

(395) 807. Pixel array, in particular for a display in polar coordinates, comprising

(396) a plurality of pixel elements arranged from a starting point on an axis through the starting point in at least one row, wherein

(397) the first plurality of pixel elements in planar view have a length and a variable width such that the width of the pixel elements substantially increases from the starting point.

(398) 808. Pixel array according to item 807, in which the starting point forms a central point and the plurality of pixel elements are arranged symmetrically about the central point along the axis in a row.

(399) 809. Pixel array according to any of the preceding items, in which any two adjacent pixel elements of the plurality of pixel elements have at least one of the following characteristics:

(400) luminous areas of equal size, the distance between them increasing with increasing distance from the starting point;

(401) luminous areas, the corresponding increasing width of the pixels becomes larger; or

(402) a combination of these two possibilities.

(403) 810. Pixel array according to any of the preceding items, in which the plurality of pixel elements have a variable length such that the length of the pixel elements increases with increasing distance from the starting point.

(404) 811. Pixel array according to any of the preceding items, where two adjacent subpixels of the multiplicity of pixels have different colors.

(405) 812. Pixel array according to any of the preceding items, in which the plurality of pixel elements have at least three different colors, the number of pixels of each color being different.

(406) 813. Pixel array according to any of the preceding items, in which a first number of said plurality of pixel elements are arranged in a first row and a second number of said plurality of pixel elements are arranged in at least one second row, said first and second numbers of pixel elements having a different color in operation.

(407) 814. Pixel array according to item 813, in which pixels in each of at least two rows have different colors in operation, the pixels being arranged such that the n-th pixel of a first row has a different color from an n-th pixel of the at least one second row.

(408) 815. Pixel array according to item 813, in which at least three rows of pixel elements are arranged, the colors of which are different in operation.

(409) 816. Pixel array according to any one of the items 813 to 815, in which the first row runs along a first axis and the at least one second row runs along a second axis different from the first axis through a common center point.

(410) 817. Pixel array according to any of the preceding items, in which the first number of the plurality of pixel elements in the first row is different from the second number of the plurality of pixel elements in the at least one second row.

(411) 818. Pixel array according to any of the preceding items, in which at least some pixels of the first and at least one second row have the same width and from an n-th pixel of the first row onwards the width is different from the width of the n-th pixel of the at least one second row.

(412) 819. Pixel array according to any of the preceding items, in which the first row and the at least one second row comprise pixels of different colors, and are arranged along the axis and starting from the starting point.

(413) 820. Pixel array according to any of the preceding items, where the row with the largest number of pixels preferably comprises pixel sin a green color.

(414) 821. Pixel array according to any of the preceding items, where from an nth pixel of the first row onwards the width of adjacent pixels in the first row is smaller than that from the nth pixel onwards in the at least one second row.

(415) 822. Pixel array according to any of the preceding items, where a number of pixels of the color green is greater than a number of pixels of the other colors.

(416) 823. Pixel array according to any of the preceding items, in which the plurality of pixel elements in the at least one row are formed by a monolithically shaped pixelated array of μ-LEDs.

(417) 824. Pixel array according to any of the preceding items, in which at least some of the plurality of pixel elements in the at least one row are formed by transferred μ-LEDs.

(418) 825. Pixel array according to any of the preceding items, in which the μ-LEDs each comprise a horizontally aligned microrod contacted on a substrate.

(419) 826. Pixel array according to any of the preceding items, in which the μ-LEDs each comprise a pair of spaced light-emitting elements with a converter material disposed therebetween.

(420) 827. pixel array according to any of the preceding items, in which the μ-LEDs have been manufactured by a process according to any of the preceding items.

(421) 828. Pixel array according to any of the preceding items objects, in which at least some μ-LEDs are assigned redundant μ-LEDs of the same color, at least one of the μ-LEDs and the redundant μ-LEDs being assigned a fuse element.

(422) 829. Pixel array according to any of the preceding items, in which the μ-LEDs are composed of μ-LED modules, each module comprising at least one base module according to any of the preceding items, the number of base modules per μ-LED module increasing towards the outside.

(423) 830. Pixel array according to any of the preceding items, in which the pixel elements have a light-shaping structure, in particular a reflective structure, a microlens or a photonic crystal.

(424) 831. Pixel array according to any of the preceding items, comprising a substrate on which the pixel array is disposed, the substrate having a supply circuit or driver circuit following one of the following items.

(425) 832. Pixel matrix comprising at least two pixel arrays according to any of the preceding items, in particular for a display in polar coordinates, in which the at least two pixel arrays have a common center point and enclose an angle substantially equal to 360° divided by twice the number of the at least two pixel arrays.

(426) 833. Pixel matrix according to item 832, in which three pixel arrays are provided, each of which has a different color.

(427) 834. Display arrangement in polar coordinates with an array or matrix of pixels according to any of the preceding items, further comprising

(428) an optical system comprising at least one mirror movable about two axes, which is arranged in a main radiation direction of the pixel array or pixel matrix and is adapted to rotate radiated light from the pixels arranged in row about a point corresponding to the starting point.

(429) 835. Method of operating a pixel array or a pixel matrix according to any of the preceding items, comprising the steps of;

(430) creating a first light line with the multitude of pixel elements arranged in a row;

(431) guiding the first light line to a destination;

(432) creating a second light line;

(433) rotating the second light line by a certain angle and a rotation point corresponding to the starting point of the pixel elements arranged in line;

(434) guiding the second light line to the destination.

(435) The description with the help of the exemplary embodiments does not limit the various embodiments shown in the examples to these. Rather, the disclosure depicts several aspects, which can be combined with each other and also with each other. Aspects that relate to processes, for example, can thus also be combined with aspects where light extraction is the main focus. This is also made clear by the various objects shown above.

(436) The invention thus comprises any features and also any combination of features, including in particular any combination of features in the subject-matter and claims, even if that feature or combination is not explicitly specified in the exemplary embodiments.