Silicon controlled rectifier
09704851 ยท 2017-07-11
Assignee
Inventors
Cpc classification
H10D89/921
ELECTRICITY
H10D89/713
ELECTRICITY
International classification
H01L29/74
ELECTRICITY
Abstract
A silicon controlled rectifier, an electrostatic discharge (ESD) protection circuit including the silicon controlled rectifier and an integrated circuit including the silicon controlled rectifier or ESD protection circuit. The silicon controlled rectifier includes a first region having a first conductivity type and a second region having a second conductivity type located adjacent the first region in a semiconductor substrate. A junction is formed at a boundary between the first region and the second region. Contact regions of the first conductivity type and the second conductivity type located in each of the first region and the second region. A further contact region of the second conductivity type is located in the second region, in between the contact region of the first conductivity type and the junction. The further contact region and the contact region of the second conductivity type in the second region are connected together for biasing the second region.
Claims
1. A silicon controlled rectifier comprising: a first region having a first conductivity type located in a semiconductor substrate; a second region having a second conductivity type located adjacent the first region in the semiconductor substrate, whereby a junction is formed at a boundary between the first region and the second region; a first contact region of the first conductivity type and a second contact region of the second conductivity type located in the first region, wherein the second contact region of the second conductivity type is located between the first contact region of the first conductivity type and said junction; a third contact region of the first conductivity type and a fourth contact region of the second conductivity type located in the second region, wherein the third contact region of the first conductivity type is located between the fourth contact region of the second conductivity type and said junction; and a further contact region of the second conductivity type, wherein the further contact region is located in the second region in between the third contact region of the first conductivity type and said junction, wherein the third contact region is connected to a first node, wherein the second contact region is connected to a second node, and wherein the further contact region and the fourth contact region of the second conductivity type in the second region are connected together to a third node for biasing the second region.
2. The silicon controlled rectifier of claim 1, wherein the further contact region and the fourth contact region of the second conductivity type in the second region are connected to an external bias for biasing the second region.
3. The silicon controlled rectifier of claim 1, wherein the further contact region has an area A.sub.fc, wherein the third contact region of the first conductivity type located in the second region has an area A.sub.e, and wherein 0.25A.sub.eA.sub.fc5.0A.sub.e.
4. The silicon controlled rectifier of claim 3, wherein A.sub.e<A.sub.fc5.0A.sub.e.
5. The silicon controlled rectifier of claim 1, wherein the first region does not include any further contact regions in addition to the first contact region of the first conductivity type and the second contact region of the second conductivity type.
6. The silicon controlled rectifier of claim 5, wherein the second contact region of the second conductivity type located in the first region and the third contact region of the first conductivity type in the second region are separated by no more than 4 m.
7. The silicon controlled rectifier of claim 1, further comprising isolation regions located at a surface of the semiconductor substrate for separating the contact regions of the first and second regions.
8. The silicon controlled rectifier of claim 1, wherein the first conductivity type is p-type and the second conductivity type is n-type.
9. The silicon controlled rectifier of claim 1, wherein the substrate has an electrical resistivity >10 .Math.cm at 300 K.
10. The silicon controlled rectifier of claim 1, wherein the first node provides a first power supply voltage and the second node provides a second power supply voltage, the second power supply voltage is less than the first power supply voltage.
11. The silicon controlled rectifier of claim 1, wherein the second contact region comprises a cathode and the third contact region comprises an anode.
12. The silicon controlled rectifier of claim 1, wherein the first node comprises one of an input/output (I/O) pin, an electrostatic discharge (ESD) rail, and a power supply rail, and the second node comprises a ground rail.
13. The silicon controlled rectifier of claim 1, wherein the third node is configured to switch from a first voltage potential to a second voltage potential during an electrostatic discharge event, wherein the silicon controlled rectifier is triggered when the third node provides the second voltage potential.
14. An electrostatic discharge protection circuit comprising: a silicon controlled rectifier comprising: a first region having a first conductivity type located in a semiconductor substrate: a second region having a second conductivity type located adjacent the first region in the semiconductor substrate, whereby a junction is formed at a boundary between the first region and the second region; a first contact region of the first conductivity type and a second contact region of the second conductivity type located in the first region, wherein the second contact region of the second conductivity type is located between the first contact region of the first conductivity type and said junction; a third contact region of the first conductivity type and a fourth contact region of the second conductivity type located in the second region, wherein the third contact region of the first conductivity type is located between the fourth contact region of the second conductivity type and said junction; and a further contact region of the second conductivity type, wherein the further contact region is located in the second region in between the third contact region of the first conductivity type and said junction, wherein the third contact region is connected to a first node, wherein the first and second contact regions connected together to a second node, and wherein the further contact region and the fourth contact region of the second conductivity type in the second region are connected together to a third node for biasing the second region; a first MOSFET connected in series with a second MOSFET between the first node and the second node, wherein the first and second MOSFETs have channels of opposite conductivity type, and wherein the further contact region and the fourth contact region of the second conductivity type in the second region are connected to a node located between said series-connected MOSFETs; and a trigger circuit having an output connected to the gates of the first and second MOSFET for applying a control signal to switch the MOSFETs during an electrostatic discharge event.
15. The electrostatic discharge protection circuit of claim 14, wherein the trigger circuit is operable to switch on the first MOSFET in the absence of an electrostatic discharge event, whereby the further contact region and the fourth contact region of the second conductivity type in the second region are both shorted to the potential at the first node via the first MOSFET for keeping the silicon controlled rectifier deactivated.
16. The electrostatic discharge protection circuit of claim 14, wherein the trigger circuit is operable to switch on the second MOSFET during an electrostatic discharge event, whereby the further contact region and the fourth contact region of the second conductivity type in the second region are both shorted to the potential at the second node via the second MOSFET for triggering the silicon controlled rectifier.
17. The electrostatic discharge protection circuit of claim 14, wherein the first MOSFET is operable to switch on to deactivate the silicon controlled rectifier after an electrostatic discharge event has passed.
18. The electrostatic discharge protection circuit of claim 14, wherein the first node comprises a power rail and the second node comprises a ground rail.
19. An integrated circuit comprising: a silicon controlled rectifier comprising: a first region having a first conductivity type located in a semiconductor substrate; a second region having a second conductivity type located adjacent the first region in the semiconductor substrate, whereby a junction is formed at a boundary between the first region and the second region; a first contact region of the first conductivity type and a second contact region of the second conductivity type located in the first region, wherein the second contact region of the second conductivity type is located between the first contact region of the first conductivity type and said junction; a third contact region of the first conductivity type and a fourth contact region of the second conductivity type located in the second region, wherein the third contact region of the first conductivity type is located between the fourth contact region of the second conductivity type and said junction; and a further contact region of the second conductivity type, wherein the further contact region is located in the second region in between the third contact region of the first conductivity type and said junction, wherein the third contact region is connected to a first node, wherein the first and second contact regions connected together to a second node, and wherein the further contact region and the fourth contact region of the second conductivity type in the second region are connected together to a third node for biasing the second region.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Embodiments of the present disclosure will be described hereinafter, by way of example only, with reference to the accompanying drawings in which like reference signs relate to like elements and in which:
(2)
(3)
(4)
(5)
(6)
DETAILED DESCRIPTION
(7) Embodiments of the present disclosure are described in the following with reference to the accompanying drawings.
(8)
(9) The silicon controlled rectifier 10 includes a first region 4 and a second region 6 located in the substrate 2. The second region 6 is located adjacent the first region 4. Each region 4, 6 may comprise a doped semiconductor material such as doped silicon. The first region 4 is doped to have a first conductivity type and the second region 6 is doped to have a second conductivity type (where the first and second conductivity types are different conductivity types). In the following examples, the first conductivity type is p-type, while the second conductivity type is n-type. However, it is envisaged that the first conductivity type may be n-type, while the second conductivity type is p-type.
(10) The first region 4 and the second region 6 may comprise wells formed in the surface of the substrate 2, e.g. using ion implantation and diffusion techniques.
(11) Since the first region 4 and the second region 6 have different conductivity types, a pn junction is formed at a boundary between them.
(12) The silicon controlled rectifier 10 includes a number of contact regions, which are located in the first region 4 and the second region 6. In general, the contact regions may be doped regions formed in a surface of the substrate. These doped regions typically may have a doping level that is higher than the doping level of the first 4 and second 6 regions. The doped regions forming the contact regions may be separated from each other by isolation regions 8. These isolation regions may be formed from dielectric (typically an oxide) and may, for instance, comprise shallow trench isolation (STI).
(13) A contact region 12 of the first conductivity type and a contact region 14 of the second conductivity type may be located in the first region 4. The contact region 14 may be located between the contact region 16 and the junction formed at the boundary between the first region 4 and the second region 6. In use, the contact region 14 (which, in this example, is n-type) may form a cathode of the silicon controlled rectifier 10. As is well known in the art of ESD protection devices, a silicon controlled rectifier may be viewed as a pair of interconnected bipolar transistors (one of which is an NPN transistor and one of which is a PNP transistor), which are triggered by avalanching at the junction between a p-type and an n-type region during an ESD event to shunt the ESD current. In the present example, the contact region 14, which is n-type, may form the emitter of an NPN bipolar transistor of the silicon controlled rectifier. The contact region 14 may form a contact for applying a potential to the first region 4.
(14) A contact region 16 of the first conductivity type and a contact region 18 of the second conductivity type may be located in the second region 6. The contact region 16 may be located between the contact region 18 and the junction formed at the boundary between the first region 4 and the second region 6. In use, the contact region 16 (which in this example is p-type) may form an anode of the silicon controlled rectifier 10. In the present example, the contact region 16, which is p-type, may form the emitter of a PNP bipolar transistor of the silicon controlled rectifier. The contact region 18 may form a contact for applying a potential to the second region 6.
(15) A further contact region 20 is located in the second region 6. The further contact region 20 is of the second conductivity type, which in the present example is n-type. Note that the further contact region 20 has the same conductivity type as the contact region 18. The further contact region 20 may be located in between the contact region 16 and the junction formed at the boundary between the first region 4 and the second region 6.
(16) The further contact region 20 and the contact region 18 are connected together so that a common potential may be applied to them both. As will be described below, the further contact region 20 may be used to apply a bias to the second region 6, which may have the effect of increasing the holding voltage of the silicon controlled rectifier 10.
(17)
(18) In
(19) In
(20) As described herein, the provision of the further contact region 20 located in the second region 6 may increase the holding voltage of the silicon controlled rectifier 10. The increased holding voltage may allow latch-up to be prevented.
(21) The increase of the holding voltage may result from the biasing of the second region 6 using a potential that is applied to the further contact region 20. This is explained herein below in the context of a device of the kind shown in
(22) Where an external bias is used (e.g. as per
(23) If the current through the first region 4 becomes sufficiently large, a voltage drop across the silicon just beneath the contact region 12 may develop and the potential of most of the first region 4 (e.g. all of the first region 4 except the area immediately below the contact region 12) may be lifted. This may put a voltage drop across the contact region 14 (which, as noted above, forms an NPN emitter of the silicon controlled rectifier 10) and the first region 4. This may cause the contact region 14 to inject electrons, which may turn the silicon controlled rectifier 10 on fully. The magnitude of the electron current passing through the contact region 12 and the further contact region 20 and/or the contact region 18 may depend partly on the bias current that pulls the second region 6 down, and partly on the overall voltage drop between the contact region 14 and the contact region 16. With only the overall voltage drop between contact region 14 and the contact region 16 (and with a pull-down on the second region 6 absent) the hole current through the contact region 12 and the electron current through the further contact region 20 and/or the contact region 18 bias the contact region 14 and the contact region 16 insufficiently to compensate for the losses of electrons and holes (e.g. lost due to recombination or due to charge carriers leaving the device). Therefore, in this state the SCR action may only be sustained in the presence of an overall voltage between contact region 14 and the contact region 16, and a pull-down current on the second region 6.
(24) The presence of the further contact region 20 may increase the loss of electrons in the silicon controlled rectifier 10 (assuming again that the first conductivity type is p-type, while the second conductivity type is n-type). Accordingly, in the absence of an external bias, a larger overall voltage between contact region 14 and the contact region 16 is required to generate the internal biases needed to keep the SCR action going. Thus, the presence of the further contact region 20 may increase the holding voltage of the silicon controlled rectifier 10.
(25) The further contact region 20 may have an area Af.sub.c, and the contact region 16 may have an area A.sub.e. The area may be defined by the area occupied by each contact region in the second region 6, when viewed from above the substrate. In some examples, the ratio of the areas of these contact regions may be in the range 0.25A.sub.eA.sub.fc<5.0A.sub.e. It is envisaged that A.sub.fc may be made larger than A.sub.e, thereby further to ease the loss of electrons in the silicon controlled rectifier 10 as explained above. For instance, in some examples, A.sub.e <A.sub.fc5.0A.sub.e. It is envisaged that the effect of increasing the size of A.sub.fc may saturate at values of A.sub.fc larger than the stated range.
(26) Embodiments of this disclosure may allow the holding voltage of the silicon controlled rectifier 10 to be increased without the need to provide extra contact regions in the first region 4. Thus, in some examples, the first region 4 does not include any further contact regions in addition to the contact region 12 and the contact region 14.
(27) This arrangement may allow the contact region 14 and the contact region 16 to be placed relatively close together (since space for additional contact regions in the first region 4 need not be provided). For instance, the contact region 14 and the contact region 16 may be separated by no more than 4.0 m or even by no more than 2.5 m. The relative closeness of the contact region 14 and the contact region 16 may allow a relatively low operating voltage and provide for fast turn-on times.
(28) Embodiments of this disclosure may be used in a wide range of applications. In contrast to conventional devices such as long-based silicon controlled rectifiers, a silicon controlled rectifier 10 according to an embodiments of this disclosure may be used in applications that require a high-ohmic substrate (e.g. high-voltage processes, or RF-processes). In some examples, the semiconductor substrate has an electrical resistivity >10 .Math.cm at 300 K. Notwithstanding this, it is envisaged that embodiments of this disclosure may be used in applications that require a low-ohmic substrates (e.g. having resistivity <0.1 .Math.cm at 300 K.
(29)
(30) The various plots in
(31) TABLE-US-00001 TABLE 1 Summary of Plots in FIGS. 3A and 3B. Reference FIG. Numeral Description 3A 70 Current at contact region 12 3A 71 Current at contact region 14 3A 72 Current at further contact region 20 3A 73 Current at contact region 16 3A 74 Current at contact region 18 3A 75 Voltage applied to contact region 18 and further contact region 20 3A 76 Voltage applied at contact region 16 3B 80 Current at contact region 12 3B 81 Current at contact region 14 3B 83 Current at contact region 16 3B 84 Current at contact region 18 3B 85 Voltage applied to contact region 18 3B 86 Voltage applied at contact region 16
(32)
(33) Accordingly, the results of
(34) In some examples, a silicon controlled rectifier according to the present disclosure may be provided with a trigger circuit. An example of this is shown in
(35) In
(36) The circuit 100 shown in
(37) The source of the first MOSFET 64 is connected to the rail 50. The drain of the first MOSFET 64 is connected to the drain of the second MOSFET 62. The source of the second MOSFET 62 is connected to the ground rail 52. The first MOSFET 64 and the second MOSFET 62 are thus connected in series between the rail 50 and the ground rail 52.
(38) A node 44 located between the drain of the first MOSFET 64 and the drain of the second MOSFET 62 is connected to contact region 18 and the further contact region 20 of the silicon controlled rectifier 40.
(39) During normal operation of the circuit (i.e. in the absence of an ESD event), the PMOS transistor 60 is switched off, whereby the gates of the MOSFET 62 and MOSFET 62 match the (low) voltage on the ground rail 52, through the resistor 58. Hence, the MOSFET 62 is on an off state, while the MOSFET 64 is in an on state. This shorts the contact region 18 and the further contact region 20 to the voltage at the contact region 16 (i.e. the voltage on the rail 50, through the node 44 and the first MOSFET 64). This keeps the silicon controlled rectifier 40 deactivated in the absence of an ESD event.
(40) When an ESD event occurs, the voltage at node 55 caused by the event switches on the PMOS transistor 60, whereby the voltage applied to the gates of the first MOSFET 64 and the second MOSFET 62 are pulled high (to the voltage on the rail 50, through the PMOS transistor 60). This switches on the second MOSFET 62, while the first MOSFET 64 is switched off. This shorts the contact region 18 and the further contact region 20 to the (low) voltage at the ground rail 52, which triggers the silicon controlled rectifier 40.
(41) When the ESD event passes, the first MOSFET 64 again switches on, which shorts the contact region 18 and the further contact region 20 to the voltage at the contact region 16 (i.e. the voltage on the rail 50, through the node 44 and the first MOSFET 64), thereby to deactivate the silicon controlled rectifier 40. This arrangement thus provides latch-up protection for the circuit 100.
(42) A circuit of the kind described herein may be provided in an integrated circuit, for providing electrostatic discharge (ESD) protection for the integrated circuit.
(43)
(44) The example circuit 200 in
(45) For example, 100 m wide silicon controlled rectifier may be sufficient to sink a 1.5 A ESD current pulse (equivalent to the peak current of a 2.2 kV HBM pulse) at roughly 5V. The second MOSFET 62 (which, as described above may form a driver NMOS for the circuit 100) may have to sink roughly 0.3 A at 3V, implying that the second MOSFET 62 may need to be around 1,320 m wide. Achieving similar clamping with conventional capacitive rail clamps would take a rail clamp of 3,300 m. An underlying assumption is that the maximum allowable voltage at the I/O pins 88 is 7 V. Roughly estimated, a silicon controlled rectifier according to the present disclosure may thus reduce the device footprint and stand-by leakage by a factor 2, if it were used in this way. Latch-up safety may be provided by the fact that the hold voltage of the SCR is larger than the operating voltage of the product.
(46) Another example circuit 200 incorporating a silicon controlled rectifier 40 according to the present disclosure is shown in
(47) The circuit includes a plurality of I/O pins 88, which in a conventional rail-based ESD protection network would be protected by two diodes. Typically the diode between pin 88 and the rail 50 would be made from a p+ implant inside an nwell-implant. That same diode also exists in an SCR as the PNP base-emitter junction (e.g. junction between the contact region 16 and the underlying second region 6 described above). This may be exploited in circuit 200 shown in
(48) In common with the example shown in
(49) In the circuit 200 of
(50)
(51) However, in the circuit 200 of
(52) Again, latch-up safety may be achieved by having the hold voltage of the silicon controlled rectifiers 40 above the operating voltage, as well as by a shunt PMOS transistor that may bias the internal ESD rail to the voltage on the rail 50 at all times when there is a supply voltage (VDD) present and the trigger circuit is not active.
(53) Embodiments of this disclosure may also be used as a pad-based protection. An example of this is shown in
(54) Conventional rail based ESD protection networks that use an internal, floating ESD rail can suffer from the fact that the stand-by leakage of the rail clamp(s) serves as bias current for a parasitic PNP inside conventional p+/nwell diodes. In the design of the circuit 200 in
(55) A silicon controlled rectifier according to this disclosure may also be used as an over-voltage protection device in a large output stage of, for example, a switch-mode power supply or class-D audio amplifier. Typically output stages of this type drive inductive loads, and this may result in voltage-spikes on the output each time that the output switches. An over-voltage can result in electrical overstress (EOS) damage to the output stage, typically in a pull-down NMOS transistor thereof.
(56) An example of this is shown in
(57) An advantage of the circuit shown in
(58) Accordingly, there has been described a silicon controlled rectifier, an electrostatic discharge (ESD) protection circuit including the silicon controlled rectifier and an integrated circuit including the silicon controlled rectifier or ESD protection circuit. The silicon controlled rectifier includes a first region having a first conductivity type and a second region having a second conductivity type located adjacent the first region in a semiconductor substrate. A junction is formed at a boundary between the first region and the second region. Contact regions of the first conductivity type and the second conductivity type located in each of the first region and the second region. A further contact region of the second conductivity type is located in the second region, in between the contact region of the first conductivity type and the junction. The further contact region and the contact region of the second conductivity type in the second region are connected together for biasing the second region.
(59) Although particular embodiments of the present disclosure have been described, it will be appreciated that many modifications/additions and/or substitutions may be made within the scope of the claimed invention.