Optical sensor device
09691914 ยท 2017-06-27
Assignee
Inventors
Cpc classification
H01L2924/00012
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00
ELECTRICITY
H10F77/334
ELECTRICITY
C03C3/21
CHEMISTRY; METALLURGY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2224/48465
ELECTRICITY
International classification
H01L31/0203
ELECTRICITY
C03C3/21
CHEMISTRY; METALLURGY
Abstract
The following configuration is adopted in order to provide a highly reliable optival sensor device which enhances the reliability of devices without making the devices unsuitable for size and thickness reductions. The light sensor comprises an element-mounting portion (3) having a cavity and a lid member closely attached thereinto, the lid member being composed of: a window (2) constituted of a phosphate-based glass to which properties approximate to a spectral luminous efficacy properties have been imparted by compositional control; and a frame (1) constituted of a phosphate-based glass having light-shielding properties. The lid member is a Laminated glass member obtained by cutting the phosphate-based glass having the spectral luminous efficacy properties into individual pieces, fitting the glass piece into the opening of the phosphate-based glass (1) having light-shielding properties, the opening having been formed so as to have a size approximately equal to the cavity size, and melting and integrating the glasses member.
Claims
1. An optical sensor device having a hollow structure in which a lid member and an element-mounting portion having a cavity are closely attached to each other, the optical sensor device comprising: an optical sensor element provided on a bottom portion of the element-mounting portion; and a lead frame in which one end is exposed to an inner side of the cavity, and another end is led to an outer side of the element-mounting portion and functions as an external terminal, the lid member and the element-mounting portion being formed from phosphate-based glass, the lid member having a window formed from first phosphate-based glass having a spectral luminous efficacy properties, and having a frame formed from second phosphate-based glass having light-shielding properties, and the lid member having a structure in which the window formed from the first phosphate-based glass having the spectral luminous efficacy properties in an immediate upward direction of the center of the element-mounting portion is embedded in and integrated with the frame that surrounds the periphery of the window and is formed from the second phosphate-based glass having the light-shielding properties.
2. The optical sensor device according to claim 1, wherein the lid member is constituted by a laminated glass member in which individual pieces of the first phosphate-based glass having the spectral luminous efficacy properties are embedded in an opened site provided in the second phosphate-based glass that has a wafer shape and the light-shielding properties, and are melted to be integrated with the second phosphate-based glass.
3. The optical sensor device according to claim 1, wherein the first phosphate-based glass having the spectral luminous efficacy properties has characteristics in which a central peak of a transmittance is in a wavelength range of 540 nm to 560 nm, a transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less, and a transmittance in a wavelength range of 300 nm to 430 nm is 3% or less, and the second phosphate-based glass having the light-shielding properties has characteristics in which a transmittance in a wavelength range of 300 nm to 1200 nm is 2% or less.
4. The optical sensor device according to claim 1, wherein the first phosphate-based glass having the spectral luminous efficacy properties is individual pieces of glass composed of either one kind of glass having characteristics in which a central peak of a transmittance is in a wavelength range of 540 nm to 560 nm, a transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less, and a transmittance in a wavelength range of 300 nm to 430 nm is 3% or less, or individual pieces of glass in which two kinds of glass including phosphate-based glass with a transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less, and phosphate-based glass with a transmittance in a wavelength range of 300 nm to 430 nm is 3% or less are superimposed on each other.
5. The optical sensor device according to claim 1, wherein a composition of the first phosphate-based glass having the spectral luminous efficacy properties contains, in terms of % by weight, 1) 40% to 60% of P.sub.2O.sub.5, 2) 20% to 40% of BaO, 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%, 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%, 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%, 6) 3% to 10% of CuO, 7) 1% to 5% of V.sub.2O.sub.5, and 8) 1% to 5% of NiO.
6. The optical sensor device according to claim 1, wherein a composition of the second phosphate-based glass having the light-shielding properties contains, in terms of % by weight, 1) 40% to 60% of P.sub.2O.sub.5, 2) 20% to 40% of BaO, 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O3 in a total amount of 1% to 8%, 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%, 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%, 6) 1% to 5% of CoO, 7) 3% to 10% of CuO, 8) 5% to 15% of V.sub.2O.sub.5, and 9) 1% to 5% of NiO.
7. The optical sensor device according to claim 1, wherein the bottom portion includes a mount portion on which the optical sensor element is provided, and the mount portion has a shape in which a rear surface opposite to a surface on which the optical sensor element is provided is exposed from the element-mounting portion to an outer side.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
DESCRIPTION OF EMBODIMENTS
(8) An optical sensor device of the invention has the following structure. A lid member is obtained by embedding one of two kinds of phosphate-based glass having light-transmitting characteristics different from each other through composition adjustment in the other in combination with each other, an element-mounting portion has a cavity, and an element is stuck to the element-mounting portion with an adhesive. An electrode provided on an upper surface of the element is electrically connected to an interconnection surface on which the element is not mounted through a wire. The element is fixed to be surrounded by the element-mounting portion having the cavity.
(9) The lid member is constituted by the two kinds of phosphate-based glass having optical characteristics different from each other through adjustment to a specific composition. A window constituted by phosphate-based glass having the spectral luminous efficacy properties is located in an immediate upward direction of the element-mounting portion, and a frame constituted by phosphate-based glass having light-shielding properties is located at the periphery of the window. An opened site is provided in the phosphate-based glass that has a wafer shape and the light-shielding properties in advance, and the phosphate-based glass having the spectral luminous efficacy properties is embedded in the opened site to be integrally formed.
(10) A composition of the phosphate-based glass having the spectral luminous efficacy properties contains, in terms of % by weight,
(11) 1) 40% to 60% of P.sub.2O.sub.5,
(12) 2) 20% to 40% of BaO,
(13) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(14) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(15) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(16) 6) 3% to 10% of CuO,
(17) 7) 1% to 5% of V.sub.2O.sub.5, and
(18) 8) 1% to 5% of NiO; and
(19) a composition of the phosphate-based glass having the light-shielding properties contains, in terms of % by weight,
(20) 1) 40% to 60% of P.sub.2O.sub.5,
(21) 2) 20% to 40% of BaO,
(22) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(23) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(24) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(25) 6) 1% to 5% of CoO,
(26) 7) 3% to 10% of CuO,
(27) 8) 5% to 15% of V.sub.2O.sub.5, and
(28) 9) 1% to 5% of NiO.
(29) According to the compositions, the spectral luminous efficacy properties, the light-shielding characteristics, and weather resistance, which are higher than those in phosphate-based glass of the related art, are provided.
(30) The phosphate-based glass having the spectral luminous efficacy properties are composed of individual pieces and the opened site is provided in the wafer-shaped phosphate-based glass having the light-shielding properties. The individual pieces of phosphate-based glass are embedded in the opened site, and are heated to constitute a melt-integrated laminated glass member.
(31) In the element-mounting portion having the cavity, a member that is formed from resin, ceramic, metal, glass, or silicon is used.
(32) The element-mounting portion having the cavity has a hollow structure in which an upper surface of the cavity and the glass lid member are closely attached to each other.
Example 1
(33) Hereinafter, a configuration of the optical sensor device of this example will be described with reference to the accompanying drawings.
(34)
(35) Here, the lid member that is constituted by the phosphate-based glass, includes the window 2 constituted by the first phosphate-based glass having the spectral luminous efficacy properties, and the frame 1 constituted by the second phosphate-based glass having the light-shielding properties. The lid member has a structure in which an opened site is provided in wafer-shaped phosphate-based glass in advance, and individual pieces of phosphate-based glass are embedded in the opened site.
(36) The first phosphate-based glass that constitutes the window 2 has the following spectral luminous efficacy properties, and a composition thereof contains, in terms of % by weight,
(37) 1) 40% to 60% of P.sub.2O.sub.5,
(38) 2) 20% to 40% of BaO,
(39) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(40) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(41) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(42) 6) 3% to 10% of CoO,
(43) 7) 1% to 5% of V.sub.2O.sub.5, and
(44) 8) 1% to 5% of NiO.
(45) According to this composition, it is possible to provide spectral luminous efficacy properties in which the central peak of a transmittance is in a wavelength range of 540 nm to 560 nm, the transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less, and the transmittance in a wavelength range of 300 nm to 430 nm is 3% or less. In addition, it is possible to provide weather resistance higher than that of phosphate-based glass in the related art.
(46) A comparison result between this example and a comparative example, which shows effectiveness of the composition, is shown in Table 1. Although being relative evaluation, it can be confirmed that spectral luminous efficacy properties shown in
(47) TABLE-US-00001 TABLE 1 Composition/ Addition Present Comparative Comparative Comparative amount (%) Example A Example B Example C Example D P.sub.2O.sub.5 40 to 60 50 to 70 40 to 60 40 to 60 BaO 20 to 40 B.sub.2O.sub.3 1 to 10 SiO.sub.2 1 to 5 (Al.sub.2O.sub.3 + 1 to 8 10 to 30 10 to 30 La.sub.2O.sub.3 + Y.sub.2O.sub.3) (ZnO + MgO + 1 to 15 1 to 15 1 to 10 CaO + SrO) (Li.sub.2O + 1 to 15 1 to 15 10 to 30 10 to 30 Na.sub.2O + K.sub.2O) CuO 3 to 10 3 to 10 3 to 10 3 to 10 V.sub.2O.sub.5 1 to 5 1 to 5 1 to 5 1 to 5 NiO 1 to 5 1 to 5 1 to 5 1 to 5 Spectral (good) (good) X (poor) (mediocre) luminous efficacy properties Weather (good) X (poor) (good) X (poor) resistance
(48) In addition, the second phosphate-based glass that constitutes the frame 1 is intended to have light-shielding characteristics in which the transmittance in a wavelength range of 300 nm to 1200 nm is 2% or less, and a composition thereof contains, in terms of % by weight,
(49) 1) 40% to 60% of P.sub.2O.sub.5,
(50) 2) 20% to 40% of BaO,
(51) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(52) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(53) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(54) 6) 1% to 5% of CoO,
(55) 7) 3% to 10% of CuO,
(56) 8) 5% to 15% of V.sub.2O.sub.5, and
(57) 9) 1% to 5% of NiO.
(58) When employing the two kinds of phosphate-based glass as laminated glass, it is possible to obtain an integrated glass lid member in which physical properties including a coefficient of expansion become close to each other, and a difference in the coefficient of expansion does not matter when employing the phosphate-based glass as a laminated glass member, and the same high weather-resistance level is provided.
(59) In addition, the lid member has the following structure. The window 2, which has a dimension equal to or less than an inner diameter of an upper portion of the cavity and is constituted by the first phosphate-based glass, is disposed at and introduced to the central portion in an immediate upward direction of the optical sensor element 4 that is mounted on the center of the bottom portion of the element-mounting portion 3 having the cavity. According to this, with regard to a light-receiving angle range in which the optical sensor element can receive light beams through the window 2 constituted by the phosphate-based glass having the spectral luminous efficacy properties, it is possible to effectively receive light beams, which are transmitted through the window 2 having the spectral luminous efficacy properties, with respect to light beams from not only in an immediate upward direction but also in a wide angle range. As a result, it is possible to greatly improve angle dependence of light reception characteristics.
(60) In addition, in the lid member, an opened site is provided in the second phosphate-based glass having a wafer shape and the light-shielding properties, and the first phosphate-based glass having the spectral luminous efficacy properties is embedded in the second phosphate-based glass to obtain a melted and integrated laminated glass member. According to this, a cut-out surface, which occurs in a case of being divided into individual pieces, disappears in the window 2 constituted by the first phosphate-based glass having the spectral luminous efficacy properties. A minute concavo-convexity exists in the cut-out surface. Therefore, in a case of performing introduction while the concave-convexity is left as is, when performing embedding, an air layer is likely to occur between two kinds of glass. In a case where the air layer occurs, light beams are reflected from the air layer, thus an interface state in which the air layer is left is not preferable. In addition, it is difficult to obtain delicate switching characteristics in absorption wavelength characteristics between the first phosphate-based glass having the spectral luminous efficacy properties and the second phosphate-based glass having the light-shielding properties with respect to external light beams. In addition, when the air layer is not left, it is possible to prevent cracking or peeling-off of glass due to expansion of air from occurring when a heat is applied to the air layer.
(61) Description will be given to a method of forming the opened site. The opened site, which is provided in the wafer-shaped second phosphate-based glass having the light-shielding properties, is obtained as follows. Light-shielding glass in a wafer state is placed on a mold provided with a convex portion, and is put into a softening temperature atmosphere in a state in which a load is applied to the glass. After extraction, the light-shielding glass, in which a concave portion is formed, is polished to provide the opened site. In another way, a mask is provided on the light-shielding glass in a wafer state, and etching is performed in a state in which a portion to be the opened site is exposed, thereby providing the opened site. According to this, a surface of the opened site, which is exposed in a thickness direction, does not become a fracture surface, and a minute concavo-convexity like a cut-out surface also does not remain on the exposed surface. According to this, air is less likely to intrude into an interface when embedding the first phosphate-based glass 2 having the spectral luminous efficacy properties.
(62) In addition, so as to form the phosphate-based glass having the spectral luminous efficacy properties, which is embedded into the opened site provided in the phosphate-based glass having the light-shielding properties, an ingot is made into a wafer state through dicing or by using a wire saw, and then the wafer is divided into individual pieces in a size capable of being accommodated in the opened site through the dicing or by using the wire saw. The individual pieces of phosphate-based glass having the spectral luminous efficacy properties are provided in the opened site provided in the wafer-shaped phosphate-based glass having the light-shielding properties, and are put into the softening temperature atmosphere in a state a load is applied to the glass. The phosphate-based glass having the light-shielding properties and the phosphate-based glass having the spectral luminous efficacy properties are in a temperature range close to the softening temperature, and a load is applied thereto. Accordingly, the glass is gradually deformed and flows into the opened site in a gradually softened state, and thus melting integration can be obtained.
(63) In addition, when the phosphate-based glass having the spectral luminous efficacy properties is divided into individual pieces from the wafer state through dicing or by using a wire saw, and the individual pieces are put into an atmosphere that is set to appropriately the lower limit of a softening temperature, a concavo-convex, chipping, and the like, which remain on a processing surface, can be mitigated. As a result, it is possible to improve air-tightness in a glass interface during embedding.
(64) In addition, since the lid member is constituted by glass, the lid member has higher reliability with respect to an environment such as heat and moisture in comparison to the lid member is constituted by a resin and the like. According to this, a variation in characteristics may not occur for a long period of time. In addition, even when changing the thickness or dimensions of the glass, the degree of freedom is high. Accordingly, in a case of designing the package to have a small thickness or a small size, it is possible to easily cope with the case through adjustment of grinding thickness of the glass, or through changing of dimensions during division into individual pieces.
Example 2
(65)
(66) According to this, it is possible to dissipate heat generated in the element 4 to an outer side through the mount portion 11.
Example 3
(67)
(68) Here, the lid member constituted by the phosphate-based glass include the glass having a structure in which the phosphate-based glass 9 that absorbs light beams in an infrared wavelength region, and the phosphate-based glass 10 that absorbs light beams in a ultraviolet wavelength region are superimposed on each other, and the frame 1 constituted by the phosphate-based glass having the light-shielding properties. An opened site is provided in advance in the frame constituted by the phosphate-based glass having the light-shielding properties, and individual pieces of the phosphate-based glass 9 and the phosphate-based glass 10 which are superimposed on each other are embedded in the opened site Here, a sequence of superimposing the phosphate-based glass 9 and the phosphate-based glass 10 is not particularly limited.
(69) The phosphate-based glass 9 is intended to absorb light beams in an infrared wavelength region, and the transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less. A composition of the phosphate-based glass 9 contains, in terms of % by weight,
(70) 1) 40% to 60% of P.sub.2O.sub.5,
(71) 2) 20% to 40% of BaO,
(72) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(73) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(74) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(75) 6) 1% to 5% of CoO,
(76) 7) 3% to 10% of CuO,
(77) 8) 5% to 15% of V.sub.2O.sub.5, and
(78) 9) 1% to 5% of NiO.
(79) In addition, the phosphate-based glass 10 is intended to absorb light beams in an ultraviolet wavelength region, and the transmittance in a wavelength range of 300 nm to 430 nm is 3% or less. A composition of the phosphate-based glass 10 contains, in terms of % by weight,
(80) 1) 40% to 60% of P.sub.2O.sub.5,
(81) 2) 20% to 40% of BaO,
(82) 3) Al.sub.2O.sub.3, La.sub.2O.sub.3, and Y.sub.2O.sub.3 in a total amount of 1% to 8%,
(83) 4) ZnO, MgO, CaO, and SrO in a total amount of 1% to 15%,
(84) 5) Li.sub.2O, Na.sub.2O, K.sub.2O in a total amount of 1% to 15%,
(85) 6) 3% to 10% of CuO,
(86) 7) 1% to 5% of V.sub.2O.sub.5, and
(87) 8) 1% to 5% of NiO.
(88) According to the compositions, the phosphate-based glass 9 and the phosphate-based glass 10 can have the above-described light-transmitting characteristics and high weather resistance.
(89) In addition, with regard to the laminated glass in which the phosphate-based glass 9 that absorbs light beams in an infrared wavelength region in which the transmittance in a wavelength range of 700 nm to 1200 nm is 2% or less, and the phosphate-based glass 10 that absorbs light beams in a ultraviolet wavelength region in which the transmittance in a wavelength range of 300 nm to 430 nm is 3% or less are superimposed on each other, glass wafers which are highly flattened through polishing are superimposed on which other, and then a load is applied thereto. Then, the superimposed wafers are put into a softening temperature atmosphere furnace set to a vacuum atmosphere or a nitrogen atmosphere so as to obtain laminated glass. In addition, the laminated glass may be obtained as follows. Specifically, the glass wafers after being polished are subjected to a chemical treatment with an acid, and is subjected to drying and annealing so as to be an activation state. The glass wafers are superimposed on each other, and a load is applied thereto. Then, the glass wafers are put into a high-temperature furnace set to a vacuum or nitrogen atmosphere. According to this, the laminated glass is obtained.
(90) In addition, the laminated glass in which the phosphate-based glass 9 and the phosphate-based glass 10 are superimposed on each other may be obtained as follows. Specifically, after being highly flattened through polishing, glass wafers are subjected to a chemical treatment with an acid, and drying and annealing. Then, the glass wafers are superimposed on each other by using an adhesive, and then the glass wafers are cured. According to this, the laminated glass is obtained. In addition, as the adhesive, a diluted coupling agent may be used. In this case, it is possible to form a very thin adhesive layer, and it is possible to realize laminated glass with high adhesive strength.
(91) The laminated glass in which the phosphate-based glass 9 and the phosphate-based glass 19 are superimposed on each other are divided into individual pieces having an embedding size through dicing or by using a wire saw, and the individual pieces are embedded in the opened site provided in the frame 1 constituted by the phosphate-based glass having the light-shielding properties and are melt-integrated to obtain the glass lid member.
Example 4
(92)
INDUSTRIAL APPLICABILITY
(93) The optical sensor device using the package, in which the lid member and the element-mounting portion having the cavity are closely attached to each other, has the hollow structure in which the phosphate-based glass formed as laminated glass having spectral luminous efficacy properties and high weather resistance is used as the lid member. Accordingly, it is possible to provide spectral luminous efficacy properties less susceptible to an effect such as heat and moisture, and high reliability. In addition, spectral luminous efficacy properties of light beams, which are received by the light-receiving element, can be obtained in a wide angle range including not only a direction in an immediate upward direction of the element, and an oblique direction. As a result, it is possible to greatly improve angle dependence.
(94) In addition, the phosphate-based glass has a composition having transmittance characteristics, in which a light beam of a wavelength in an ultraviolet region and a light beam of a wavelength in an infrared region is 3% to 2%, in spectral luminous efficacy properties, and high weather resistance. According to this, in comparison to a configuration in which the spectral luminous efficacy properties are provided by resin, an absorbance of an ultraviolet wavelength and an infrared wavelength is higher, and more satisfactory spectral luminous efficacy properties are obtained. In addition to this, the phosphate-based glass is less susceptible town ambient environment, and a variation with the passage of time is also small. According to this, it is possible to provide an optical sensor device in which deterioration in characteristics is small. As a result, the phosphate-based glass can contribute to supply of the optical sensor device to a television, a household electric appliance, and a portable terminal, and further an optical sensor device mounted apparatus with concern of an in-vehicle use or an outdoor use in more severe environments.
REFERENCE SIGNS LIST
(95) 1: Frame, which is formed phosphate-based glass having light-shielding properties, of lid member
(96) 2: Window, which is formed from phosphate-based glass having spectral luminous efficacy properties, of lid member
(97) 3: Element-mounting portion having cavity
(98) 4: Optical sensor element
(99) 5: Wire
(100) 6a, 6b, 6c, 6d: Lead frame
(101) 7: Adhesive of element
(102) 8: Sticking agent of lid member
(103) 9: Phosphate-based glass absorbing light beam in infrared wavelength region
(104) 10: Phosphate-based glass absorbing light beam in ultraviolet wavelength region
(105) 11: Optical sensor element-mounting portion having heat dissipation properties
(106) 12: Optical sensor device