Method And Device For The Thermal Analysis Of A Sample And/Or For The Calibration Of A Temperature Measuring Device

Abstract

A method and a device for the thermal analysis of a sample, as well as a method and a device for the calibration of a temperature measuring device used in a device for the thermal analysis.

Claims

1. A method for thermal analysis of a sample, comprising: tempering the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed, measuring the temperature (T) of the sample in the course of the temperature program, measuring at least one physical characteristic of the sample, which differs from the temperature (T) of the sample, in the course of the temperature program, wherein the measuring of the temperature (T) of the sample comprises: irradiating a first surface area of the sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of the irradiation, determining a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation, determining the temperature of the sample by means of the determined temperature conductivity () by using data, which specify the temperature-dependent course of the temperature conductivity () of the sample.

2. A method for thermal analysis of a sample, comprising: tempering the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed, measuring the temperature (T) of the sample in the course of the temperature program, measuring at least one physical characteristic of the sample which differs from the temperature (T) of the sample, in the course of the temperature program, wherein the measuring of the temperature (T) of the sample comprises: arranging a further sample adjacent to the sample, so as to subject the sample and the further sample to the tempering together, irradiating a first surface area of the further sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the further sample as a result of the irradiation, determining a temperature conductivity () of the further sample by evaluating the detected intensity of the thermal radiation, determining the temperature of the sample by means of the determined temperature conductivity () of the further sample by using data, which specify the temperature-dependent course of the temperature conductivity () of the further sample.

3. A method for calibrating a temperature measuring device used in a device for thermal analysis of a sample for measuring a temperature (T) of the sample, comprising: arranging a sample in the device for the thermal analysis, tempering the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed, measuring the temperature (T) of the sample in the course of the temperature program by means of the temperature measuring device, measuring the temperature (T) of the sample in the course of the temperature program by means of the following steps: irradiating a first surface area of the sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of the irradiation, determining a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation, determining the temperature (T) of the sample by means of the determined temperature conductivity () by using data, which specify the temperature-dependent course of the temperature conductivity () of the sample. calibrating the temperature measuring device by means of a comparison of results of the two measurements of the temperature (T) of the sample.

4. A device for thermal analysis of a sample, comprising: a sample chamber having a sample holder configured to hold the sample; a heating device tempering the sample, in the course of which a temperature (T) of the sample is changed; a controller controlling the heating device according to a temperature program; a temperature sensor disposed within the sample chamber and connected to the controller, the temperature sensor measuring the temperature (T) of the sample in the course of the temperature program; a measuring device connected to the controller and configured to measure at least one physical characteristic of the sample, which differs from the temperature (T) of the sample, in the course of the temperature program; an irradiator exposing a first surface area of the sample with an electromagnetic excitation beam; and a detector detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of irradiation by the irradiator; wherein the controller has an evaluator that determines a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation and determines the temperature of the sample by means of the determined temperature conductivity () by using data which specify the temperature-dependent course of the temperature conductivity () of the sample.

5. A computer program product comprising: a program code, which, executed on a data processing device, carries out a method for thermal analysis of a sample, the program code including code to: temper the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed; measure the temperature (T) of the sample in the course of the temperature program; measure at least one physical characteristic of the sample, which differs from the temperature (T) of the sample, in the course of the temperature program; wherein the code to measure the temperature (T) of the sample includes code to: irradiate a first surface area of the sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of the irradiation; determine a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation; and determine the temperature of the sample by means of the determined temperature conductivity () by using data, which specify the temperature-dependent course of the temperature conductivity () of the sample.

6. A device for thermal analysis of a sample, comprising: a sample chamber having a sample holder configured to hold a first sample and a second sample adjacent to the first sample; a heating device tempering the first sample, in the course of which a temperature (T) of the first sample is changed, wherein the second sample is adjacent to the first sample such that the second sample is tempered along with the first sample; a controller controlling the heating device according to a temperature program; a temperature sensor disposed within the sample chamber and connected to the controller, the temperature sensor measuring the temperature (T) of the first sample in the course of the temperature program; a measuring device connected to the controller and configured to measure at least one physical characteristic of the first sample, which differs from the temperature (T) of the first sample, in the course of the temperature program; an irradiator exposing a first surface area of the second sample with an electromagnetic excitation beam; and a detector detecting an intensity of a thermal radiation emanating from a second surface area of the second sample as a result of irradiation by the irradiator; wherein the controller has an evaluator that determines a temperature conductivity () of the second sample by evaluating the detected intensity of the thermal radiation and determines the temperature of the first sample by means of the determined temperature conductivity () of the second sample by using data which specify the temperature-dependent course of the temperature conductivity () of the second sample.

7. A computer program product comprising: a program code, which, executed on a data processing device, carries out a method for thermal analysis of a sample, the program code including code to: temper the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed; measure the temperature (T) of the sample in the course of the temperature program; measure at least one physical characteristic of the sample, which differs from the temperature (T) of the sample, in the course of the temperature program; wherein the code to measure the temperature (T) of the sample includes code to: temper the sample together with a further sample, the further sample being arranged adjacent to the sample; irradiate a first surface area of the further sample with an electromagnetic excitation beam, and detect an intensity of a thermal radiation emanating from a second surface area of the further sample as a result of the irradiation; determine a temperature conductivity () of the further sample by evaluating the detected intensity of the thermal radiation; determine the temperature of the sample by means of the determined temperature conductivity () of the further sample by using data, which specify the temperature-dependent course of the temperature conductivity () of the further sample.

8. A device for calibrating a temperature measuring device that is used in a device for thermal analysis of a sample, the temperature measuring device being configured to measure a temperature (T) of the sample, comprising: a controller configured to perform the steps of: tempering the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed, the sample being arranged in the device for thermal analysis; measuring the temperature (T) of the sample in the course of the temperature program by means of the temperature measuring device; measuring the temperature (T) of the sample in the course of the temperature program by means of: irradiating a first surface area of the sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of the irradiation, determining a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation, and determining the temperature (T) of the sample by means of the determined temperature conductivity () by using data, which specify the temperature-dependent course of the temperature conductivity () of the sample; and calibrating the temperature measuring device by means of a comparison of results of the two measurements of the temperature (T) of the sample.

9. A computer program product comprising: a program code, which, executed on a data processing device, carries out a method for calibrating a temperature measuring device that is used in a device for thermal analysis of a sample, the temperature measuring device being configured to measure a temperature of the sample, the program code including code to: temper the sample according to a temperature program, in the course of which a temperature (T) of the sample is changed, the sample being arranged in the device for thermal analysis; measure the temperature (T) of the sample in the course of the temperature program by means of the temperature measuring device; measure the temperature (T) of the sample in the course of the temperature program by means of: irradiating a first surface area of the sample with an electromagnetic excitation beam, detecting an intensity of a thermal radiation emanating from a second surface area of the sample as a result of the irradiation, determining a temperature conductivity () of the sample by evaluating the detected intensity of the thermal radiation, and determining the temperature (T) of the sample by means of the determined temperature conductivity () by using data, which specify the temperature-dependent course of the temperature conductivity () of the sample; and calibrate the temperature measuring device by means of a comparison of results of the two measurements of the temperature (T) of the sample.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0090] The invention will be described in more detail below by means of exemplary embodiments with reference to the enclosed drawings.

[0091] FIG. 1 shows a device for the thermal analysis of a sample according to an exemplary embodiment,

[0092] FIG. 2 shows an application of the temperature conductivity a as a function of the temperature, for different materials (literature values),

[0093] FIG. 3 shows a double-logarithmic application of the temperature conductivity a of silicon as a function of the temperature (literature values),

[0094] FIG. 4 shows an application of an uncertainty of a temperature measurement as a function of the temperature when using a flash method on a sample of silicon, and

[0095] FIG. 5 shows a device for the thermal analysis of a sample according to a further exemplary embodiment.

DETAILED DESCRIPTION

[0096] FIG. 1 shows, schematically, a device 10 for the thermal analysis of a sample 12, comprising a sample chamber 14 comprising a sample holder 16 accommodated therein for accommodating the sample 12. To temper the sample 12 according to a predetermined temperature program, in the course of which a temperature T of the sample 12 is changed, the device 10 in the illustrated example comprises an electric heating device 18, which is controlled by a central control device 20 of the device 10 according to the predetermined temperature program.

[0097] The control device 20 is embodied as a program-controlled control device (micro-controller) and is equipped with a (non-illustrated) human-machine interface, via which a user can provide details of the temperature program, e.g. a start and end temperature, as well as details for the control of components, which will be described below, to the device 10.

[0098] To measure the temperature T of the sample 12 in the course of the temperature program, the device 10 comprises a thermal element 22, which is accommodated in the sample chamber 14 and by means of which the control device 20 carries out a measuring of the sample temperature T and stores time-resolved data relating to the temperature in the sample chamber 14 and thus the sample temperature T, in a digital storage device of the control device 20.

[0099] The thermal analysis carried out on the sample 12 serves to determine at least one physical characteristic (which differs from the sample temperature T) of the sample 12 as a function of the sample temperature T.

[0100] With regard to the measuring of such a physical characteristic, an optical transmitter 24 and an optical detector 26, which are also connected to the control device 20 as illustrated, are illustrated only in an exemplary manner, so as to measure a corresponding measuring of the physical characteristic (e.g. optical reflectivity, change in length of the sample, etc.), and to store time-resolved data relating to this physical characteristic in the storage device of the control device 20.

[0101] The measuring device formed in this example by the components 24 and 26 is to only be understood in an exemplary manner. In this respect, all of the measuring devices, which are known from the prior art of thermal analyses, can be used for embodying the measuring device in the context of the invention (e.g. also for measuring a force acting on the sample or for measuring the sample mass, etc.).

[0102] During or after completing the temperature program, data relating to the temperature dependency or a temperature-dependent course of the respective physical characteristic, respectively, can be generated, stored in the control device 20, and can be provided to the user for a further evaluation.

[0103] In the case of the device 10, the accuracy of the measuring of the sample temperature T, which is realized by means of the thermal element 22, is problematic on principle. It turned out to be advantageous in practice to carry out a calibration of this temperature measuring device from time to time (and/or after changing the temperature program), so as to increase the accuracy of the temperature measuring, which is carried out therewith.

[0104] To carry out a calibration of the temperature measuring, the device 10 comprises means for carrying out a flash method on a sample, which is held by the sample holder 16. These means comprise an irradiation source 30 (here, e.g. a laser, which is controlled by the control device 20 in a pulsed manner), by means of which a first side (bottom side in FIG. 1) of the sample is heated by means of electromagnetic excitation pulses, and a detection device 32 for detecting an intensity of a second side (upper side in FIG. 1) of the sample opposite the first side of the sample as a result of the thermal radiation emanating from the irradiation.

[0105] The detection device 32 (here an IR detector, e.g.) is connected to the control device 20 as illustrated, so as to provide a detector signal, which is representative of the thermal radiation intensity, to the control device 20. The flash method realized by means of the components 30 and 32 works as follows: a platelet-shaped sample, of which the temperature-dependent course of the temperature conductivity a is known, is initially placed into the sample holder 16. The control device 20 in connection with the heating device 18 then generate or start, respectively, different temperatures in the sample chamber 14 according to a predetermined temperature program, and measuring them by means of the thermal element 22. For example, this can in particular be a completion of that temperature program, by means of which a sample 12 is to be analyzed thermally after the calibration has ended. The sample, which serves as temperature measuring reference is heated from the bottom side by means of short irradiation pulses from the irradiation source 30 in the course of the temperature program. Each such irradiation pulse has the result that a temperature rise results on the upper side of the sample after a certain temporal offset. The temperature conductivity a of the sample follows directly from the transient course of the temperature rise, which is measured by means of the detection device 22, by using a suitable mathematical model, which is stored in the control device 22 or which can be predetermined on the user side, respectively, and with the knowledge of a thickness of the sample.

[0106] The detected thermal radiation intensity is thus evaluated in the control device 20 so as to determine the temperature conductivity a of the sample (for every temperature rise resulting from an irradiation pulse), and to store it in allocation to the temperature T, which is measured simultaneously by means of the thermal element 22. Data relating to the sample temperature T are furthermore generated in the control device 20 by using the data, which specify the temperature-dependent course of the temperature conductivity of the sample, so that temperature measuring results, from the temperature measuring device, which is realized by means of the thermal element 22 on the one hand and from the temperature measurement by means of the flash method on the other hand are at hand in the course of the tempering for a plurality of sample temperatures T. The calibration of the temperature measuring device, which is realized by means of the thermal element 22, then takes places by means of the measuring results, which were determined by means of the flash method, so that more accurate measuring results are provided for the sample temperature T in subsequent temperature measurements by means of the thermal element 22. The characteristic of the conversion of a thermoelectric voltage, which is provided by the thermal element 22, into the corresponding temperature is adapted concretely in response to this calibration, in the illustrated example. The idea, on which the calibration is based, is thus to draw a conclusion to the temperature in the interior of the sample from the measuring of the temperature conductivity of a sample with known temperature-dependent course of the temperature conductivity .

[0107] A more accurate sample temperature T with a slight systematic deviation, better robustness and long-term stability follows in an advantageous manner by means of the flash method.

[0108] In contrast to the example illustrated in FIG. 1, the measuring device for the temperature-dependent measuring of the mentioned physical characteristic of the sample could also be formed by the means (which are present in any event) for carrying out the flash method, here thus the irradiation source 30 and the detection device 32. In this case, the device 10 can serve, e.g., for the temperature-dependent measuring of temperature conductivity a on different samples 12. The control device 22 in connection with the components 30 and 32 can then also be embodied to carry out the described method for the calibration of the temperature measuring device, which is embodied with the thermal element 22.

[0109] In contrast to the example illustrated in FIG. 1, a conventional temperature measuring device (here: thermal element 22) can even be foregone completely in the case of the device 10. Such an example of a device will be described below with reference to FIG. 5.

[0110] Several aspects relating to the accuracy of the temperature conductivity thermometer, which is used in the context of the invention (formed from the components 30, 32 and 20) will be explained below.

[0111] The accuracy is examined in the form of an uncertainty u. An uncertainty u(T) of the sample temperature T, which is determined by means of the flash method, can be expressed as follows:

u(T)=(d/dT).sup.1u() (equation 1)

[0112] whereby [0113] u(T) identifies the uncertainty of the temperature T, and [0114] d/dT identifies the increase of the temperature-dependent temperature conductivity .

[0115] It can be seen from equation 1 that the uncertainty u(T), which is to be expected, is smaller, the more depends on T. For many materials, this is increasingly so even for lower temperatures T, which is illustrated in FIG. 2 by means of some example materials.

[0116] FIG. 2 shows an application of the temperature conductivity as a function of the temperature T for a number of different materials M1 (tungsten), M2 (molybdenum, type SRM781, M3 (graphite), M4 (iron) and M5 (silicon).

[0117] All of the materials M1 to M5, which are mentioned in an exemplary manner here, are suitable for use in the context of the invention at hand, in particular at temperatures T of less than 1000 K.

[0118] The temperature conductivity of silicon (material M5) as a function of the temperature T for a larger temperature range is once again illustrated in FIG. 3 in a double-logarithmic application.

[0119] It can be seen from this that the use of silicon for measuring temperature by means of the flash method is advantageous all the way to very low temperatures T. The temperature conductivity increases by approximately five magnitudes as the temperature drops between room temperature (approx. 300 K) and 10 K.

[0120] In one embodiment, provision is thus made to provide silicon as material for the sample, which is used for this temperature measuring.

[0121] Returning once again to the above-specified equation 1, it can also be seen from this that the uncertainty u(T) is smaller, the smaller the uncertainty u() of the temperature conductivity . When determining the sample temperature T from the comparison of a temperature conductivity .sub.mess measured in the flash method, with corresponding literature values .sub.lit, the following can be assumed for u():

u()={square root over (u.sup.2().sub.lit+u.sup.2().sub.mess)}(equation 2)

[0122] whereby [0123] u().sub.lit identifies the uncertainty of the temperature conductivity .sub.lit (literature values), and [0124] u().sub.mess identifies the uncertainty of the temperature conductivity .sub.mess (measuring values)

[0125] The uncertainty u().sub.lit of the literature values is typically in the range of between 5% and 15%, whereas the uncertainty u().sub.mess of the measured temperature conductivity .sub.mess is typically in the range of approx, 3%.

[0126] In this case, the total resulting uncertainty u() of the temperature conductivity thermometer is determined largely by the uncertainty u().sub.lit of the literature values (or of the values represented by the data in the case of the invention) of the temperature conductivity .

[0127] In a further development of the invention, provision is made for the temperature conductivity thermometer to be calibrated via a calibrated different thermometer.

[0128] pow In a further embodiment, a plurality of temperature conductivity thermometers of the same type are calibrated via a calibrated further thermometer, so as to obtain an averaged master curve <(T)> of the temperature conductivity thermometer type. Systematic uncertainties, e.g. due to the uncertainty of the sample thickness, but also uncertainties due to endless reproducibility of the temperature conductivity measuring can be reduced. With such an embodiment, the uncertainty u() is reduced to:

u()={square root over (i.sup.2().sub.kal+u.sup.2().sub.repr)}(equation 3)

wherein the uncertainties of the calibration of the temperature conductivity thermometer are combined in u().sub.kal, and u().sub.repr is the uncertainty due to endless reproducibility of the temperature conductivity measurement when reading the temperature conductivity thermometer. In a further design, the latter can be reduced in that an average is formed when reading via a plurality of temperature conductivity thermometers (which is very practicable, e.g. when using a controllable sample changer, in particular by means of a sample changer, which can be controlled automatically by means of a control device of the device) and/or when an average is formed via a plurality of measurements on a temperature conductivity thermometer.

[0129] As a whole, a value of approximately 1% of the measuring value can be strived for u(). If u()=1% is assumed, the uncertainty u(T) of the temperature conductivity thermometer illustrated in FIG. 4 results in the case of silicon as thermometer material (material of the sample, which is subjected to the flash method).

[0130] It can be seen from this that an uncertainty u(T) of less than 1 K can be reached in the temperature range below room temperature (approx. 300 K).

[0131] FIG. 5 shows a device 10 for the thermal analysis of a sample according to a modified exemplary embodiment,

[0132] A first (optional) modification as compared to the example according to FIG. 1 is that the device 10 has a controllable multiple sample holder 16 comprising a plurality of accommodations for the corresponding accommodation of a plurality of samples in a temperable sample chamber 14. Two such accommodations for accommodating two samples 12-1 and 12-2 are shown in FIG. 5 in an exemplary manner. In the course of the temperature program, the automatic sample changer 16 can be controlled (here rotated) via an electric drive 40 in such a manner that a desired one of the samples 12-1 and 12-2 can in each case be brought into the beam path of the temperature conductivity thermometer formed from the irradiation source 30 and a detection device 32.

[0133] A second (optional) modification of the device 10 shown in FIG. 5 is that the arrangement and the operation of a conventional temperature measuring device (see thermal element 22 in FIG. 1) is foregone, and that at least one of the samples 12-1 and 12-2 is instead brought into the beam path of the temperature conductivity thermometer, which is formed from the components 30 and 32, by means of the automatic sample changer 16 for the temperature measuring during normal operation, so as to determine a current temperature T in the sample chamber 14 in the manner as already described above.

[0134] In contrast to the illustrated multiple sample holder 16 comprising only two sample accommodations, the sample holder could also be embodied for accommodating at least three (or even more) samples. This has the advantage, e.g., that a plurality of further samples with a known such temperature dependency can be used as temperature conductivity thermometers in the course of a thermal analysis on a sample comprising an unknown temperature dependency of the temperature conductivity, whereby an advantageous redundancy of the temperature measuring is created by means of a plurality of such further samples (e.g. in that an average value of the individual results of the temperature measurements is used as determined temperature).

[0135] In contrast to the illustrated multiple sample holder 16 comprising only two sample accommodations, the sample holder could also be embodied for accommodating at least three (or even more) samples. This has the advantage, e.g., that a plurality of further samples with a known such temperature dependency can be used as temperature conductivity thermometers in the course of a thermal analysis on a sample comprising an unknown temperature dependency of the temperature conductivity, whereby an advantageous redundancy of the temperature measuring is created by means of a plurality of such further samples (e.g. in that an average value of the individual results of the temperature measurements is used as determined temperature).