Apparatus for Generating a Gas Discharge
20220338338 ยท 2022-10-20
Inventors
Cpc classification
H05H1/2481
ELECTRICITY
H05H1/2406
ELECTRICITY
International classification
Abstract
In an embodiment a device includes a low voltage assembly having an output contact, the low voltage assembly configured to provide a low voltage at the output contact, a high voltage assembly having an input contact and a transformer and a plug-in connection interconnecting the low voltage assembly and the high voltage assembly, wherein the plug-in connection is configured to provide an electrical contact between the output contact of the low voltage assembly and the input contact of the high voltage assembly, wherein the low voltage provided at the output contact is applied to the transformer via the input contact, wherein the transformer is configured to convert the low voltage into a high voltage, and wherein the device is configured to generate a gas discharge.
Claims
1.-15. (canceled)
16. A device comprising: a low voltage assembly having an output contact, the low voltage assembly configured to provide a low voltage at the output contact; a high voltage assembly comprising an input contact and a transformer; and a plug-in connection interconnecting the low voltage assembly and the high voltage assembly, wherein the plug-in connection is configured to provide an electrical contact between the output contact of the low voltage assembly and the input contact of the high voltage assembly, wherein the low voltage provided at the output contact is applied to the transformer via the input contact, wherein the transformer is configured to convert the low voltage into a high voltage, and wherein the device is configured to generate a gas discharge.
17. The device according to claim 16, wherein the low voltage assembly comprises a housing and the high voltage assembly comprises a cartridge in which the transformer is arranged and which comprises the input contact, and wherein the housing and the cartridge are latched together by the plug-in connection or wherein the housing and the cartridge are clamped together by the plug-in connection.
18. The device according to claim 17, wherein the high voltage assembly comprises a discharge structure configured to affect an electric field generated by the high voltage produced at the transformer, and wherein the discharge structure comprises a metallization of an outer surface of the cartridge.
19. The device according to claim 18, wherein the discharge structure comprises a protruding element arranged on an outside of the cartridge, and wherein the discharge structure comprises a first conductive material.
20. The device according to claim 19, wherein the protruding element is needle-shaped, blade-shaped or rounded at its tip, or wherein the protruding element has, at an end facing away from the transformer, a wire extending perpendicularly to a longitudinal direction of the cartridge, or wherein the protruding element comprises bristles, at least some of the bristles comprising a second conductive material and/or an insulating material.
21. The device according to claim 17, wherein the transformer is encapsulated in the cartridge.
22. The device according to claim 17, wherein the cartridge has an opening.
23. The device according to claim 16, wherein the high voltage assembly comprises a discharge structure configured to affect an electric field generated by the high voltage produced at the transformer.
24. The device according to claim 23, wherein the discharge structure is coated with an insulating material forming a dielectric barrier.
25. The device according to claim 16, wherein the high voltage assembly is separable from the low voltage assembly.
26. The device according to claim 16, wherein the low voltage assembly comprises a driver configured to drive the transformer.
27. The device according to claim 16, wherein the transformer is a piezoelectric transformer.
28. The device according to claim 16, wherein the high voltage assembly comprises a gas supply through which a process gas is suppliable.
29. The device according to claim 16, wherein the device is a plasma generator, an ionizer, an ozone generator and/or a gas discharge structure.
30. The device according to claim 16, wherein the low voltage assembly comprises two output contacts, wherein the high voltage assembly comprises two input contacts, and wherein the plug-in connection is configured to plug the high voltage assembly into the low voltage assembly in both orientations such that each of the output contacts is connectable to either of the two input contacts.
31. An arrangement comprising: the device according to claim 16; and a further high voltage assembly, wherein the low voltage assembly of the device is adapted to be interchangeably connected to one of the high voltage assembly of the device or the further high voltage assembly.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Preferred embodiments are described below with reference to the figures.
[0032]
[0033]
[0034]
DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
[0035]
[0036] Only a low voltage is present in the low voltage assembly 1. The low voltage assembly 1 has a housing 3. All elements of the low voltage assembly may be arranged in the housing 3. In the embodiment shown in
[0037] A driver module 6 is arranged in the housing 3. The driver module 6 may be, for example, an ASIC (Application Specific Integrated Circuit) or a printed circuit board on which a drive circuit is formed. The driver module 6 is designed to drive a transformer 7 in the high voltage assembly. In this context, the drive can have a resonance control, a phase control, an amplitude control, a power control, a pulse width modulation or a pulse operation. Likewise, it is possible to monitor the operating state on the high voltage side via the high-frequency signal components generated during discharge ignition.
[0038] The low voltage assembly 1 further has two output contacts 8a, 8b. A low voltage can be provided at the output contacts 8a, 8b. In particular, the output contacts 8a, 8b are connected to the mains supply 5 via the driver module 6. The driver module 6 can thereby pass on the voltage provided by the mains supply 5 to the output contacts 8a, 8b.
[0039] The housing 3 of the low voltage module 11 has a plug-in connection 9 shown schematically in
[0040] In particular, the plug-in connection 9 can be designed such that the low voltage assembly 1 and the high voltage assembly 2 latch together. Alternatively, the low voltage assembly 1 and the high voltage assembly 2 may be clamped together when the plug-in connection 9 is closed. The plug-in connection 9 is designed in such a way that the high voltage assembly 2 rests directly against the housing 3 of the low voltage assembly 1 when the plug-in connection 9 is closed.
[0041] In the embodiment schematically shown in
[0042] The plug-in connection 9 is designed in such a way that a force threshold must be overcome in order to open the plug-in connection. This can prevent accidental disconnection of the plug-in connection 9. Alternatively or additionally, the plug-in connection 9 can be designed in such a way that a defined movement of the connection partners must be carried out. The plug-in connection 9 can, for example, be designed as a bayonet connection. In this case, the high voltage assembly 2 can only be disconnected from the low voltage assembly 1 if a rotating movement of the high voltage assembly 2, in which the high voltage assembly 2 is rotated relative to the low voltage assembly 1, followed by a pulling movement, in which the high voltage assembly 2 is moved linearly with respect to the low voltage assembly 1, is performed.
[0043] The high voltage assembly 2 has the aforementioned input contacts 10a, 10b. Furthermore, the high voltage assembly 2 has the transformer 7. The input contacts 10a, 10b are connected to the transformer 7. The transformer 7 is configured to convert a low voltage applied thereto into a high voltage. The high voltage generated by the transformer 7 is used for gas discharge, for example for plasma generation. The transformer 7 may be a piezoelectric transformer, for example.
[0044] The high voltage assembly may include a cartridge 11. The transformer 7 is arranged in the cartridge 11. The cartridge 11 has input contacts 10a, 10b. Thereby, the input contacts 10a, 10b are arranged on an outer side of the cartridge 11. The cartridge 11 is adapted to be plugged into the low voltage assembly 1.
[0045] The cartridge 11 further includes a discharge structure 12. When a high voltage is generated at the piezoelectric transformer 7, the discharge structure 12 influences the electric field generated, and in this way the shape of a generated gas discharge or plasma discharge is determined in advance. Various discharge structures 12 will be discussed later with reference to
[0046] The plug-in connection 9 can be designed in such a way that plugging the high voltage assembly 2 into the low voltage assembly 1 is only possible in one orientation. Alternatively, plugging-in in both orientations may be possible. Accordingly, for example, the output contact 8a can be connected to either of the two input contacts 10a, 10b.
[0047] The plug-in connection 9 makes it possible to define a defined state in which the low voltage assembly 1 and the high voltage assembly 2 are firmly connected and can only be separated from each other by applying a force that is greater than the defined force threshold, so that unintentional separation of the two assemblies 1, 2 can be avoided. The plug-in connection 9 can further provide an electrically secure connection between the two assemblies 1, 2.
[0048] The transformer 7 is encapsulated in the high voltage assembly 2 in the cartridge 11. As a result, the transformer 7 is protected against dust, moisture and corrosion. Furthermore, the cartridge 11 provides shielding of the high voltage components, in particular the transformer 7, thus preventing unwanted parasitic discharges.
[0049] The high voltage assembly 2 can be separated from the low voltage assembly 1 by disconnecting the plug-in connection 9. Depending on the design of the plug-in connection 9, this may require a force threshold to be overcome or a defined movement, for example a linked rotating and pulling movement. The high voltage assembly 2 can then be replaced by another high voltage assembly which is connected to the low voltage assembly 1. The other high voltage assembly may differ from the first high voltage assembly 2, for example, by the discharge structure 12. Accordingly, a single low voltage assembly 1 may be used to generate different types of gas discharges by respectively connecting other high voltage assemblies 2 having different discharge structures 12 to the low voltage assembly 1.
[0050] The piezoelectric transformer 7 is a mechanically vibrating component and should therefore be decoupled from the environment, for example by elastic mounting. This can preferably be solved by elastic potting. Preferably, the transformer is encapsulated in unity with the discharge structure. By means of a replaceable high voltage assembly 2, the transformer 7 can be replaced in a simple manner. Replacing the high voltage assembly 2 thus allows the low voltage assembly 1 to continue to be used.
[0051] The arrangement of the transformer 7 in the cartridge 11 allows the high voltage assembly 1 to be compact. A simple structure is constructed. The cartridge 11 is robust against damage and interference such as dust, moisture, etc. The high voltage assembly 2 and the low voltage assembly 1 each form functional and mechanically integral subunits of the device.
[0052] The compact design of the high voltage assembly 2 in a cartridge 11 makes it possible to keep cable lengths to a minimum. The very short cables used mean that impedance can be minimized. The compact design of the high voltage assembly 2 also makes it possible to arrange the discharge structure 12 in the immediate vicinity of the piezoelectric transformer 7 and thus, under certain circumstances, to dispense completely with the connecting cables on the high voltage side.
[0053]
[0054] The high voltage assembly 2 is designed as a cartridge 11. The piezoelectric transformer 7 is arranged in the cartridge 11. The cartridge 11 has the discharge structure 12 shown in
[0055] The low voltage assembly 1 used in the embodiment shown in
[0056] In
[0057]
[0058] The piezoelectric transformer 7 is encapsulated in the cartridge 11. Accordingly, the cartridge 11 is sealed in an airtight manner. A discharge structure 12 is attached to the envelope of the cartridge 11. The discharge structure 12 comprises a metallization 14 applied to an outer surface of the envelope. The piezoelectric transformer 7 generates a strong electric field when it generates a high voltage. The metallization 14 of the discharge structure 12 changes the field routings of this electric field. This can affect the nature of a plasma cloud generated by the device.
[0059] In the embodiment shown in
[0060]
[0061]
[0062] The protruding element 15 affects the field distribution of the electric field. If the protruding element 15 is tapered, as in
[0063] In the brush-shaped protruding element 15 shown in
[0064]
[0065]
[0066] In
[0067]
[0068] Although the invention has been illustrated and described in detail by means of the preferred embodiment examples, the present invention is not restricted by the disclosed examples and other variations may be derived by the skilled person without exceeding the scope of protection of the invention.