SYSTEM FOR MEASURING DISPLACEMENT OF ACCELERATING TUBE IN HIGH-VACUUM CHAMBER BY USING MICRO-ALIGNMENT TELESCOPE AND METHOD THEREOF

Abstract

A system for measuring displacement of an accelerating tube by using a micro-alignment telescope, which includes a vacuum chamber; a hollow accelerating tube in the vacuum chamber; a sighting target attached to a surface of the accelerating tube while protruding from the surface of the accelerating tube; the micro-alignment telescope spaced apart from one side surface of the vacuum chamber; a first lens device interposed between the micro-alignment telescope and the vacuum chamber; and a second lens device spaced apart from an opposite side surface of the vacuum chamber by a distance, wherein the vacuum chamber includes first and second viewports placed on the surfaces of the vacuum chamber in correspondence with each other, and the micro-alignment telescope, the first lens device, the first viewport, the sighting target, the second viewport and the second lens device are aligned on a same axis in one direction.

Claims

1. A system of measuring displacement of an accelerating tube by using a micro-alignment telescope, the system comprising: a vacuum chamber inside which a vacuum state can be formed; a hollow accelerating tube placed in the vacuum chamber; a sighting target attached to a surface of the accelerating tube while protruding from the surface of the accelerating tube; the micro-alignment telescope spaced apart from one side surface of the vacuum chamber by a predetermined distance; a first lens device interposed between the micro-alignment telescope and the vacuum chamber; and a second lens device spaced apart from an opposite side surface of the vacuum chamber by a predetermined distance, wherein the vacuum chamber includes first and second viewports placed on the one side surface and the opposite surface of the vacuum chamber in correspondence with each other, and the micro-alignment telescope, the first lens device, the first viewport the sighting target, the second viewport and the second lens device are aligned on a same axis in one direction.

2. The system of claim 1, wherein each of the micro-alignment telescope, the first lens device, the first viewport, the sighting target, the second viewport and the second lens device is provided as a pair aligned about two axes, and the pair of sighting targets protrudes from both sides of the accelerating tube.

3. The system of claim 1, wherein the second lens device comprises a light source.

4. The system of claim 1, wherein the first lens device comprises an inclination controller.

5. The system of claim 3, wherein the light source forms one optical axis, and the micro-alignment telescope, the first lens device, the first viewport, the sighting target, the second viewport and the second lens device are aligned about the optical axis.

6. A method of measuring displacement of an accelerating tube by using a micro-alignment telescope, in a system for measuring the displacement of the accelerating tube including a vacuum chamber, the micro-alignment telescope, first and second lens devices, a sighting target, and first and second viewports, the method comprising: (a) adjusting the micro-alignment telescope to be levelled with a ground; (b) aligning the micro-alignment telescope, the first and second lens devices, the sighting target and the first and second viewports in a row along an optical axis formed by a light source included in the second lens device; (c) reading a coordinate initial value as a longitudinal value (X1.sub.0) and a transverse value (Y1.sub.0) through an indicator attached to the micro-alignment telescope in a state that the optical axis is aligned; (d) reading a coordinate change value as a longitudinal displacement (X1.sub.1) and a transverse displacement (Y1.sub.1) through the indicator on the sighting target as the vacuum chamber maintained in a high vacuum state reaches a targeted high vacuum state when the accelerating tube to which the sighting target is attached is placed inside the vacuum chamber; and (e) calculating a first correcting value based on the coordinate initial value and the coordinate change value obtained from steps (c) and (d), respectively.

7. The method of claim 6, wherein the first correcting value in step (e) is a differential value (X1=X1.sub.0X1.sub.1, Y1=Y1.sub.0Y1.sub.1) between the coordinate initial value and the coordinate change value.

8. The method of claim 6, wherein each of the micro-alignment telescope, the first lens device, the first viewport, the sighting target, the second viewport and the second lens device is provided as a pair aligned about two axes, respectively, the pair of sighting targets protrude from both sides of the accelerating tube, and steps (a) and (b) are commonly applied to the micro-alignment telescopes, the first and second lens devices, the sighting targets and the first and second viewports disposed on the two axes, respectively.

9. The method of claim 8, wherein step (c) comprises: (c1) reading a coordinate initial value on another optical axis, which is paired with the optical axis, as a longitudinal value (X2.sub.0) and a transverse value (Y2.sub.0) through an indicator attached to another micro-alignment telescope paired with the micro-alignment telescope, step (d) comprises: (d1) reading the coordinate change value as a longitudinal displacement (X2.sub.1) and a transverse displacement (Y2.sub.1) through the indicator of another micro-alignment telescope on another sighting target which is paired with the sighting target when a target high vacuum state is achieved, and step (e) comprises: (e1) calculating a second correcting value based on the coordinate initial value and the coordinate change value obtained from steps (c1) and (d1).

10. The method of claim 9, wherein the second correcting value is a differential value (X2=X2.sub.0X2.sub.1, Y2=Y2.sub.0Y2.sub.1) between the coordinate initial value and the coordinate change value obtained from steps (c1) and (d1).

11. The method of claim 9, wherein the vacuum chamber and the accelerating tube are aligned by using the first and second correcting values when a refrigerant or a heat source is not supplied to the vacuum chamber, and wherein, when the refrigerant or the heat source is supplied into the vacuum chamber, the method further comprises: (f) aligning the pair of micro-alignment telescopes, the pair of the first lens devices, the pair of the first viewports, the pair of the sighting targets, the pair of the second viewports and the pair of the second lens devices in two rows about a pair of optical axes formed by light sources provided in the pair of the second lens devices; (g) reading coordinate values of a pair of optical axes as longitudinal displacements (X1.sub.2 and X2.sub.2) and transverse displacements (Y1.sub.2 and Y1.sub.2) through indicators which are attached to the pair of micro-alignment telescopes; (h) calculating a correcting value based on the coordinate values (X1.sub.2 and X2.sub.2, and Y1.sub.2 and Y2.sub.2) obtained from step (g) and coordinate values (X1.sub.0 and X2.sub.0, and Y1.sub.0 and Y2.sub.0) obtained from step (c); and (i) aligning the vacuum chamber and the accelerating tube by using the correcting value calculated in step (h).

12. The method of claim 11, wherein the correcting value calculated ins step (h) is a differential value (X2=X2.sub.0X2.sub.1, Y2=Y2.sub.0Y2.sub.1) between the coordinate values and the initial values obtained from steps (g) and (c), respectively.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0022] FIG. 1 is a perspective view showing a system for measuring displacement of an accelerating tube in a high-vacuum chamber according to an embodiment of the present invention.

[0023] FIG. 2 is a plan view of the system depicted in FIG. 1.

[0024] FIG. 3 is an enlarged view showing one example of a sighting target which is a component of the system for measuring displacement of an accelerating tube according to an embodiment of the present invention.

[0025] FIG. 4 is a perspective view showing one example of a micro-alignment telescope of the system for measuring displacement of an accelerating tube according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0026] The terminology and words used herein and accompanying claims should be not interpreted as the meanings of commonly used dictionaries, but interpreted as having meanings according to the technical sprit of the present invention on the principle that the concepts of the terminology and the words can be defined by the inventor in order to explain the present invention in the best mode.

[0027] Throughout the whole specification, when a predetermined part includes a predetermined component, the predetermined part does not exclude other components, but may further include other components unless the context clearly indicates otherwise. In addition, the terms part, machine, module, device, or step refer to units to process at least one function or operation, and is realized. by hardware or software, or the combination of the hardware and the software.

[0028] Hereinafter, a system for measuring displacement of an accelerating tube in a high-vacuum chamber by using a micro-alignment telescope and a method thereof according to an exemplary embodiment of the present invention will be described in detail with reference to accompanying drawings.

[0029] FIG. 1 is a perspective view showing a system for measuring displacement of an accelerating tube in a high-vacuum chamber according to an embodiment of the present invention, and FIG. 2 is a plan view of the system of FIG. 1.

[0030] Referring to FIGS. 1 and 2, a system of measuring displacement of an accelerating tube includes a vacuum chamber 100 in which a vacuum is formed, a hollow accelerating tube 200 placed in the vacuum chamber 100, first and second viewports 110 and 120 placed in the vacuum chamber 100, a micro-alignment telescope 300 capable of precisely aligning an object, first and second lens devices 410 and 420 each having a lens and supporting the lens, and a sighting target 210 attached to a side surface of the accelerating tube 200 while protruding from the side surface.

[0031] In this case, the micro-alignment telescope 300 is preferably spaced apart from one side surface of the vacuum chamber 100 by a predetermined distance, and the first lens device 410 is preferably interposed between the micro-alignment telescope 300 and the vacuum chamber 100. In addition, the second lens device 420 is preferably spaced apart from the opposite surface of the vacuum chamber 100 by a predetermined distance.

[0032] By having the components displaced in this way, the micro-alignment telescope 300, the first lens device 410, the first viewport 110, the sighting target 210, the second viewport 120 and the second lens device 420 all may be aligned along an optical axis formed by a light source 421 provided to the second lens device 420. Preferably, the devices are aligned on the same axis in one direction. To align them more precisely, the first lens device 410 preferably includes an inclination controller 411 able to control an inclination of the first lens device 410. In addition, the first and second viewports 110 and 120 are preferably formed of glass.

[0033] As shown in FIGS. 1 and 2, the micro-alignment telescope 300 may be displaced as a pair of micro-alignment telescopes 300a and 300b. The first lens device 410 may be displaced as a pair of first lens devices 410a and 410b. The first viewport 110 may be displaced as a pair of first viewports 110a and 110b. The sighting target 210 may be displaced as a pair of sighting targets 210a and 210b. The second viewport 120 may be displaced as a pair of second. viewports 120a and 120b. The second lens device 420 may be displaced as a pair of second lens devices 420a and 420b.

[0034] The micro-alignment telescope 300a, the first lens device 410a, the first viewport 110a, the sighting target 210a, the second viewport 120a, and the second lens device 420a are preferably aligned on the optical axis A. In addition, the micro-alignment telescope 300b, the first lens device 410b, the first viewport 110b, the sighting target 210b, the second viewport 120b, and the second lens device 420b are preferably aligned on the optical axis B. In this case, the optical axes A and B are preferably parallel to each other.

[0035] Specifically, the pair of the sighting targets 210a and 210b, which protrude from both sides of the accelerating tube 200, are used as references which represent a degree of deformation when the accelerating tube 200 and the vacuum chamber 100 are deformed after the optical axes A and B are aligned.

[0036] The sighting targets 210a and 210b may be formed of transparent material, but the material and shape of the sighting targets 210a and 210b are not limited to specific kind and shape. In addition, the sighting targets 210a and 210b are preferably attached to the accelerating tube 200 with bolts to protrude perpendicularly to the outer surface of the accelerating tube 200. Specifically, the direction of an ion beam, which is formed when a heavy-ion accelerator is operated, is preferably perpendicular to the direction of the sighting targets 210a and 210b protruding from the accelerating tube 200.

[0037] FIG. 3 is an enlarged view showing one example of the sighting target 210 according to an embodiment of the present invention. Referring to FIG. 3, a display part 211 is formed on the sighting target 210. The display part 211 preferably, includes a plurality of concentric circles having mutually different sizes which are usable as references of coordinates, but is not limited to a specific shape or pattern.

[0038] FIG. 4 is a perspective view showing one example of the micro-alignment telescope 300 of the system for measuring displacement of an accelerating tube according to an embodiment of the present invention. Referring to FIG. 4, the micro-alignment telescope 300 includes an eyepiece part 310 provided on one end thereof, an adjustment part 320 for precisely adjusting the focus and alignment, and radiation part 330 provided on another end thereof. In addition, the micro-alignment telescope 300 which may be used for the system is not limited to one kind thereof.

[0039] Hereinafter, a method of measuring displacement of an accelerating tube by using a micro-alignment telescope according to the present invention will be described.

[0040] After the micro-alignment telescope 300 is adjusted to be levelled with a ground in step (a), the micro-alignment telescope 300, the first and second lens devices 410 and 420, the sighting target 210 and the first and second viewports 110 and 120 are aligned in a row based on the optical axis formed by the light source 421 included in the second lens device 420 in step (b).

[0041] Preferably, the steps (a) and (b) are commonly applied to devices aligned as pairs along two optical axes A and B, respectively.

[0042] In step (c), an indicator (not shown) attached to the micro-alignment telescope 300a may read a coordinate initial value as a longitudinal value X1.sub.0 and a transverse value Y1.sub.0 in the state that the optical axis A is aligned. The step (c) may include step (c1) in which an indicator (not shown) attached to the micro-alignment telescope 300b may read another coordinate initial value as a longitudinal value X2.sub.0 and a transverse value Y2.sub.0 in the state that the optical axis B is aligned.

[0043] In step (d), the vacuum pressure of the accelerating tube 200 to which the sighting target 210a is attached is maintained in a high vacuum state in a state where it is located inside the vacuum chamber 100, and when a targeted vacuum pressure state is reached, the indicator provided to the micro-alignment telescope 300a may read a coordinate change value as a longitudinal displacement X1.sub.1 and a transverse displacement Y1.sub.1 in units of micrometers.

[0044] The step (d) may include step (d1) in which, similarly to the step (d), the indicator which is provided to the micro-alignment telescope 300b may read another coordinate change value as a longitudinal displacement X2.sub.1 and a transverse displacement Y2.sub.1 in units of micrometers.

[0045] In step (e), a first correcting value is calculated based on the coordinate initial value X1.sub.0 and Y1.sub.0 and the coordinate change value X1.sub.1 and Y1.sub.1 obtained in steps (c) and (d).

[0046] The step (e) may include step (e1) in which, similarly to the step (e), a second correcting value is calculated based on another coordinate initial value X2.sub.0 and Y2.sub.0 and another coordinate change value X2.sub.1 and Y2.sub.1 obtained through the micro-alignment telescope 300b.

[0047] Preferably, the first and second correcting values are differential values between the coordinate initial values and the coordinate change values obtained through the micro-alignment telescopes 300a and 300b, respectively. That is, the first correcting value may be expressed as X1=X1.sub.0X1.sub.1 and Y1=Y1.sub.0Y1.sub.1 and the second correcting value may be expressed as X2=X2.sub.0X2.sub.1 and Y2=Y2.sub.0Y2.sub.1.

[0048] When the first and second correcting values are calculated, the vacuum chamber 100 and the accelerating tube 200 may be aligned by using the first and second correcting values, so that the accelerating tube 200 may be disposed at the correct position thereof. Thus, differently from a previous measuring method, the displacement of the accelerating tube 200 may be precisely measured in a non-contact manner by using the correcting value calculated by the simple process described above without making direct contact with the accelerating tube 200 in the hollow chamber 100.

[0049] Furthermore, in case the accelerating tube 200 is moved away from the correct position due to additionally supplying a refrigerant or heat source into the vacuum chamber 100 or applying a thermal or chemical variation in a vacuum state, the displacement may be precisely measured according to the present invention.

[0050] When the refrigerant and the heat source are supplied into the vacuum chamber, in step (f), the micro-alignment telescopes 300a and 300b, the first lens devices 410a and 410b, the first viewports 110a and 110b, the sighting targets 21-a and 210b, the second viewports 120a and 120b, and the second lens devices 420a and 420b are aligned in two rows along the pair of the optical axes A and B formed by the light sources provided in the second lens devices 420a and 420b.

[0051] In step (g), the indicators attached to the micro-alignment telescopes 300a and 300b read the coordinates of the pair of the optical axes A and B. The vertical movement and the horizontal movement which occur about the optical axis A may be expressed as X1.sub.2 and X2.sub.2, and the vertical movement and the horizontal movement which occur about the optical axis B may be expressed as X2.sub.2 and X2.sub.2.

[0052] In step (h), a correcting value is calculated based on the coordinate values X1.sub.2, X2.sub.2, Y1.sub.2 and Y2.sub.2 obtained in step (g) and the initial values X1.sub.0, X2.sub.0, Y1.sub.0 and Y2.sub.0 obtained in step (c).

[0053] In step (i), the correcting value calculated in step (h) is used to align the vacuum chamber 100 and the accelerating tube 200, so that the accelerating tube (200) is disposed at the correct position thereof again.

[0054] In this case, the correcting value calculated in step (h) is preferably calculated based on the subtraction between the coordinate values obtained in step (g) and the coordinate values obtained in (c). That is, the correcting value, which is calculated when the refrigerant and the heat source are supplied into the vacuum chamber 100, may be expressed as X2=X2.sub.0X2.sub.1 and Y2=Y2.sub.0Y2.sub.1.

[0055] Although a preferred embodiment of the present invention has been described for illustrative purposes, those skilled in the art will appreciate that various equivalents, modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.