Membrane-based fluid control in microfluidic devices

Abstract

A microfluidic valve system includes a substrate, a valve seat a compliant membrane and a mechanically actuable displacement element. The substrate includes first and second channels embedded within it and includes a first layer of material and a second layer of material. The valve seat is in fluid communication with the first and second channels. Portions of the second layer of material form sidewalls of the second channel and the valve seat. The mechanically actuable displacement element applies a mechanical force to the compliant membrane to bring the compliant membrane into sealable contact with the valve seat, thereby closing the valve system.

Claims

1. A microfluidic valve system, comprising: a substrate having first and second channels embedded therein and having a first layer of material and a second layer of material; a valve seat in fluid communication with the first and second channels; a compliant membrane; and a mechanically actuable displacement element for applying a mechanical force to the compliant membrane to bring the compliant membrane into sealable contact with the valve seat, thereby closing the valve system, wherein portions of the second layer of material form sidewalls of the second channel and the valve seat.

2. The valve system of claim 1, wherein the substrate comprises a plate with a threaded hole formed therethrough, and wherein the displacement element is positioned in the threaded hole.

3. The valve system of claim 1, wherein the displacement element is manually actuable.

4. The valve system of claim 1, wherein the displacement element comprises a threaded element.

5. The valve system of claim 1, wherein the valve seat comprises a protruding ring axially aligned with the through hole.

6. The valve system of claim 1, further comprising a third layer of material, coupled to the second layer of material and positioned on an opposite side of the second layer of material relative to the first layer of material, wherein the third layer of material forms a portion of a ceiling of the second channel, and the compliant membrane is coupled to the third layer of material on an opposite side of the third layer of material relative to the second layer of material.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The foregoing and other objects, aspects, features, and advantages of the invention will become more apparent and may be better understood by referring to the following description taken in conjunction with the accompanying drawings, in which:

(2) FIG. 1A is a schematic view of prior art stopcock valves set in a manifold loading position;

(3) FIG. 1B is a schematic view of the stopcock valves of FIG. 1A set for loop circulation;

(4) FIG. 2A is a schematic view of a prior art rotary valve set in a manifold loading position;

(5) FIG. 2B is a schematic view of the rotary valve of FIG. 2A set for loop circulation;

(6) FIG. 3A is a schematic view of a microfluidic system with valves set for loop filling, in accordance with one embodiment of the invention;

(7) FIG. 3B is a schematic circuit representation of the microfluidic system of FIG. 3A;

(8) FIG. 4A is a schematic top view of a compliant membrane-based capacitive element, in accordance with one embodiment of the invention;

(9) FIG. 4B is a cross-sectional view of the compliant membrane-based capacitive element of FIG. 4A along the line A-A, when the capacitive element is in a closed configuration;

(10) FIG. 4C is a cross-sectional view of the compliant membrane-based capacitive element of FIG. 4A along the line A-A, when the capacitive element is in an open configuration;

(11) FIG. 4D is a cross-sectional view of the compliant membrane-based capacitive element of FIG. 4A along the line A-A, when the capacitive element is in a collapsed position;

(12) FIG. 5 is a cross-sectional view of a compliant membrane-based capacitive element and displacement element, in accordance with one embodiment of the invention;

(13) FIG. 6A is a schematic top view of a five-valve manifold with an integrated channel network, in accordance with one embodiment of the invention;

(14) FIG. 6B is a schematic perspective view of the five-valve manifold of FIG. 6A;

(15) FIG. 7A is a schematic plan view of a compliant membrane-based valve structure, in accordance with one embodiment of the invention;

(16) FIG. 7B is a cross-sectional side view of the compliant membrane-based valve structure of FIG. 7A along the line B-B, when the valve structure is in an open configuration; and

(17) FIG. 7C is a cross-sectional side view of the compliant membrane-based valve structure of FIG. 7A along the line B-B, when the valve structure is in a closed configuration.

DESCRIPTION

(18) In various embodiments, the present invention features compliant membrane-based microfluidic structures that are capable of providing capacitive fluidic control and/or valve control functions in microfluidic systems. These capacitive fluidic control and/or valve control structures may be used, for example, in conjunction with the microfluidic devices, systems, and methods described in U.S. Ser. Nos. 11/046,540, 11/169,211, and 11/503,450, the disclosures of which are hereby incorporated herein by reference in their entireties.

(19) In one embodiment, the present invention uses a compliant membrane-based structure, rather than tubing, as a fluidic capacitive element. FIG. 3A depicts an exemplary microfluidic system 300, which serves to allow transient pulsed flow through a discharge line 350, while FIG. 3B depicts an equivalent circuit representation 305 for the microfluidic system 300.

(20) More particularly, as depicted in FIG. 3A, the microfluidic system 300 may include a valve manifold 310 connected to injection lines 320. The valve manifold 310 may include a compliant membrane-based valve structure, for example as described herein with reference to FIGS. 7A-7C. In one embodiment, the valve manifold 310 is connected through rigid tubing 330 to a discharge manifold 340, which is connected to a discharge line 350 for delivering fluid to, and possibly receiving fluid from, a target area of a body, such as a cochlea. The discharge manifold 340 may also be connected to a second rigid tubing section 360, which may itself be connected to a vent valve 370. In an alternative embodiment, the vent valve 370 is absent from the microfluidic system 300. When present, the vent valve 370 may be connected to a compliant membrane-based capacitive element 380, such as, for example, the capacitive elements described herein with reference to FIGS. 4A-4C and 5. The compliant membrane-based capacitive element 380 may provide the required capacitive fluidic control to the system 300, as described herein. In one embodiment, the capacitive element 380 is attached to a pump 390, which is then attached through a length of tubing 395 to the valve manifold 310, thereby completing the fluid loop. In alternative embodiments, the configuration of elements in the fluid loop may be differently arranged. In addition, the fluid loop may include further elements, or exclude some of the elements depicted in FIG. 3A, as appropriate.

(21) The capacitance of the capacitive element 380 is typically an important factor in setting the behavior of the flow characteristics, i.e., how rapidly fluid is discharged and retracted through the discharge line 350. For example, if the capacitance is increased, the discharge rate slows down, and vice-versa. In addition, in one embodiment, if the direction of pulsed flow is that indicated by arrow 315 in FIG. 3A, fluid will be first discharged rapidly through the discharge line 350 and then slowly retracted (i.e., pulled back into the loop). Alternatively, if the direction of pulsed flow is that indicated by arrow 325 in FIG. 3A, fluid will be first drawn rapidly into the system 300 and then slowly discharged. These characteristics may be advantageous in delivering a drug to a target area, and/or in mixing the drug with a body fluid drawn into the fluidic system 300 through the discharge line 350.

(22) Using a compliant membrane-based structure, rather than tubing, as the fluidic capacitive element 380 in the microfluidic system 300 provides several advantages. For example, the compliant membrane-based capacitive element 380 may be easily integrated onto a single substrate with other microfluidic elements, thus reducing the size of the system 300 and easing the manufacture of the system 300. In addition, in one embodiment, connecting the compliant membrane-based capacitive element 380 to the other microfluidic elements does not require the use of macro-scale connectors. Thus, leakage through, and dead volume in, these elements are avoided. Moreover, by using thin, compliant layers for the membrane of the capacitive element 380, large capacitance values may be achieved while the total element volume remains small. As previously described, this is typically not the case when tubing is used.

(23) In addition, because the compliant membrane-based capacitive element 380 may be manufactured to have a small surface area, and because a variety of materials having low intrinsic gas and/or vapor permeabilities are available to be used as membranes, the compliant membrane-based capacitive element 380 may have an extremely low permeability to gas and/or vapor. In another embodiment, by using a displacement-limiting element, for example a screw, the capacitance of the compliant membrane-based capacitive element 380 may be altered or adjusted to any desired value within a range of values.

(24) In greater detail, as described below with reference to FIGS. 4A-4D and 5, one embodiment of the invention features a microfabricated membrane that forms at least one wall, or partial wall, of a cavity. In one embodiment, the membrane has sufficient compliance such that when fluid pressure in the cavity is changed, the cavity volume changes due to the displacement of at least a portion of the membrane. The membrane may be directly integrated with other microfluidic structures such as channels, pumps, and valves in the same base substrate. No tubing or bellows structure is required. In addition, in one embodiment, the compliant membrane-based capacitive element 380 of the present invention has a capacitance value that may be altered during in-use operation, as desired. For example, in one embodiment, a screw or other displacement/blocking element may be positioned above the membrane, with its distance relative to the relaxed position of the membrane capable of being altered to limit the maximum displacement of the membrane as the capacitive cavity is pressurized.

(25) FIG. 4A depicts a top view of a compliant membrane-based capacitive element 400 embedded within a substrate 410 in accordance with one embodiment of the invention. The capacitive element 400 includes a fluid-control cavity 420 with a first channel 430 and a second channel 440 entering the cavity 420 at opposite ends. Alternatively, the first channel 430 and second channel 440 may connect to the cavity 420 at a suitable angle to one another, depending on the application. In addition, more than two channels may be connected to the cavity 420. The cavity may be substantially cylindrical (as depicted in FIGS. 4A-4D), or be of another appropriate shape, such as an oval, a spherical-shape, a cubic-shape, or other appropriate geometry.

(26) In one embodiment, the upper surface of the cavity 420 is bounded by a compliant membrane 450 that is clamped around its outer edge 455 so that it forms a sealed wall of the cavity 420 while being free to expand into or out of the cavity 420 at a central portion 460. As illustrated in FIG. 4B, an expansion hole 465 may be formed within the substrate 410 directly above the membrane 450 to provide an open area for the central portion 460 of the membrane 450 to expand into as it extends outwardly from the cavity 420. In an alternative embodiment, the membrane 450 may be located at the outer layer of the substrate 410, thus allowing it to extend outwardly into the surrounding area without the need for the expansion hole 465.

(27) In one embodiment, by creating a pressure differential between the pressure within the cavity 420 and the pressure within the expansion hole 465, the compliant membrane 450 may move into or out of the cavity 420, thus increasing or decreasing the volume of the cavity 420. For example, if the pressure within the cavity 420 is less than that in the expansion hole 465, the central portion 460 of the membrane 450 will be forced down into the cavity 420, thus reducing the volume of the cavity 420 and thereby restricting the fluid flow therethrough, as depicted in FIG. 4B.

(28) Alternatively, if the pressure within the cavity 420 is greater than that in the expansion hole 465, the central portion 460 of the membrane 450 will be forced outwardly into the expansion hole 465, thus increasing the volume of the cavity 420 and thereby reducing the restriction to fluid flow, as depicted in FIG. 4C.

(29) As a result, in one embodiment, the compliant membrane-based capacitive element 400 promotes and/or restricts fluid flow by changing the volume of the cavity 420. The compliant membrane-based capacitive element 400 may also increase and/or decrease the fluid storage volume of the cavity 420, and thereby of the associated microfluidic device, by moving the compliant membrane 450 into or out of the cavity 420. In addition, by allowing the compliant membrane 450 to move in response to pressure changes within the fluid flow, the compliant membrane-based capacitive element 400 may also provide a capacitive function. More specifically, the capacitive element 400 may provide a frequency response filtering of time-varying flow and/or pressure sources within the microfluidic device, thereby damping out rapid changes in flow or pressure occurring throughout the fluid flow cycle.

(30) The pressure differential between the cavity 420 and the expansion hole 465 may be created, for example, by properties of the fluid flow itself as it is pumped through the microfluidic system. For example, in microfluidic systems for delivering one or more drugs to the cochlea, such as the system 300 depicted in FIG. 3A, the pressure within the cavity 420 will vary as the microfluidic pump 390 discharges and retracts fluid through the discharge line 350 in a pulsed flow. As a result, the central portion 460 of the membrane 450 will be forced inward toward the cavity 420 and outward into the expansion hole 465 as the pressure within the cavity 420 varies during the pulsed fluid-flow cycle, thereby providing a capacitive control for the fluid flow. This may be advantageous, for example, in embodiments where the desired fluid flow rate is lower in amplitude and extended in time downstream of the capacitive element 400 relative to the pulsatile flow rate through a pump upstream of the capacitive element 400.

(31) In one embodiment, the compliant membrane-based capacitive element 400 performs frequency response filtering of time-varying flow or pressure sources. For example, the capacitive element 400 may act as a low pass filter for fluid flow driven by a rapid-pulse pump. In particular, in one embodiment, the compliant membrane-based capacitive element 400 does not have any effect on a steady state flow rate, such as, for example, a mean constant-velocity unidirectional flow (analogous to a DC electrical current in an electrical system). However, in such an embodiment, the compliant membrane-based capacitive element 400 may have a substantial effect on a transient flow rate (i.e., a time-varying flow). As a result, the compliant membrane-based capacitive element 400 may provide pressure control for a fluid flowing within a microfluidic device.

(32) In some cases, for example those where it is desirable to reduce the pressure inside the cavity 420 to a value below that of the pressure outside the cavity 420 (i.e., a negative pressure differential), the capacitive membrane element 400 may be configured so that fluid continues to flow through the element 400 even in the event of a partial or substantially full collapse of the membrane 450 into the cavity 420. To achieve this, one or more bypass channels 470, examples of which are illustrated FIGS. 4A-4D, may be incorporated into the capacitive element 400. In addition, as part of the capacitive cavity structure, the inlet and/or outlet channels 430, 440 may be fashioned with chamfers 475, which may, for example, prevent the trapping of unwanted gas bubbles inside the cavity 420 when fluid is flowing through the cavity 420.

(33) For example, FIG. 4D depicts a capacitive element 400 in which the membrane 450 is fully collapsed into the cavity 420. In this embodiment, the bypass channels 470 act as fluid flow channels to prevent a total, or substantially total, blocking of fluid flow through the cavity 420. This may be useful in, for example, implantable drug delivery devices where fluid flow, and therefore drug delivery, is required to be maintained even in the event of a membrane 450 collapse. The bypass channels 470 may also serve to prevent large fluid pressure changes in the system and thus prevent excessive stresses being applied to components of a microfluidic device, such as a pump of a drug delivery device.

(34) The membrane 450 may be of the same material (as depicted in FIG. 4C) or of a different material (as depicted in FIG. 4B) from that of the other wall(s) 480 of the cavity 420. In addition, the substrate 410 may be manufactured from a single layer or a plurality of layers of the same or different materials. The cavity 420 and channels 430, 440 may be formed in the substrate 410 in accordance with any appropriate manufacturing method, such as, for example, etching, machining, or laser ablation.

(35) In one embodiment, the wall(s) of the cavity 420 (other than the membrane 450) are made from the same material(s) as the substrate 410. In an alternative embodiment, a separate material may be embedded within the cavity 420 to create an impermeable wall, or other appropriate structure, for the cavity 420.

(36) For its part, the membrane 450 may be composed of a single material or layer, or of multiple materials, layers, and/or composites. In addition, some or all of the membrane 450 layers may act as a barrier to vapor and/or gas. As an example, a vapor-permeable polymer material may be combined with a thin layer of barrier metal to form a composite membrane 450 that is both compliant and also resistant to moisture, gas, and/or vapor transport through it. Such low-permeability structures may be desirable in applications where the microfluidic system is in use for long periods of time and is not refilled or reloaded with fluid.

(37) The thickness, diameter, and material stiffness of the membrane 450 may also be chosen to achieve a desired capacitance value. In one embodiment, the membrane 450 has sufficient compliance such that when fluid pressure in the cavity 420 is changed, the volume of the cavity 420 changes due to displacement of the membrane 450. In one embodiment, the capacitance has units of volume per unit pressure differential, e.g., microliters/Pascal. As described herein, the compliant membrane-based capacitive element 400 may be directly integrated with other microfluidic structures such as channels, pumps, and valves in the same base substrate 410, or within a number of connected substrates, as required.

(38) The capacitive properties of the capacitive element 400 may be varied by limiting the displacement of the central portion 460 of the membrane 450. In one embodiment, the capacitive element 400 is used together with a displacement element that is adapted to alter or adjust, in-use, the capacitance of the capacitive element 400 to any value within a range of values by limiting the displacement of the central portion 460 of the membrane 450. This displacement element may be actuated manually. Alternatively, the displacement element may be actuated automatically, either by a signal from a remote location or in response to a condition of the system. The displacement element may be a mechanical element, a magnetic element, a hydraulic element, a solenoid, an electrical element, or combinations thereof. For example, in the embodiment depicted in FIG. 5, the displacement element is a threaded element 510 (e.g., a screw) that is positioned above the central portion 460 of the membrane 450 within the expansion hole 465. By moving the threaded displacement element 510 up and down within the expansion hole 465, the distance of a distal face 520 of the threaded displacement element 510 relative to a relaxed position of the central portion 460 of the membrane 450 (i.e., when the central portion 460 of the membrane 450 is not displaced in either direction) is altered, as is the maximum distance the membrane 450 may be displaced and thus the capacitance of the capacitive element 400. The shape of the distal face 520 of the displacement element 510 may also be chosen to give different capacitance vs. screw displacement functions.

(39) The displacement element 510 may additionally be used to force the central portion 460 of the membrane 450 down into the cavity 420, thereby reducing the volume of the cavity 420 and, as a consequence, the fluid flow therethrough. In one embodiment, the cavity 420 may be configured without bypass channels 470, thus allowing the central portion 460 of the membrane 450 to seal the cavity 420 upon full displacement of the displacement element 510. In such a case, the capacitive element 400 acts as a valve element.

(40) As described, embodiments of the present invention that use the compliant membranes 450 as capacitive elements 400 provide several advantages and have many applications. For example, compliant membrane-based capacitive elements 400 may be used to regulate drug dose in a reciprocating drug delivery device. In addition, the built-in bypass structures 470 provide a safety mechanism against the complete blocking of fluid flow in the event of a structural collapse of the membrane 450.

(41) Additional embodiments of the present invention relate to the use of valves in a microfluidic system, such as a drug-delivery device. The valves may be used for filling or venting a microfluidic system, such as the microfluidic system 100 depicted in FIGS. 1A and 1B. For example, a valve system may be used with the manifold 110 while filling the recirculation loop of the microfluidic system 100.

(42) Referring to FIGS. 6A and 6B, the present invention, in one embodiment, features a valve system 600 that contains one or more valves 610 on a single planar substrate 620. The substrate 620 may define fluidic channels 630 that connect the valves 620 to each other and to external tubing connections 640, as appropriate for the desired function. The valve system 600 is, in one embodiment, incorporated into a microfluidic device, such as, for example, the microfluidic device 100 depicted in FIGS. 1A-1B, and is used to regulate flows therein. For example, a particular valve 610 of the valve system 600 may be set in a partially open configuration. As described below, this setting may be variable, thereby providing a variable resistance to fluid flow through the valve 610. In contrast, many prior valve systems may typically only be either fully open or fully closed.

(43) The substrate 620 may also contain built-in fine-bore tubing mated to appropriate fluidic channels and be used to fit to additional components in a microfluidic system or manifold. Other appropriate means of mating components may also be utilized. The substrate 620 may also contain other microfluidic components, such as, but not limited to, additional compliant structures, fluidic capacitors, electronically actuated valves and/or pumps, mixing chambers, and reservous.

(44) FIGS. 6A and 6B depict a valve system 600 on a substrate 620 that incorporates five valves 610. In alternative embodiments, a greater and/or lesser number of valves 610 are incorporated into the valve system 600 in any appropriate configuration. In one embodiment, valve screws 650 for the valves 610 are #0-80 hex-head set screws. Alternatively, other appropriate screw elements may be employed. The additional holes 660 depicted in FIGS. 6A and 6B may be used for other purposes, such as, but not limited to, mounting of the system 600. In addition, the top plate of the valve system 600 may be partially transparent to provide clarity.

(45) FIGS. 7A-7C depict, in accordance with one embodiment of the invention, an exemplary valve 700 that may be used in the valve system 600 described above. In this embodiment, the compliant membrane-based valve structure 700 includes a substrate 710 that defines a first channel 720, a second channel 730, and a cavity 740 therebetween. As illustrated in FIG. 7B, the first channel 720, second channel 730, and cavity 740 may be in fluid communication with one another. In an alternative embodiment, additional inlet and/or outlet channels may be placed in fluid communication with the cavity 740.

(46) In one embodiment, a valve seat 750 is included in the cavity 740. A compliant membrane 755 forms at least one wall to the cavity 740. The membrane 755 may be a separate element embedded within the substrate 710 and held in place by a clamping region at its outer edge, or be an integral part of one or more layers of the substrate 710.

(47) The substrate 710 may also include a threaded hole 760 for holding a threaded displacement element 770. The threaded displacement element 770 may be configured such that its distal end 765 abuts, in operation, a central portion of the membrane 755. The displacement element 770 may then be used to push the central portion of the membrane 755 against the valve seat 750, thereby sealing the cavity 740 and preventing fluid flow between the first channel 720 and the second channel 730. In an alternative embodiment, the valve seat 750 is not employed. In such a case, the membrane 755 may be forced directly against a bottom surface of the cavity 740 in order to seal the cavity 740 and prevent fluid flow.

(48) In another embodiment, the threaded displacement element 770 is threaded only partially downward into the cavity 740 such that the membrane 755 reduces the volume of the cavity 740 and reduces the fluid flow therethrough, without completely blocking the flow. As a result, the valve system 700 may be used to control the rate of fluid-flow therethrough, in addition to completely preventing flow. In still another embodiment, the valve system 700 includes one or more bypass channels that allow a limited flow therethrough even if the membrane 755 is fully sealed against the valve seat 750.

(49) In one embodiment, the threaded displacement element 770 is retracted away from the membrane 755, either completely or by a limited distance, such that the compliant membrane 755 and cavity 740 act as a compliant membrane-based capacitive element, as described above.

(50) The displacement element 770 may be a mechanically actuable displacement element that is manually actuated and/or automatically actuated, for example through a control system in response to a fluid flow condition. For example, the displacement element 770 may be a mechanically actuable element that is adapted to provide a mechanical force directly to at least a portion of the membrane 755 upon actuation. Examples of mechanically actuable displacement elements 770 include, but are not limited to, one or more threaded elements, spring elements, bistable spring-loaded elements, rotating cam elements, pushing rod elements, hydraulic elements, and/or other appropriate mechanical force providing elements.

(51) In one embodiment, the displacement element 770 is a standard metal screw, such as, for example, a #0-80 hex head screw, mounted in a tapped hole in an upper rigid layer of the structure. Alternatively, the screw may be made from a plastic, such as nylon, or another appropriate material. In other embodiments, the displacement element 770 has two stable states, and has a structure similar to that of the click action or press action mechanism of a retractable ball-point pen (i.e., a bistable spring-loaded device). The states may be switched via either rotation or axial displacement (e.g., pushing) of the displacement element 770.

(52) As mentioned, the mechanically actuable displacement element 770 may be manually actuated. For example, in embodiments where the valve system 700 is accessible to a user, a threaded displacement element 770 may be actuated through insertion and rotation of a screwdriver or other actuation element by a user, or a bistable click-action type displacement element 770 may be pushed by the user. In embodiments where the valve system 700 is implanted in a patient and inaccessible to a user, a control device may be mechanically coupled to the mechanically actuable displacement element 770 and may apply a mechanical force thereto to actuate the displacement element 770. This control device may itself be a mechanical, electromagnetic, hydraulic, or other appropriate actuation device, and may mechanically actuate the displacement element 770 in response to a fluid flow condition and/or a control input from a remote location.

(53) In one embodiment of the invention, the bottom face 765 of the displacement element 770 has a ring-shaped boss with a radius either substantially identical to, or similar in value to, the valve seat 750 radius, and thus preferentially applies pressure to the membrane 755 on the valve seat 750 area.

(54) Any appropriate method of manufacturing the multi-layered substrate 710 may be used. For example, in one embodiment, the first channel 720 is formed by a through-cut or partial-depth cut of a single layer 780 of thin bondable polymer sheet. The bottom of the channel 720 may be either in the same layer 780 or formed by another sheet 775 of polymer bonded to it. A different polymer sheet 785 may provide the top of the first channel 720 and may be patterned with a through-hole 787 that connects the channel 720 to the valve cavity 740. A further polymer sheet 790 may be patterned to form the valve seat 750, the lower portion of the valve cavity 740, and, optionally, a second channel 730. The valve seat 750 may be a protruding ring, (i.e., a ring-shaped boss element) or any other appropriately shaped seating element. The ring may be axially aligned with the through hole 787 in layer 785.

(55) In order to create and facilitate convenient assembly of the valve seat 750, layer 785 and layer 790 may be either bonded together before patterning (for example by etching, machining, ablation, and/or other appropriate patterning techniques), or a single layer may be substituted for both. In either case, a partial-depth cut may define the outer diameter of the valve seat 750 and a through-cut may define the inner diameter of the seat 750 and flow access to the first channel 720.

(56) The second channel 730 may also be formed from either a partial-depth or through-cut pattern in the layer 790. A further layer 795 may be cut to form the upper part of the valve chamber and, optionally, the second channel 730 or a portion thereof. An additional layer 800 may form the valve membrane 755. Finally, an additional layer of a material 805 such as, but not limited to, aluminum or other appropriate metal, plastic, or polymer, with aligned holes for the displacement elements 770, may be attached to the membrane layer 800. The layer 805 may be thicker than one or more of the other layers and/or be substantially rigid.

(57) In an alternative embodiment, layer 790 is not used. In this case, when the displacement element 770 is in the open position (i.e., displaced away from the membrane 755), the membrane 755 may still be in contact with the valve seat 750, and thus significant fluid pressure will be required to displace the membrane 755 and allow flow. In this case, it is desirable for no bonding material or adhesive to be present on the valve seat 750 during component fabrication.

(58) The polymer sheets 775, 780, 785, 790, 795, 800, and/or other appropriate layers constituting the substrate 710, may be prefabricated with thin layers of adhesive on one or both of their sides. Optionally, stand-alone layers of adhesive may be patterned and aligned with the polymer sheets 775, 780, 785, 790, 795, 800 and stacked prior to the bonding step(s). In one embodiment, the bonding of the layers of the substrate 710 may include a high-temperature, high-pressure adhesive-bonding and curing step.

(59) As described, the compliant membrane valve systems 700 provide several advantages and have many applications. For example, by using a screw or other manually-actuated axial displacement element 770 to displace the membrane 755, a simple means of manually or automatically controlling fluid flow within a microfluidic system is achieved. In addition, compliant membrane valve systems 700 may be configured to provide both recirculating flow and/or loading and venting flow for a microfluidic system, such as the microfluidic system of FIG. 3A.

(60) In some embodiments of the invention, the compliant membrane-based fluidic control elements are very small. For example, the five-valve manifold 600 depicted in FIGS. 6A and 6B may have a size of approximately 1 cm by 1 cm by 3 mm, or less. In addition, the valves may be integrated on a single substrate with other microfluidic elements and, as such, connecting a valve to these other elements avoids the need for macroscale connectors. Thus, leakage through, and dead volume in, these elements are avoided. Moreover, because of the large number of valves that may be implemented within a small volume, a wide variety of fluid routing functions may be easily achieved. In contrast, prior valve systems known in the art typically become bulky and unwieldy as the number of valves becomes large.

(61) As described herein, a microfluidic device that includes a compliant membrane may be used to provide both capacitive fluid control and a valve function for a fluidic system. In addition, a plurality of microfluidic devices, incorporating various functions of the invention described herein, may be used within a microfluidic system, as required. For example, a microfluidic system may include one or more compliant membrane-based capacitive elements and/or one or more compliant membrane-based valves.

(62) Having described certain embodiments of the invention, it will be apparent to those of ordinary skill in the art that other embodiments incorporating the concepts disclosed herein may be used without departing from the spirit and scope of the invention. Accordingly, the described embodiments are to be considered in all respects as only illustrative and not restrictive.