Assembly method of direct-docking probing device

Abstract

An assembly method of direct-docking probing device is provided. First, a space transforming plate made by back-end-of-line semiconductor manufacturing process is provided, so the thickness of the space transforming plate is predetermined by the client of probe card manufacturer. Then a reinforcing plate in which a plurality of circuits disposed is provided, which has larger mechanical strength than the space transforming plate. After that the reinforcing plate and the space transforming plate are joined and electrically connected by a plurality of solders so as to form a space transformer. Then, a conductive elastic member and a probe interface board are provided. Thereafter, the space transformer and the conductive elastic member are mounted on the probe interface board. After that, at least one vertical probe assembly having a plurality of vertical probes is mounted on the space transforming plate, and the vertical probes is electrically connected with the space transforming plate.

Claims

1. An assembly method of direct-docking probing device, comprising the steps of: providing a space transforming plate which is made by a back-end-of-line semiconductor manufacturing process; providing a reinforcing plate which has larger mechanical strength than the mechanical strength of the space transforming plate, and a plurality of circuits disposed in the reinforcing plate; joining and electrically connecting the reinforcing plate and the space transforming plate by reflowing so as to form a space transformer; providing a conductive elastic member; providing a probe interface board and mounting the space transformer and the conductive elastic member on the probe interface board, wherein the conductive elastic member is located between and electrically connected with the probe interface board and the reinforcing plate, and the probe interface board is mounted on a test head; providing at least one vertical probe assembly having a plurality of vertical probes; and mounting the at least one vertical probe assembly on the space transforming plate, wherein the vertical probes is electrically connected with the space transforming plate; wherein the thickness of the space transforming plate is smaller than 1.8 mm and predetermined or configured by the client of the probe card manufacturer instead, and the thickness of the reinforcing plate is larger than 1.0 mm; wherein the conductive elastic member is disposed between the probe interface board and the reinforcing plate, and the conductive elastic member is disposed on the one side of the reinforcing plate, that is away from the space transforming plate; wherein the reinforcing plate is disposed between the conductive elastic member and the space transforming plate.

2. The assembly method of probing device of claim 1, further comprising the steps of: providing a fixing frame, and the fixing frame comprising a stiffener, a frame body, and a holding portion; putting the space transformer and the conductive elastic member in the frame body and the holding portion holding on the space transformer; mounting the fixing frame containing the space transformer and the conductive elastic member on the probe interface board.

3. The assembly method of probing device of claim 2, further comprising a step of disposing the stiffener on the probe interface board.

4. The assembly method of probing device of claim 2, wherein the holding portion is holding on the reinforcing plate.

5. The assembly method of probing device of claim 2, wherein the holding portion is holding on the space transforming plate.

6. The assembly method of probing device of claim 2, wherein the frame body and the holding portion are formed integrally.

7. The assembly method of probing device of claim 1, wherein the reinforcing plate is a multilayer ceramic structure and the space transforming plate is a multilayer organic structure.

8. The assembly method of probing device of claim 7, wherein the thickness of the reinforcing plate is between 1.0 mm and 3.0 mm.

9. The assembly method of probing device of claim 1, wherein the conductive elastic member comprises a supporting plate and a plurality of electrical contacts, the electrical contacts are penetrated through the supporting plate and fixed by the supporting plate, and the electrical contacts possess elasticity.

10. The assembly method of probing device of claim 1, wherein the circuits in the reinforcing plate are vertically penetrated through the reinforcing plate.

11. The assembly method of probing device of claim 1, wherein the quantity of the space transforming plates and the vertical probe assemblies are both more than one, and each vertical probe assembly is individually electrically connected to one of the space transforming plates, respectively.

12. The assembly method of probing device of claim 1, wherein the reinforcing plate and the space transforming plate are rectangular.

13. The assembly method of probing device of claim 1, wherein the length of the reinforcing plate is 5 mm to 10 mm longer than the length of the space transforming plate.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1A shows a conventional probing system.

(2) FIG. 1B shows a probing device shown in FIG. 1A.

(3) FIG. 2 shows another conventional probing system.

(4) FIG. 3 shows yet another conventional probing system.

(5) FIG. 4A shows a probing system of a first embodiment in the present invention.

(6) FIG. 4B shows a probing device of the first embodiment in the present invention.

(7) FIG. 4C shows a probing device of a second embodiment in the present invention.

(8) FIG. 4D shows a probing device of variant embodiment compared to FIG. 4C in the present invention.

(9) FIG. 5AFIG. 5E show the assembly method of the probing device in FIG. 4B.

(10) FIG. 6 shows a probing device of a third embodiment in the present invention.

(11) FIG. 7 shows a probing device of a fourth embodiment in the present invention.

(12) FIG. 8A shows a probing device of a fifth embodiment in the present invention.

(13) FIG. 8B shows a probing device of variant embodiment compared to FIG. 4A in the present invention.

(14) FIG. 9 shows a probing device of a sixth embodiment in the present invention.

(15) FIG. 10 shows a probing device of a seventh embodiment in the present invention.

(16) FIG. 11 shows a probing device of an eighth embodiment in the present invention.

DETAILED DESCRIPTION OF THE INVENTION

(17) Please refer to FIG. 4A and FIG. 4B. FIG. 4A shows a probing system of a first embodiment in the present invention. FIG. 4B shows a probing device 30 of the first embodiment in the present invention. The probing device 30 is, for example, mounted on the probing system 2000. The probing system 2000 includes a test head 2100, the probing device 30, and a prober 2400. The prober 2400 includes a wafer stage 2410. A device under test 2300 is disposed on the wafer stage 2410. The probing device 30 includes a probe interface board 32, a space transformer 34, a fixing frame 35, a conductive elastic member 36, two protective spacers 37, and a vertical probe assembly 39.

(18) Please refer to FIG. 1A and FIG. 4A. In FIG. 1A the probe card 1230 of the probing device 1200 is configured to be set downward. The seating surface for the probe card 1230 is formed on the prober 1400. In FIG. 4A, the probing device 30 is connected with the test head 2100. In other words, the probe interface board 32 of the probing device 30 is set in an upward configuration. The seating surface for the probe interface board 32 is formed on the test head 2100, i.e. the probe interface board 32 is mounted on and connected with the test head 2100.

(19) Please refer to FIG. 4B. The space transformer 34 includes a space transforming plate 341 and a reinforcing plate 343. The reinforcing plate 343 is located between the probe interface board 32 and the space transforming plate 341. In this embodiment, the reinforcing plate and the space transforming plate are rectangular, and the length of the reinforcing plate 343 is for example 5 mm10 mm longer than the length of the space transforming plate 341. The reinforcing plate 343 is electrically connected with the space transforming plate 341 via a plurality of solders 342. Furthermore, the mechanical strength of the reinforcing plate 343 is larger than that of the space transforming plate 341. Because of the presence and usage of the reinforcing plate 343 in the space transformer 34, the overall mechanical strength of the space transformer 34 is increased.

(20) The conductive elastic member 36 is located between the reinforcing plate 343 and the probe interface board 32. In the embodiment, the conductive elastic member 36 includes a supporting plate 362 and a plurality of electrical contacts 364. The electrical contacts 364 possess elasticity, and are penetrated through and supported by the supporting plate 362. Furthermore, a plurality of circuits 3431 is disposed in the reinforcing plate 343. Therefore, after passing through the electrical contacts 364, the test signals sent from the probe interface board 32 is then passed through the circuits 3431 in the reinforcing plate 343 and transferred into the space transforming plate 341.

(21) The fixing frame 35 includes a stiffener 352, a frame body 354, and a holding portion 356. The stiffener 352 is disposed on one side of the probe interface board 32, and by using two locking screws 351 the frame body 354 can be screwed on the other side of the probe interface board 32. The frame body 354 contains the reinforcing plate 343 and the conductive elastic member 36. The holding portion 356 is locked on the frame body 354 by the two locking screws 353. The holding portion 356 is holding on one side of the reinforcing plate 343, in order to ensure adequate electrical conductivity between the electrical contacts 364 and the space transforming plate 343. Although the frame body 354 and the holding portion 356 are of two different elements, the frame body 354 and the holding portion 356 can be formed integrally, so that the locking screws 353 are no longer needed. In addition, the electrical conductivity between the electrical contacts 364 and the reinforcing plate 343 can be enhanced by screwing the locking screws 351 more tightly.

(22) In addition, please refer to the probing device 30 shown in FIG. 4D, the locking screws 353 are penetrated through the frame body 354 and screwed into the probe interface board 32, and the locking screws 351 are penetrated through the stiffener 352 and screwed into the probe interface board 32. In other words, the frame body 354 is mounted on the probe interface board 32 by using the locking screws 353.

(23) Furthermore, the protective spacer 37 is disposed between the reinforcing plate 343 and the probe interface board 32, and located around the periphery of the conductive elastic member 36. The two protective spacers 37 are each located on the two opposite sides, respectively. The top ends of the protective spacers 37 are pressed against the probe interface board 32 and the bottom ends of the protective spacers 37 are pressed on the reinforcing plate 343. Compared with respect to the holding portion 356, the protective spacers 37 are pressed on the other side of the reinforcing plate 343. However, in other embodiment, person having ordinary skill in the art can choose not to dispose the protective spacers 37 in the probing device 30.

(24) Please refer to FIG. 4A. The vertical probe assembly 39 includes a plurality of vertical probes 394. The vertical probes 394 are electrically connected with the space transforming plate 341. The bottom of the vertical probes 394 are contacted with the device under test (not shown).

(25) In the embodiment, the Young's module of the space transforming plate 341 is 11 Gpa, and the Young's module of the reinforcing plate 343 is 120 Gpa. Because the mechanical strength of the reinforcing plate 343 is larger than that of the space transforming plate 341, the amount of deformation of the space transforming plate 341 is smaller than that of the space transforming plate 24 in FIG. 3. Therefore, compared to the vertical probe assembly 29 in FIG. 3, the offset amount of the vertical probe assembly 39 is smaller, so that the vertical probes 394 can be more accurately contacted with the device under test (not shown).

(26) In addition, when the vertical probe 394 is contacted with the device under test, the device under test will apply a reaction force back to the vertical probe 394. At the same time, because of the support of the protective spacer 37, the space transformer 34 is not easily deflected toward the probe interface board 32. Thus, the electrical contacts 364 are not easily compressed and are thereby better protected.

(27) In the embodiment, the reinforcing plate 343 is a multilayer ceramic structure, and the space transforming plate 341 is a multilayer organic structure. Person of ordinary skill in the art can modify the material and the structure of the reinforcing plate 343 or the space transforming plate 341, provided that the mechanical strength of the reinforcing plate 343 is larger than that of the space transforming plate 341, so as to prevent any large amount of deformation from occurring on the space transforming plate 341. The reinforcing plate 343 can also be made as a multilayer organic structure, a printed circuit board structure, or a FR-4 type glass fiber board.

(28) In this embodiment, the thickness of the space transforming plate 341 is smaller than 1.8 mm and predetermined or configured by the client of the probe card manufacturer instead. The thickness of the reinforcing plate 343 is larger than 1.0 mm, in the preferred embodiment the thickness of the reinforcing plate 343 is between 1.0 mm and 3.0 mm. In a preferred embodiment, the thickness of the space transforming plate 341 is smaller than 1.8 mm.

(29) Please refer to FIG. 4C which shows a probing device 30 of a second embodiment in the present invention. In the probing device 30, the solders 342 are surrounded by a filler layer 344, and the filler layer 344 is made of polymer material. The filler layer 344 is used to prevent the solders 342 from being polluted by the external environment. Because the other elements of the probing device 30 is identical or similar to the elements shown in FIG. 4B, they are marked with the same numbers in FIG. 4C and not described in detail.

(30) Person of ordinary skill in the art can use other protective device to replace the protective spacer 37, for example: a protective frame. The protective frame is a hollow plate-shaped object and is located around the conductive elastic member 36. The hollow portion of the protective frame is used to contain the conductive elastic member 36. The two ends of the protective frame are pressed on the probe interface board 32 and the reinforcing plate 343, respectively.

(31) In the following, the assembly method of the probing device 30 is described. Please refer to FIG. 5A, the space transforming plate 341 is provided. The space transforming plate 341 is made by a back-end-of-line semiconductor manufacturing process, i.e. packaging process. In other words, the space transforming plate 341 is provided and predetermined by the client or customer of the manufacturer of the probing device 30. Therefore, the manufacturer of the probing device 30 cannot change or alter the size, for example: length and height, of the space transforming plate 341.

(32) Then, as shown in FIG. 5B, the reinforcing plate 343 is provided, the reinforcing plate 343 has greater mechanical strength than that of the space transforming plate 341. Furthermore, the reinforcing plate 343 and the space transforming plate 341 are joined and electrically connected by reflowing method, i.e. reflowing the solders 342, so as to form the space transformer 34.

(33) Thereafter, as shown in FIG. 5C, the conductive elastic member 36 and the frame body 354 are provided. After that, the space transformer 34, the conductive elastic member 36, and the protective spacer 37 are put in the frame body 354, and then the locking screws 353 are screwed so as to press the holding portion 356 on the space transformer 34. In the embodiment, the holding portion 356 is holding on the reinforcing plate 343, but the holding portion 356 can also be holding on the space transforming plate 341. After that, as shown in FIG. 5D, the probe interface board 32 is provided, and the frame body 354 is mounted on the probe interface board 32 by using the stiffener 352 and the locking screws 351. Or, the frame body 354 can be mounted on the probe interface board 32 by using the locking screws 353 as shown in FIG. 4D. In next step, as shown in FIG. 5E, the vertical probe assembly 39 having a plurality of vertical probes 394 is provided and mounted on the space transforming plate 341.

(34) Please refer to FIG. 6 which shows a probing device 40 of a third embodiment in the present invention. The probing device 40 includes two protective screws 47. The protective screws 47 are penetrated through the probe interface board 32, and the bottom ends of the protective screws 47 are pressed on the reinforcing plate 343. The protective screws 47 and the protective spacer 37 have a similar function, i.e. preventing the space transformer 34 from being deflected toward the probe interface board 32, so as to avoid the electrical contacts 364 being compressed and damaged. The assembly method of the probing device 40 is similar to that of the probing device 30, and the difference is that after the fixing frame 35 is mounted on the probe interface board 32, the protective screws 47 are screwed so as to make its end being pressed on the reinforcing plate 343.

(35) Please refer to FIG. 7 which shows a probing device 50 of a fourth embodiment in the present invention. In the probing device 50, a limit portion 3541 is formed on the frame body 354 of the fixing frame 35. Compared with respect to the holding portion 356, the limit portion 3541 is holding on the other side of the reinforcing plate 343. In other words, the reinforcing plate 343 is clamped by the holding portion 356 and the limit portion 3541. Because of the limit portion 3541, the deformation of the space transformer 34 caused by the reaction force from the device under test can be avoided. In addition, the limit portion 3541 can prevent the transformer 34 from being deflected toward the probe interface board 32 and protect the electrical contacts 364 from being compressed and damaged, so that the limit portion 3541 can be a protective device for the probing device 50. The assembly method of the probing device 50 is similar to that of the probing device 30, and thus not described hereinafter.

(36) Please refer to FIG. 8A which shows a probing device 60 of a fifth embodiment in the present invention. The probing device 60 includes a protective screw 67. The protective screw 67 is penetrated through the center portion of a probe interface board 62 and the center portion of a supporting plate 662 of the conductive elastic member 66. The bottom end of the protective screw 67 is pressed on the reinforcing plate 643. In another embodiment, a threaded hole (not shown) can be formed in the reinforcing plate 643, and the bottom end of the protective screw 67 can be screwed with the threaded hole. If the reinforcing plate 643 is made of ceramic material and not easily to be threaded, a metal block having an inner thread can be embedded in the reinforcing plate 643, so as to lock the bottom end of the protective screw 67 and the reinforcing plate 643 together. When the vertical probe 394 is contacted with the device under test, the device under test will apply a reaction force back. At this time, because the bottom end of the protective screw 67 is pressed on the reinforcing plate 643, the deflection of a space transformer 64 toward the probe interface board 62 can be avoided. The assembly method of the probing device 60 is similar to that of the probing device 30, and the difference is that after the fixing frame 35 is mounted on the probe interface board 62, the protective screws 67 are screwed so as to make its end being pressed on the reinforcing plate 643.

(37) In FIG. 4A, the circuits 3431 is penetrated through the reinforcing plate 343 vertically. However, in the probing device 60 shown in FIG. 8A, the protective screw 67 is penetrated through the central portion of the conductive elastic member 66, so that the electrical contacts 664 would be configured to be disposed in locations toward the respective two sides. Therefore, the circuits 6431 in the reinforcing plate 643 have a deflecting part, in order to ensure adequate electrical connection between the space transformer 64 and the reinforcing plate 643. Furthermore, in order to better protect the electrical contacts 664, other protective devices, such as the protective device shown in FIG. 4A, FIG. 6, and FIG. 7, can be disposed around the conductive elastic member 66 shown in FIG. 8A.

(38) In FIG. 8B, the protective screw 67 is not disposed and the pitch P1 between the neighboring contact points on the top surface of the reinforcing plate 643 is larger than the pitch P2 between the neighboring contact points on the bottom surface of the reinforcing plate 643.

(39) Please refer to FIG. 9 which shows a probing device 70 of a sixth embodiment in the present invention. In this embodiment, the protective device of the probing device 70 includes two protective films 77. One of the protective films 77 is disposed between the supporting plate 362 and the reinforcing plate 343, and another protective film 77 is disposed between the supporting plate 362 and the probe interface board 32. The protective film 77 has a plurality of through holes 771 and the electrical contacts 364 are penetrated through the through holes 771. Person of ordinary skill in the art can also choose to dispose only one protective film 77 in the probing device 70, and the protective film 77 is disposed between the supporting plate 362 and the reinforcing plate 343 or between the supporting plate 362 and the probe interface board 32. The assembly method of the probing device 70 is similar to that of the probing device 30, and thus not described hereinafter.

(40) In the above described embodiments, the reinforcing plate 343 is disposed in the fixing frame 35, and the space transforming plate 341 is disposed outside of the fixing frame 35. Please refer to FIG. 10, which shows a probing device 80 of a seventh embodiment in the present invention. In the probing device 80, a reinforcing plate 343 of a space transformer 34 and a space transforming plate 341 are both disposed in the frame body 354 of the fixing frame 35. Furthermore, the holding portion 356 of the fixing frame 35 is holding on the space transforming plate 341.

(41) Please refer to FIG. 11, which shows a probing device 90 of an eighth embodiment in the present invention. In the probing device 90, two space transforming plates 941 are disposed, and two vertical probe assemblies 994 are each mounted on the bottom ends of the two space transforming plates 941, respectively. Thus the probing device 90 can probe two devices under test at the same time. The surfaces of the probe interface board 32 and the reinforcing plate 343 can be enlarged depending on the requirement conditions, therefore more space transforming plates and vertical probe assemblies can be mounted thereon, so as to probe more than one device under test at the same time. The assembly method of the probing device 90 is similar to that of the probing device 30, and thus not described hereinafter.

(42) In all of the embodiments discussed above, the electrical contacts are used to electrically connect the reinforcing plate and the probe interface board, and prevent the probe interface board from being processed under the reflow operation, so as to increase the service life of the probe interface board. The electrical contacts can be designed to be in the form such as the signal contacts shown in FIG. 1 and FIG. 2 of U.S. Pat. No. 6,722,893, the electrical contacts shown in FIG. 3 and FIG. 4 of U.S. Pat. No. 6,846,184, or the elastomeric contacts shown in FIG. 1 and FIG. 2 of U.S. Pat. No. 6,712,620. The electrical contacts can be mainly comprised of the anisotropic conductive paste.

(43) In the above described embodiments, the probing devices are all equipped with the protective devices. However, Person of ordinary skill in the art can opt to design a probing device having no protective device.

(44) Although the description above contains many specifics, these are merely provided to illustrate the invention and should not be construed as limitations of the invention's scope. Thus it will be apparent to those skilled, in the art that various modifications and variations can be made in the system and processes of the present invention without departing from the spirit or scope of the invention.