Atomic Layer-Based Surface Treatments for Infrared Detectors

Abstract

Disclosed herein is a method of producing an infrared detector. In certain embodiments, the method includes: forming a planar multi-layer structure including an absorber including a superlattice structure; patterning the planar multi-layer structure; etching the planar multi-layer structure to define a plurality of pixels, the sidewalls of the plurality of pixels includes a sidewall roughness and multiple types of surface oxides; and performing a surface treatment process to the plurality of pixels in order to reduce the sidewall roughness and replace the surface oxides with a chlorinated surface morphology. The surface treatment process may reduce surface current of the infrared detector which may decrease the dark current in the infrared detector.

Claims

1. A method of producing an infrared detector, the method comprising: forming a planar multi-layer structure comprising an absorber including a superlattice structure; patterning the planar multi-layer structure; etching the planar multi-layer structure to define a plurality of pixels, wherein sidewalls of the plurality of pixels includes a sidewall roughness and multiple types of surface oxides; and performing a surface treatment process to the plurality of pixels in order to reduce the sidewall roughness and replace the surface oxides with a chlorinated surface morphology.

2. The method of claim 1, wherein the planar multi-layer structure further comprises a unipolar barrier layer and a contact layer.

3. The method of claim 2, wherein the contact layer comprises a superlattice structure.

4. The method of claim 3, wherein the superlattice structure of the contact layer comprises a compound semiconductor.

5. The method of claim 4, wherein the compound semiconductor comprises InAs and InAsSb.

6. The method of claim 5, wherein the multiple types of surface oxides include indium oxide, arsenic oxide, and antimony oxide.

7. The method of claim 1, wherein the superlattice structure of the absorber comprises a compound semiconductor.

8. The method of claim 7, wherein the compound semiconductor comprises InAs and InAsSb.

9. The method of claim 8, wherein the multiple types of surface oxides include indium oxide, arsenic oxide, and antimony oxide.

10. The method of claim 1, wherein the surface treatment process comprises a first atomic layer etching process followed by a second atomic layer deposition process.

11. The method of claim 10, wherein the first atomic layer etching process comprises cyclically and alternately: exposing the sidewalls of the plurality of pixels to a fluorocarbon reactant; and exposing the sidewalls of the plurality of pixels to an ionized argon gas.

12. The method of claim 11, wherein the fluorocarbon reactant may be CHF.sub.3 gas.

13. The method of claim 11, wherein exposing the sidewalls of the plurality of pixels to the fluorocarbon reactant is between 20-80 seconds.

14. The method of claim 11, wherein exposing the sidewalls to the fluorocarbon reactant is performed with substantially no bias.

15. The method of claim 11, exposing the sidewalls to the ionized argon gas includes exposing the sidewalls to argon gas with a bias.

16. The method of claim 15, wherein the bias applied to the ionized argon gas is higher than a bias applied when exposing the sidewalls to the fluorocarbon reactant.

17. The method of claim 10, wherein the second atomic layer etching process comprises cyclically and alternately: exposing the sidewalls of the plurality of pixels to a chorine reactant; and exposing the sidewalls of the plurality of pixels to an ionized argon gas.

18. The method of claim 17, wherein the chorine reactant comprises chlorine argon plasma.

19. The method of claim 17, wherein exposing the sidewalls to the chorine reactant and/or the ionized argon gas is less than 100 ms.

20. The method of claim 17, wherein the second atomic layer etching process treats the sidewalls with a chlorinated III-V compound.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The description will be more fully understood with reference to the following figures and data graphs, which are presented as various embodiment of the disclosure and should not be construed as a complete recitation of the scope of the disclosure, wherein:

[0029] FIG. 1A-1C conceptually illustrate a process for creating an infrared detector in accordance with an embodiment of the invention.

[0030] FIG. 2 conceptually illustrates an example of a BIRD device.

[0031] FIG. 3 is a plot illustrating a comparison between an example infrared device without surface treatment and an example infrared device after applied surface treatment.

[0032] FIG. 4 is a flowchart illustrating a method of producing a low surface current infrared detector in accordance with an embodiment of the invention.

DETAILED DESCRIPTION

[0033] The disclosed technology relates to a highly manufacturable surface treatment applied to these infrared detector components. The surface treatment may include passivation and encapsulation of the surface of infrared detectors after pixel delineation. Pixel delineation may produce unwanted surface defects. Some infrared detectors may include superlattice structure which layers different compound semiconductor materials. These compound semiconductor materials may be III-V semiconductor materials. For example, the compound semiconductor may be indium arsenic (InAs) and/or indium arsenic antimony (InAsSb). When exposed to air after pixel delineation, the compound semiconductor may produce multiple different oxides. For example, in the case of InSb, indium oxide and antimony oxide may be produced. These different oxides create a rough and undesirable surface. These surface oxides may lead to undesirable surface current which may lead to dark current which may limit the performance of the infrared sensor.

[0034] The disclosed surface treatment applied after pixel delineation may remove the surface oxides and instead convert the surface into a stable surface which may decease surface current and increase performance of the infrared sensor. In some embodiments, the surface treatment may apply a chlorine-based surface which may decrease future growth of surface oxides and also have advantageous properties which limit surface current. The decreased surface current may decrease dark current which may increase device performance.

[0035] The surface treatment may includes atomic layer etching (ALE) and atomic layer deposition (ALD). With ALE, a layer is deposited, then ALE is utilized to etch this layer into the proper encapsulation semiconductor layer. With ALD, the encapsulation semiconductor layer is deposited utilizing an ALD process. In each case, the process is controlled so it is limited to a single layer, which can then be ended or repeated at will.

[0036] When specific ALE and ALD treatments are applied to BIRD detectors, the cleaned and encapsulated semiconductor layer decreases the surface leakage current which may improve the device performance metrics by several orders of magnitude.

[0037] The ALE treatment may be a clean-etch. The ALE and/or ALD process may not have atomic layer specificity, may be highly anisotropic, and/or may still leave areas untreated or over-treated. The ALE/ALD technology is targeted, highly isotropic (e.g. penetrates into all etched vertical or horizontal surfaces uniformly), and/or highly controllable.

[0038] These properties make the ALE/ALD approach far more deterministic in outcome and much more repeatable, making it suitable for both R&D and high-volume manufacturing.

[0039] FIG. 1A-1C conceptually illustrate a process for creating an infrared detector in accordance with an embodiment of the invention. In FIG. 1A, a substrate 102 is coated with a planar multi-layer structure 104. In FIG. 1B, the planar multi-layer structure 104 is patterned with a patterning structure 106. The patterning structure 106 may be a photoresist which may be exposed and developed. The planar multi-layer structure 104 may be etched with an etching process 108. The etching process 108 may be a dry etch process or a wet etch process. The wet etch process may utilize citric acid, tartaric acid or tartaric acid with a citric finishing/cleanup step. That wet etch may result in sloped sidewalls and may proceed differently along different crystallographic planes. The dry etch can be performed with a chlorine and argon etching chemistry (e.g. CH.sub.4/H.sub.2/Ar chemistry). The dry etch may be performed at elevated temperatures which may help the III-V chloride evaporate.

[0040] Portions of the planar multi-layer structure 104 may be protected from the etching process 108 by the patterning structure 106. In FIG. 1C, the planar multi-layer structure 104 may be etched until a plurality of pixels 110 are positioned onto the substrate 102. The patterning structure 106 may be removed. The plurality of pixels 110 include sidewalls 110a. As discussed above, the sidewalls 110a may include various defects which increase surface current which may have detrimental effects to the performance of the infrared detector. As discussed, a surface treatment may be applied to the sidewalls 110a to mitigate these defects and thus increase the infrared detector performance.

[0041] Infrared detectors include Barrier-InfraRed Detector (BIRD) devices. Examples of BIRD devices are described in U.S. Pat. App. Pub. No. 2012/0145996 which is hereby incorporated by reference in its entirety. Further, examples of BIRD devices are described in U.S. Pat. App. Pub. No. 2014/0225064 which is herby incorporated by reference in its entirety. These devices would include a pixel defining step as described above which would create unwanted sidewall defects and sidewall roughness which would be detrimental to device performance. In some embodiments, the below discussed surface treatment process may be utilized to perform the pixel defining etch in order to decrease the amount of the initial surface defects.

[0042] FIG. 2 conceptually illustrates an example of a BIRD device. The BIRD device 200 includes a plurality of pixels disposed on a substrate 202. Each of the pixels includes an absorber layer 204, a unipolar barrier layer 206, and a contact layer 208. Operations of the BIRD device are described in U.S. Pat. App. Pub. No. 2012/0145996 and U.S. Pat. App. Pub. No. 2014/0225064. The absorber layer 204 and the contact layer 208 may include a superlattice structure which may be an III-V semiconductor material. For example, each of the absorber layer 204 and the contact layer 208 may include alternating layers of InAs and InAsSb. The contact layer 208 may be a bulk alloy. The absorber layer 204 may include a III-V semiconductor based absorber region. It has been discovered that surface leakage tends to increase as p-type material is used in longer cutoff wavelengths, but the surface treatment described below may be useful with n-type and shorter cutoff devices as well. Specific examples of absorber compositions are: InAs/InAsSb superlattices; GaInSb/InAs superlattices; bulk GaInAsSb or InAsSb.

[0043] After pixel delineation, the exposed surfaces may become oxide layers. In the case that the contact layer 208 and/or the absorber layer 204 include InAs/InAsSb superlattices, the oxide layers may be a mixture of indium oxide, arsenic oxide, and/or antimony oxide. Such an exposed surface of a mixture of different oxide structures may create unwanted surface defects and surface roughness. It has been discovered that a surface treatment may both remove the surface oxides and also convert the exposed surfaces into a surface which may decrease surface defects and surface roughness.

[0044] The BIRD device is merely exemplary. The surface treatment may also be applicable in infrared detector designs that do not include the unipolar barrier layer 206. Examples include a detector device including a pn junction, pin diode, or other heterojunction detector without the barrier design specific to the BIRD device.

[0045] In some embodiments, the surface treatment may include an ALE and/or ALD process. The surface treatment may include a two stepped process. A first step may include an ALE fluorine or fluorocarbon-based process. The first step may include a cyclical process which includes cyclically exposing the sidewalls to alternating fluorine or fluorocarbon reactant and argon gas. The fluorine or fluorocarbon reactant may react with the surface oxides to weaken the bonds of the surface oxides to the underlying sidewall material. Then the ionized argon gas may be used to etch away the surface oxides. The ALE process may be highly controlled to decrease surface oxides and surface roughness without significantly disturbing the underlying sidewall material. The ALE process may be performed at a low temperature.

[0046] An example first step includes a dose step which utilizes CHF.sub.3 gas. The dose step may be rather long (e.g. between 20-80 seconds). The dose step may be performed with little or no applied bias. The dose step may be cyclically and alternately followed by an etch step. The etch step may utilize Ar gas and may include some bias. The bias may be higher than the dose step.

[0047] A subsequent second step may include an ALE chorine-based process. The chorine-based process may replace the surface chemistry with stabilizing chorine which may produce a preferred surface chemistry. The ALE chorine-based process may include cyclically exposing the sidewalls to alternating chorine reactant and argon gas. The ALE chorine-based process may be performed at room temperature. In some embodiments, the temperature of the chorine-based process may be adjusted which may control the chemical composition and structure of the sidewall.

[0048] An example second step includes a dose step which may a very short chlorine argon plasma (e.g. less than 100 ms). The dose step may be cyclically and alternately followed by an etch step. The etch step may be an argon etch step. The argon etch step may be also short (e.g. less than 100 ms). One key feature of the chlorine based atomic layer etching process is that it is performed at near room temperature. The chlorinated III-V compounds may stay on the surface which may treat the sidewall material. There may be a tradeoff between smoothness of the sidewalls and obtaining the right chemistry of chlorine to help form the advantageous sidewall passivation.

[0049] FIG. 3 is a plot illustrating a comparison between an example infrared device without surface treatment and an example infrared device after applied surface treatment. The x-axis is a series of numbered fabricated devices whereas the y-axis is the dark current. Higher dark current is undesirable. As illustrated, the plot 302 of the example infrared device without surface treatment includes a higher dark current than the plot 304 of the example infrared device with surface treatment.

[0050] FIG. 4 is a flowchart illustrating a method of producing a low surface current infrared detector in accordance with an embodiment of the invention. The method 400 includes forming (402) a planar multi-layer structure including an absorber including a superlattice structure. The superlattice structure may include compound semiconductors such as InAs/InAsSb superlattice. The method 400 further includes patterning (404) the planar multi-layer structure. etching the planar multi-layer structure to define a plurality of pixels, wherein the sidewalls of the plurality of pixels includes a sidewall roughness and multiple types of surface oxides. The patterning 404 may be performed utilizing a photoresist. The method 400 may further include etching (406) the planar multi-layer structure to define a plurality of pixels. The sidewalls of the plurality of pixels may include a sidewall roughness and multiple types of surface oxides. After etching, exposed surfaces of the compound semiconductor material may include a mixture of different oxide structures may create unwanted surface defects and surface roughness. The method 400 may further include performing (408) a surface treatment process to the plurality of pixels in order to reduce the sidewall roughness and replace the surface oxides with a chlorinated surface morphology.

[0051] The surface treatment process may include an atomic layer etching process followed by a different atomic layer etching process. The atomic layer etching process may include cyclically and alternately: exposing the sidewalls of the plurality of pixels to a fluorocarbon reactant; and exposing the sidewalls of the plurality of pixels to an ionized argon gas. The atomic layer deposition process comprises cyclically and alternately: exposing the sidewalls of the plurality of pixels to a chorine reactant; and exposing the sidewalls of the plurality of pixels to an ionized argon gas.

DOCTRINE OF EQUIVALENTS

[0052] While the above description contains many specific embodiments of the invention, these should not be construed as limitations on the scope of the invention, but rather as an example of one embodiment thereof. It is therefore to be understood that the present invention may be practiced in ways other than specifically described, without departing from the scope and spirit of the present invention. Thus, embodiments of the present invention should be considered in all respects as illustrative and not restrictive. Accordingly, the scope of the invention should be determined not by the embodiments illustrated, but by the appended claims and their equivalents.