Apparatus for coating substrates using the EB/PVD method

Abstract

An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.

Claims

1. An apparatus for coating substrates with a coating material, comprising: a frame internal to a vacuum chamber and mounted on a door that at least partially forms the vacuum chamber when closed; a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, wherein the crucible arrangement is disposed on the frame; an electron gun in the vacuum chamber, wherein an electron beam of the electron gun is directed to a point of impact on the horizontal plane; at least one first shaft associated with the first crucible and at least one second shaft associated with the second crucible, wherein the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively; and a first lifting device associated with the at least one first shaft and a separate second lifting device associated with the at least one second shaft, wherein the first and second lifting devices are disposed in the frame and movable therewith; wherein the frame is linearly displaceable internal to and in the horizontal plane of the vacuum chamber, whereby the displacement is a back and forth movement inside the vacuum chamber in the direction of the offset such that one of the crucibles is placed in the a point of impact on the horizontal plane and the coating material in the crucible is vaporized when hit by the electron beam from the electron gun.

2. The apparatus according to claim 1, further comprising a second crucible arrangement disposed on the frame.

3. The apparatus according to claim 1, wherein the at least one first and second shafts are disposed on a first carousel and a second carousel, respectively, wherein the first and second carousels each include a plurality of shafts, and wherein the first and second carousels are each rotatably mounted around a respective vertical axis in the frame.

4. The apparatus according to claim 3, wherein the plurality of shafts of the first and second carousels are respectively arranged in a circle and extend between a respective upper and lower rotary disk of the first and second carousels.

5. The apparatus according to claim 4, wherein each of the frame structures has a crossbar, and wherein the frame is guided by rollers on the upper side of the crossbars.

6. The apparatus according to claim 1 in combination with a vacuum chamber, wherein the apparatus is disposed in the vacuum chamber, wherein a first drive shaft of the first lifting device and a second drive shaft of the second lifting device are disposed through a wall of the vacuum chamber in a vacuum-tight manner, and wherein a first motor associated with the first drive shaft and a second motor associated with the second drive shaft are disposed outside of the vacuum chamber.

7. The apparatus according to claim 6, wherein each of the first and second drive shafts are telescopic.

8. The apparatus according to claim 1, wherein the first and second lifting devices are spindle drives.

9. The apparatus according to claim 1, further comprising a first feed sleeve disposed on an upper side of the frame associated with the first crucible and a second feed sleeve disposed on the upper side of the frame associated with the second crucible, wherein the first and second feed sleeves each include a clamping device.

10. The apparatus according to claim 1, wherein the vacuum chamber has a housing with a door, wherein the frame structures are fastened to the door, and wherein the frame is guided on the upper side of the frame structures.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a general view of the apparatus, in which a frame with crucibles is situated in a forward position, and

(2) FIG. 2 is a general view of the same apparatus, in which the frame with crucibles is situated in a rear position.

DETAILED DESCRIPTION OF THE DRAWINGS

(3) The arrangement according to the invention is made up of a frame 1 having a rectangular framework structure, which is disposed between two frame structures 2 so that it is linearly movable in the direction of the double arrow. Each frame structure is made up of a vertical bar 3, which is fastened over its length to a door (not shown here) of a vacuum chamber 4, and a crossbar 5, which sticks out from the door horizontally, and a support bar 6 that runs diagonally between the vertical bar 3 and the crossbar 5. There is a guide rail 7 on the upper side of the crossbar 5.

(4) Two plates 8, 9 are screwed onto the upper side of the frame 1, on each of which a front and a rear guide sleeve 10, 11 are fastened. Front and rear crucibles (not shown in further detail here) for accommodating the material to be vaporized are situated on the guide sleeves 10, 11. Said material is inserted in the form of bars through the guide sleeves 10, 11 and through the base of the associated crucible from below into the crucible. A front and a rear crucible each form a crucible arrangement, wherein the crucibles of a crucible arrangement may be respectively loaded with different materials.

(5) There is a condensation hood (not shown here) above the crucibles, which is likewise fastened to the door (not shown here) of the vacuum chamber. The condensation hood encloses a coating zone, in which the substrates are disposed on rotatable holders, which are also not shown in this case. The rotatable holders allow the substrates to rotate in a cloud of vapor so that they are coated on all sides.

(6) Situated inside the frame 1, which is shown clearly in FIG. 1, beneath every guide sleeve 10, 11 is a carousel 12 having several shafts 13, in which the to-be-vaporized material is stockpiled in the form of material bars. The shafts 13 are disposed concentrically to a vertical axis 14 so that a shaft 13 of a frame 1 is always able to be placed under the respective associated guide sleeve 10, 11 or crucibles. The carousels 12 are each made up of an upper and a lower rotary disk 15, 16, between which cage bars 17 limiting the shafts 13 are disposed.

(7) Every guide sleeve 10, 11 has a lateral opening 18, in which a clamp piece 19 can be inserted by means of a linear drive 20. This makes it possible to clamp a material bar in the guide sleeve 10, 11.

(8) Situated in the side regions of the frame 1 are four lifting devices 21 (two on each side), which can be moved with the frame 1 and are respectively assigned to a carousel 12. Because both the carousels 12 as well as the lifting devices 21 are disposed on the frame 1, their spatial allocation is unchanged so that the lifting devices 21 are able to engage precisely in the shafts 13 to lift the material bars present there.

(9) In order to be able to move the frame 1 back and forth, said frame has rollers on the upper edges, which are not shown in further detail here and which engage in the guide rails 7. The force for displacing the frame 1 is generated by a motor 22, which is fastened to the outside of a door of the vacuum chamber 4 and is connected to a spindle drive 23 that is fastened to the frame 1.

(10) The lifting devices are also spindle drives, which are individually driven via other motors 24. These motors 24 are likewise attached externally on the door and are connected to the lifting devices 21 via several drive shafts 25 and diverters 26. So that the frame 1 is able to be moved with respect to the fixed motors 24, a drive shaft is respectively configured as a telescopic shaft 27, which connects directly to the respective motor 24 via cardan joints 28.

(11) FIG. 1 shows the frame 1 in a rear position, i.e., away from the door, and FIG. 2 shows the frame 1 in a front position, i.e., near the door. In the position depicted in FIG. 1, the two rear guide sleeves 11 and therefore the associated rear crucibles are situated in the operating positions.

(12) In position of the frame near the door that is depicted in FIG. 2, the front crucibles are situated in the same operating position.

(13) The crucibles, which are respectively situated in the operating positions, are able to be reached by the electron beams of the electron guns, which are situated above the frame structure.

(14) The substrates are now able to be coated layer-by-layer with two different materials, which are each stockpiled in the carousels 12 for the front or rear crucibles. When changing to the next layer that is made of another material than the preceding one, the frame 1 is moved from the one position into the other end position so that the crucibles are situated in the operating position with the material that is now required.

(15) The arrangement of two pairs of crucibles is necessary in order to create an extensive cloud of vapor in the coating zone in which a plurality of small substrates, e.g., turbine blades, is able to be coated simultaneously.

LIST OF REFERENCE NUMBERS

(16) 1 Frame 2 Frame structure 3 Vertical bar 4 Vacuum chamber 5 Crossbar 6 Support bar 7 Guide rail 8 Plate 9 Plate 10 Front guide sleeves 11 Rear guide sleeves 12 Carousel 13 Shafts 14 Vertical axis 15 Upper rotary disk 16 Lower rotary disk 17 Cage bars 18 Opening 19 Clamp pieces 20 Linear drive 21 Lifting devices 22 Motor 23 Spindle drive 24 Motors 25 Drive shafts 26 Diverter 27 Telescopic shafts 28 Cardan joints