Method for Producing a Nano-gap in a Brittle Film Assisted by a Stabilizing Substrate

Abstract

This application discloses a method for developing a conductive nano-gap. The first step can comprise depositing a brittle material on a substrate. Next, a conductive graphene layer can be deposited at the surface of the brittle material. Lastly, a crack can be propagated through the brittle material and the graphene using a force, the crack a nano-gap.

Claims

1. A method for developing a conductive nano-gap comprising the step of depositing a brittle material on a substrate; depositing a conductive graphene layer at the surface of said brittle material; and propagating a crack through said brittle material and said graphene using a force, said crack a nano-gap.

2. The method of claim 1, prior to propagating said crack, further comprising the step of placing one or more indentions on said brittle material to mark one or more endpoints of said crack.

3. The method of claim 2 wherein prior to placing said indentions on said brittle material comprises the step of mounting said substrate into the vacuum chamber of a microscope.

4. The method of claim 3 wherein said microscope is an atomic force microscope (AFM).

5. The method of claim 3 wherein said microscope is a scanning electron microscope (SEM).

6. The method of claim 1 further comprising the step of bending said substrate at an angle to reduce said nano-gap.

7. The method of claim 6 wherein said nano-gap is reduced to less than 10 nanometers.

8. The method of claim 1 wherein after depositing said brittle material on said substrate comprises the step of measuring the thickness of said brittle material and said substrate.

9. The method of claim 1 wherein after depositing said graphene on said brittle material further comprises the step of determining the conductivity of said graphene using Raman spectroscopy technique.

10. The method of claim 1 wherein said force is compression force.

11. The method of claim 1 wherein said force is tensional force.

12. The method of claim 1 wherein said force is applied by bending said substrate around a bar.

13. The method of claim 1 wherein said substrate can comprise of a Poly-ethylene Terephthalate (PET).

14. The method of claim 1 wherein said brittle film comprises a salt.

15. The method of claim 1 wherein said brittle film comprises ceramic.

16. The method of claim 1 wherein said brittle film comprises silica glass substance.

17. The method of claim 1 wherein said conductive graphene layer is 2-dimensional (2D).

18. The method of claim 1 wherein said brittle film comprises a spin on glass (SOG) cured liquid glass.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0005] FIG. 1 illustrates a side view of a strip comprising a substrate coated with a brittle film.

[0006] FIG. 2 illustrates a conductive two-dimensional (2D) layer deposited at the surface of a strip.

[0007] FIG. 3 illustrates a strip mounted on a microscope.

[0008] FIG. 4 illustrates a top view of a strip marked with one or more indentions.

[0009] FIG. 5 illustrates propagating a crack on a strip.

[0010] FIG. 6 illustrates exemplary measurements that can be used to calculate bending of a substrate.

[0011] FIG. 7 illustrates an exemplary calculation of bending of a substrate.

[0012] FIG. 8 illustrates a nanotechnology system for reading of DNA sequences through a nano-gap.

DETAILED DESCRIPTION

[0013] Described herein is a system and method for producing a nano-gap in a brittle film assisted by a stabilizing substrate. The following description is presented to enable any person skilled in the art to make and use the invention as claimed and is provided in the context of the particular examples discussed below, variations of which will be readily apparent to those skilled in the art. In the interest of clarity, not all features of an actual implementation are described in this specification. It will be appreciated that in the development of any such actual implementation (as in any development project), design decisions must be made to achieve the designers' specific goals (e.g., compliance with system- and business-related constraints), and that these goals will vary from one implementation to another. It will also be appreciated that such development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the field of the appropriate art having the benefit of this disclosure. Accordingly, the claims appended hereto are not intended to be limited by the disclosed embodiments, but are to be accorded their widest scope consistent with the principles and features disclosed herein.

[0014] FIG. 1 illustrates a side view of a strip 100 comprising a substrate 101 coated with a brittle film 102. In one embodiment, substrate 101 can be a Poly-ethylene Terephthalate (PET) film that is used as a stabilizer for strip 100. Brittle film 102 can comprise of a brittle material 103, which can include but are not limited to salt, ceramic, or silica glass substance. An example of brittle film 102 is a Spin on Glass (SOG) liquid glass. For purposes of this disclosure, SOG is a type of glass that can be applied as a liquid and cured to form a layer of glass having characteristics similar to those of SiO2. SOG is mainly used for planarization and is a dielectric.

[0015] Brittle film 102 can be deposited onto the surface of substrate 101 through a coating method such as Mayer rod coating. After substrate 101 is coated with brittle film 102, the thickness of substrate 101 can be measured to ensure that the thickness of strip 100 is within a desired height. The measurement can be taken at a point 104 of strip 100. Point 104 can be any area within strip 100.

[0016] FIG. 2 illustrates a conductive two-dimensional (2D) layer 201 deposited at the surface of strip 100. In a preferred embodiment, conductive 2D layer 201 comprises graphene. For purposes of this disclosure, graphene is a 2 dimensional hexagonal carbon lattice that can survive large transmembrane pressure with intrinsic conductive properties. Therefore, graphene can be ideal for the conductive nano-gap application. After conductive 2D layer 201 is deposited onto the surface of strip 100, thickness of strip 100 can be measured again at point 104 of strip 100. Thickness of strip 100 can be measured to determine the resulting thickness after conductive 2D layer 201 is deposited. The quality of conductive 2D layer 201 can also be determined to ensure that a relevant area of conductive 2D layer 201 can still be used as a conductor. Raman spectroscopy can be used to determine the thickness (single layer, bilayer, multilayer), and quality or presence of defects on conductive 2D layer 201.

[0017] FIG. 3 illustrates strip 100 mounted onto a microscope 300. In a preferred embodiment, microscope 300 can be an atomic force microscope (AFM). In this embodiment, strip 100 can be placed within the vacuum chamber of microscope 300. Then, through an AFM scratching technique, one or more indentions 301 can be formed to mark the desired position where a crack should be formed. Such scratching can create a weak point where a crack is most likely to first form. Moreover, indentions 301 can aid microscope 300 to detect where the crack is on strip 100. Further in another embodiment, microscope 300 can be a scanning electron microscope (SEM).

[0018] FIG. 4 illustrates a top view of strip 100 marked with indentions 301. To produce an initial gap 401 on conductive 2D layer 201, a strain can be exerted on indentions 301. The strain in indentions 301 can produce a crack in brittle film 102 which can produce initial gap 401.

[0019] FIG. 5 illustrates propagating a crack 501 on strip 100. After placing indentions 301 on strip 100, force 500 can be applied to indentions 301 to cause crack 501 in brittle film 102 and conductive 2D layer 201 to propagate. In one embodiment, force 500 can be a compression force, which exerts pressure by squeezing indentions 301. In another embodiment, force 500 can be a tensional force. In some embodiments, force 500 can be applied by bending strip 100 around a bar or a bending device. In a preferred embodiment, crack 501 can be a break created on brittle film 102 that is within indentions 301. Since brittle film 102 can have a definite feature at a nano level, when strip 100 is cracked in between indentions 301 through a controlled and supported experiment, a nano-gap 502 can be created on conductive 2D layer 201. Nano-gap 502 can be a gap within conductive 2D layer 201 that is less than 100 nanometers wide.

[0020] FIG. 6 illustrates exemplary measurements that can be used to calculate bending of substrate 101. After the processes of propagating crack 501, nano-gap 502 can widen to as much as 400 nm. As such, substrate 101 can be bent to decrease the distance between nano-gap 502. Using known measurements on strip 100, such as a strip thickness 601, a crack width 602, and a preferred nano-gap distance, a calculation can be made to determine at what angle of bend on each side of strip 100 can be done in order to produce the preferred nano-gap distance. In one embodiment, substrate 101 can be bended using a suction method, wherein a suction cup can be placed at the bottom of strip 100, which can cause substrate 101 to bend concavely and thus a relationship between applied pressure and bend degree can be made and stabilized with further processing such as applying a tack similar to what is used in the art of welding by metal physical deposition methods. Strip thickness 601 can be the entire thickness of strip 100, which can comprise substrate 101, brittle layer 102, and conductive 2D layer 201. Furthermore, strip thickness 601 can comprise a thickness of first-side strip 601a, a thickness of second-side strip 601b, a height of first-side strip 603a, and a height of second-side strip 603b. Thickness of first-side strip 601a can be the measure of thickness on one side of strip 100, while thickness of second-side strip 601b can be the measure of thickness on the other side of strip 100. Additionally, height of first-side strip 603a can be the edge on one side of nano-gap 502, while height of second-side strip 603b can be the edge on the other side of nano-gap 502. Crack width 602 can be the measure of the total distance between crack 501. Crack width 602 can further comprise a mid-crack distance 604, a first base point 605a, a second base point 605b, and an intersection point 606. Mid-crack distance 604 can be half of the total distance between crack 501. First base point 604a can be the lowest point on one side of nano-gap 502, while second base point 604b can be the lowest point on the other side of nano-gap 502. Intersection point 606 can be the common point at which an inward (or center) bend 607 of a 45-degree angle from vertical lines on base points 604a and 604b meets. For purposes of this disclosure, it is assumed that movement of vertical lines on first base point 604a and second base point 604b is negligible to none at bending. The control on bending of

[00001]$\left(\begin{array}{c}{}_1\\ a_1\end{array}\right).Math..Math.\mathrm{and}.Math..Math.\left(\begin{array}{c}{}_2\\ a_2\end{array}\right)$

is the most important process, parameters provide an accurate way to keep C.sub.1=C.sub.2.

[0021] FIG. 7 illustrates an exemplary calculation of bending of substrate 101. In an example measurements shown in FIG. 7, wherein thickness of strip 601a and 601b can be at 400 nm, crack width 602 can be 200 nm, and a preferred nano-gap distance 701 can be 9 nm, an angle of bend 702 can be calculated. Preferred nano-gap distance 603 can be desired distance between nano-gap 502. Angle of bend 702 can be the required degree of angle at which either ends of substrate 101 can be bent in order to obtain preferred nano-gap distance 701. Using the equations

[00002]$C_1.Math.\mathrm{Cos}\left({}_1\right)=f\left(\frac{}{2}\right).Math..Math.\mathrm{and}.Math..Math.C_2.Math.\mathrm{Cos}\left({}_2\right)=f\left(\frac{}{2}\right),$

wherein f=b.sub.1=b.sub.2 and l.sub.1=l.sub.2=45, angle of bend 702 can be obtained. Thus, using the given measurements in FIG. 7, angle of bend 702 can be at 13.8 degree angle.

[0022] Using the law of cosines one can determine the distance that the edge traveled as well as the resulting angle it produces in triangulation with the edge locations, a1, or b1, and a2, or b2 that may prove useful in certain applications.

[0023] To get the distance that the edge traveled on either of the sides of nano-gap 502, one can use these equation: J={square root over (2(C1).sup.22(C1).sup.2 cos(l.sub.1))} or J={square root over (2(C2).sup.22(C2).sup.2 cos(l.sub.2))}, wherein J is the distance traveled.

[0024] To get the resulting angle produced in triangulation, these equations can be used:

[00003]${\cos }^{-1}\left(\frac{J}{C.Math..Math.1^2}\right).Math..Math.\mathrm{or}.Math..Math.{\cos }^{-1}\left(\frac{J}{C.Math..Math.2^2}\right)$

[0025] FIG. 8 illustrates a nanotechnology system for reading of DNA sequences through nano-gap 502. The resistive reader system can comprise nano-gap 502 between graphene 201 that connected to a voltage source 801. Using nano-gap sequencing, nano-gap 502 can initially be immersed in a conducting fluid and a potential voltage can be applied across nano-gap 502, due to conductions of ions through nano-gap 502 an electric current 802 can be observed. The amount of current 802 can be sensitive to the size and shape of nano-gap 502. As such, by being able to manipulate and stabilize substrate 101, a desired width on nano-gap 502 can be obtained, and readings made on resistive reader system can have high accuracy and resolution.

[0026] Various changes in the details of the illustrated operational methods are possible without departing from the scope of the following claims. Some embodiments may combine the activities described herein as being separate steps. Similarly, one or more of the described steps may be omitted, depending upon the specific operational environment the method is being implemented in. It is to be understood that the above description is intended to be illustrative, and not restrictive. For example, the above-described embodiments may be used in combination with each other. Many other embodiments will be apparent to those of skill in the art upon reviewing the above description. The scope of the invention should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. In the appended claims, the terms including and in which are used as the plain-English equivalents of the respective terms comprising and wherein.