Method for preparing nanostructure by electrochemical deposition, and nanostructure prepared thereby
09595439 ยท 2017-03-14
Assignee
Inventors
Cpc classification
B82B3/0014
PERFORMING OPERATIONS; TRANSPORTING
H01L21/02422
ELECTRICITY
International classification
H01L21/02
ELECTRICITY
B82B3/00
PERFORMING OPERATIONS; TRANSPORTING
H01L29/22
ELECTRICITY
Abstract
The present invention relates to a method for preparing a nanostructure by electrochemical deposition, and a nanostructure prepared thereby, and more specifically, to: a method for preparing a nanostructure by electrochemical deposition, wherein it is possible to prepare a nanostructure having remarkable morphological, structural and optical characteristics by controlling a method for applied power during electrochemical deposition; and a nanostructure prepared thereby.
Claims
1. A method of forming a nanostructure by electrochemical deposition, comprising: positioning a plurality of electrodes which includes a working electrode in a growth solution in an electrolytic deposition reactor; growing a first nanostructure on the working electrode by supplying a first applying power source between the plurality of electrodes for a first applying time and supplying oxygen/inert gas into the electrolytic deposition reactor; and growing a second nanostructure on the first nanostructure grown on the working electrode by supplying a second applying power source between the plurality of electrodes for a second applying time and supplying oxygen/inert gas into the electrolytic deposition reactor, wherein the first applying power source and the second applying power source are different from each other, wherein the first applying power source is in a range of 0.8 to 1.2 V and the first applying time is in a range of 6 to 240 seconds, wherein the second applying power source is in a range of 0.5 to 0.8 V and the second applying time is in a range of 900 to 1,500 seconds, and wherein the growing of the first nanostructure and the growing of the second nanostructure are performed at a temperature in a range of 80 to 100 C.
2. The method of claim 1, wherein the working electrode is a conductive substrate, and is a transparent substrate on which a transparent conductive film is formed.
3. The method of claim 2, wherein the transparent substrate is a glass substrate, and the transparent conductive film is formed of a material selected from the group consisting of ITO, ILO, ATO, ZnO, CdO, SnO.sub.2, and In.sub.2O.sub.3.
4. The method of claim 1, wherein the plurality of electrodes include a reference electrode, a counter electrode, and the working electrode, and the reference electrode is formed of Ag/AgCl and the counter electrode is formed of a material selected from the group consisting of Pt, Au, Zn, and Ag.
5. The method of claim 1, wherein the growth solution is an electrolyte solution including metal salts, and the metal is zinc (Zn).
6. The method of claim 5, wherein the growth solution is a ZnCl.sub.2 or Zn(NO.sub.3).sub.2 aqueous solution having a concentration in a range of 0.0001 to 0.01 M.
7. The method of claim 6, wherein the growth solution further includes potassium chloride (KCl).
8. The method of claim 1, further comprising performing a heat treatment at a temperature in a range of 250 to 350 C. after growing the second nanostructure.
9. The method of claim 1, further comprising applying additional applying power source n times (n is 1 or more) after applying the second applying power source.
10. A nanostructure prepared by the method of claim 1.
11. The nanostructure of claim 10, wherein the nanostructure is a zinc oxide nanorod.
12. The nanostructure of claim 10, wherein the nanostructure has an average diameter in a range of 50 to 160 nm.
Description
DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
MODES OF THE INVENTION
(5) Hereinafter, the present invention will be described in detail with reference to embodiments. However, the present invention is not limited to the following embodiments.
Example
Preparation of Zinc Oxide Nanostructure
(6) A zinc oxide nanostructure was prepared using a potentiostat/galvanostat (Model PL-9 Physio Lab Co., Ltd., South Korea) as an electrochemical deposition device and using a three-electrode system. ITO/glass (sheet resistance: 10 /sq) was used as a working electrode, a Pt-mesh was used as a counter electrode, Ag/AgCl (1 M KCl) was used as a reference electrode, and ITO/glass which was the working electrode was used after cleaning with ultrasonic waves in acetone, methanol, and deionized water for 10 minutes respectively, and drying with filtered air.
(7) As an electrolyte solution in which a zinc oxide nanostructure is grown, 0.005 M ZnCl.sub.2 (Sigma-Aldrich Co. LLC., purity>98%) was used as a main electrolyte solution for Zn.sup.2, and 0.1 M KCl (KANTO KAGAKU, purity>99.5%) was used as an auxiliary electrolyte solution. A bath temperature was set to 90 C., a mixed gas of Ar/O.sub.2 which is an oxygen source was introduced into the solution for 10 minutes, and thereby an electrolyte solution saturated with the mixed gas of Ar/O.sub.2 was prepared and used. A first applied electric potential and time, and a second applied electric potential and time were changed as shown in the following Table 1 such that total process time was 1,200 seconds, and thereby a zinc oxide nanostructure was synthesized.
(8) After the electrochemical process, a heat treatment was performed at 300 C. under a nitrogen atmosphere for 1 hour using a rapid thermal process (RTP).
(9) TABLE-US-00001 TABLE 1 First-step Deposition Second-step Deposition No potential (V) time (s) potential (V) time (s) 1 1.2 3 0.7 1197 2 6 1194 3 10 1190 4 20 1180 5 60 1140 6 240 960 7 1 10 1190 8 20 1180 9 60 1140 10 240 960 11 0.8 10 1190 12 20 1180 13 60 1140 14 240 960 15 0.6 10 1190 16 20 1180 17 60 1140 18 240 960 19 0.4 10 1190 20 20 1180 21 60 1140 22 240 960 23 0.2 10 1190 24 20 1180 25 60 1140 26 240 960
Comparative Example
(10) A zinc oxide nanostructure was grown while a constant voltage was applied for 1,200 seconds without a change in the voltage.
Experimental Example
Field Emission Scanning Electron Microscope (FE-SEM) Measurement
(11) FE-SEM pictures were taken to determine the morphological characteristics of the zinc oxide nanostructure according to the magnitude and the applying time of the first applied voltage, and are shown in
(12)
(13) As shown in
(14) When the second applied voltage of 0.7 V was applied for 1,190 seconds after the first applied voltage of 1.5 V was applied for 10 seconds, a zinc oxide nanostructure having a hexagonal crystal structure was grown. However, when the first applied voltage was applied for 20 seconds or more, a reference electrode was ruined.
(15) In
(16) As shown in
(17)
(18) As shown in
Experimental Example
Measurement of Diameter and Density of Nanostructure
(19) The diameter and density of the zinc oxide nanostructures prepared while the first applied voltage of 1.2 V was applied for 3, 6, 10, 20, 60, and 240 seconds each, and then the second applied voltages of 0.7 V was applied for 1197, 1194, 1190, 1180, 1140, and 960 seconds each, were measured using FE-SEM pictures in
(20) As shown in
Experimental Example
X-Ray Diffraction Analysis (XRD)
(21) An XRD was measured to determine the structural characteristics of the zinc oxide nanostructure, and results are shown in
(22)
(23) As shown in
(24)
(25) As shown in
(26)
Experimental Example
Measurement of Optical Properties According to First Applied Voltage
(27) The photo luminescence (PL) characteristics of zinc oxide nanostructures prepared while the first applied voltage was changing from 0.2 to 1.5 V was applied for the constant applying time of 10 seconds, and then the second applied voltage of 0.7 V was applied for 1,190 seconds were measured and are shown in
(28) In general, the NBE peak results from free exciton recombination, and the DLE peak results from defects such as oxygen vacancy, zinc vacancy, interstitial oxygen, and interstitial zinc.
(29) As shown in
Experimental Example
Measurement of Optical Properties According to Applying Time of First Applied Voltage
(30) The photo luminescence (PL) characteristics of the zinc oxide nanostructures prepared while the constant first applied voltage of 1.2 V was applied while the applying time was changing from 3 to 240 seconds, and then the second applied voltage of 0.7 V was applied while the applying time was changing from 1,197 to 960 seconds were measured and are shown in
(31) As shown in
INDUSTRIAL APPLICABILITY
(32) In the method of preparing a nanostructure by electrochemical deposition according to the embodiment of the present invention, a buffer layer and an additive are not used, a power applying method is optimized in electrochemical deposition, and thereby a nanostructure having excellent morphological, structural and optical characteristics can be prepared.