MICROMECHANICAL TIMEPIECE PART COMPRISING A LUBRICATED SURFACE AND METHOD FOR PRODUCING SUCH A MICROMECHANICAL TIMEPIECE PART

Abstract

The invention relates to a micromechanical timepiece part comprising a silicon-based substrate (1) having at least one surface, at least one part of said surface having pores (2) which open out at the external surface of the micromechanical timepiece part and comprise a tribological agent (5).

The invention likewise relates to a method for producing a micromechanical timepiece part starting from a silicon-based substrate (1), said silicon-based substrate having at least one surface, at least one part of which is lubricated by a tribological agent (5), said method comprising, in order, the steps of: a) forming pores (2) on the surface of the part of said surface of said silicon-based substrate (1), b) depositing said tribological agent (5) in said pores (2).

Claims

1. A micromechanical timepiece part comprising a silicon-based substrate, having at least one surface, wherein at least one part of said surface has pores which open out at the external surface of the micromechanical timepiece part and comprise a tribological agent.

2. The micromechanical timepiece part according to claim 1, wherein the pores have an aspect factor (depth:diameter ratio) between 5 and 100.

3. The micromechanical timepiece part according to claim 1, wherein the pores have a depth greater than 100 m.

4. The micromechanical timepiece part according to claim 3, wherein the pores have a depth greater than 200 m.

5. The micromechanical timepiece part according to claim 4, wherein the pores have a depth greater than 300 m.

6. The micromechanical timepiece part according to claim 1, wherein it comprises, between the pores, silicon-based fibres.

7. The micromechanical timepiece part according to claim 6, wherein the silicon-based fibres have an aspect factor (depth : diameter ratio) between 5 and 100.

8. The micromechanical timepiece part according to claim 6, wherein the silicon-based fibres comprise walls which are covered with at least one wetting agent for the tribological agent, the silicon-based fibres being impregnated with the tribological agent.

9. The micromechanical timepiece part according to claim 6, wherein silicon-based fibres comprise walls which are covered with at least one polymer brush, the silicon-based fibres and the polymer brush being impregnated with the tribological agent.

10. The micromechanical timepiece part according to claim 1, wherein the tribological agent is a perfluorocarbonated polymer.

11. The micromechanical timepiece part according to claim 1, wherein the silicon-based substrate is a silicon wafer or an SOI wafer (Silicon-on-Insulator).

12. A method for producing a micromechanical timepiece part starting from a silicon-based substrate, said silicon-based substrate having a surface, at least one part of which is lubricated by a tribological agent, said method comprising, in order, the steps of: a) forming pores on the surface of the part of said surface of said silicon-based substrate, b) depositing said tribological agent in said pores.

13. The method according to claim 12, wherein the pores are designed in order to form, between the pores, silicon-based fibres.

14. The method according to claim 13, comprising, between steps a) and b), a step c) of depositing at least one wetting agent for the tribological agent on the walls of the silicon-based fibres.

15. The method according to claim 13, comprising, between steps a) and b), a step d) of depositing at least one polymer brush on the walls of the silicon-based fibres.

16. The method according to claim 12, wherein step a) is achieved by a method chosen from the group comprising a method by electrochemical etching, a method of the <<Stain-etch>> type, and a method of the <<MAC-Etch>> type.

17. The method according to claim 16, wherein step a) is achieved by a method of the <<MAC-Etch>> type.

18. The method according to claim 12, wherein step b) is achieved by a method of thin-film deposition.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The aims, advantages and features of the present invention will appear more clearly in the following detailed description of several embodiments of the invention, given solely by way of non-limiting example, and illustrated by the appended drawings in which:

[0017] FIGS. 1 to 2 illustrate schematically the steps of a first embodiment of the manufacturing method according to the invention,

[0018] FIGS. 3 to 5 illustrate schematically the steps of a second embodiment of the manufacturing method according to the invention, and

[0019] FIGS. 6 to 8 illustrate schematically the steps of a third embodiment of the manufacturing method according to the invention.

DETAILED DESCRIPTION OF THE INVENTION

[0020] With reference to FIGS. 1 and 2, the method of producing a micromechanical timepiece part lubricated by a tribological agent starting from a silicon-based substrate 1 according to the invention comprises firstly a step a) of forming pores 2 starting from the surface of said silicon-based substrate 1 over a zone of the silicon-based substrate 1 which corresponds to a zone to be lubricated. The pores 2 are designed so as to open out at the external surface of the micromechanical timepiece part. The silicon-based substrate 1 is chosen as a function of the micromechanical timepiece part to be formed. The final shape of the silicon-based substrate 1, as a function of the micromechanical timepiece part to be manufactured, is given before or after implementation of the method of the invention. In the present invention, the expression <<silicon-based substrate>> describes both a layer of silicon in a substrate and a substrate made of silicon. Preferably, the silicon-based substrate 1 is a silicon wafer or an SOI wafer (Silicon-on-Insulator). The pores can be formed preferably over the surface perpendicular to the plane of the substrate, i.e. on the sides of the micromechanical timepiece part which are subject to friction, but likewise over the surface parallel to the plane of the substrate.

[0021] Advantageously, this step a) can be achieved by a method chosen from the group comprising a method by electrochemical etching, a method of the <<Stain-etch>> type, and a method of the <<MAC-Etch>> type.

[0022] The method by electrochemical etching can be a method by electrochemical anodisation. Its implementation requires the use of an electrochemical bath containing hydrofluoric acid in aqueous solution or mixed with ethanol in concentrations of 1 to 10%. An electrical current and electrodes are necessary to create electrochemical conditions which cause the etching of the silicon. According to the electrochemical conditions, various types of pores can be obtained. Such a method is known to the person skilled in the art and does not require detailed information here.

[0023] The method of the <<Stain-etch>> type is based on moist etching of the silicon resulting directly in the formation of porous silicon. Typically, the etching takes place with an HF/HNO.sub.3/H.sub.2O solution with a ratio HF:HNO.sub.3 of 50-500:1. This method has the advantage of not requiring any electrical supply in the bath. Such a method is known to the person skilled in the art and does not require detailed information here.

[0024] Preferably, step a) is achieved by a method of the <<MAC-Etch>> type. This method is based on the use of particles of noble metals in order to catalyse local chemical etching reactions. Typically, a very thin layer (10-50 nm) of a noble metal (gold, silver, platinum) is deposited and structured in a random manner or by lift-off, etching, laser, etc. For preference, the noble metal is gold. More particularly, there can advantageously be used particles of gold in solution in an HF/H.sub.2O.sub.2 mixture. The size of the particles can be between 5 and 1,000 nm. The structuring can be obtained by lithography of the gold, etching or lift-off. Another option is evaporation or cathodic pulverisation (sputtering) of a very fine, non-closed layer (5-30 nm). A thermal treatment will be able to contribute to the formation of islets of gold.

[0025] When the silicon with the layer of noble metal is immersed in an aqueous solution of an HF/H.sub.2O.sub.2 mixture, the noble metal locally catalyses the dissolution of the silicon. This etching solution can typically comprise between 4 ml:1 ml:8 ml (48% HF:30% H.sub.2O.sub.2:H.sub.2O) and 4 ml:1 ml:40 ml (48% HF:30% H.sub.2O.sub.2 : H.sub.2O). The dissolution of the silicon is produced for preference under the metal, the latter penetrating then progressively into the silicon. This reaction can be continued over great depths (>100 m) according to propagation modes essentially influenced by the orientation of the silicon crystal, the surface disposition, the doping and the chemistry of the bath. The method of the <<MAC-Etch>> type has the advantage of not requiring an electrical supply in the bath whilst allowing the formation of pores of very great depth (>100 m) in the silicon. It is therefore particularly suitable for use for SOI wafers as substrate which are generally used for the manufacture of timepiece components.

[0026] The person skilled in the art knows the parameters of the methods described above to be implemented in order that the pores formed in the silicon-based substrate have a suitable geometry and size.

[0027] In particular, the pores can advantageously have an aspect factor (depth:diameter ratio) between 5 and 100.

[0028] Preferably, the pores can have a depth greater than 100 m, preferably greater than 200 m and more preferably greater than 300 m.

[0029] As illustrated in FIG. 2, the formation of pores 2 in the silicon-based substrate 1 over a certain depth causes formation, between the pores 2, of silicon-based pillars 3 over the same depth. Preferably, when considering the silicon-based pillars as having a circular section, the pores 2 are formed so that the projected surface of the silicon-based pillars 3 is less than 79% of the apparent total surface in order not to have silicon-based pillars which are touching.

[0030] The second step b) of the method according to the invention consists of depositing in the pores 2, between the pillars 3, a tribological agent. The tribological agent is a lubricant and can be liquid, for example in the form of an aqueous solution, or dry. Preferably, said tribological agent is a perfluorocarbonated polymer, such as polytetrafluoroethylene (PTFE), or any other tribological agent or suitable lubricant.

[0031] According to a first embodiment of the method according to the invention, the tribological agent is deposited, according to step b), directly in the pores 2 of the silicon-based substrate. This step b) can be produced by a method of thin-film deposition, such as CVD, iCVD, PECVD. A suitable thermal treatment can be applied in order to polymerise the tribological agent, at temperatures of the order of 100 C. to 300 C. Thus, large quantities of tribological agent can be stored close to the surface of the silicon-based substrate, whilst preserving an apparent hardness of the surface which is relatively increased because of the silicon.

[0032] In a particularly advantageous manner, the parameters of the method of forming pores 2 in the silicon-based substrate 1, according to step a), are chosen in order that the pores 2 have a suitable geometry and size so that the pillars 3, formed between the pores 2, comprise silicon-based fibres 3. These fibres 3 have an aspect factor (depth : diameter ratio) between 5 and 100. The fibres form a flexible superstructure and are finally impregnated with a tribological agent chosen in order to facilitate the wetting of the pores, according to step b) of the method according to the invention.

[0033] A substrate comprising silicon-based fibres can be used according to two other embodiments of the method of the invention.

[0034] More particularly, with reference to FIGS. 3 to 5, according to a second embodiment of the method according to the invention, it is provided, according to step a), to produce, in a silicon-based substrate 1, pores 2 in order to form, between the pores 2, pillars 3 in the form of fibres 3, as shown in FIG. 3. There is therefore provided, between steps a) and b), a step c) of depositing at least one wetting agent 4 of the tribological agent on the walls of the silicon-based fibres 3. The wetting agent 4 is chosen in order to facilitate wetting and penetration of the tribological agent. It is applied in order to form a very thin layer (a few nanometres) in order to functionalise the walls of the silicon-based fibres 3. Then the fibres 3 are impregnated with a tribological agent 5, according to step b), the tribological agent 5 being chosen in order to facilitate the wetting of the pores 2.

[0035] With reference to FIGS. 6 to 8, according to a third embodiment of the method according to the invention, it is provided, according to step a), to produce in a silicon-based substrate 1 pores 2 in order to form, between the pores 2, pillars 3 in the form of fibres 3, as shown in FIG. 6. Between steps a) and b), a step d) is therefore provided of depositing at least one polymer brush 6 on the walls of the silicon-based fibres 3. Such a polymer brush 6 is described for example in publications WO 2012/152512 and WO 2014/009059. The polymer brushes have fibres of a smaller length than those of the silicon-based fibres so that the polymer fibres are protected by the silicon-based fibres which are more mechanically resistant. Then the silicon-based fibres 3 and the polymer brushes 6 are impregnated with a tribological agent 5, according to step b), the tribological agent 5 being chosen in order to facilitate wetting.

[0036] The present invention likewise relates to a micromechanical timepiece part able to be obtained by the method described above. Said micromechanical timepiece part comprises a silicon-based substrate 1 having at least one surface, this surface being able in particular to end up in contact with a surface of another micromechanical timepiece part, said micromechanical timepiece parts being mobile one relative to the other.

[0037] According to the invention, at least one part of said surface has pores 2 which open out at the external surface of the micromechanical timepiece part, said pores 2 comprising a tribological agent.

[0038] Advantageously, the pores 2 are produced in order to form, between said pores, silicon-based fibres 3.

[0039] According to one embodiment, the silicon-based fibres 3 can comprise walls covered with at least one wetting agent 4 for the tribological agent 5, the silicon-based fibres being impregnated with the tribological agent 5.

[0040] According to another embodiment, the silicon-based fibres 3 can comprise walls which are covered by at least one polymer brush 6, the silicon-based fibres 3 and the polymer brush 6 being impregnated with the tribological agent 5.

[0041] The method according to the invention makes it possible to manufacture fibres directly in the material of the silicon-based substrate with controlled geometries and properties of mechanical bending which make it possible, in the case of using polymer brushes, to maintain the supra-lubrication behaviour over a wide range of friction conditions whilst increasing reliability. Thus, the method according to the invention makes it possible to compensate for the lack of mechanical resistance of the polymer brushes which are usually used in supra-lubrication. The formed structure of silicon-based fibres constitutes a reservoir of lubricant which is able to restore a sufficient quantity of lubricant into the contact as a function of the stresses.

[0042] The geometry of the pores and of the silicon-based fibres can be optimised as a function of the intended friction conditions and tribological objectives. The structuring of the silicon-based substrate can range from silicon-based fibres to open and disordered pores forming a spongy layer.