Thin film solar cells on flexible substrates and methods of constructing the same
09590133 ยท 2017-03-07
Assignee
Inventors
Cpc classification
H10F19/80
ELECTRICITY
H10F10/161
ELECTRICITY
Y02E10/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H10F71/1272
ELECTRICITY
H10F10/13
ELECTRICITY
Y02E10/544
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H10F71/00
ELECTRICITY
H10F77/315
ELECTRICITY
H10F71/138
ELECTRICITY
H10F77/337
ELECTRICITY
H10F10/163
ELECTRICITY
Y02E10/52
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H10F77/1248
ELECTRICITY
H10F71/127
ELECTRICITY
International classification
H01L31/18
ELECTRICITY
H01L31/0203
ELECTRICITY
H01L31/0445
ELECTRICITY
Abstract
Material and antireflection structure and methods of manufacturing are provided that produce efficient photovoltaic power conversion from thin film solar cells on flexible substrates. Step-graded antireflection structures are placed on the front of the device structure. Materials of different energy gap are combined in the depletion region of at least one of the semiconductor junctions within the thin film device structure. Conductive, low refractive index layers are deposited on the bottom of the thin film device structure to form an omni-directional back reflector contact.
Claims
1. A method of manufacturing a thin film solar cell comprising: providing a flexible substrate having a top surface and a bottom surface; depositing a semiconductor thin film solar cell device structure at least partially on the top surface of the flexible substrate thereby leaving a predetermined top region of the semiconductor thin film device structure exposed; and coating the semiconductor thin film solar cell with a first optical coating comprising 65 nm of TCO having an index of refraction of approximately 2.19; coating the first optical coating with a second optical coating of 90 nm of porous TCO having an index of refraction of approximately 1.88; coating the second optical coating with a third optical coating of 125 nm of porous TCO having an index of refraction of approximately 1.6; coating the third optical coating with a fourth optical coating of 260 nm of porous TCO having an index of refraction of approximately 1.41; and coating the fourth optical coating with an encapsulant.
2. The method of claim 1 further comprising depositing of a porous SiO.sub.2 layer on a front side of the encapsulant layer using oblique angle deposition.
3. The method of claim 1 wherein the step of depositing a semiconductor thin film solar cell device structure at least partially on the top surface of the flexible substrate comprises depositing using at least one of a physical vapor deposition, and a chemical vapor deposition.
4. The method of claim 1 further comprising the step of depositing a layer of porous material on the flexible substrate using oblique angle deposition.
5. The method of claim 1 further comprising the step of coating the flexible substrate with a conductive metal layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The invention will be readily understood by the following detailed description in conjunction with the accompanying drawings, wherein like reference numerals designate like structural elements, and in which:
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(9) The drawings are not necessarily to scale with emphasis instead being placed upon illustrating embodiments of the present invention.
DETAILED DESCRIPTION
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(11) In various embodiments, front coating 110 and intermediate coating 130 are configured and arranged with transparent antireflection coating structures to reduce the reflection of incident photons at the material interface between air 170 and front coating 110 and the interface encapsulant 120 and semiconductor device structure 140, respectively. In the various embodiments, front coating 110 and intermediate coating 130 are implemented in accordance with industry standard processes and materials known to those skilled in the art. Transparent antireflection coating structures can comprise a single layer or multiple layers of materials having an index of refraction intermediate between the semiconductor structure 140 and the media in which the incident photons are delivered, which by way of example is illustrated as air 170 in
(12) Oblique-angle deposition is utilized as an effective technique for tailoring the refractive index of a variety of thin film materials (see for example, by way of useful background, J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Optical Thin-Film Materials with Low Refractive Index for Broad-Band Elimination of Fresnel Reflection, Nat. Photon., vol. 1, pp. 176-179, 2007). Oblique-angle deposition is a method of growing nanostructured, porous thin films, and hence thin films with low-refractive index (low-n), enabled by surface diffusion and self-shadowing effects during the deposition process. Both conducting and non-conducting graded-index antireflection coatings that are broadband and Omni-directional have been demonstrated using this deposition technique. As taught by Cho et al. in U.S. Pat. No. 7,483,212, by way of background, both oblique angle deposition and co-sputtering are material synthesis techniques that can be used to construct multiple layer, graded refractive index coatings to minimize reflection losses. The teachings of this patent are expressly incorporated herein by reference as useful background information. It is contemplated in illustrative embodiments that these processes can be adapted to minimize reflection losses in thin film solar cells on flexible substrates. It is further contemplated that other processes can be adapted for thin film deposition including such semiconductor deposition tool as metal-organic chemical vapor deposition (MOCVD) or molecular beam epitaxy (MBE). It should be apparent to those skilled in the art that various other techniques when made available can be employed to fabricate the structures of the described embodiment, herein.
(13) According to the illustrated embodiments, light trapping techniques can be employed to dramatically improve thin film solar cell performance by increasing the optical path length of photons within the thin absorber layers. An illustrative implementation of light trapping employs a back reflector that functions to bounce any unabsorbed photons passing through the semiconductor thin film solar cell device structure into the active layers of the device, thus thereby increasing the probability of their absorption. Texturing of the back reflector surface and/or the addition of nano-particles further provides a mechanism to enhance the optical path length of reflected photons through the device active region. Conventional metal reflectors can be employed, but have limited reflectivity, generally around 95%. Distributed Bragg Reflectors may be utilized to offer higher peak reflectivity, but are generally more complicated and are sensitive to the angle of incidence. In contrast, Omni-directional reflectors (ODRs), which combine a metal layer with a low-refractive index layer, provide ultra-high reflectivity over a wide range of wavelengths and incident angles. High conductivity can be maintained in an ODR structure by using conductive material such as indium-tin oxide (ITO) nano-rods as the low refractive index material (see for example, by way of useful background information, J. K. Kim et al, GaInN Light-Emitting Diode with Conductive Omnidirectional Reflector having a Low-Refractive-Index Indium-Tin Oxide Layer, Appl. Phys. Lett., vol. 88, no. 012501, January 2006). The use of an ODR structure as the bottom contact 150 in
(14) The refractive index of front coating 110 is shown on top of the underlying encapsulant 120 in
(15) In the illustrative embodiment, the refractive index profile for at least part of a thin film solar cell including the top surface of a semiconductor device structure 140, intermediate coating 130, and encapsulant 120 is shown in
(16) In a further embodiment, a transparent conductive oxide such as indium tin oxide (ITO) is employed to form a conductive, low resistance film. This film acts as a transparent contact further helping to draw current out of the top of the solar cell device. In a still further embodiment, non-conducting materials such as SiO.sub.2 and TiO.sub.2 are employed for the materials 330, 340, and 350 adjoining encapsulant 320. In an illustrative embodiment, a thicker, dense TCO film material can be employed in a dense TCO layer 360 adjoining the semiconductor thin film solar cell device material 380.
(17) The illustrative embodiments utilize materials having variable refractive indices. Fresnel reflection losses in a thin film solar cell on flexible substrates arise from the differences in index of refraction between air (n1) and encapsulant (n1.4) and between encapsulant (n1.4) and the active semiconductor material (n3.6), respectively. By varying the index of refraction in a quintic profile (by way of useful background information, refer to U.S. Pat. No. 4,583,822, which is incorporated by reference) using materials with a range of refractive indices having graded refractive index design, the Fresnel reflection losses in thin film solar cell are minimized. Additionally, the type of material with a desired refractive index often forces a compromise in other material properties such as optical transmittance and electrical conductivity that are also important photovoltaic applications. Thus, the ability to control the refractive index of thin film materials using high performance antireflection coating tailored for thin film solar cells on flexible substrates enables high performance optical coatings to approximate a quintic profile.
(18) In the illustrative embodiments, SiO.sub.2 and ITO materials are used due to the varying porosity and thus different index of refraction employable on thin film solar cells on flexible substrates. SiO.sub.2 material is utilized for its high transmission and stability, and is employed on the top of the device to minimize reflection losses between air and encapsulant. While non-conductive materials are acceptable for the front coating, an intermediate coating in a thin film solar cell must be highly conductive to ensure efficient carrier collection with minimal resistance losses. Transparent conductive oxides are an exemplary class of materials that are both highly conductive and transmissive. ITO in particular is utilized as a transparent conductive oxide, and is employed herein to minimize reflection losses between encapsulant and the active semiconductor material. Because dense ITO only reaches an index of refraction of n2.2, wide band gap semiconductor materials such as SiC are also employed to step grade the index of refraction all the way from encapsulant to the active semiconductor material which will absorb most of the photons in a solar spectrum. The combined use of optical thin film materials and semiconductor layers to step grade the index of refraction difference between encapsulant and the photovoltaic absorbing layers are approaches disclosed herein. The usage of optical material, such as SiO.sub.2, ITO, and SiC, coupled with techniques for growing nano-porous structures enable for the deposition of optical material with very low refractive indices on encapsulant, historically have not been employed before.
(19) In another illustrative embodiment, a semiconductor thin film solar cell device structure is composed of a multilayered structure of semiconductor thin films employing lower index of refraction semiconductor layers between the dense TCO and semiconductor materials in the active region of the solar cell device. By way of an illustrative embodiment as shown in
(20) The illustrative antireflection structures show particular combinations of layer thicknesses and index of refractions. However, it should be apparent to those skilled in the art that the number of layers, the variation of the layer thicknesses, the materials composition of the layers, and index of refractions of the layer can be varied according to the various embodiments. In particular, the use of semiconductor layers to step grade the index of refraction from semiconductor device structure to the optical material layers (e.g. ITO, TiO.sub.2 or SiO.sub.2). It should be further noted that semiconductor layers such as SiC and CdTe can be designed to simultaneously function as a window and a contact layer in the thin film photovoltaic devices.
(21) The semiconductor structure 140 deposited on the flexible substrate 105 is coated over with intermediate coating 130, encapsulant 120, and front coating 110, as depicted in
(22) Advantageously, low energy-gap material incorporated throughout the absorbing layer of the semiconductor material enables the active region of the PV device to absorb a wider portion of the solar spectrum. However, the incorporation of narrow band gap material throughout the depletion region of a PN or PIN junction typically increases the dark diode current of the device, which results in a lower operating voltage in solar cell devices.
(23) The layered structures and associated energy bands graph depicted in
(24) In the illustrative embodiment, the PIN junction 505 consists of an emitter 520, a base 570, and a depletion region 525 illustratively shown as a wide energy gap (E.sub.g) depletion region layer 540, a narrow energy gap (E.sub.g) depletion region layer 550, and a wide energy gap (E.sub.g) depletion region layer 560. The depletion region is distinguished by the presence of a built-in electric field, a non-zero slope in the conduction band 585 (E.sub.c) and valence band 590 (E.sub.v), induced by the juxtaposition of p-type and n-type semiconductor material. In the illustrative embodiment, the depletion region is on the order of approximately 0.1 to 2 microns for thin film solar cells. It should be apparent to those skilled in the art that the thickness of the depletion region can be adjusted by varying the thickness of unintentionally doped material between the p-type and n-type material. Window 500 and back surface field 580 layers are typical solar cell structure deposit above and below the PIN junction 505.
(25) In the illustrated embodiment, higher energy gap material is inserted into depletion region 525 adjacent to the emitter 520 to form a wide energy gap (E.sub.g) depletion region layer 540. In contrast to previous art, the physical boundary between the different energy gap materials is offset from the physical boundary between the emitter and intrinsic/base materials. Higher energy gap material is also inserted into depletion region 525 adjacent to base 570 to form a second wide energy gap (E.sub.g) depletion region layer 560. The wide energy gap depleted region layers reduce space charge recombination by replacing narrow energy gap material with wide energy gap material. In alternate embodiments, the depletion region 525 can consist of a single wide energy gap depletion layer (540 or 560). In an illustrative embodiment, the wide energy gap (E.sub.g) depletion region layer 540 and 560 are a single material composition matching that of the emitter 520 and base 570, but is undoped or lightly doped to ensure that this additional higher energy gap material lies entirely within depletion region 525. In further embodiments, the depletion region consists of multiple layers with different energy gap materials. By way of example, a different energy gap material employed in the depletion layer 525 can be SiGe. In particular, SiGe is employed in a narrow energy gap layer 550 within the depletion region 525. SiGe has a higher absorption coefficient over a wide range of photon energies relative to traditional material such as silicon. SiGe can also absorb a wider spectrum of photon energies than silicon. The SiGe materials can be amorphous, polycrystalline, microcrystalline, or nanocrystalline, and can range over the entire compositional range from 100% Si to 100% Ge, with higher Ge concentrations desirable for generating higher currents. To counteract the negative impact of employing SiGe on the voltage output of thin film solar cells, higher energy gap material is used throughout the rest of the device structure.
(26) By way of an illustrative embodiment shown in
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(28) According to the various embodiments, the metal contacts can be formed using conventional semiconductor processing technology known to those of ordinary skill. The optical coatings can be applied using oblique angle deposition and/or co-sputtering. The silicon-based thin films can be deposited via a variety of conventional material synthesis techniques, including sputtering, evaporation, and chemical vapor deposition.
(29) Note that the use of wider energy gap material in the emitter layer provides various benefits for photovoltaic devices. Theories may vary with respect to the physical principals that govern, but in general, a wide energy gap emitter can reduce diffusion-driven injection of majority carriers from the base into the emitter. However, other significant dark diode current components, such as space charge recombination within the depletion region and carrier injection from the emitter into the base, are generally not improved with a typical heterojunction design. By extending the region of wide energy gap material, described herein, into the depletion region, space charge recombination can be reduced.
(30) The illustrative embodiments utilize different energy gap material within the junction of a thin film subcell on flexible substrate to enhance both the current and voltage output thus represent an improvement over a single semiconductor material in thin film solar cell structure. The dark diode current of semiconductor devices is typically composed of several different components. At low bias, carrier recombination within the junction space charge region dominates the dark diode current of most practical p-n junction devices in which surface recombination has been minimized with proper passivation. The space charge recombination exhibits a voltage dependence with an ideality factor (n) near two and, in general, is expected to be concentrated in a region near where the electron and hole densities are equal (see for example, by way of useful background information, P. E. Dodd, T. B. Stellwag, M. R. Melloch, and M. S. Lundstrom, Surface and Perimeter Recombination in GaAs Diodes: An Experimental and Theoretical Investigation, IEEE Trans. Electron Devices, vol. 38, pp. 1253-1261, June 1991). At higher bias, diffusion-driven injection currents with ideality factors approaching one tend to describe the dark diode characteristics. All of such dark diode current mechanisms are sensitive to the material energy gap, and thus, are generally a consideration in the implementations of various embodiments.
(31) The many features and advantages of the illustrative embodiments described herein are apparent from the above written description and thus it is intended by the appended claims to cover all such features and advantages of the invention. Further, because numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the invention to the exact construction and operation as illustrated and described. For example, the illustrative embodiments can include additional layers to perform further functions or enhance existing, described functions. Likewise, while not shown, the electrical connectivity of the cell structure with other cells in an array and/or an external conduit is expressly contemplated and highly variable within ordinary skill. More generally, while some ranges of layer thickness and illustrative materials are described herein. It is expressly contemplated that additional layers, layers having differing thicknesses and/or material choices can be provided to achieve the functional advantages described herein. In addition, directional and locational terms such as top, bottom, center, front, back, above, and below should be taken as relative conventions only, and not as absolute. Furthermore, it is expressly contemplated that various semiconductor and thin films fabrication techniques can be employed to form the structures described herein. Accordingly, this description is to be taken only by way of example and not to otherwise limit the scope of the invention.