WAFER TEST CASSETTE
20250093411 ยท 2025-03-20
Inventors
Cpc classification
G01R31/2868
PHYSICS
G01R31/2891
PHYSICS
G01R1/07342
PHYSICS
G01R31/2863
PHYSICS
International classification
Abstract
A wafer test cassette is provided, which includes a first housing, a second housing, and a magnetic barrier assembly. The first housing includes a first magnetic member, and the second housing includes a second magnetic member arranged corresponding to the first magnetic member. The magnetic barrier assembly is configured to be connected to the first housing or the second housing for reducing or eliminating magnetic attraction generated between the first magnetic member and the second magnetic member. The magnetic barrier assembly is configured to reduce or eliminate the magnetic attraction before the first housing and the second housing are in contact with each other. When the first housing and the second housing are correspondingly in contact with each other, an effect of the magnetic barrier assembly is released, so that the first housing and the second housing are tightly coupled to each other through the magnetic attraction.
Claims
1. A wafer test cassette, comprising: a first housing including at least one first magnetic member; a second housing including at least one second magnetic member, the second magnetic member being arranged corresponding to the first magnetic member; wherein, when the first housing and the second housing are correspondingly in contact with each other, an accommodating space is defined between the first housing and the second housing; and a magnetic barrier assembly configured to be connected to the first housing or the second housing for reducing or eliminating magnetic attraction generated between the first magnetic member and the second magnetic member; wherein the magnetic barrier assembly is configured to reduce or eliminate the magnetic attraction before the first housing and the second housing are in contact with each other; wherein, when the first housing and the second housing are correspondingly in contact with each other, an effect of the magnetic barrier assembly is released, so that the first housing and the second housing are tightly coupled to each other through the magnetic attraction; and wherein the first housing and the second housing tightly coupled to each other through the magnetic attraction are configured to be separable by using the magnetic barrier assembly to reduce the magnetic attraction.
2. The wafer test cassette according to claim 1, wherein the first magnetic member is a permanent magnet, and the second magnetic member is the permanent magnet or an unmagnetized magnetically permeable object; wherein the magnetic barrier assembly is movably disposed in the first housing or the second housing and between the first magnetic member and the second magnetic member; wherein, when the magnetic barrier assembly is configured to move a position to shield the first magnetic member or the second magnetic member, the magnetic attraction generated between the first magnetic member and the second magnetic member is reduced.
3. The wafer test cassette according to claim 2, wherein the magnetic barrier assembly is a magnetic shielding member or a magnetic force generating assembly.
4. The wafer test cassette according to claim 3, wherein, when the magnetic barrier assembly is the magnetic force generating assembly, the magnetic force generating assembly is configured to modulate the magnetic attraction between the first magnetic member and the second magnetic member so that the first housing and the second housing are tightly coupled with each other or separated.
5. The wafer test cassette according to claim 1, wherein the first magnetic member is a non-permanent magnet, the second magnetic member is a paramagnetic object, and the magnetic barrier assembly is configured to control whether or not the first magnetic member to generate a magnetic force; wherein the magnetic barrier member is connected to the first magnetic member, and the magnetic barrier assembly is a switch or a microprocessor.
6. The wafer test cassette according to claim 1, wherein multiple first magnetic members and multiple second magnetic members are provided, and a number of the multiple first magnetic members is the same as a number of the multiple second magnetic members.
7. The wafer test cassette according to claim 1, further comprising a seal member disposed at a periphery of the accommodating space, and the accommodating space is defined by the first housing, the second housing, and the seal member.
8. The wafer test cassette according to claim 1, wherein the first housing has at least one first positioning structure, the second housing has at least one second positioning structure, and the first positioning structure and the second positioning structure are arranged correspondingly so as to allow the first housing and the second housing to be correspondingly in contact with each other.
9. The wafer test cassette according to claim 8, wherein one side of the first housing has a first protruding structure, one side the second housing has a protruding structure, and the first protruding structure and the second protruding structure are arranged correspondingly; wherein, when the first housing and the second housing are tightly coupled to each other, the first protruding structure and the second protruding structure are tightly coupled to each other.
10. The wafer test cassette according to claim 1, wherein one side of the first housing has a first protruding structure, one side of the second housing has a second protruding structure, and the first protruding structure and the second protruding structure are arranged correspondingly; wherein, when the first housing and the second housing are tightly coupled to each other, the first protruding structure and the second protruding structure are tightly coupled to each other.
11. The wafer test cassette according to claim 10, wherein the accommodating space is defined by the first housing, the first protruding structure, the second housing, and the second protruding structure.
12. The wafer test cassette according to claim 1, further comprising a probe card and a wafer disposed in the accommodating space.
13. The wafer test cassette according to claim 12, wherein the first housing is configured to carry the probe card, and the probe card includes at least one probe; wherein, when the first housing and the second housing are coupled to each other, the at least one probe projects toward the second housing; wherein the wafer has at least one pad, and the second housing is configured to carry the wafer; wherein, when the first housing and the second housing are coupled to each other, the at least one probe is configured to be in contact with the at least one pad of the wafer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The described embodiments may be better understood by reference to the following description and the accompanying drawings, in which:
[0016]
[0017]
[0018]
[0019]
[0020]
[0021]
[0022]
[0023]
[0024]
[0025]
[0026]
[0027]
[0028]
DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS
[0029] The present disclosure is more particularly described in the following examples that are intended as illustrative only since numerous modifications and variations therein will be apparent to those skilled in the art. Like numbers in the drawings indicate like components throughout the views. As used in the description herein and throughout the claims that follow, unless the context clearly dictates otherwise, the meaning of a, an and the includes plural reference, and the meaning of in includes in and on. Titles or subtitles can be used herein for the convenience of a reader, which shall have no influence on the scope of the present disclosure.
[0030] The terms used herein generally have their ordinary meanings in the art. In the case of conflict, the present document, including any definitions given herein, will prevail. The same thing can be expressed in more than one way. Alternative language and synonyms can be used for any term(s) discussed herein, and no special significance is to be placed upon whether a term is elaborated or discussed herein. A recital of one or more synonyms does not exclude the use of other synonyms. The use of examples anywhere in this specification including examples of any terms is illustrative only, and in no way limits the scope and meaning of the present disclosure or of any exemplified term. Likewise, the present disclosure is not limited to various embodiments given herein. Numbering terms such as first, second or third can be used to describe various components, signals or the like, which are for distinguishing one component/signal from another one only, and are not intended to, nor should be construed to impose any substantive limitations on the components, signals or the like.
Embodiments
[0031] Reference is made to
[0032] A wafer test cassette 1A includes a first housing 11 and a second housing 12. The first housing 11 includes a first magnetic member 111, and the second housing includes a second magnetic member 121. In the present embodiment, the wafer test cassette 1A is shown from a side view in
[0033] In the present embodiment, a shape of the wafer test cassette 1A can be square, circular, or other shapes, which can be adjusted according to practical requirements, but the present disclosure is not limited thereto.
[0034] As shown in
[0035] A servo motor or a stepper motor can be used as a driving device for the first housing 11 and the second housing 12 of the wafer test cassette 1A to combine. The servo motor or the stepper motor can be used to provide a more precise driving force for a smooth coupling process between the first housing 11 and the second housing 12 when the first housing 11 and the second housing 12 are in close proximity to each other.
[0036] When the first housing 11 and the second housing 12 are provided in close proximity, magnetic attraction is generated as the first magnetic member 111 and the second magnetic member 121 attract each other. However, too strong the magnetic attraction may lead to an excess contact force between the first housing 11 and the second housing 12, causing damage to a probe or a wafer. Therefore, the wafer test cassette of the present disclosure further includes a magnetic barrier assembly configured for reducing or eliminating the magnetic attraction between the first magnetic member 111 and the second magnetic member 121. The magnetic barrier assembly is configured to be connected to the first housing 11 or the second housing 12 to or prevent the magnetic attraction between the first magnetic member 111 and the second magnetic member 121 before the first housing 11 and the second housing 12 come into contact with each other.
[0037] In the present embodiment, each of the first magnetic member 111 and the second magnetic member 121 is a paramagnetic object, such as a permanent magnet, a non-permanent magnet, and an unmagnetized magnetically permeable object.
[0038] In the case where the first magnetic member 111 and the second magnetic member 121 are both the permanent magnets, or where one of the first magnetic member 111 and the second magnetic member 121 is the permanent magnet, and another is the non-permanent magnet, an end of the first magnetic member 111 and an end of the second magnetic member 121 that face each other are configured to have different polarities, so that the magnetic attraction is enabled to be generated between the first magnetic member 111 and an end of the second magnetic member 121.
[0039] In certain embodiments, one of the first magnetic member 111 and the second magnetic member 121 is the non-permanent magnet, such as an electromagnet, and another is the paramagnetic object, such as the magnetically permeable object such as iron, cobalt, and nickel. In certain embodiments, the paramagnetic object is the permanent magnet or the electromagnet.
[0040] Referring to
[0041] In the embodiment shown in
[0042] In certain embodiments, the first housing 11 and the second housing can respectively have engagement structures, e.g., male/female engagement structures, so that the first housing 11 and the second housing 12 can be aligned with each other. In the embodiment shown in
[0043] In certain embodiments, the first housing 11 and the second housing 12 respectively have the engagement structures, such as the engagement structure 11FP and the further engagement structure 12FP as described above. When the first housing 11 and the second housing 12 are aligned and positioned, the first housing 11 and the second housing 12 can be fixedly coupled to each other through the magnetic attraction between the first magnetic member 111 and the second magnetic member 121, so as to achieve an effect of interlocking the first housing 11 and the second housing 12.
[0044] As shown in
[0045] In the present embodiment, the first housing 11 includes certain mechanisms, such as a first fixing member 112F, to fix the one or more probes 112. The first fixing member 112F is arranged on one side of the first housing 11 that face the probe card 112 for engagedly fixing the probe card 112. In the present embodiment, the first fixing member is arranged on an outer side of the probe card 112. The first fixing member 112F can also be arranged in an engagement region between the probe card 112 and the first housing 11 so as to be tightly engaged to the probe card 112.
[0046] The second housing 12 also includes certain further mechanisms, such as a second fixing member 13F, to fix the wafer 13. In the present embodiment, the second fixing member 13F is configured for fixing an outer edge of the wafer 13. The first fixing member 112F and the second fixing member 13F of the present embodiment can be implemented by utilizing other fixing structures, but the present disclosure is not limited thereto.
[0047] That is, the probe card 112 and the wafer 13 are aligned before the first housing 11 and the second housing are coupled to each other, so that at least one of the probes 1121 of the probe card 112 can be abutted against the pad of the wafer 13 when the first housing 11 and the second housing are coupled to each other.
[0048] Referring to
[0049] Referring to
[0050] Reference is made to
[0051] In the present embodiment, a structure and a function of a wafer test cassette 1D are similar to those of the wafer test cassette 1A in the first embodiment. In the present embodiment, a first magnetic member 111C of the wafer test cassette 1D is the permanent magnet, and a second magnetic member 121C is the paramagnetic object. The paramagnetic object is, for example, the magnetically permeable object such as iron, cobalt, and nickel as described above. The paramagnetic object can also be the permanent magnet.
[0052] When the first housing 11 and the second housing 12 of the wafer test cassette 1D come into closer proximity, the first housing 11 and the second housing 12 are brought in contact with each other by respective driving devices, such as the servo motor or the stepper motor, so as to be magnetically connected.
[0053] After the wafer 13 passes a test process or a burn-in process performed through the probe card 112, the first housing 11 and the second housing 12 can be separated from each other by respective driving devices, such as the servo motor or the stepper motor, by gradually increasing power.
[0054] Further, as shown in
[0055] As shown in
[0056] As shown in
[0057] Reference is made to
[0058] In the present embodiment, a structure and a function of a wafer test cassette 1E are similar to those of the wafer test cassettes 1A to 1C in the first embodiment. In the present embodiment, a first magnetic member 111E of the wafer test cassette 1E is the permanent magnet, a second magnetic member 121E is the non-permanent object, and the magnetic barrier assembly is a current switch 15B connected to a power supply P.
[0059] As shown in
[0060] In certain embodiments, the first magnetic member 111 is the non-permanent magnet, e.g., the electromagnet, and the second magnetic member 121 is the non-permanent magnet, e.g., the electromagnet. The first magnetic member 111 and the second magnetic member 121 are respectively connected to the magnetic barrier assemblies, which are the current switches 15B. That is, multiple current switches 15B are provided, and the multiple current switches 15B are respectively connected to the first magnetic member 111 and the second magnetic member 121. Similarly, as shown in
[0061] In certain embodiments, the magnetic barrier assembly is a processor connected to the power supply P. The processor is configured to vary an intensity of the magnetic field by increasing or decreasing a current intensity, thereby eliminating or reducing the magnetic attraction when the first housing 11 and the second housing are in close proximity and in contact, and generating or enhancing the magnetic attraction when the first housing 11 and the second housing 12 are configured to be tightly coupled to each other. After the wafer 13 passes the test process, the processor is configured to reduce or eliminate the magnetic attraction by reducing the current intensity to turn the first housing 11 and the second housing into a state in which they can be separable from each other. In the present embodiment, the power supply P can be a battery or a direct current power generating circuit to provide electric energy to the first magnetic member 111E or the second magnetic member 121E. In the case that the power supply P is the battery, the power supply P can be a lithium ion battery, a lithium manganese dioxide battery, a lithium polymer battery, or a nickel metal hydride battery.
[0062] Referring to
[0063] In the embodiment shown in
[0064] When the first housing 11 and the second housing 12 are about to be in close proximity and in contact with each other, the control circuit CRT is configured to control the current intensity flow through the magnetic force generating assembly 15C, so that each of a repulsion force between the magnetic force generating force 15C and the first magnetic member 111E and a repulsion force between the magnetic force generating assembly 15C and the second magnetic member 121E is less or slightly less than the magnetic attraction between the first magnetic member 111E and the second magnetic member 121E. When the first housing 11 and the second housing 12 are aligned and in contact with each other, the control circuit CRT is configured to gradually reduce the current flowing through the magnetic force generating assembly 15C, so that each of the repulsion force between the magnetic force generating force 15C and the first magnetic member 111E and the repulsion force between the magnetic force generating assembly 15C and the second magnetic member 121E is reduced or eliminated, whereby the first housing 11 and the second housing 12 are tightly coupled to each other. After the wafer 13 passes the test process, the control circuit CRT is configured to increase the current flowing through the magnetic force generating assembly 15C, so that each of the repulsion force between the magnetic force generating force 15C and the first magnetic member 111E and the repulsion force between the magnetic force generating assembly 15C and the second magnetic member 121E is increased or generated to be greater than the magnetic attraction between the first magnetic member 111E and the second magnetic member 121E. In such a way, the first housing 11 and the second housing 12 are turned into the state in which they can be easily separable from each other.
Beneficial Effects of the Embodiments
[0065] In conclusion, in the wafer test cassette provided by the present disclosure, by virtue of the wafer test cassette including the first housing and the second housing, the first housing including the first magnetic member and the second housing including the second magnetic member, when the first housing and the second housing are in close proximity, the magnetic attraction is generated to combine and fix the first housing and the second housing, and the magnetic barrier assembly being configured to reduce or eliminate the magnetic attraction between the first magnetic member and the second magnetic member, so that the first housing and the second housing can be separated, a structure of the wafer test cassette can be strengthened. In addition, the combination and fixation of the first housing and the second housing can be strengthened, and alignment accuracy during the combination of the first housing and the second housing, thereby improving an effect of the wafer test cassette on fixing the wafer.
[0066] The foregoing description of the exemplary embodiments of the disclosure has been presented only for the purposes of illustration and description and is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching.
[0067] The embodiments were chosen and described in order to explain the principles of the disclosure and their practical application so as to enable others skilled in the art to utilize the disclosure and various embodiments and with various modifications as are suited to the particular use contemplated. Alternative embodiments will become apparent to those skilled in the art to which the present disclosure pertains without departing from its spirit and scope.