Micromembrane Pumping Device

Abstract

What is suggested is a micromembrane pumping device for pumping a fluid, having: a pump chamber to which an inlet valve, an outlet valve, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and influencing means for influencing the plate-shaped actuator and the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to and electrically insulated from the plate-shaped membrane body by an electrically insulating glue layer; wherein at least one embedded portion of a support body at or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the glue layer to detect the volume of the pump chamber; wherein the influencing means, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a volume flow.

Claims

1. A micromembrane pumping device for pumping a fluid, comprising: a pump chamber to which an inlet valve for introducing the fluid into the pump chamber, an outlet valve for discharging the fluid from the pump chamber, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device comprises a plate-shaped actuator for deforming the membrane device; and an influencer for influencing the plate-shaped actuator so as to influence the volume of the pump chamber; wherein the membrane device comprises a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to the plate-shaped membrane body by means of an electrically insulating glue layer so that the plate-shaped actuator is electrically insulated from the membrane body; wherein at least one embedded portion of a support body at which or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the electrically insulating glue layer in order to detect the volume of the pump chamber; wherein the influencer, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber during an operating cycle of the micromembrane pumping device and a duration of the operating cycle of the micromembrane pumping device.

2. The micromembrane pumping device in accordance with claim 1, wherein the glue layer is applied over an area, in particular the entire area, on a side of the plate-shaped actuator facing the membrane body, and/or wherein the glue layer is applied over an area, in particular the entire area, on a side of the membrane body facing the plate-shaped actuator.

3. The micromembrane pumping device in accordance with claim 1, wherein the glue layer comprises a cured liquid glue, cured glue paste and/or adhesive film.

4. The micromembrane pumping device in accordance with claim 1, wherein the glue layer comprises a temperature-curing material, an anaerobically curing material, a UV radiation-curing material, an activator-curing material, humidity-curing material, dry-curing material and/or hot-melt glue material.

5. The micromembrane pumping device in accordance with claim 1, wherein the plate-shaped actuator is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape-memory actuator or bimetal actuator.

6. The micromembrane pumping device in accordance with claim 1, wherein the support body comprises one or more electrically insulating materials.

7. The micromembrane pumping device in accordance with claim 1, wherein the support body comprises glass, one or more semiconductor materials, one or more composites, one or more polymeric materials or one or more ceramic materials.

8. The micromembrane pumping device in accordance with claim 1, wherein the deformation sensor is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

9. The micromembrane pumping device in accordance with any claim 1, wherein the deformation sensor is a force sensor.

10. The micromembrane pumping device in accordance with claim 1, wherein the membrane body comprises a metal, semiconductor material and/or plastic.

11. The micromembrane pumping device in accordance with claim 1, wherein at least a part for evaluating signals of the deformation sensor is arranged at or in the support body.

12. The micromembrane pumping device in accordance with claim 1, wherein the influencer is configured for recognizing operating disturbances of the micromembrane pumping device using measuring signals of the deformation sensor.

13. The micromembrane pumping device in accordance with claim 1, wherein the support body comprises a non-embedded portion which is led out from the glue layer, wherein contacts for tapping measuring signals of the deformation sensor which are electrically connected to the deformation sensor are attached to the non-embedded portion.

14. The micromembrane pumping device in accordance with claim 1, wherein a heating wire is arranged at or in the embedded portion.

15. The micromembrane pumping device in accordance with claim 14, wherein the support body comprises a non-embedded portion which is led out from the glue layer, wherein contacts for providing the heating wire with electrical energy which are electrically connected to the heating wire are attached to the non-embedded portion.

16. The micromembrane pumping device in accordance with claim 1, wherein a temperature sensor is arranged at or in the embedded portion.

17. The micromembrane pumping device in accordance with claim 16, wherein the support body comprises a non-embedded portion which is led out from the glue layer, wherein contacts for tapping measuring signals of the temperature sensor which are electrically connected to the temperature sensor are attached to the non-embedded portion.

18. The micromembrane pumping device in accordance with claim 1, wherein a state sensor, in particular a humidity sensor or a chemical sensor, for checking a state of the glue layer is arranged at or in the embedded portion.

19. The micromembrane pumping device in accordance with claim 18, wherein the support body comprises a non-embedded portion which is led out from the glue layer, wherein contacts for tapping measuring signals of the state sensor which are electrically connected to the state sensor are attached to the non-embedded portion.

20. The micromembrane pumping device in accordance with claim 1, wherein the embedded portion of the support body, when viewed in a direction from the plate-shaped actuator towards the plate-shaped membrane body, comprises an area which is smaller than an area of the plate-shaped membrane body facing the embedded portion of the support body, and which is smaller than an area of the plate-shaped actuator facing the embedded portion of the support body.

21. The micromembrane pumping device in accordance with claim 1, wherein the embedded portion of the support body comprises at least one through hole which extends from a side of the embedded portion of the support body, facing the plate-shaped actuator, to a side of the embedded portion of the support body, facing the plate-shaped membrane body.

22. The micromembrane pumping device in accordance with claim 20, wherein the embedded portion of the support body, when viewed in the direction from the plate-shaped actuator towards the plate-shaped membrane body, comprises an edge which comprises recesses.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Embodiment of the present invention and its advantages will be described in greater detail below referring to the figures, in which:

[0052] FIG. 1 shows a first embodiment of a micromembrane pumping device in accordance with the present invention in a schematic side view;

[0053] FIG. 2 shows a second embodiment of a micromembrane pumping device according to the present invention in a schematic side view;

[0054] FIG. 3 shows a third embodiment of a micromembrane pumping device in accordance with the present invention in a schematic side view;

[0055] FIG. 4 shows an exemplary actuator, an exemplary support body and an exemplary membrane body for a micromembrane pumping device in accordance with the present invention in a schematic three-dimensional explosive view;

[0056] FIG. 5 shows an exemplary support body having an exemplary deformation sensor for a micromembrane pumping device in accordance with the present invention in a schematic top view;

[0057] FIG. 6 shows a simplified partial view of a micromembrane pumping device in accordance with the present invention in a schematic side view in a rest state;

[0058] FIG. 7 shows a simplified partial view of a micromembrane pumping device in accordance with the present invention in a schematic side view when fluid is introduced; and

[0059] FIG. 8 shows a simplified partial view of a micromembrane pumping device in accordance with the present invention in a schematic side view when fluid is discharged.

DETAILED DESCRIPTION OF THE INVENTION

[0060] Same or uniform elements or elements of equal or equivalent function will subsequently be provided with same or uniform reference numerals.

[0061] In the following description, embodiments having a plurality of features of the present invention will be described in more detail so as to provide better understanding of the invention. However, it is to be stated that the present invention may also be realized while omitting certain of the described features. It is also to be pointed out that the features shown in different embodiments may also be combined differently, provided this is not excluded explicitly or would result in contradictions.

[0062] FIG. 1 shows a first embodiment of a micromembrane pumping device 1 in accordance with the present invention in a schematic side view.

[0063] The micromembrane pumping device 1 for pumping a fluid FL comprises:

[0064] a pump chamber 2 to which an inlet valve 3 for introducing the fluid FL into the pump chamber 2, an outlet valve 4 for discharging the fluid FL from the pump chamber 2, and a membrane device 5 for varying a volume of the pump chamber 1 are associated, wherein the membrane device 5 comprises a plate-shaped actuator 6 for deforming the membrane device 5; and

[0065] influencing means 7 for influencing the plate-shaped actuator 6 so as to influence the volume of the pump chamber 2;

[0066] wherein the membrane device 5 comprises a plate-shaped membrane body 8 limiting the pump chamber 2;

[0067] wherein the plate-shaped actuator 6 is arranged on a side of the plate-shaped membrane body 8 facing away from the pump chamber 2;

[0068] wherein the plate-shaped actuator 6 is mounted to the plate-shaped membrane body 8 by means of an electrically insulating glue layer 9 so that the plate-shaped actuator 6 is electrically insulated from the membrane body 8;

[0069] wherein at least one embedded portion 10 of a support body 11 at which or in which a deformation sensor 12 for detecting a deformation of the membrane device 5 is arranged, is arranged within the electrically insulating glue layer 9 in order to detect the volume of the pump chamber 2;

[0070] wherein the influencing means 7, the plate-shaped actuator 6 and the deformation sensor 12 form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber (2) during an operating cycle of the micromembrane pumping device (1) and a duration of the operating cycle of the micromembrane pumping device 1.

[0071] In accordance with a further development of the invention, the glue layer 9 is applied over an area, in particular the entire area, on a side of the plate-shaped actuator 6 facing the membrane body 8 and/or the glue layer 9 is applied over an area, in particular the entire area, on a side of the membrane body 8 facing the plate-shaped actuator 6.

[0072] According to an advantageous further development of the invention, the glue layer 9 comprises a cured liquid glue, a cured gluing paste and/or adhesive film.

[0073] In accordance with an advantageous development of the invention, the glue layer 9 comprises a temperature-curing material, an anaerobically curing material, a UV radiation-curing material, an activator-curing material, a humidity-curing material, a dry-curing material and/or a hot-melt glue material.

[0074] In accordance with a practical further development of the invention, the plate-shaped actuator 6 is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape-memory actuator or a bimetal actuator.

[0075] In accordance with an advantageous further development of the invention, the support body 11 comprises one or more electrically insulating materials.

[0076] In accordance with a practical further development of the invention, the support body 11 comprises glass, one or more semiconductor materials, one or more composites, one or more polymeric materials or one or more ceramic materials.

[0077] According to an advantageous further development of the invention, the deformation sensor 12 is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

[0078] According to a practical further development of the invention, the deformation sensor 12 is a force sensor.

[0079] In accordance with a practical further development of the invention, the membrane body 8 comprises a metal, semiconductor material and/or plastic.

[0080] In accordance with a practical further development of the invention, at least a part of evaluation electronics for evaluating signals of the deformation sensor 12 is arranged at or in the support body 11.

[0081] In accordance with a practical further development of the invention, the influencing means 7 is configured for recognizing operating disturbances of the micromembrane pumping device 1 using measuring signals MS of the deformation sensor 12.

[0082] In accordance with a practical further development of the invention, the support body 11 comprises a non-embedded portion 13 which is led out from the glue layer 9, wherein contacts 14 for tapping measuring signals MS of the deformation sensor which are electrically connected to the deformation sensor are attached to the non-embedded portion 13.

[0083] In the embodiment of FIG. 1, the deformation sensor 12 is electrically connected to contacts 14 arranged at the non-embedded portion 13 of the support body 11. The contacts 14 in turn are electrically connected to the influencing means 7 via a measuring line 15 so that measuring signals MS of the deformation sensor 12 can be transmitted to the influencing means 7. Based on measuring signals MS, the influencing means 7 generates control signals ST transmitted to the actuator 6 via a control line 16 and controlling the same. The control signals ST may also serve for supplying energy to the actuator 6.

[0084] FIG. 2 shows a second embodiment of a micromembrane pumping device 1 in accordance with the present invention in a schematic side view. The embodiment of FIG. 2 is based on the embodiment of FIG. 1 so that only the differences will be described and explained below.

[0085] In accordance with a further development of the invention, a heating wire 17 is arranged at or in the embedded portion 10.

[0086] According to an advantageous further development of the invention, the support body 11 comprises a non-embedded portion 13 which is led out from the glue layer 9, wherein contacts 18 for providing the heating wire 17 with electrical energy EE which are electrically connected to the heating wire 17 are attached to the non-embedded portion 13.

[0087] According to an advantageous further development of the invention, a temperature sensor 20 is arranged at or in the embedded portion 10.

[0088] In accordance with a practical further development of the invention, the support body 11 comprises a non-embedded portion 13 which is led out from the glue layer 9, wherein contacts 21 for tapping measuring signals TMS of the temperature sensor 20 which are electrically connected to the temperature sensor 20 are attached to the non-embedded portion 13.

[0089] In the embodiment of FIG. 2, the heating wire 17 is electrically connected to contacts 18 formed at the non-embedded portion 13 of the support body 11. The contacts 18 are connected to the influencing means 7 via a supply line 19 so that the influencing means 7 can supply the heating wire 17 with electrical energy EE. Thus, the fluid FL can be heated in a manner controlled by the influencing means 7. Additionally, while manufacturing the micromembrane pumping device 1, the glue layer 9 can be heated so as to cure the same. The electrical energy EE, however, may also be provided by means independent from the influencing means 7.

[0090] Additionally, the temperature sensor 20 is connected to contacts 21 formed at the non-embedded portion 13 of the support body 11. The contacts 21 are connected to the influencing means 7 via a measuring line 22 so that measuring signals TMS of the temperature sensor 20 can be transmitted to the influencing means 7. The measuring signals TMS can be used by the influencing means 7 to regulate the heat power of the heating wire 17.

[0091] FIG. 3 shows a third embodiment of a micromembrane pumping device 1 in accordance with the present invention in a schematic side view. The embodiment of FIG. 3 is based on the embodiment of FIG. 1 so that only the differences will be described and explained below.

[0092] According to an advantageous further development of the invention, a state sensor 23, in particular a humidity sensor or a chemical sensor, for checking a state of the glue layer 9 is arranged at or in the embedded portion 10.

[0093] According to a practical further development of the invention, the support body 11 comprises a non-embedded portion 13 which is led out from the glue layer 9, wherein contacts 24 for tapping measuring signals ZMS of the state sensor 23 which are electrically connected to the state sensor 23 are attached to the non-embedded portion 13.

[0094] In the embodiment of FIG. 3, a state sensor 23 is electrically connected to contacts 24 which are formed at the non-embedded portion 13 of the support body 11 and are electrically connected to the influencing means 7 via a measuring line 25 so that measuring signals ZMS of the state sensor 23 can be transmitted to the influencing means 7. The measuring signals ZMS may be used by the influencing means 7 for early recognition of malfunctioning of the micromembrane pumping device 1 caused by damage to the glue layer 9.

[0095] FIG. 4 shows an exemplary actuator 6, an exemplary support body 11 and an exemplary membrane body 8 for a micromembrane pumping device 1 according to the present invention in a schematic three-dimensional explosive illustration.

[0096] In accordance with an advantageous further development of the invention, the embedded portion 10 of the support body 11, when viewed in a direction RI from the plate-shaped actuator 6 towards the plate-shaped membrane body 8, comprises an area 26 which is smaller than an area 27 of the plate-shaped membrane body 8 which faces the embedded portion 10 of the support body 11, and which is smaller than an area 28 of the plate-shaped actuator 6 which faces the embedded portion 10 of the support body 11.

[0097] In accordance with a practical further development of the invention, the embedded portion 10 of the support body 11 comprises at least one through hole 29 which extends from a side of the embedded portion 10 of the support body 11 facing the plate-shaped actuator 6 to a side of the embedded portion 10 of the support body 11 facing the plate-shaped membrane body 8.

[0098] FIG. 5 shows an exemplary support body in an exemplary deformation sensor 12 for a micromembrane pumping device 1 in accordance with the present invention in a schematic top view.

[0099] In accordance with an advantageous further development of the invention, the embedded portion 10 of the support body 11, when viewed in the direction RI from the plate-shaped actuator 6 towards the plate-shaped membrane body 8, comprises an edge 30 which comprises recesses 31.

[0100] FIG. 6 shops a simplified partial view of a micromembrane pumping device 1 in accordance with the present invention in a schematic side view in a rest state. Thus, the actuator 6 is shown in its rest position so that the membrane body 8 is also in its rest position.

[0101] FIG. 7 shows a simplified partial view of a micromembrane pumping device 1 in accordance with the present invention in a schematic side view when fluid FL is introduced. Thus, the actuator 6 is driven such that it moves such that, together with the membrane body 8, it increases the volume of the pump chamber 2 compared to that volume which the pump chamber 2 takes when the actuator 6 is in its rest position.

[0102] FIG. 8 shows a simplified partial view of a micromembrane pumping device in accordance with the present invention in a schematic side view when fluid is discharged. Here, the actuator 6 is driven such that it moves such that, together with the membrane body 8, it decreases the volume of the pump chamber 2 compared to that volume which is taken by the pump chamber 2 when the actuator 6 is in its rest position.

[0103] The volume flow of the fluid FL can be generated by periodically moving the actuator 6 back and forth between the position shown in FIG. 7 and the position shown in FIG. 8. However, it is also conceivable for the volume flow of the fluid FL to be generated by moving the actuator 6 back and forth between the position shown in FIG. 6 and the position shown in FIG. 7. It is also conceivable for the volume flow of the fluid FL to be generated by moving the actuator 6 back and forth between the position shown in FIG. 6 and the position shown in FIG. 8.

[0104] While this invention has been described in terms of several embodiments, there are alterations, permutations, and equivalents which will be apparent to others skilled in the art and which fall within the scope of this invention. It should also be noted that there are many alternative ways of implementing the methods and compositions of the present invention. It is therefore intended that the following appended claims be interpreted as including all such alterations, permutations, and equivalents as fall within the true spirit and scope of the present invention.