METHODS FOR FABRICATING MICRO-DEVICES

Abstract

The present invention provides methods utilizing current nano-technological processes for fabricating a range of micro-devices with significantly expanded capabilities, unique functionalities at microscopic levels, enhanced degree of flexibilities, reduced costs and improved performance in the fields of bioscience and medicine. Such fabricated micro-devices have significant improvements in many areas over the existing, conventional methods, which include, but are not limited to reduced overall costs, early disease detection, targeted drug delivery, targeted disease treatment and reduced degree of invasiveness in treatment.

Claims

1. A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises: using at least one movable material and at least one structural material; and forming at least one component which can move upon receiving a force or energy.

2. The method of claim 1, wherein said movable material and said structural materials are joined with at least one space material.

3. A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises the following steps: fabricating a integrated circuit containing memory and logic functions for data storage, data analysis, data comparison, data processing, and/or decision making purposes; fabricating a micro-injector; and fabricating a micro-container.

4. The method of claim 3, further comprising the step of fabricating a signal receiver, a signal transmitter, a micro-sensor, a micro-positioning sensor, or a micro-motion apparatus which comprises a micro-motor, micro-propeller, or micro-stepper.

5. The method of claim 3, further comprising the following steps: fabricating a signal receiver; fabricating a signal transmitter; fabricating a micro-sensor; fabricating a micro-motion apparatus comprising of micro-motor, micro-propeller, and micro-stepper; and fabricating a micro-positioning sensor.

6. The method of claim 3, wherein the injection function is accomplished by means comprising hydraulic, electrical, electro-mechanical, electro-magnetic, capacitive, micro-electro mechanical, or piezoelectric force.

7. The method of claim 3, wherein the technology for constructing an integrated circuit comprises complementary metal-oxide-semiconductor (CMOS) technology or bipolar complementary metal-oxide-semiconductor (BiCMOS) technology.

8. The method of claim 3, wherein each injector is optionally connected to an integrated circuit on the micro-device and can be selected to turn on injection action to release compound.

9. The method of claim 3, wherein said micro-containers have means to release stored compound in a timed manner.

10. The method of claim 3, wherein said timed manner in compound release is achieved using a method selected from the following: using a desired thickness of bio-degradable capping layer at the surface of said micro-containers, receiving instructions from integrated circuit on the same micro-device, and means for receipt of a wireless signal from a computer.

11. The method of claim 3, wherein said micro-container carries one or a combination of the following: a cancer killing drug; a cancer killing protein; a cancer killing signal; a signal which stimulates immune system against cancer; a signal which alerts immune system; a species which carry electrical signal; an agent disrupting response from cancer cells and system; an agent suppressing transfer of cancer cells, proteins, tissue, signal and response, hormones; a catalyst; a messenger RNA; a receptor; natural or synthesized human cells; natural or synthesized human proteins capable of killing tumors and triggering resistance to cancers; a Type II Interferon; a platinum-based cancer drug; sirt1 enzyme; resveratrol; and tumor necrosis factors (TNFs) for improved treatment effects.

12. The method of claim 3, wherein said substrate comprises a silicon substrate.

13. The method of claim 3, wherein the microelectronics process comprises thin film deposition, lithography, wet etch, dry etch, cleaning, wet processing, diffusion, ion implantation, annealing, or CMP.

14. The method of claim 3, wherein said micro-device is fabricated on a wafer substrate, which can be cut and packaged into desired sizes with a desired number and combinations of types of micro-devices on each of packaged final block.

15. The method of claim 3, wherein said spacial region, said moving component, said micro-container, and said micro-injector each have a size from 0.05 micron to 1 centimeter, and a minimum feature from 0.01 micron to 20 microns.

16. The method of claim 15, wherein said spacial region, said moving component, said micro-container, and said micro-injector each have a size from 0.1 micro to 5 millimeter, and minimum feature from 0.01 micron to 0.5 micron.

17. The method of claim 3, wherein said micro-device carries one or a combination of the following: a cancer killing drug, a cancer killing protein, a cancer killing signal, a signal which stimulates immune system against cancer, a signal which alerts immune system, a species which carry electrical signal, an agent disrupting response from cancer cells and system, an agent suppressing transfer of cancer cells, proteins, tissue, signal and response, and virus.

18. The method of claim 3, wherein said micro-devices optionally have bio-degradation functions and capabilities.

19. The method of claim 3, wherein said micro-devices optionally have disintegration capabilities and decompose into pieces with sizes smaller than 1 micron.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] These and other features, aspects and advantages of the present invention will become better understood with regard to the following description, appended claims and accompanying drawings where:

[0019] FIGS. 1 through 4 (FIG. 1, FIG. 2, FIG. 3 and FIG. 4) illustrate an innovative method of fabricating micro-containers for carrying compounds for bio-medical applications.

[0020] FIG. 5 shows an alternative process flow for fabricating micro-containers.

[0021] FIGS. 6 through 9 (FIG. 6, FIG. 7, FIG. 8, and FIG. 9) illustrate another novel process for fabricating micro-containers.

[0022] FIG. 10 and FIG. 11 illustrate a method of fabricating micro-containers for timed drug release using a bio-degradable capping (sealing) layer on the micro-container surface.

[0023] FIGS. 12 through 26 illustrate a novel method and process flow for fabricating integrated micro-injector and micro-container onto the same substrate, in which injection action using the integrated micro-injector is shown.

[0024] FIG. 27 and FIG. 28 shows micro-injector selection and injection process in a micro-device with an array of micro-containers integrated with micro-injectors and integrated circuits for selecting injector, triggering injector action for the selected injector, and compound release.

[0025] FIG. 29 illustrates a schematic view of a micro-device integrating micro-containers and injectors with integrated circuits such as front end CMOS or BiCMOS integrated circuits with memory and logic functions for data storage, data analysis, data processing, and logic decision making (providing instructions), and other components including sensors, wireless signal transmitter, wireless signal receiver, position sensor, and motion apparatus (motorized propellers in this case).

DETAILED DESCRIPTION OF THE INVENTION

[0026] While major progress in the area of bio-medicine has been made in the past few decades, in a number of key areas including deadly disease (such as cancer) prevention, early detection and treatment, progress has been relatively slow. For example, to date, treatment options for cancer have remained mainly limited to chemotherapy, radiation treatment or a combination of the two. On the other hand, some progress has been made in the area of cancer curing drugs, including a targeted drug approach. However, drugs that have shown promise during animal testing have not performed as expected during clinical human trials. Often, drugs lack effectiveness, selectivity, specificity, have side effects and high costs. A new approach and major innovation is urgently needed to address these major issues. In this invention, a set of novel process flows utilizing microelectronics processes to fabricate powerful micro-container/injectors with other optional components integrated onto integrated circuits for improved drug and other agent transportation and delivery with improved effectiveness, selectivity and specificity with reduced side effects and costs. A novel use of these devices is further disclosed herein.

[0027] While microelectronics process technology has been utilized to fabricate a wide range of information technology-related products such as memory devices, micro-processors, and digital signal processors, relatively speaking, its application in the field of bio-medicine is still in its infancy. To date, the application of microelectronics process technologies has been mainly limited to chips for lab tests such as DNA mapping and the diagnosis of certain diseases. Such chips contain integrated, miniaturized probes to speed up tests and data collection. However, to a large extent, its (microelectronics) application and associated special fabrication process flows for more sophisticated bio-medical applications have not been developed.

[0028] The key inventive aspect of this patent application is a set of novel process flows using microelectronics processes for fabricating micro-devices comprising at least a sealed space and a micro-component which can convert an applied force or energy into a motion, where a portion of the wall of said sealed space is a part of said micro-component. The microelectronics process includes, but is not limited to, thin film deposition, lithography, wet etch, dry etch, cleaning, wet processing, diffusion, ion implantation, annealing and CMP.

[0029] One embodiment is the fabrication process of micro-containers and micro-injectors for bio-medical applications with significantly improved drug carrying flexibility, selectivity, specificity, efficiency, and reduced side effects and costs.

[0030] Another key, novel aspect of the current invention is the fabrication process flow to integrate micro-injectors and micro-containers with an injection action from the said injector to release drug(s) or agent(s) contained in the micro-containers.

[0031] Yet another novel feature of this disclosure is the integration of micro-containers, injectors, and other components which include, but is not limited to, sensors, position sensors, signal transmitters, signal receivers and motion apparatus (such as motorized propellers and steppers) with integrated circuits onto the same micro-device. These features use processing technologies which include, but are not limited to CMOS or BiCMOS technologies with both memory and logic functions. The integration of the above components can greatly enhance performance of the micro-devices for bio-medical applications, with both mechanical abilities as well as device motion, position, signal sensing, signal transmission, data storage, data analysis, data processing and logic decision-making capabilities.

[0032] One additional innovative aspect of the current application is the ability to select micro-containers for drug (or agent) release through a pre-programmed instruction set or instructions from an integrated circuit on the micro-device or a host computer via wireless signal instructions to the corresponding, selected micro-device.

[0033] Another embodiment is the process flow and design using a bio-compatible material with dissolution ability in a desired environment, as a capping layer for micro-containers for timed drug or carrying agent release.

[0034] Still, another embodiment is the use of micro-containers/injectors for carrying natural and/or synthesized cells, proteins, biological, chemical, and electrical species for disease prevention and treatment. The agents carried are not limited to drugs. The agents could be species carrying biological signal information and immunity triggering agents, hormones, catalysts, messenger RNA, receptors such as G protein linked receptors, which have improved speed and efficiency. For example, for cancer prevention and treatment, natural tumor killing or signal carrying cells/proteins can be carried to further efficiency and speed (such as CD8 T cells, NK cells, Type II Interferons, and TNFs).

[0035] In this invention disclosure, the micro-devices include, but are not limited to, micro-containers and micro-injectors for drug delivery and disease treatments. Other components include sensors, signal transmitters, signal receivers and motorized propellers. The components/devices can be integrated onto integrated circuits with both memory and logic functions. The said microelectronics processes include, but are not limited to, thin film deposition, lithography, etch (both wet and dry etch processes), cleaning, wet processing, diffusion, ion implantation and CMP processes. Such processes are utilized and arranged in many novel ways to fabricate various types of micro-devices with a minimum feature size of as small as 0.1 micron. The above-mentioned micro-devices have one to multiple functions, with typical sizes ranging from sub-micron to several millimeters. Optionally, the said devices are bio-degradable, or capable of disintegrating into smaller pieces on the order of less than 10 microns.

[0036] FIG. 1 through FIG. 4 show the first example of a novel process flow for fabricating micro-containers using microelectronics processes. In FIG. 1, a structural material 121 is first deposited onto a substrate 111. Said structural material 121 is deposited via chemical vapor deposition, sputtering, vacuum evaporation, or other suited methods, with chemical vapor deposition preferred due to its high deposition rate and maturity. Substrate 111 can be a semiconductor material such as silicon, silicon based compounds, non-conductive inorganic materials, non-conductive organic or biological material, with silicon or polysilicon materials preferred. Structural material 121 is next patterned using lithography and etch processes, with a desired set of patterns such as holes formed in the structural material 121. Structural material 121 preferably has a reasonably higher etch rate in the desired etch process than that of substrate material 111, so that the etch process can stop and leave the substrate 111 unaffected. The structural material 121 can be silicon nitride, silicon oxynitride, silicon carbide, or other materials with a different etch rate than that of substrate 111 in the desired etch process. The dimension of the patterned holes in structural material 121 should be the desired micro-container dimension since it will be the micro-container when the fabrication process is completed. A space material 331 is next deposited, filling in the holes defined in the previous step. The space material 331 is a sacrificial material since it will be removed at a later process. It can be an inorganic material such as silicon dioxide (SiO.sub.2), with a high etch selectivity to substrate 111 and structural material 121 (it is required to have a reasonably higher etch rate than those of substrate 111 and structural 121). After deposition of space material 331, as shown in FIG. 1, there is a topography due to recessed areas in the layer of structural material 121. Therefore, chemical mechanical polishing is used to remove space material 331 above the structural material 121, leaving space material 331 remaining in the holes in layer 121 at the same height as the surface of structural material 121, as shown in FIG. 2. A structural material 131, preferably with a reasonably slower etch rate than that of space materials 331 in desired etch chemistries, is subsequently deposited and patterned (via lithography and etch processes) to form small openings above the holes as shown in FIG. 2. Next, an etching process is used to remove space material 331 in the holes. The etch process is required to be selective to structural materials 111, 121, and 131, with space material 331 etched away only. The preferred etch processes are wet etch and vapor etch. For preferred SiO.sub.2 as a space material 331, diluted FH solution can be used for wet etch and a vapor etching gas containing O.sub.2 can be used in a vapor etch. Thus, micro-containers with a desired storage space and an opening are fabricated using this novel microelectronics process flow. Next, as shown in FIG. 3, the said substrate 111 with fabricated micro-containers with openings is micro-aligned with a compound filling station 422 which has compound filling nozzles 434, a compound reservoir 444, a desired compound 511, and a nozzle holder 344, and pressed against each other to have micro-nozzles 434 inserted into the openings of the micro-containers. As illustrated in FIG. 4, following the filling of a desired compound 511 into the micro-containers, the compound filling station 422 is detached, via etching of the nozzle holder 344 (again, a nozzle holder material 344 of SiO.sub.2 and a vapor etching gas containing O.sub.2 gas is preferred), from the said micro-container assembly, leaving nozzles 434 in the openings of the micro-containers. Thus, a set of micro-containers containing the said compound 511 with nozzles 434 can be fabricated using the above disclosed novel process flow as shown in the final step, FIG. 4.

[0037] In addition to the above process flow illustrated in FIGS. 1-4, as a second example, an alternative process is shown in FIG. 5. After space material 331 removal and compound filling steps described above in FIG. 3, the filling station 422 is removed with nozzles 434 still attached to the station 422. A capping layer 141 is then deposited as illustrated in FIG. 5. The capping layer 141 is preferably a bio-compatible material which can be dissolved in an environment (for example, the human body) such as a blood environment for timed drug release.

[0038] FIG. 6 through FIG. 9 show yet another novel, alternative process flow. Structural material 121 is deposited on a substrate 111 as shown in FIG. 1. Then, as shown in FIG. 6, following structural material 121 deposition, micro-container hole patterning in layer 121, space material 331 deposition and polishing, a first capping layer 131 is deposited. A thick capping layer 151 is next deposited, which is subsequently patterned using lithography and etch processes, along with the first capping layer 131, to form small openings above the hole regions in layer 121 as shown in FIG. 7. This etch process is selective to space material 331. Space material 331 is then etched, selective to other materials (111, 121, 131, and 151). Preferred process for etching space material 331 is wet or vapor etch. Finally, a desired compound (or compounds) is filled into the etched out micro-container holes as shown in FIG. 8. After fabrication of the said micro-containers, micro-nozzles can then be mounted onto the openings. Alternatively, the opening above the micro-container can be sealed with a top capping layer 161, as shown in FIG. 8, which can be a bio-degradable material capable of dissolving in a timed manner in a desired environment, such as in blood. Finally, the top capping layer 161 and the thick capping layer 151 can be patterned using lithography and etch processes to form sharpened nozzle heads 521 as illustrated in FIG. 9.

[0039] The above three examples show several novel process flows using microelectronics process technologies for fabricating micro-containers with compound such as drug carrying capabilities for bio-medical applications. The dimensions for an individual micro-container can range from 0.05 micron to 5 millimeters in size (diameter and height), with a minimum feature size (for example, for micro-container nozzle size) of 0.05 micron to 20 microns being preferred.

[0040] In addition to carrying a desired compound or compounds to a targeted location, when and how the said compound(s) are released is also critical for achieving the maximum effect. To address this matter, a novel approach combined with the disclosed micro-container is illustrated in FIG. 10. As shown in FIG. 10, a bio-compatible capping material 141 can be used to seal the narrow opening of the said micro-container following a desired compound 511 (or compounds) being filled into the container. The bio-compatible capping material 141 is selected such that it can dissolve in the environment along its way to the target or in the environment surrounding the target in a desired time frame, resulting in the timed release of compound(s) in the targeted area, as shown in FIG. 11. For example, it can dissolve in human blood, or an acid environment in the stomach all which can be manipulated depending on the desired therapeutic outcome. The timing is such that the narrow opening is opened in a desired time frame upon reaching its targeted location.

[0041] In some disease prevention or treatment applications, it may require a more precise, targeted delivery to an intended site, even at the cellular level. To achieve the above stated objective, one of the key inventive aspects of this patent application is to integrate micro-containers, injectors, sensors, positioning device, motion apparatus, communications devices, and other various components with one to multiple IC devices with memory and logic processing functions on the same micro-device to achieve far greater functionality, precision, selectivity, and flexibility than those by conventional drug delivery approaches, using microelectronics processes and disclosed process flows in this application. With the aid of sensors and IC device, an injector head can precisely attach to the targeted cells and not on the un-intended cells, thereby greatly enhancing delivery selectivity, specificity and efficiency, with reduced side effects and costs over traditional approaches.

[0042] Using the novel microelectronics fabrication process flows disclosed in this application, micro-devices can be manufactured to store different types of compounds such as drugs and agents, and deliver and release the said different types of drugs and agents at desired locations, time intervals, sequence and drug doses. An array of micro-containers can be fabricated using the disclosed microelectronics processes with a desired spacing between adjacent micro-containers and container sizes, which can impact compound release dosage and density. Further, with the integration with an integrated circuit, each single micro-container, each single row of micro-containers, or any combination set of micro-containers can be selected to release stored compound. The above mentioned selective release function can also be achieved using the disclosed use of biocompatible and bio-degradable capping layer, where the thickness of bio-degradable capping layer can be varied to result in selective earlier release (using thinner bio-degradable capping layer) or selective delayed release (using thicker bio-degradable capping layer) of desired compound(s). Such a micro-device can be very powerful in releasing different types of drugs or agents at desired sequence and time interval, and combination of drugs at the targets (in-situ mixing), with effects which otherwise cannot be obtained with conventional disease treatment approaches.

[0043] One of the key novel aspects of this invention is the fabrication and resultant functions and mechanisms of micro-injectors. In one approach, a micro-container is integrated with a micro-injector housing at the bottom portion of the said micro-container. Such structures can be fabricated using novel microelectronics process flows disclosed below in FIG. 12 through FIG. 26. The mechanisms which can be used for micro-injectors include, but are not limited to, hydraulics, electro-magnetic, electrical, electro-mechanical, micro-electrical mechanical, capacitive and piezoelectric forces.

[0044] In addition to the above disclosed novel fabrication processes and process flows for making micro-containers and micro-injector mechanisms, yet another key embodiment of this application is how to fabricate integrated micro-injector and micro-container, as illustrated in FIG. 12 through FIG. 26. In FIG. 12, a movable material 221 is first deposited onto a substrate 111, and subsequently patterned using lithography and etch processes, forming a push plate which could later, when in use, apply a force onto the injector base plate for injection action. Optionally, an etch stop layer can be deposited onto the substrate 111 first to separate the substrate 111 and the movable material 221. The substrate 111 can be a silicon substrate, a silicon compound, or an inert material, while the movable material 221 can be polysilicon (when an etch stop layer is used between substrate 111 and movable material 221), silicon nitride, silicon carbide, or a desired material with sufficient mechanical strength. Next, a space material 331 is deposited (see FIG. 12), and planarized using chemical mechanical polishing (FIG. 13). The space material 331 is a sacrificial layer which will be removed later in the process, which can be a material such as silicon dioxide or aluminum oxide. As shown in FIG. 13 a movable material 222 is next deposited and patterned using lithography and etch processes which are illustrated in FIG. 14, forming an injector base plate, which will result in an injection action when a force is applied to it in operations. A second space material 332 is then deposited and planarized. The second space material 332 is preferably an identical material as the first space material 331 for ease of processing. Next, as shown in FIG. 15, a structural material 171 is deposited on top of the second space material 332. As illustrated in FIG. 16, layer 171 and space materials 332 and 331 are patterned using lithography and etch processes, selective to materials 111, 221, and 222, forming holes and trenches in layers of space materials 331 and 332.

[0045] Optionally, a thin layer of space material 333 is deposited (not shown in the figure), preferably by chemical vapor deposition or atomic layer deposition, which serves to help smooth injector motion later on. Space material 333 is preferably the same material as space material 332 for ease of removal in the same etching step later on.

[0046] As shown in FIG. 17, a movable material 223 is next deposited to fill in holes and trenches and planarized using CMP. Movable materials 224 and 223 are next deposited in FIG. 18. As shown in FIG. 19, material stack 223/224/223 is subsequently patterned using lithography and etch processes, selective to structural material 171. Small openings in structural material 171 are next created through patterning material 171 using lithography and etch processes and are shown in FIG. 19. Next, as illustrated in FIG. 20A, space materials 332 and 331 are removed via etching, preferably using wet etching or vapor etch process, selective to all other materials present. Another layer of structural material 171 is subsequently deposited and planarized using chemical mechanical polishing. Structures may also be supported in other directions (for example, in horizontal direction vertical to the cross-sectional plane shown in the figures).

[0047] As referred to above, but not illustrated in the drawings, in the case where a thin layer of space material 333 is used, it will also be removed in the same etching step, forming a spacing between movable material 223 and structural material 171, which will help the injector motion. FIG. 20B illustrates a schematic for the case where a space material 333 is used and removed in the etching step, in which the spacing between structural material 171 and movable material 223 is shown and will help the injector motion when it is in operation. In FIG. 21, a structural material 181 is deposited. Next, structural materials 181 and 171 are patterned using lithography and etch processes to form small openings above movable material layer 223, selective to movable material 223. Alternatively, structural materials 181 and 171 can be patterned in separate etch steps. As illustrated in FIG. 22, the top movable material 223 is removed in the areas where there is an opening above it, preferably by wet etching or vapor gas etching, selective to materials 181, 171 and 224, forming a space within structural material 171 (in three sides) and with material 224 at the bottom. This space is the desired micro-container area used to hold the compound to be stored. Next, a short etch is optionally used to etch structural material 171, selective to materials 181, 224, and 223, resulting in a small spacing between the wall of layer 171 and materials stack 224/223 as shown in enlarged portion of FIG. 22. The purpose of this short etch is to form a small spacing to allow for an easier and more smooth motion of injector base plate (materials stack 224/223) during injection action. In FIG. 23, a desired compound 511 is next filled into the micro-containers, followed by application of a desired, taping film 191 to the top surface of layer 181 to seal the micro-containers. Preferably, film 191 is sufficiently thin for easier compound release when pressure is exerted onto it during injection action, while strong enough to keep compound contained before intended release. As illustrated in FIG. 24, materials 191 and 181 are next patterned using lithography and etch processes to form the nozzle of an integrated micro-injector and micro-container. FIG. 24 also serves as a micro-device with an integrated micro-injector and micro-container before compound 511 injection. FIG. 25 illustrates a micro-device after injection of said compound. In FIG. 25, upon an applied force to injector base plate 222 (by push plate 221 in this case), injector base plate 222 pushes up and results in the release of the compound stored in the micro-containers.

[0048] As another embodiment for compound injection, a micro-device with an integrated micro-injector and micro-container using a piezoelectric material as a push plate 221 below an injector base plate 222 is shown in FIG. 26. After application of a desired voltage to the piezoelectric push plate 221, the push plate 221 expands and pushes injector base plate 222 upward, resulting in injection action and compound release.

[0049] Another major advantage of using a micro-device with micro-containers, micro-injectors, and an integrated circuit integrated on the same unit is the ability to select the micro-container to release compound with time and space control because each micro-container can be interfaced with the integrated circuit and can be instructed by the integrated circuit on when and where to release the compound. For example, a micro-device can have an array of micro-containers, with each micro-container releasing compound based on instructions from the integrated circuit which in turn makes a decision based on a micro-sensor's measurements on a local, living environment. The micro-device can further carry multiple types of compounds stored in the array of micro-containers, with different compounds released in desired time interval and space combinations via integrated circuit instructions to achieve the optimum treatment effects. Specifically, injectors can be individually selected to launch injection action via some applied force to its base plate, triggered by instructions from an integrated circuit on the same micro-device, or by a wireless signal. As one example, FIG. 27 illustrates a micro-device with multiple micro-injectors integrated with micro-containers. Both guide plate 266 and injector bottom plate 222 are connected to integrated circuits via conductive wiring (not shown in the figure). Guide plate 266 serves to select injector to cause injection action when an opposite charge relative to that on the injector plate 222 is applied to it. In FIG. 27, opposite charges are applied to the guide plate 266 and injector plate 222 on the micro-injector on the left. As a result, in FIG. 28, due to the attractive electrical charge force between the injector plate 222 and guide plate 266 for the micro-injector on the left, the injector plate 222 is pulled upward toward the plunger plate 288, resulting in injection action and compound 511 release in the left micro-container, while the micro-injector on the right is not selected and remains inactive.

[0050] To enhance the performance and flexibility of micro-devices, in addition to micro-containers and micro-injectors, integrated circuits with data storage and logic processing capabilities and other functional components can also be integrated onto the same substrate using microelectronics fabrication techniques and process flows for biological and medical applications. FIG. 29 shows a cross-sectional schematic view of a micro-device with micro-container integrated with micro-injector 455, sensor 881, signal receiver 771, signal transmitter 772, positioning device 661, and motion device 991 integrated on an integrated circuit 551 with memory and logic processing capabilities for improved performance, with all of them interfaced to the integrated circuit for communication and instruction purposes. The schematic in FIG. 29 shows a number of key components of an integrated circuit including transistors (implanted regions and gate stack 522), metal contact plugs 533, and interconnects 544. The said micro-containers and injectors are electrically connected (interfaced) to the integrated circuits 551 for receiving and executing instructions from the integrated circuits 551. The said integrated circuit 551, which contain both memory and logic functions for data storage, data analysis, data processing and logic decision making such as making injection instruction to release the stored drug, can be fabricated using either CMOS or BiCMOS technologies first, with micro-containers, injectors and other components such as sensors, and signal transmission and receiving components fabricated subsequently on the same substrate. To insure integrity of the integrated circuit 551, processing temperatures for the subsequent micro-containers and injectors are preferably controlled at 400 degrees Celsius or below.

[0051] In the above integrated micro-device, the said sensors can detect a wide range of parameters and provide information to the integrated circuits for data analysis and decision making. The signal transmitters and receivers are for wireless communications with outside world (for example for a host computer outside the human body or a doctor). The said motion apparatus such as propeller can be used to position (to move) the micro-device to a desired location. Positioning device can function to determine the relative and absolute locations of the micro-device within the biological body. The integrated circuit serves as a central commander to receive data (from sensors and signal receivers), store data, analyze data, make decisions and send instructions to various components (instructing propeller for motions, injectors for compound release, transmitter for signal transmission).