METHOD AND APPARATUS FOR PRECISION WORKING OF MATERIAL

Abstract

A method for precise working of material, particularly organic tissue, comprises the step of providing laser pulses with a pulse length between 50 fs and 1 ps and with a pulse frequency from 50 kHz to 1 MHz and with a wavelength between 600 and 2000 nm for acting on the material to be worked. Apparatus, in accordance with the invention, for precise working of material, particularly organic tissue comprising a pulsed laser, wherein the laser has a pulse length between 50 fs and 1 ps and with a pulse frequency of from 50 kHz to 1 MHz is also described.

Claims

1-31. (canceled)

32. An apparatus for precision machining of an organic tissue, the apparatus comprising: a radiation source that produces a pulsed laser beam having a plurality of laser pulses; wherein the pulsed laser beam has a pulse length between 50 fs and 1 ps, a pulse frequency greater than 50 kHz, and an energy of an individual laser pulse between 100 nJ and 10 J; and a beam device that directs the pulsed laser beam, wherein the radiation source and the beam device are configured to apply the pulsed laser beam to the organic tissue that generates a plurality of cuts in the organic tissue by photodisruption, and wherein the plurality of the cuts divide a portion of the organic tissue into fragments capable of being extracted by a suction device.

33. The apparatus according to claim 32, further comprising: a holding mechanism that positions the organic tissue, wherein the holding mechanism includes an adapter and a vacuum suction ring for fixating a human eye.

34. The apparatus according to claim 32, further comprising: an operation microscope.

35. The apparatus according to claim 34, wherein the beam device includes an objective of the operation microscope, and wherein the operation microscope has a beam splitter that reflects the pulsed laser beam into a beam path of the operation microscope.

36. The apparatus according to claim 32, wherein the suction device has a suction cannula.

37. The apparatus according to claim 36, wherein the fragments are adapted to a diameter of the suction cannula so that the fragments are sucked out by the suction cannula.

38. The apparatus according to claim 32, wherein the radiation source includes an oscillator-amplifier arrangement having a fiber laser amplifier, and the radiation source further includes an optical module which influences a spectral phase function of the pulses of the pulsed laser beam and generates a linear pre-chirp, the amount of the linear pre-chirp being set according to a linear chirp of a downstream optical system.

39. The apparatus according to claim 32, wherein the beam device is programmable.

40. The apparatus according to claim 33, wherein the holding mechanism has a contact glass which is pressed against a cornea, the curvature of the contact glass being adapted to the cornea.

41. The apparatus according to claim 32, wherein the radiation source is configured to modify the pulse frequency.

42. The apparatus according to claim 38, wherein the oscillator-amplifier arrangement has a pump source that is a semiconductor laser diode.

43. The apparatus according to claim 38, wherein the oscillator-amplifier arrangement has a mode-coupled oscillator that has a solid state material doped with ytterbium or neodymium.

44. The apparatus according to claim 43, wherein the mode-coupled oscillator is at least one selected from the group consisting of a disk laser oscillator, a fiber laser oscillator, and a rod laser oscillator.

45. The apparatus according to claim 32, wherein the beam device has a deflecting device which deflects a focus of the pulsed laser beam in a scan mode, wherein the beam device also includes an emission control device that controls an emission of the pulses of the pulsed laser beam, wherein the emission control device is configured to release the emission of the pulses of the pulsed laser beam when the deflecting device reaches a pre-determined focus position to generate a track of working volumes in the organic tissue, and wherein adjacent working volumes are placed at a predefined and uniform distance along a pre-determined path.

46. The apparatus according to claim 38, wherein the optical module is integrated in the radiation source.

47. The apparatus according to claim 38, wherein the linear pre-chirp is set according to both the linear chirp of the downstream optical system and the linear chirp of the radiation source.

48. A method for precision machining of an organic tissue, the method comprising: providing a radiation source that generates a pulsed laser beam having a plurality of laser pulses; wherein the pulsed laser beam has a pulse length between 50 fs and 1 ps, a pulse frequency greater than 50 kHz, and an energy of an individual laser pulse between 100 nJ and 100 J; and providing a beam device that directs the pulsed laser beam to the organic tissue such that a plurality of cuts in the organic tissue are generated by photodisruption, wherein the plurality of the cuts divide a portion of the organic tissue into fragments capable of being extracted by a suction device.

49. The method according to claim 48, further comprising: providing a holding mechanism that positions the organic tissue, wherein the holding mechanism includes an adapter and a vacuum suction ring for fixating a human eye.

50. The method according to claim 48, further comprising, providing an operation microscope; and configuring the beam device to include an objective of the operation microscope, wherein the operation microscope has a beam splitter that reflects the pulsed laser beam into a beam path of the operation microscope.

51. The method according to claim 48, wherein the suction device includes a suction cannula, and wherein the fragments are adapted to a diameter of the suction cannula so that the fragments are sucked out by the suction cannula.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In the drawings:

[0048] FIG. 1 shows a schematic view of an embodiment example of a laser according to the invention;

[0049] FIG. 2 shows another embodiment example of a laser according to the invention with a surgical microscope and an eye to be worked;

[0050] FIG. 3A shows a schematic view of a cut pattern which can be made with the laser system according to an embodiment of the present invention. FIG. 3B shows a schematic view of a cut pattern which can be made with the laser system according to an embodiment of the present invention. FIG. 3C shows a schematic view of a cut pattern which can be made with the laser system according to an embodiment of the present invention. FIG. 3D shows a schematic view of a cut pattern which can be made with the laser system according to an embodiment of the present invention;

[0051] FIG. 4 shows a schematic detailed view of a sequence of laser spots on circle lines; and

[0052] FIG. 5 shows the timeline of sequences of laser pulses in and outside of the laser resonator;

[0053] FIG. 6 shows the cutting control for generating a lenticle in section through the cornea;

[0054] FIG. 7 shows the process of extracting the cut lenticle through a small lateral cut;

[0055] FIG. 8 shows the cut lenticle in a top view of the cornea;

[0056] FIG. 9 shows another form of the cutting control in which the lenticle is divided and can be extracted through two lateral cuts; and

[0057] FIG. 10 shows another embodiment of the method according to the invention, wherein the lens is divided in many parts which are removed by a suction/rinsing device.

DETAILED DESCRIPTION OF EMBODIMENTS

[0058] It is to be understood that the figures and descriptions of the present invention have been simplified to illustrate elements that are relevant for a clear understanding of the present invention, while eliminating, for purposes of clarity, many other elements which are conventional in this art. Those of ordinary skill in the art will recognize that other elements are desirable for implementing the present invention. However, because such elements are well known in the art, and because they do not facilitate a better understanding of the present invention, a discussion of such elements is not provided herein.

[0059] The present invention will now be described in detail on the basis of exemplary embodiments.

[0060] FIG. 1 shows a schematic view of the individual components of an embodiment example of a laser system according to the invention. The working device 1 comprises an fs laser beam source as radiation source 11. The laser beam 15 is coupled out to beam expansion optics 21 by mirrors and a beam splitter 57. The expanded laser beam 15 is then guided by a beam deflection device such as a scanner in XY-direction to a beam focusing device 24. The latter is displaceable in the Z-axis and accordingly allows the displacement of the focus point by displacing the beam focusing device along arrow Z. Alternatively, a focusing optical system with variable focal length can be used in order to displace the focus position in Z-direction in a controlled manner. In this way, the focused laser spot 16 is directed onto the material 90 to be worked, which material 90 is held in its position by means of a fixating device 32. In the present instance, the material 90 is a contact lens to be worked. The spot 16 can also be oriented by displacing the fixating device 32 in direction XY or Z on or in the material.

[0061] The laser beam 15 generated by the radiation source 11 is focused on the material 90 by the working apparatus 1. A focus diameter of a few micrometers can be achieved in that the laser beam 15 is focused with a beam diameter of a few millimeters through optics with a few centimeters focal length. For a Gaussian beam profile, for example, there is a focus diameter of three micrometers when focusing a laser beam of wavelength 1000 nm and a beam diameter of 10 mm with a focal length of 50 mm.

[0062] Generally, the diameter of the laser beam 15 at the output of the radiation source 11 is smaller than is necessary for optimal focusing. With beam expansion optics 21, the beam diameter can be adapted to requirements. A Galileo telescope (diverging lens plus collecting lens) which is adjusted to infinity can preferably be used as beam expansion optics 21. There is no intermediate focus in this case which could lead to an optical breakdown in air under certain circumstances. The remaining laser energy is accordingly higher and the beam profile is consistently good. It is preferable to use lens systems which lead to optimal imaging characteristics of the telescope. By adjusting the telescope, manufacturing variations can also be compensated in the beam divergence of the radiation source 11.

[0063] In this embodiment example, the laser focus is moved over or through the material in a scanning manner. The laser focus or laser spot 16 is accordingly scanned three-dimensionally with micrometer accuracy. The expanded laser beam 15 is deflected perpendicular to the original beam direction by a deflection device 23. The position of the focus 16 after the focusing optics 24 is displaced perpendicular to the original beam direction. The focus can accordingly be moved in a surface which is essentially plane and perpendicular to the laser beam direction (X/Y direction). The movement parallel to the beam direction (Z-direction) can be carried out on one hand by moving the workpiece (see arrow Z). The scan algorithms are then preferably configured in such a way that the workpiece need only be moved slowly and the fast scanning movements are carried out by the deflecting unit. On the other hand, the focusing optics can also be moved parallel to the laser beam direction (arrow Z) in order to lower the focus in the Z-direction. Particularly in medical applications, the second method is preferred because the patient can generally not be moved quickly enough.

[0064] The worked material 90 is fixated relative to the laser device in a fixating and adjusting device 32. In this connection, the fixating device is preferably adjusted vertical to and parallel to the beam device in order to be able to place the cut pattern at the intended location in the material 90. A visible laser beam which proceeds from a pilot laser 27 and is collinear with the working laser beam 15, 15 supports the adjustment.

[0065] Mirrors or pairs of mirrors 22 are provided for beam control and for precision adjustment of the beam position between the individual components. The mirrors are preferably so constituted that the working laser beam does not destroy the mirrors, but the mirrors are highly reflecting for the wavelength of the working laser and are sufficiently reflecting for the pilot laser. The coating is selected in such a way that the mirror does not substantially lengthen the laser pulse duration. In a particularly preferable manner, at least one of the mirrors is a chirped mirror with which the dispersion of all of the optics present in the beam path can be compensated in order to achieve optimally short pulses in the working focus.

[0066] FIG. 2 shows another embodiment example of the present laser working apparatus with surgical microscope. The construction corresponds essentially to the construction in FIG. 1. Identical parts are identified by the same reference numbers. In this example, a human eye is provided as material 90. This laser device, with which precise cuts can be made in the cornea of the human eye, will be described in detail by way of example. A circular surface which follows the curvature of the cornea and is centered with respect to the optical axis of the eye is to be cut inside the cornea with fs laser pulses. A cornea flap is formed from the circular surface to the outside of the cornea by an arc-shaped edge cut and can be opened to the side after the laser cut.

[0067] A flap of the kind mentioned above is used to prepare for a LASIK operation in which the thickness of the cornea is changed by laser ablation in such a way that refractive errors of the eye are compensated. Previously, this cut was carried out by a mechanical keratomy which requires a high level of training on the part of the physician and is fraught with risk. In addition, a refractive correction of the cornea can be carried out in the same work step through another curved circular surface which, together with the first circular surface of the flap, surrounds a lenticle that can be removed after opening the flap.

[0068] In the special embodiment of the invention, the eye is pressed by means of a suction ring 32 against a contact glass 31 which is either plane or preferably essentially adapted to the curvature of the cornea. The suction ring is fixedly connected with the outlet window of the laser device which provides for a defined position of the cornea relative to the laser focus. The expanded femtosecond laser beam is focused in the cornea by optics 24. A beam splitter which is highly reflective for the laser wavelength and transmits visible light reflects the laser beam in the beam path of a surgical microscope which is used for observing and centering the eye. The focusing optics 24 form a part of the microscope objective. Together with bundling optics, a real intermediate image of the cornea can be generated and can be observed three-dimensionally with the stereo eyepiece 80. The beam deflection unit 23 deflects the expanded laser beam 15 vertical to its propagation direction. Accordingly, the laser focus can be directed to different points in the cornea. The depth of focus can be varied by displacing the focusing optics 23 along the optical axis or by adapting the focal length of the focusing optics.

[0069] Circular paths are preferably traveled by the deflecting unit. For cutting the circular surface, the circle radius is reduced from circular path to circular path and the repetition rate is so adapted that a uniform spot distance is maintained. The depth of focus is adapted from circular path to circular path in such a way that the cut follows the curvature of the cornea. To perform astigmatic corrections of eyesight (cylindrical correction), the depth of focus can be moved up and down twice over the course of the circular path, so that a lenticle with a cylindrical lens portion is formed. For the flap edge, the depth of focus is slowly displaced from the base of the flap to the outside of the cornea while the radius remains fixed, so that a cylindrical jacket is formed. The laser beam must be interrupted on an arc-shaped segment of the circles described above in order to leave a hinge at which the prepared flap is held. For this purpose, laser pulses are simply coupled out of the radiation source 11.

[0070] The radiation source 11 is a femtosecond radiation source with the parameters described above which is preferably directly diode-pumped and therefore simple and reliable. The emitted laser beam 15 is preferably expanded to a 1- to 2-cm beam diameter by a Galileo telescope. A visible laser beam from a pilot laser 27 is superposed collinear to the expanded laser beam 15 and is then scanned and focused together with the working laser beam. For this purpose, the beam splitter 57 is transparent for the femtosecond laser wavelength and reflecting for the pilot beam.

[0071] The many possible cut shapes depend only on the scan algorithms. In principle, a laser device such as that described for a great many applications (for example, for refractive correction of vision) in which cuts or structural transformations are made within the transparent parts of the eye (cornea, lens, vitreous body) and on the nontransparent parts such as the sclera, iris and cilliary body are suitable. Accordingly, the invention by far surpasses existing technologies in universality and precision (avoidance of damage to surrounding tissue) even in this small sub-area of the application.

[0072] Application examples of cut geometries which can be realized with the laser system according to the invention are shown in FIGS. 3a to 3d. These applications are only given by way of example; any other geometries can be realized. The coherence of the material 90 is canceled (photodisruption) in the focus 16 of the laser. In general, this is brought about by a local vaporization of the material. After the action of the laser pulse, the material structure is canceled within a small volume, the cavitation bubble (also referred to as spot 16 in the following) permanently or for a period of time lasting at least until the end of the operating period. The use of a sharply focused femtosecond laser accordingly offers the most precise localization of the laser action. In the sharply defined focus volume, the material structure is accordingly destroyed while no change in the material takes place in general in the closely adjacent areas (distance of less than one micrometer). This results in a high working precision while avoiding damage to neighboring regions of material.

[0073] For cuts and structuring, a large number of individual spots which dissolve the material structure are placed close to one another. The distance between adjacent spots should be on the order of the spot diameter at the end of the procedure. In FIG. 3a, a predetermined volume (e.g., a bore hole in the material) is generated by completely filling the volume to be removed with individual spots 16. In a nontransparent material of this kind, one proceeds by layers beginning with the layer of spots facing the laser.

[0074] In FIG. 3b, only the edge of the bore hole is covered by spots. In this case, a cut is shown through the material. The spots 16 should be arranged in a rotationally symmetric manner around the axis Z shown in dashes. In this way, a drill core is generated in the middle of the material 90 to be worked. The drill core can be removed subsequently as a cohesive piece. The required quantity of laser pulses is accordingly considerably reduced compared to FIG. 3a particularly in large cross-sectional surfaces of the bore hole.

[0075] An undercut in a transparent material 90 is shown in FIG. 3c. Since the radiation is not absorbed by the material 90, cohesive pieces of material can be detached from the material by placing the spots on the edge of the cut when this material adjoins the surface.

[0076] FIG. 3d shows how voids or structures (e.g., changes in the optical characteristics) can be generated depending upon the makeup of the material.

[0077] For macroscopic cut shapes (in the centimeter range), several million laser spots are required just to cover only the cut surface (FIGS. 3b and 3c) with spots in a sufficient density. For many applications (particularly medical applications), it is advantageous to keep the working time or treatment time as short as possible. Therefore, according to the invention, the radiation source of the laser device is capable of delivering laser pulses with a high repetition rate. FIG. 4 shows a schematic section of a possible scan pattern in which the individual spots 16 worked by individual laser pulses are arranged along paths which can be traveled by the scanner in a continuous manner. In order to achieve a sufficiently great distance between spots at high repetition rates of the radiation source 11, the focus is moved very fast in at least one of three scanning dimensions. The scan algorithms are therefore preferably designed in such a way that the spots are placed along paths which correspond to the natural movements of the deflection unit. The movement in the other two dimensions can then be carried out relatively slowly. The natural paths of the deflection unit can be, e.g., circular paths which the deflection units can travel at fixed rotational frequencies. This can be carried out, e.g., by rotating optical elements in the deflection unit. The radius of the circular path and the depth of focus (Z-direction) are then the gradually variable scan quantities. This variant is particularly suitable when rotationally symmetric cut shapes must be generated. The repetition rate of the laser can then be put to particularly effective use when the rotational frequency of the circular paths is selected in such a way that the full repetition rate of the radiation source leads to the desired spot distance d in the largest circular paths (B) to be traveled. When the circular paths are smaller in radius (A) when traveling over the cut pattern, the repetition rate of the source can be correspondingly reduced, resulting again in the optimal spot distance. This adaptation of the repetition rate can easily be achieved with the laser radiation source described above. Adapting the rotational frequency to the repetition rate of the source can be more difficult in technical respects, particularly when this is carried out continuously for every circular path (A, B). However, for purposes of reducing the working time, it can be advantageous to adapt the rotational frequency to the smaller circular paths in a few steps.

[0078] In FIG. 5, possible sequences of laser pulses are shown in and outside an oscillator-amplifier arrangement. The rotational frequency of the laser pulses in the oscillator 40 depend only on the resonator length and is predetermined for a determined radiation source and is around 100 MHz with resonator lengths of a few meters. With the regenerative amplification shown here, the pulses 41 are coupled into the amplifier and amplified, for example. When a lower repetition rate is desired, the amplification of the pulses 43 is carried out. The repetition rate of the amplified laser pulses is changed in an economical manner in this way.

[0079] FIG. 6 shows a cut in the human cornea 107 with front side 100 and back side 101. The lenticle 103 is formed by the two surface cuts 104 and 105. A small lateral cut 102 which leads as far as the front surface 100 of the cornea makes it possible to extract the lenticle 103. This extraction is shown in FIG. 7. The remaining void collapses 106.

[0080] FIG. 8 shows the cornea in a top view. The border 111 of the lenticle 103 and the cuts 102 leading to the front surface of the cornea are shown in the drawing. The front surface of the cornea is severed along line 110 and makes it possible to extract the lens.

[0081] FIG. 9 shows another preferred form of making the cut. The lenticle is divided into two parts 123 ad 124 by a cut 122. Instead of an individual extraction cut 110, two extraction cuts 120 and 121 are made. Subsequently, the lens part 123 is removed through the extraction cut 120 and the lens part 124 is removed through the extraction cut 121.

[0082] FIG. 10 shows another expression of the method according to the invention. In this case, the lenticle bordered by the edge 111 is cut into many small fragments 132. These fragments 132 can now be sucked out by means of a cannula 133 which preferably has a diameter that is adapted to the fragment size. This process can be reinforced by a rinsing device via a second cannula 134 which is introduced into an oppositely located duct or even the same duct. The rinsing medium 136, 135 is preferably isotonic saline solution, but other solutions can also be used. This process achieves the minimum weakening of the cornea through these methods of refractive laser surgery.

[0083] The invention was described with reference to preferred embodiment examples. Further developments carried out by persons skilled in the art do not constitute a departure from the protective scope defined by the claims.

[0084] While this invention has been described in conjunction with the specific embodiments outlined above, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art. Accordingly, the preferred embodiments of the invention as set forth above are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit and scope of the inventions as defined in the following claims.