Chip with Protection Function and Method for Producing Same
20170011827 ยท 2017-01-12
Inventors
- Yasuharu MIYAUCHI (Graz, AT)
- Pavol Dudesek (Deutschlandsberg, AT)
- Christian Faistauer (Frauental, AT)
- Gerhard Fuchs (Steinerkirchen, AT)
- Stefan Obermair (Stainz, AT)
- Klaus-Dieter Aichholzer (Deutschlandsberg, AT)
- Christian Block (Stainz, AT)
- Sebastian BRUNNER (Graz, AT)
Cpc classification
H01L2924/0002
ELECTRICITY
H01C7/18
ELECTRICITY
H01L2924/0002
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L25/167
ELECTRICITY
International classification
H01C7/18
ELECTRICITY
Abstract
A chip and a method for manufacturing a chip are disclosed. In an embodiment, the chip includes a varistor layer composed of zinc oxide, a multilayered electrode structure which realizes a varistor function in the varistor layer and at least two solderable or bondable external contacts on a first main surface of the varistor layer. The chip further includes a glass layer disposed on the first main surface leaving only the external contacts uncovered, wherein the glass layer includes, as main constituents, oxides of Si and/or Ge, B and K, which in total have at least 70% by weight of the constituents of the glass layer, and wherein the glass layer is substantially free of Al, Ga, Cr and Ti.
Claims
1-13. (canceled)
14. A chip comprising: a varistor layer composed of zinc oxide; a multilayered electrode structure which realizes a varistor function in the varistor layer; at least two solderable or bondable external contacts on a first main surface of the varistor layer; and a glass layer disposed on the first main surface leaving only the external contacts uncovered, wherein the glass layer comprises, as main constituents, oxides of Si and/or Ge, B and K, which in total comprise at least 70% by weight of the constituents of the glass layer, and wherein the glass layer is substantially free of Al, Ga, Cr and Ti.
15. The chip according to claim 14, further comprising electrical connection pads on a second main surface of the varistor layer, the electrical connection pads configured to connect an electrical component.
16. The chip according to claim 15, wherein the external contacts and the connection pads are deposited electrolytically, and wherein the external contacts and the connection pads comprise at least one of Ni, Ag and Au.
17. An arrangement comprising: a chip according to claim 15; and an electrical component, wherein the electrical component is mounted on the second main surface of the varistor layer and is electrically connected to the connection pads, and wherein the electrical component is interconnected with the electrode structure and with the external contacts.
18. The arrangement according to claim 17, wherein the electrical component is an LED.
19. The chip according to claim 14, wherein the electrode structure comprises at least 4 electrode layers arranged one above another and alternately connected to the two external contacts.
20. The chip according to claim 14, wherein the glass layer is free of ZnO and Bi.sub.2O.sub.3.
21. The chip according to claim 14, wherein the glass layer contains a filler having a better thermal conductivity than quartz.
22. The chip according to claim 21, wherein the glass layer comprises solid filler particles composed of ZrO2.
23. The chip according to claim 14, wherein the glass layer contains, as further constituents, oxides of metals selected from Li, Na, Mg, Ca, Sr and Ba.
24. The chip according to claim 23, wherein the constituents Li and Na are contained in proportions of up to, in each case, a maximum of 5% by weight, and the others up to, in each case, a maximum of 15% by weight.
25. The chip according to claim 14, wherein the chip comprises a maximum thickness of 1000 m.
26. The chip according to claim 14, wherein the chip comprises a maximum thickness of 500 m.
27. The chip according to claim 14, wherein the chip comprises a maximum thickness of 250 m.
28. A method for producing a chip, the method comprising: producing a stack by stacking green sheets composed of a ZnO one above another, the green sheets comprising a print with an electrode material; sintering the stack of green sheets thereby forming a varistor layer having a multilayered electrode structure; printing a metallization paste on a first and/or a second main surface of the varistor layer for defining external contacts and/or connection pads; printing a glass paste thereon in a structured manner such that areas provided for the external contacts and/or the connection pads remain uncovered; firing and sintering the metallization paste and the glass paste thereby producing a metallization and a structured glass layer, wherein the glass layer comprises, as main constituent, oxides of Si and/or Ge, B and K, which in total comprise at least 70% by weight of the constituents of the glass layer, and wherein the glass layer is substantially free of Al, Ga, Cr and Ti; and reinforcing electrolytically or electroless regions of the metallization which are provided for the external contacts and/or the connection pads and which are not covered by the glass layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0029] The invention is explained in greater detail below on the basis of exemplary embodiments and the associated figures. The figures serve merely for illustrating the invention and are therefore not represented as true to scale. Therefore, neither absolute nor relative dimensional indications can be inferred from the figures.
[0030] In the figures:
[0031]
[0032]
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[0036]
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DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
[0043]
[0044]
[0045]
[0046]
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[0048]
[0049]
[0050] In order to produce this green sheet, a zinc oxide powder is finely ground, provided with a dopant and once again homogeneously mixed and ground. If appropriate, a glass forming agent is added in order to set the sintering temperature to a desired value. A certain shapability and cohesion of the green sheet is ensured with the aid of an organic binder. The green sheet can be shaped by sheet drawing, casting or any other conventional technique.
[0051] The second green sheet GF2 is printed with an electrode material which can be sintered to form an electrode layer ES2. Furthermore, at least two plated-through holes DK are provided in said green sheet, said plated-through holes being produced, for example, by holes being stamped into the green sheet. Afterward the plated-through holes are filled with a conductive compound, usually with the electrode material.
[0052] The third green sheet GF3 illustrated is similar to the second green sheet, but the plated-through holes and the structure of the printed electrode material in both green sheets GF2, GF3 are applied in a horizontally mirrored fashion in order to connect the respective electrode layer ES in the varistor to different plated-through holes and thus to different contacts.
[0053]
[0054] In order to achieve the necessary current-carrying capacity, an expedient varistor, that is to say a chip with varistor function, generally comprises a plurality of electrode layers alternately connected to different contacts. In the illustrated stack, the electrode layers are alternately assigned to two plated-through holes arranged congruently or in an overlapping manner in the stack in order to ensure a continuous line of conduction through to a main surface, here the first main surface. As the topmost layer, here a green sheet without any plated-through hole and without an electrode layer is applied, which serves for covering the inner electrode layers ES.
[0055] It goes without saying that it is also possible to use green sheets having plated-through holes which, from the second main surface, too, enable an excess to inner electrode layers or the later external contacts on the first main surface.
[0056] In the next step, the stack of green sheets placed one above another and possibly pressed is sintered, the chip arising as a solid monolithic composite made from the originally separate green sheets. The binder burns out completely and metallic electrode layers, the ceramic varistor layer and purely metallic plated-through holes remain in the chip.
[0057] The varistor layer VS obtained after sintering is then provided with a metallization M for the external contacts AK. For this purpose, a metallization paste is printed onto the corresponding main surface such that the metallization is in contact with a respective plated-through hole DK.
[0058] Afterward, a layer of a glass-containing paste with the specifications already mentioned is printed onto the first main surface such that only the metallizations M provided for the external contacts continue not to be covered by the glass paste layer. This can be carried out by screen printing or some other spatially resolving method. Afterward, the entire arrangement is subjected to a further sintering process, wherein a fixedly adhering metallization and the now impermeable and likewise fixedly adhering glass layer GS are obtained.
[0059] Alternatively, the metallization paste can be fired before the glass paste is applied, and the glass layer can be fired separately in a further sintering process.
[0060]
[0061] In the next step, the metallizations M that have hitherto only been printed and fired are reinforced electrolytically or in an electroless manner in order to obtain solderable surfaces. For this purpose, conventional standardized electroplating baths are used, which are usually set up to be basic or acidic.
[0062] Suitable depositable metals for the external contacts AK, which can also be used for the connection pads AF, comprise nickel and gold and/or nickel and silver layers. However, other metallizations comprising other metals and, if appropriate, further layers can also be applied electrolytically or in an electroless manner, without the properties of the chips CH, in particular the varistor function, being detrimentally affected thereby.
[0063]
[0064] Although only the production of external contacts AK, that is to say of solderable metallizations on a first main surface of the chip, has been described in the figures, nevertheless connection pads AF can also be produced on the second main surface of the chip in the same way and in parallel with the external contacts AK.
[0065] In one exemplary embodiment, a glass paste having the following composition is chosen for producing the glass layer GS: 78% by weight SiO.sub.2, 19% by weight B.sub.2O.sub.3 and 3% by weight K.sub.2O. Such a glass has a softening point of 775 C. and, after sintering, has a coefficient of thermal expansion of approximately 2.8 ppm/K. Firstly, however, a glass paste is produced from the glass powder or the finely distributed and homogeneously mixed oxides. In parallel therewith a varistor layer VS is processed up to the method stage illustrated in
[0066] At this stage, the varistor properties are determined for comparison purposes. Afterward, the glass paste is printed and fired and the varistor is measured again.
[0067] It is found that the varistor voltage remains unchanged and that the leakage current does not exceed the permissible current intensities and is less than 0.1 A in the exemplary embodiment.
[0068] An electroplating is subsequently carried out on the test components in order to thicken the metallizations M to the desired layer thickness of the external contacts AK and connection pads AF. A further determination of the varistor values at this method stage shows that the electroplating had no negative effects whatsoever on the varistor properties.
[0069] This proves that the varistor function is not adversely influenced by the printed and fired glass layer nor is the varistor layer damaged by the subsequent electroplating bath.
[0070] In a parallel experiment, a glass paste is used in which 15% by volume of zirconium oxide powder is added as filler to the glass composition. This glass layer is also fired at approximately 850 C. An electrical measurement of the chip reveals that here, too, the varistor function or the electrical varistor properties are not altered negatively.
[0071] With the chip according to the invention it is possible to realize a varistor which has a varistor voltage in the range of approximately 10 V with a structural size of, for example, 1.21.2 mm.sup.2 and a layer thickness of 250 m. The clamping voltage U.sub.c (residual voltage) is typically at the maximum of 100 V in the case of a standardized 8 kV pulse. This shows that the chip with the varistor function can manifest an excellent protective effect even with this small structural size. As a result of the high thermal conductivity, the small structural size and the contacts that are structurable without any problems, the chip can be used as a substrate for electrical components such as for LEDs, for example.
[0072]
[0073] In
[0074] In
[0075] In this interconnection, which is preferably realized in an arrangement in accordance with
[0076] The invention is not restricted to the structures and methods illustrated in the exemplary embodiments. In particular, the electrode structure of the varistor layer can have an arbitrary number of electrode layers and an arbitrary structuring. The number of green sheets, plated-through holes, external contacts and connection pads can also be chosen arbitrarily and be adapted to the requirements for a desired use. Only external contacts or both external contacts and connection pads may be provided, which individually and independently of one another may or may not be connected to the electrode structure.