Substrate structure and manufacturing method thereof
09538647 ยท 2017-01-03
Assignee
Inventors
Cpc classification
H01L21/486
ELECTRICITY
H05K2201/0145
ELECTRICITY
H05K2201/035
ELECTRICITY
H05K3/007
ELECTRICITY
H01L21/48
ELECTRICITY
H05K2201/09063
ELECTRICITY
H01L2924/15151
ELECTRICITY
H05K1/115
ELECTRICITY
H05K2203/0214
ELECTRICITY
H01L2221/68318
ELECTRICITY
H01L23/49827
ELECTRICITY
H01L23/498
ELECTRICITY
Y10T156/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L21/84
ELECTRICITY
H05K3/00
ELECTRICITY
H01L21/48
ELECTRICITY
H05K1/11
ELECTRICITY
H01L23/498
ELECTRICITY
Abstract
A substrate structure is provided. The substrate structure includes a substrate and a carrier. The substrate includes a first through hole, a first surface and a second surface opposite to the first surface. The first through hole penetrates the substrate for connecting the first surface and the second surface. The carrier includes a second through hole, a release layer, an insulating paste layer and a metal layer. The insulating paste layer is disposed between the release layer and the metal layer. The carrier is attached to the second surface with the release layer thereof. The second through hole corresponds to the first through hole and penetrates the carrier for exposing the first through hole.
Claims
1. A substrate structure, comprising: a substrate, comprising a dielectric layer, a plurality of pads, a patterned solder mask, a first through hole, a first surface, and a second surface opposite to the first surface, the plurality of pads being respectively disposed on two opposite surfaces of the dielectric layer, the patterned solder mask covering the two opposite surfaces and exposing the plurality of pads, wherein the first through hole penetrates the substrate for connecting the first surface and the second surface and the first through hole penetrates the dielectric layer and the patterned solder mask; and a carrier, comprising a second through hole, a release layer, an insulating paste layer, and a metal layer, wherein the insulating paste layer is disposed between the release layer and the metal layer, the carrier is attached to the second surface by attaching the release layer to the second surface and contacting the release layer with the patterned solder mask, the second through hole corresponds to the first through hole and penetrates the carrier for exposing the first through hole, and a smallest diameter of the second through hole is greater than a largest diameter of the first through hole.
2. The substrate structure as claimed in claim 1, wherein a material of the release layer comprises polyethylene terephthalate (PET) or polyimide (PI) film.
3. The substrate structure as claimed in claim 1, wherein a material of the insulating paste layer comprises prepreg (PP).
4. The substrate structure as claimed in claim 1, wherein the metal layer comprises a copper foil layer.
5. The substrate structure as claimed in claim 1, wherein the substrate is a single-layer circuit board.
6. The substrate structure as claimed in claim 1, wherein the substrate is a multi-layer circuit board.
7. The substrate structure as claimed in claim 1, wherein the substrate further comprises a plurality of vias, each of the vias connecting the corresponding pads disposed on the two opposite surfaces.
8. The substrate structure as claimed in claim 1, further comprising: a surface finishing layer, covering the plurality of pads.
9. A manufacturing method of a substrate structure, comprising: providing a substrate comprising a dielectric layer, a plurality of pads, a patterned solder mask, a first surface and a second surface opposite to the first surface, the plurality of pads being respectively disposed on two opposite surfaces of the dielectric layer, the patterned solder mask covering the two opposite surfaces and exposing the plurality of pads; forming a first through hole on the substrate, wherein the first through hole penetrates the substrate for connecting the first surface and the second surface and the first through hole penetrates the dielectric layer and the patterned solder mask; providing a carrier comprising a release layer, an insulating paste layer, and a metal layer, wherein the insulating paste layer is disposed between the release layer and the metal layer; forming a second through hole on the carrier, wherein the second through hole penetrates the carrier, and a smallest diameter of the second through hole is greater than a largest diameter of the first through hole; and laminating the substrate on the release layer of the carrier, so that the release layer contacts the patterned solder mask, wherein a position of the second through hole corresponds to a position of the first through hole for exposing the first through hole.
10. The manufacturing method of the substrate structure as claimed in claim 9, wherein the method of forming the first through hole and the second through hole comprises mechanical drilling.
11. The manufacturing method of the substrate structure as claimed in claim 9, wherein a material of the release layer comprises polyethylene terephthalate (PET) or polyimide (PI) film.
12. The manufacturing method of the substrate structure as claimed in claim 9, wherein a material of the insulating paste layer comprises prepreg.
13. The manufacturing method of the substrate structure as claimed in claim 9, wherein the metal layer comprises a copper foil layer.
14. The manufacturing method of the substrate structure as claimed in claim 9, wherein the method of providing the carrier further comprises: forming the carrier by laminating the release layer, the insulating paste layer, and the metal layer.
15. The substrate structure as claimed in claim 1, wherein the first though hole is adjacent to the pads.
16. The manufacturing method of the substrate structure as claimed in claim 9, wherein the first through hole is adjacent to the pads.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
(2)
DESCRIPTION OF THE EMBODIMENTS
(3) Reference will now be made in detail to the present preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
(4) It is to be understood that both of the foregoing and other detailed descriptions, features, and advantages are intended to be described more comprehensively by providing embodiments accompanied with figures hereinafter. In the following embodiments, wordings used to indicate directions, such as up, down, front, back, left, and right, merely refer to directions in the accompanying drawings. Therefore, the directional wording is used to illustrate rather than limit the invention. In addition, like or similar elements will be referred to by using like or similar reference numeral.
(5)
(6) In addition, the substrate 110 may further include a surface finishing layer 118 covering the pads 115 exposed by the solder mask 117. A material of the surface finishing layer 118 may include a copper-base alloy, a nickel-base alloy, a palladium-base alloy, platinum-base alloy, a silver-base alloy, a gold-base alloy, a titanium-base alloy, or any combination thereof.
(7) Referring to
(8) Then, referring to
(9) Then, referring to
(10) Then, referring to both
(11) The substrate structure 100 shown in
(12) In view of the foregoing, the thickness of the substrate according to the embodiments of the invention is rather thin, therefore, to prevent the substrate from cracking during the packaging process, the substrate is laminated on the carrier having the release layer, so as to increase an overall rigidity of the substrate structure. In addition, the substrate may be easily separated from the carrier after the manufacturing process is finished by taking advantage of the characteristic of the release layer being easily stripped from the substrate.
(13) Moreover, the substrate according to the embodiments of the invention further includes the first through hole that may serve as a gas aperture for ventilation or a sound hole for resonance. Meanwhile, the second through hole corresponding to the first through hole is formed on the carrier. In this way, the first through hole of the substrate may be exposed by the carrier through the second through hole after the substrate is disposed on the carrier. Accordingly, in a subsequent thermal compression process or other high temperature processes, gas in the first through hole may be easily discharged from the second through hole without being accumulated between the substrate and carrier or pushing the carrier away due to thermal expansion, which may weaken the bonding strength between the substrate and the carrier and make the substrate separated from the carrier. Therefore, the substrate structure according to the embodiments of the invention not only meets special requirements for a substrate having special functions but also increases a yield rate of the substrate structure.
(14) It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.