LIFTING HEAD AND LIFTING DEVICE

Abstract

A lifting head comprises a base member that has a suctioned surface, a raising/lowering shaft supported by the base member and having a raising/lowering axial channel, a contact member fixed to one end of the raising/lowering shaft and contacting with a raising/lowering drive mechanism of a lifting device, a needle support member fixed to the other end of the raising/lowering shaft and supporting a needle, and a needle cap having a stage at one end thereof and fixed to the base member. The suctioned surface of the base member is gripped by a suction force of a first negative pressure passage of an attachment member of the lifting device. While the contact member contacts with the raising/lowering drive mechanism, an inside of the needle cap is suctioned by a suction force of a second negative pressure passage of the raising/lowering drive mechanism via the raising/lowering axial channel.

Claims

1. A lifting head configured to lift, with a needle, at least one of a plurality chips attached to a holding sheet, in a lifting device of a semiconductor manufacturing apparatus, the lifting head comprising: a base member that is configured to be detachably attached with respect to an attachment member of the lifting device, and that has a suctioned surface that is configured to be gripped onto the attachment member; a raising/lowering shaft that is supported by the base member in a state of being movable in an axial direction as well as being non-rotatable about an axis, and that has a raising/lowering axial channel that communicates from one end to the other end in the axial direction; a contact member that is fixed to the one end of the raising/lowering shaft in a state in which the raising/lowering axial channel is in communication with an outside, and that is configured to contact with, from a raising/lowering direction, a push-up member of a raising/lowering drive mechanism of the lifting device; a needle support member that is fixed to the other end of the raising/lowering shaft in a state in which the raising/lowering axial channel is in communication with the outside, and that supports the needle in the axial direction so as to be detachable; and a needle cap that has a tubular shape and that has, at one end thereof, a stage on which the holding sheet is configured to be placed and to which is provided a through-hole through which the needle is inserted, the needle cap being fixed, at the other end thereof, to the base member so that, while the needle support member and the needle are located therein, the through-hole overlaps with the needle when viewed in the axial direction, the suctioned surface of the base member being configured to be gripped by a suction force of a first negative pressure passage of the attachment member in a state of being positioned on the attachment member, and while the contact member contacts with the raising/lowering drive mechanism, an inside of the needle cap is configured to be suctioned by a suction force of a second negative pressure passage of the raising/lowering drive mechanism via the raising/lowering axial channel.

2. The lifting head according to claim 1, further comprising a tubular suction elastic member that is fixedly coupled to one of the raising/lowering shaft and the contact member so as to communicate with the raising/lowering axial channel, the suction elastic member being configured to communicate with the second negative pressure passage while the contact member contacts with a push-up member of the raising/lowering drive mechanism.

3. The lifting head according to claim 1, further comprising a pressing elastic member that is configured to press the contact member toward the push-up member of the raising/lowering drive mechanism, the contact member being configured to be pressed against the push-up member of the raising/lowering drive mechanism by the pressing elastic member.

4. The lifting head according to claim 1, wherein the base member has an arm engagement portion that is configured to engage with a replacement arm of the lifting device.

5. A lifting device configured to raise/lower the needle of the lifting head according to claim 1, comprising: an attachment member to which the lifting head is configured to be detachably attached; a raising/lowering drive mechanism that is configured to raise/lower the contact member of the lifting head; and a lifting head replacement mechanism that is configured to attach/detach the lifting head to/from the attachment member, the attachment member having a first negative pressure passage that is configured to be suctioned by a vacuum source, to apply suction force to the suctioned surface of the base member while the base member of the lifting head is attached to the attachment member, and the raising/lowering drive mechanism having a push-up member that is configured to push up the contact member of the lifting head and a second negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to the inside of the needle cap of the lifting head via the raising/lowering axial channel of the lifting head while the contact member of the lifting head contacts with the push-up member.

6. The lifting device according to claim 5, further comprising a tubular suction elastic member that is fixedly coupled to an opening of the second negative pressure passage to communicate with the second negative pressure passage, the suction elastic member being configured to communicate with the raising/lowering axial channel of the lifting head while the contact member of the lifting head contacts with the push-up member.

7. The lifting device according to claim 5, wherein the lifting head replacement mechanism has a plurality of replacement arms, that are respectively configured to hold lifting heads, a one of the replacement arms holding a selected lifting head being configured to attach the selected lifting head onto the attachment member, and another one of the replacement arms corresponding to a lifting head that has been attached to the attachment member being configured to remove the lifting head from the attachment member.

8. The lifting head according to claim 2, further comprising a pressing elastic member that is configured to press the contact member toward the push-up member of the raising/lowering drive mechanism, the contact member being configured to be pressed against the push-up member of the raising/lowering drive mechanism by the pressing elastic member.

9. The lifting head according to claim 2, wherein the base member has an arm engagement portion that is configured to engage with a replacement arm of the lifting device.

10. The lifting head according to claim 3, wherein the base member has an arm engagement portion that is configured to engage with a replacement arm of the lifting device.

11. A lifting device configured to raise/lower the needle of the lifting head according to claim 2, comprising: an attachment member to which the lifting head is configured to be detachably attached; a raising/lowering drive mechanism that is configured to raise/lower the contact member of the lifting head; and a lifting head replacement mechanism that is configured to attach/detach the lifting head to/from the attachment member, the attachment member having a first negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to the suctioned surface of the base member while the base member of the lifting head is attached to the attachment member, and the raising/lowering drive mechanism having a push-up member that is configured to push up the contact member of the lifting head and a second negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to an inside of the needle cap of the lifting head via the raising/lowering axial channel of the lifting head while the contact member of the lifting head contacts with the push-up member.

12. A lifting device configured to raise/lower the needle of the lifting head according to claim 3, comprising: an attachment member to which the lifting head is configured to be detachably attached; a raising/lowering drive mechanism that is configured to raise/lower the contact member of the lifting head; and a lifting head replacement mechanism that is configured to attach/detach the lifting head to/from the attachment member, the attachment member having a first negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to the suctioned surface of the base member while the base member of the lifting head is attached to the attachment member, and the raising/lowering drive mechanism having a push-up member that is configured to push up the contact member of the lifting head and a second negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to an inside of the needle cap of the lifting head via the raising/lowering axial channel of the lifting head while the contact member of the lifting head contacts with the push-up member.

13. A lifting device configured to raise/lower the needle of the lifting head according to claim 4, comprising: an attachment member to which the lifting head is configured to be detachably attached; a raising/lowering drive mechanism that is configured to raise/lower the contact member of the lifting head; and a lifting head replacement mechanism that is configured to attach/detach the lifting head to/from the attachment member, the attachment member having a first negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to the suctioned surface of the base member while the base member of the lifting head is attached to the attachment member, and the raising/lowering drive mechanism having a push-up member that is configured to push up the contact member of the lifting head and a second negative pressure passage that is configured to be suctioned by a vacuum source to apply suction force to an inside of the needle cap of the lifting head via the raising/lowering axial channel of the lifting head while the contact member of the lifting head contacts with the push-up member.

14. The lifting device according to claim 6, wherein the lifting head replacement mechanism has a plurality of replacement arms that are respectively configured to hold lifting heads, one of the replacement arms holding a selected lifting head being configured to attach the selected lifting head onto the attachment member, and another one of the replacement arms corresponding to a lifting head that has been attached to the attachment member being configured to remove the lifting head from the attachment member.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0033] FIG. 1 is a perspective view of a lifting head according to an embodiment of the present disclosure.

[0034] FIG. 2 is a cross-sectional view of the lifting head and a lifting device according to the embodiment of the present disclosure as viewed from a direction perpendicular to the raising/lowering direction.

[0035] FIG. 3 is a cross-sectional view of the lifting head and the lifting device according to the embodiment of the present disclosure, in a state in which a needle of the lifting head is positioned at a lowered position, as viewed from a direction perpendicular to the raising/lowering direction.

[0036] FIG. 4 is a cross-sectional view of the lifting head and the lifting device according to the embodiment of the present disclosure, in a state in which a needle of the lifting head is positioned at a raised position, as viewed from a direction perpendicular to the raising/lowering direction.

[0037] FIG. 5 is a plan view showing a state in which the lifting device according to the embodiment of the present disclosure is holding a plurality of lifting heads with a lifting head replacement mechanism.

[0038] FIG. 6 is a side view showing a state in which the lifting device according to the embodiment of the present disclosure has attached the lifting head to the attachment member.

DETAILED DESCRIPTION OF EMBODIMENTS

[0039] An exemplary embodiment of the present disclosure will be described in detail below, with reference to the drawings. Identical or corresponding parts in the drawings have been assigned the same reference numerals, and explanations thereof are not repeated. In addition, the dimensions of the component members in the drawings do not faithfully represent the actual dimensions of the component members or the dimensional ratios of each component member. In the explanation of the lifting head 1, which is an exemplary embodiment of the present disclosure, the direction parallel to the axis of the raising/lowering shaft is referred to as the raising/lowering direction, up-down direction, or the Z direction, the two directions that are perpendicular to the axis of the raising/lowering shaft and that are perpendicular to each other are referred to as X direction and the Y direction, and the rotation direction around the axis of the raising/lowering shaft is referred to as the circumferential direction. However, definitions of these directions are not intended to limit the orientation of the lifting head 1 during use.

Lifting Head 1

[0040] The lifting head 1, which lifts at least one semiconductor chip C (refer to FIG. 3) will be described, with reference to FIGS. 1 and 2. FIG. 1 is a perspective view of the lifting head 1. FIG. 2 is a cross-sectional view of the lifting head 1 and a lifting device 10 as viewed from a direction perpendicular to the raising/lowering direction.

[0041] As shown in FIGS. 1 and 2, the lifting head 1 is a jig that lifts up a given semiconductor chip C from a plurality of semiconductor chips C attached to a holding sheet S (refer to FIG. 3). The lifting head 1 is attached to the lifting device 10 so as to be detachable (refer to FIG. 2). The lifting head 1 comprises a base member 2, a spline nut 3, a spline shaft 4, a contact member 5, a compression spring 6, a needle support member 7, needles 8, and a needle cap 9.

[0042] As shown in FIG. 2, the base member 2 is a member that is fitted into an attachment member 16 of the lifting device 10. The base member 2 is a hollow cylindrical member. One end surface of the base member 2 constitutes a suctioned surface 2a that is gripped onto the attachment member 16 of the lifting device 10. In addition, one end surface of the base member 2 has a cylindrical base member fitting portion 2b that protrudes in the axial direction. The base member fitting portion 2b is configured to be attachable to/detachable from a base member fitting hole 16c of the attachment member 16. The base member fitting portion 2b that is fitted into the base member fitting hole 16c determines the position of the base member 2 in the X direction and the Y direction with respect to the attachment member 16. Furthermore, one end surface of the base member 2 is provided with a base member positioning pin groove 2c that extends in the radial direction. The base member positioning pin groove 2c is configured such that a base member positioning pin 16d of the attachment member 16 can be attached thereto/detached therefrom. The circumferential position of the base member 2 with respect to the attachment member 16 is determined by the base member positioning pin groove 2c into which the base member positioning pin 16d is fitted.

[0043] The other end surface of the base member 2 constitutes an attachment surface 2d to which the needle cap 9 is fixed. In addition, the other end surface of the base member 2 has an annular needle cap fitting portion 2e that protrudes in the axial direction. The needle cap fitting portion 2e is configured such that the needle cap 9 can be attached thereto/detached therefrom. The center of the needle cap fitting portion 2e overlaps with the center of the base member fitting portion 2b when viewed in the axial direction. That is, the needle cap fitting portion 2e is configured to be concentric with the base member fitting portion 2b when viewed in the axial direction. In the base member 2, the position of the needle cap 9 in the X direction and the Y direction with respect to the base member 2 is determined by the needle cap fitting portion 2e that fits into the needle cap 9. Furthermore, the attachment surface 2d of the base member 2 has a needle cap positioning pin 2f. The needle cap positioning pin 2f is configured to be attachable to/detachable from a needle cap positioning pin groove 9d of the needle cap 9. In the base member 2, the circumferential position of the needle cap 9 with respect to the base member 2 is determined by the needle cap positioning pin 2f that fits into the needle cap positioning pin groove 9d.

[0044] The base member 2 has an arm engagement portion 2g with which a replacement arm 18 of the lifting device 10 engages. The arm engagement portion 2g is the portion with which the replacement arm 18 of the lifting device 10 engages. The arm engagement portion 2g is configured by forming recesses in the radial direction in portions of the outer circumferential surface of the base member 2 that face each other across the axis of the base member 2. A side surface of the arm engagement portion 2g on the needle cap 9 side, which is the upper side surface, is configured as a replacement arm contact surface 2h with which the upper surface of the replacement arm 18 comes into contact. The base member 2 is held by the replacement arm 18 by the upper surface of the replacement arm 18 coming in contact with the replacement arm contact surface 2h from below. In addition, the arm engagement portion 2g has a pair of projecting portions 2i at positions facing each other across the axis. The pair of projecting portions 2i are configured to engage with the replacement arm 18. The base member 2 is configured to be capable of being held by the replacement arm 18 in a state in which the movement thereof in the X direction and the Y direction with respect to the replacement arm 18 is restricted by the replacement arm contact surface 2h and the projecting portions 2i.

[0045] The spline nut 3 is a component that supports the spline shaft 4, which is the raising/lowering shaft, so as to be movable in the axial direction and to be immovable around the axis. The spline nut 3 supports the spline shaft 4 via undiagrammed rolling elements. The spline nut 3 is fixed inside the base member 2 such that the axis of the spline shaft 4, which the spline nut 3 supports, coincides with the axis of the base member 2. That is, the spline shaft 4 is supported by the base member 2 at the center of the base member 2 so as to be movable up and down in the axial direction, and to be rotationally fixed around the axis. The spline shaft 4 is a hollow shaft having a raising/lowering axial channel 4a that extends in the axial direction and that communicates from one end to the other end.

[0046] The contact member 5 is a member that comes in contact with the raising/lowering drive mechanism 11 in the lifting device 10. The contact member 5 is a disk-shaped member having a larger outer diameter than the outer diameter of the spline shaft 4. The contact member 5 is fixed to one end of the spline shaft 4 on the lifting device 10 side. In addition, the contact member 5 is positioned on the lifting device 10 side of the base member 2. The spline shaft 4 passes through the contact member 5. That is, the contact member 5 does not block the raising/lowering axial channel 4a of the spline shaft 4. An end surface of the contact member 5 is configured so as to be capable of coming in contact with a push-up member 14 of the raising/lowering drive mechanism 11.

[0047] The compression spring 6, which is a pressing elastic member, is an elastic member that presses the contact member 5 against the push-up member 14 of the raising/lowering drive mechanism 11. The compression spring 6 is positioned between the base member 2 and the contact member 5. One end of the compression spring 6 is in contact with the contact member 5. The other end of the compression spring 6 is in contact with the base member 2. The compression spring 6 applies a force to the base member 2 for pressing the contact member 5 toward the raising/lowering drive mechanism 11 of the lifting device 10, in a state in which the gap between the base member 2 and the contact member 5 is smaller than the natural length of the spring 6.

[0048] The needle support member 7 is a member that supports the needles 8 in a prescribed arrangement. The needle support member 7 is a columnar member having an outer diameter that is larger than the outer diameter of the spline shaft 4 and smaller than the inner diameter of the needle cap 9. The needle support member 7 is fixed to the other end of the spline shaft 4 on the needle cap 9 side. The other end of the spline shaft 4 is inserted into one end of the needle support member 7. The needle support member 7 has a needle support member flow channel 7a that connects the raising/lowering axial channel 4a and the outside. The needle support member flow channel 7a extends in the radial direction of the needle support member 7 and connects the raising/lowering axial channel 4a with the outside.

[0049] The needle support member 7 has, at the other end thereof, a plurality of needle holding holes that hold the needles 8. The plurality of needle holding holes extend in the axial direction of the spline shaft 4. The plurality of needle holding holes are configured such that the proximal ends of the needles 8 can be inserted therein in the axial direction. In addition, the plurality of needle holding holes are configured such that the proximal ends of the needles 8 can be attached thereto/detached therefrom. Thus, the needle support member 7 can hold the needles 8 in a state in which the axes of the needles 8 are aligned with the axis of the spline shaft 4 by the needle holding holes.

[0050] The needles 8 are rod-like members that lift a prescribed semiconductor chip C from among a plurality of semiconductor chips C on the holding sheet S. When viewed in the axial direction, the needles 8 are configured such that the projected areas of the distal ends are smaller than the cross sectional area of the semiconductor chip C to be lifted. In addition, the needles 8 are configured such that the proximal ends can be attached to/detached from the plurality of needle holding holes of the needle support member 7 in the axial direction. The needles 8 are disposed at positions on the needle support member 7 corresponding to the position of the semiconductor chip C to be lifted.

[0051] The needle cap 9 is a tubular member that covers the needle support member 7 as well as the needles 8 and that constitutes a stage 9a on which the semiconductor chip C is placed. The needle cap 9 is a cylindrical member that has, on one end, the stage 9a on which the semiconductor chip C is placed, and that is open on the other end. The stage 9a is a planar surface that is perpendicular to the axis of the needle cap 9. The stage 9a has a plurality of stage through-holes 9b that suction the holding sheet S onto which the semiconductor chip C is attached, or through which the needles 8 pass. The needle cap 9 has, at the other end, an annular fixing flange 9c that extend in the radial direction. The fixing flange 9c has the needle cap positioning pin groove 9d. In addition, the inner diameter of the fixing flange 9c is configured such that the needle cap fitting portion 2e of the base member 2 can be fitted therein.

[0052] In the needle cap 9, the fixing flange 9c is fixed to the attachment surface 2d of the base member 2. At this time, in the needle cap 9, the needle cap fitting portion 2e of the base member 2 is fitted into the annular fixing flange 9c. The fixing flange 9c into which the needle cap fitting portion 2e is fitted determines the position of the needle cap 9 in the X direction and the Y direction with respect to the base member 2. In addition, in the needle cap 9, the needle cap positioning pin 2f of the base member 2 is fitted into the needle cap positioning pin groove 9d. The needle cap positioning pin groove 9d into which the needle cap positioning pin 2f is fitted determines the circumferential position of the needle cap 9 with respect to the base member 2.

[0053] In addition, the needle cap 9 is fixed to the base member 2 in a state in which the needle support member 7 and the needles 8 are positioned therein. That is, the needle cap 9 covers the needle support member 7 and the needles 8. At this time, the stage through-holes 9b of the needle cap 9 overlap with the needles 8 when viewed in the axial direction of the spline shaft 4. In addition, the inside of the needle cap 9 is in communication with the raising/lowering axial channel 4a of the spline shaft 4 via the needle support member flow channel 7a of the needle support member 7.

[0054] In the lifting head 1 configured in this manner, the X-direction and Y-direction positions of the spline nut 3 and the spline shaft 4, as well as the positions thereof about the axis of the spline shaft 4, are determined relative to the base member 2. In addition, in the lifting head 1, the X-direction and Y-direction positions of the needle support member 7 and the needles 8, as well as the positions thereof about the axis of the spline shaft 4, are determined relative to the spline shaft 4. That is, in the lifting head 1, the X-direction and Y-direction positions of the needle support member 7 and the needles 8, as well as the positions thereof about the axis of the spline shaft 4, are determined relative to the base member 2. In addition, in the lifting head 1, the X-direction and Y-direction position of the needle cap 9, as well as the position thereof about the axis of the spline shaft 4, are determined relative to the base member 2. In addition, in the lifting head 1, the spline nut 3, the spline shaft 4, the needle support member 7, the needles 8, and the needle cap 9 are supported by the base member 2. In this manner, the lifting head 1 is configured to be integrally detachable as a single unit that includes the base member 2, the spline nut 3, the spline shaft 4, the needle support member 7, the needles 8, and the needle cap 9.

[0055] In addition, in the lifting head 1, the contact member 5 is moved in the axial direction of the spline shaft 4, thereby moving the needle support member 7 and the needles 8, which are fixed to the spline shaft 4, in the axial direction. In the lifting head 1, when the contact member 5 is in the raised position, the needles 8 are inserted into the stage through-holes 9b of the needle cap 9. As a result, in the lifting head 1, the distal ends of the needles 8 protrude from the stage 9a by a prescribed amount. In the lifting head 1, when the contact member 5 is in the lowered position, the needles 8 come out of the stage through-holes 9b of the needle cap 9. As a result, in the lifting head 1, the distal ends of the needles 8 does not protrude from the stage 9a.

Lifting Device 10

[0056] An exemplary first embodiment of the lifting device that lifts the lifting head 1 according to the present invention will be described next, with reference to FIGS. 2 to 6. FIG. 3 is a cross-sectional view of the lifting head 1 and the lifting device 10, in a state in which the needles 8 of the lifting head 1 are positioned at a lowered position P1, as viewed from a direction perpendicular to the raising/lowering direction. FIG. 4 is a cross-sectional view of the lifting head 1 and the lifting device 10, in a state in which the needles 8 of the lifting head 1 are positioned at a raised position P2, as viewed from a direction perpendicular to the raising/lowering direction. FIG. 5 is a plan view showing a state in which the lifting device 10 is holding a plurality of the lifting heads 1 with a lifting head replacement mechanism 17. FIG. 6 is a side view showing a state in which the lifting device 10 has attached the lifting head 1 to the attachment member 16.

[0057] As shown in FIGS. 2 to 4, the lifting device 10 included in the semiconductor manufacturing apparatus is a device for moving the needles 8 of the lifting head 1 in the axial direction. The lifting device 10 comprises the raising/lowering drive mechanism 11, the attachment member 16, and the lifting head replacement mechanism 17.

[0058] The raising/lowering drive mechanism 11 is a mechanism for raising and lowering the needles 8 of the lifting head 1. The raising/lowering drive mechanism 11 is provided in an undiagrammed semiconductor manufacturing apparatus. The raising/lowering drive mechanism 11 has an undiagrammed electric motor, which is an actuator, a power conversion device 13, the push-up member 14, and a suction elastic member 15.

[0059] The electric motor is a servo motor capable of being rotated at any rotational position, rotational speed, and rotational torque. The electric motor is connected to the power conversion device 13. The electric motor is configured to be capable of transmitting rotational force to the power conversion device 13.

[0060] The power conversion device 13 is a device that converts the rotational motion of the electric motor to a raising/lowering motion. The power conversion device 13 converts the rotational motion that is input from the electric motor to a linear motion using a cam mechanism. The power conversion device 13 is arranged with a linearly moving output part 13a oriented in the Z direction (up-down direction). The push-up member 14, which moves the contact member 5 of the lifting head 1 upward is fixed to the output part 13a. The power conversion device 13 raises the push-up member 14 by the rotation of the electric motor in one direction. In addition, the power conversion device 13 lowers the push-up member 14 by the rotation of the electric motor in the other direction.

[0061] The push-up member 14 has support portions 14a that come in contact with the contact member 5 of the lifting head 1. The support portions 14a are a pair of rectangular block bodies that protrude toward the contact member 5, from the surface of the push-up member 14 on the contact member 5 side. The support portions 14a face each other across the center of the push-up member 14. The support portions 14a are configured to be capable of supporting the contact member 5.

[0062] The push-up member 14 has a second negative pressure passage 14b, which is a flow channel for gas. One end of the second negative pressure passage 14b has an opening between the pair of block bodies that constitute the support portions 14a. That is, one end of the second negative pressure passage 14b is open toward the contact member 5 at essentially the center of the surface of the push-up member 14 on the contact member 5 side. In addition, the other end of the second negative pressure passage 14b has an opening on a side surface of the push-up member 14 that is parallel to the raising/lowering direction. As a result, the second negative pressure passage 14b is configured as a flow channel that connects the side surface of the push-up member 14 that is parallel to the raising/lowering direction with the surface of the push-up member 14 on the contact member 5 side. The opening at the other end of the second negative pressure passage 14b is connected to a vacuum source of the undiagrammed semiconductor manufacturing apparatus.

[0063] The suction elastic member 15 is a cylindrical member that connects the second negative pressure passage 14b with the raising/lowering axial channel 4a of the lifting head 1. The suction elastic member 15 is made of a flexible member, such as rubber. The suction elastic member 15 is fixed, with the axial direction thereof oriented in the raising/lowering direction, to the surface of the push-up member 14 on the contact member 5 side. In addition, the suction elastic member 15 is positioned such that, as viewed in the axial direction, the opening at one end of the second negative pressure passage 14b is included inside the suction elastic member 15. Thus, the suction elastic member 15 is in communication with the second negative pressure passage 14b. Furthermore, the suction elastic member 15 is positioned such that, as viewed in the axial direction, the raising/lowering axial channel 4a of the lifting head 1 that is attached to the attachment member 16 is included inside the suction elastic member 15. The end of the suction elastic member 15 on the contact member 5 side protrudes farther toward the contact member 5 side than the support portions 14a of the push-up member 14. As a result, the end of the suction elastic member 15 on the contact member 5 side comes in contact with the contact member 5, when the contact member 5 of the lifting head 1 is in contact with the support portions 14a of the push-up member 14.

[0064] The attachment member 16 is an essentially cuboid member to which the lifting head 1 is attached. The attachment member 16 has a through-hole 16a that penetrates from one side surface to the other side surface that face each other. The attachment member 16 is fixed to the end of the power conversion device 13 on the output part 13a side, with the one side surface thereof having the opening of the through-hole 16a facing the power conversion device 13. That is, the attachment member 16 is fixed to the power conversion device 13 at a position in which the through-hole 16a extends in the raising/lowering direction. The output part 13a of the power conversion device 13 is inserted into the through-hole 16a from the opening on one side surface of the attachment member 16.

[0065] The attachment member 16 has, on the other side surface thereof having the opening, a placement surface 16b on which the lifting head 1 is placed. The opening of the mounting surface 16b is configured to be the base member fitting hole 16c into which the base member fitting portion 2b of the base member 2 of the lifting head 1 is detachably fitted. In addition, the placement surface 16b has the base member positioning pin 16d that is fitted into the base member positioning pin groove 2c of the base member 2.

[0066] The attachment member 16 has the first negative pressure passage 16e, which is a flow channel for gas. The first negative pressure passage 16e has an opening in the periphery of the base member fitting hole 16c on the placement surface 16b. An opening at one end of the first negative pressure passage 16e is opened at a position that overlaps with the suctioned surface 2a of the lifting head 1 that is attached to the attachment member 16, when viewed in the raising/lowering direction. Thus, the opening at one end of the first negative pressure passage 16e is covered by the suctioned surface 2a when the lifting head 1 is attached to the attachment member 16. In addition, the other end of the first negative pressure passage 16e has an opening on a side surface of the attachment member 16 that is parallel to the raising/lowering direction. As a result, the first negative pressure passage 16e is configured as a flow channel that connects the placement surface 16b with the side surface of the attachment member 16 that is parallel to the raising/lowering direction. The opening at the other end of the first negative pressure passage 16e is connected to a vacuum source of the undiagrammed semiconductor manufacturing apparatus.

[0067] As shown in FIG. 5, the lifting head replacement mechanism 17 is a mechanism for replacing the lifting head 1 to be attached to the attachment member 16. The lifting head replacement mechanism 17 has a plurality of the replacement arms 18. The plurality of the replacement arms 18 are supported radially at equal intervals by a disk-shaped base part 19. In the present embodiment, the base part 19 supports six of the replacement arms 18. The six replacement arms 18 respectively hold the lifting heads 1 corresponding to different types. The base part 19 is configured to be movable, by an undiagrammed transport device, relative to the attachment member 16 in the X direction and Z direction (raising/lowering direction), as well as in the circumferential direction about the center of the base part 19.

[0068] The replacement arms 18 have holding portions 18a, which are a pair of rod-like members. The proximal ends of the pair of holding portions 18a are connected to each other. The pair of holding portions 18a have upper surfaces 18b that can come in contact with the replacement arm contact surfaces 2h of the base members 2 of the lifting heads 1. In addition, the pair of holding portions 18a have inner side surfaces 18c that are parallel to each other and face each other. The pair of holding portions 18a are arranged between the opposing inner side surfaces 18c with a gap therebetween, into which the base member 2 can be inserted. Furthermore, the pair of holding portions 18a each has, at the distal end thereof, a pawl portion 18d that projects toward the opposing holding portion 18a.

[0069] The replacement arms 18 are configured to be able to hold the base members 2 of the lifting heads 1 between the pair of holding portions 18a. The replacement arms 18 can bring the upper surfaces 18b in contact with the replacement arm contact surfaces 2h to move the lifting heads 1 in the raising/lowering direction (up-down direction). In addition, the replacement arms 18 bring the inner side surfaces 18c in contact with the projecting portions 2i of the base members 2, thereby determining the X direction and Y direction positions of the lifting heads 1, as well as the circumferential position about the center of the lifting heads 1 with respect to the replacement arms 18. The replacement arms 18 can bring the inner side surfaces 18c in contact with the projecting portions 2i of the base members 2 to move the replacement arms 18 in the circumferential direction. In addition, the replacement arms 18 can bring the pawl portions 18d in contact with the projecting portions 2i of the base members 2 to restrict the movement of the lifting heads 1 in the radial direction relative to the replacement arms 18.

[0070] The attachment/detachment of the lifting head 1 by the lifting device 10 will be described next, with reference to FIGS. 2 to 4. It is assumed that the lifting head 1 is not attached to the lifting device 10. In addition, it is assumed that the lifting head 1 is supported, as a single unit, by the replacement arm 18 of the head replacement mechanism 17.

[0071] As shown in FIGS. 2 and 3, when attaching the lifting head 1 to the lifting device 10, the lifting head replacement mechanism 17 of the lifting device 10 rotates the base part 19 using an undiagrammed transport device, and moves, from among the lifting heads 1 respectively held by the plurality of the replacement arms 18, a selected lifting head 1 to a standby position P3 (refer to FIG. 5). Subsequently, the lifting head replacement mechanism 17 moves the base part 19 toward the lifting device 10 to a replacement position P4 (refer to FIG. 5). Subsequently, the lifting head replacement mechanism 17 lowers the base part 19 and attaches the lifting head 1 that is supported by the replacement arm 18 to the attachment member 16 of the lifting device 10. After lowering the base part 19 so that the pawl portions 18d of the replacement arm 18 separate from the projecting portions 2i of the base member 2, the lifting head replacement mechanism 17 moves the replacement arm 18 to the standby position P3.

[0072] In the lifting head 1 that is supported by the replacement arm 18, the base member fitting portion 2b of the base member 2 is fitted into the base member fitting hole 16c of the attachment member 16 with the lowering of the base part 19 by the lifting head replacement mechanism 17. As a result, the X direction and the Y direction positions the lifting head 1 are determined relative to the attachment member 16. At the same time, in the lifting head 1, the base member positioning pin 16d of the attachment member 16 is fitted into the base member positioning pin groove 2c of the base member 2. As a result, the position of the lifting head 1 is determined relative to the attachment member 16 in the circumferential direction about the center of the base member fitting hole 16c.

[0073] The lifting head 1 is supported by the attachment member 16 in a state in which the suctioned surface 2a of the base member 2 is in contact with the placement surface 16b of the attachment member 16. At this time, the suctioned surface 2a covers the opening of the first negative pressure passage 16e of the placement surface 16b. Further, in the lifting head 1, the compression spring 6 presses the contact member 5 against the push-up member 14 of the raising/lowering drive mechanism 11. The contact member 5 comes in contact with the support portions 14a of the push-up member 14. In addition, the contact member 5 is pressed against the suction elastic member 15 protruding farther upward than the support portions 14a. The suction elastic member 15 is compressed by the contact member 5 toward the raising/lowering drive mechanism 11. At this time, the opening of the raising/lowering axial channel 4a of the spline shaft 4 that penetrates the contact member 5 is included inside the suction elastic member 15. Thus, the raising/lowering axial channel 4a is in communication with the second negative pressure passage 14b via the suction elastic member 15, which is in communication with the second negative pressure passage 14b of the lifting device 10.

[0074] Subsequently, the lifting device 10 reduces the pressure inside the first negative pressure passage 16e to a negative pressure using the vacuum source. In the lifting head 1, the suctioned surface 2a, which covers the opening of the first negative pressure passage 16e, is gripped by the suction force from the first negative pressure passage 16e. The suctioned surface 2a is pressed against the placement surface 16b by the suction force. The position of the lifting head 1 with respect to the placement surface 16b is maintained by frictional force generated between the suctioned surface 2a and the placement surface 16b due to the suction force. The lifting head 1 may be configured to be fixed by an engagement member that is pressed by a spring, or the like, in addition to the fixing by the suction force.

[0075] Subsequently, the lifting device 10 reduces the pressure inside the second negative pressure passage 14b to a negative pressure using the vacuum source. The suction elastic member 15 that communicates with the second negative pressure passage 14b is in close contact with the contact member 5 of the lifting head as a result of the reduction in the internal pressure. In the lifting head 1, the pressure inside the raising/lowering axial channel 4a that is in communication with the suction elastic member 15 becomes negative. Furthermore, in the lifting head 1, the interior of the needle cap 9 is suctioned via the needle support member flow channel 7a of the needle support member 7, which is in communication with the raising/lowering axial channel 4a. As a result, in the lifting head 1, suction force that suctions the holding sheet S (refer to FIG. 3), which holds the semiconductor chip C (refer to FIG. 3), is generated in the plurality of stage through-holes 9b of the stage 9a of the needle cap 9.

[0076] As shown in FIG. 4, the lifting device 10 raises and lowers the needles 8 of the lifting head 1 with the raising/lowering drive mechanism 11, in a state in which the lifting head 1 is gripped onto the attachment member 16 by the suction force of the first negative pressure passage 16e. At this time, the suction elastic member 15 that connects the second negative pressure passage 14b with the raising/lowering axial channel 4a of the lifting head 1, is in close contact with the contact member 5 of the lifting head 1 by the negative pressure of the second negative pressure passage 14b. Furthermore, the contact member 5 is pressed against the support portions 14a of the push-up member 14 by the compression spring 6 of the lifting head 1, and thus does not separate from the push-up member 14 regardless of the raising or lowering of the push-up member 14. Thus, the suctioned state of the suction elastic member 15 with respect to the contact member 5 is not affected by the operation of the lifting head 1.

[0077] As shown in FIG. 3, when moving the holding sheet S (refer to FIG. 3), which is holding the semiconductor chip C (refer to FIG. 3), the lifting device 10 raises the pressure inside the second negative pressure passage 14b to atmospheric pressure. With the rise in the internal pressure, the suction elastic member 15, which is a flexible member, is put in a state of losing the gripping of the contact member 5 due to negative pressure. The suction elastic member 15 maintains the state of being in contact with the contact member 5 due to the elastic force of the flexible member. Thus, when the pressure inside the second negative pressure passage 14b is made negative again in the lifting device 10, the suction elastic member 15 comes in close contact with the contact member 5 at the same position. As a result, the lifting device 10 is able to maintain the communication state, realized by the suction elastic member 15, between the second negative pressure passage 14b and the raising/lowering axial channel 4a of the lifting head 1, even if the pressure in the second negative pressure passage 14b fluctuates.

[0078] On the other hand, the first negative pressure passage 16e is a passage of a separate system, independent of the second negative pressure passage 14b, and thus is not affected by fluctuations in the pressure in the second negative pressure passage 14b. That is, the suction force of the lifting head 1 imparted by the first negative pressure passage 16e does not fluctuate due to fluctuations in the pressure in the second negative pressure passage 14b. Thus, it is possible to maintain the position of the lifting head 1 with respect to the attachment member 16.

[0079] As shown in FIG. 3, when removing the lifting head 1 from the lifting device 10, the lifting device 10 increases the pressure inside the second negative pressure passage 14b to atmospheric pressure. With the rise in the internal pressure, the suction elastic member 15, which is a flexible member, is put in a state of not gripping the contact member 5 of the lifting head. The suction elastic member 15 maintains the state of being in contact with the contact member 5 due to the elastic force of the flexible member. In addition, the lifting head 1 is put in a state in which the interior of the needle cap 9 is not suctioned.

[0080] Subsequently, the lifting device 10 raises the pressure inside the first negative pressure passage 16e to atmospheric pressure. The suctioned surface 2a of the lifting head 1, which covers the opening of the first negative pressure passage 16e, will no longer be gripped. The lifting head 1 is pressed against the placement surface 16b of the attachment member 16 by gravity alone. The lifting head 1 is switched to a state of being movable with respect to the placement surface 16b.

[0081] As shown in FIG. 5, the lifting head replacement mechanism 17 uses an undiagrammed transport device to move the replacement arm 18, which is in the standby position P3, together with the base part 19, toward the lifting device 10 to the replacement position P4.

[0082] As shown in FIG. 6, the lifting head replacement mechanism 17 raises the base part 19 and brings the replacement arm 18 in contact with the lifting head 1, which is attached to the attachment member 16 of the lifting device 10. The replacement arm 18 removes the lifting head 1 from the attachment member 16 in a state in which the inner side surfaces 18c are in contact with the projecting portions 2i of the base member 2, and the upper surfaces 18b are in contact with the replacement arm contact surface 2h of the base member 2. In the lifting head 1, the suctioned surface 2a of the base member 2 separates from the placement surface 16b of the attachment member 16 as the base part 19 of the lifting head replacement mechanism 17 rises. Accordingly, in the lifting head 1, the contact member 5 separates from the suction elastic member 15 and the support portions 14a of the push-up member 14, and the base member fitting portion 2b comes out of the base member fitting hole 16c of the attachment member 16. Furthermore, the lifting head replacement mechanism 17 moves the replacement arm 18 to the standby position P3 in a state of holding the lifting head 1 that is removed from the attachment member 16.

[0083] The lifting head 1 configured in this manner is configured as a single unit in which the base member 2 supports the other members. In addition, in the lifting head 1, the base member 2 is gripped onto the attachment member 16 by the suction force of the first negative pressure passage 16e of the attachment member 16 of the lifting device 10. Thus, the lifting head 1 does not move relative to the attachment member 16. Furthermore, in the lifting head, the inside of the needle cap 9 is suctioned by the suction force of the second negative pressure passage 14b of the raising/lowering drive mechanism 11 of the lifting device 10. That is, the lifting head 1 is configured such that the base member 2 is gripped, and the inside of the needle cap 9 is suctioned, by the suction forces of different negative pressure passages. Therefore, fluctuations in the negative pressure inside the needle cap 9 of the lifting head 1 does not affect the gripped state of the base member 2.

[0084] In addition, the compression spring 6 constantly applies a force to press the contact member 5 of the lifting head 1 against the raising/lowering drive mechanism 11. Thus, even when raised or lowered by the raising/lowering drive mechanism 11, the contact member 5 does not separate from the push-up member 14 of the raising/lowering drive mechanism 11. That is, the lifting head 1 can prevent leakage from the connection portion of the suction elastic member 15 which connects the second negative pressure passage 14b and the raising/lowering axial channel 4a of the spline shaft 4. In addition, the compression spring 6 applies a force in a direction in which the base member 2 separates from the attachment member 16.

[0085] In addition, the lifting head 1 is transported in a state in which the movement thereof in the X direction, the Y direction, and the Z direction (raising/lowering direction) with respect to the replacement arm 18 is restricted by the replacement arm contact surface 2h and the projecting portions 2i, provided in the arm engagement portion 2g of the base member 2. Thus, the lifting head 1 does not move relative to the replacement arm 18 during transportation. As a result, the lifting head 1 is able to maintain the positions of the needles 8 positioned relative to the lifting device 10 in a readily detachable state.

[0086] The lifting device 10 according to the present embodiment grips the suctioned surface 2a of the base member 2 of the lifting head 1 with the suction force of the first negative pressure passage 16e of the attachment member 16. Furthermore, the lifting device 10 suctions the inside of the needle cap 9 in the lifting head 1 with the second negative pressure passage 14b of the raising/lowering drive mechanism 11. Therefore, the lifting device 10 grips the lifting head 1 and suctions the inside of the lifting head 1 through different passages, so neither is affected by fluctuations in the negative pressure.

[0087] In addition, in the lifting device 10, when the base member 2 of the lifting head 1 is attached to the attachment member 16, the second negative pressure passage 14b of the raising/lowering drive mechanism 11 and the raising/lowering axial channel 4a of the spline shaft 4 in the lifting head 1 are placed in communication with each other by the suction elastic member 15. The suction elastic member 15 is made of an elastic body, such as rubber, and therefore comes in close contact with the spline shaft 4 or the contact member 5 of the lifting head 1 by the suction force in the second negative pressure passage 14b. The suction elastic member 15 separates from the lifting head 1 by making the pressure inside the second negative pressure passage 14b positive. Thus, the lifting device 10 can prevent leakage from the connection portion between the second negative pressure passage 14b and the raising/lowering axial channel 4a.

[0088] In addition, in the lifting device 10, the plurality of the replacement arms 18 of the lifting head replacement mechanism 17 respectively hold the lifting heads 1 corresponding to different types of chips. The lifting device 10 is able to automatically attach/detach, using the replacement arms 18, any one of the lifting heads 1 respectively held by the plurality of replacement arms 18, to/from the attachment member 16. As described above, the lifting device 10 can adjust the pressure of the first negative pressure passage 16e and the second negative pressure passage 14b to maintain the positions of the needles 8 positioned relative to the lifting device 10 in a readily detachable state.

Other Embodiments

[0089] In all of the embodiments described above, the raising/lowering axial channel 4a of the spline shaft 4 in the lifting head 1 is in communication with the second negative pressure passage 14b via the suction elastic member 15 of the lifting device 10. However, the suction elastic member 15 may be provided in the lifting head 1. When the suction elastic member 15 is attached to the attachment member 16 of the lifting device 10, the suction elastic member 15 is pressed against the push-up member 14 of the raising/lowering drive mechanism 11. In addition, the lifting head 1 and the lifting device 10 may each have the suction elastic member 15.

[0090] If the lifting head 1 has the suction elastic member 15, the second negative pressure passage 14b of the raising/lowering drive mechanism 11 and the raising/lowering axial channel 4a of the raising/lowering shaft is placed in communication with each other by the suction elastic member 15. The suction elastic member 15 is made of an elastic body, such as rubber, and thus is in close contact with the raising/lowering drive mechanism 11 by the suction force of the second negative pressure passage 14b. Thus, the suction elastic member 15 can prevent leakage from the connection portion between the second negative pressure passage 14b and the raising/lowering axial channel 4a. On the other hand, the suction elastic member 15 separates from the raising/lowering drive mechanism 11 by making the pressure inside the second negative pressure passage 14b positive. As a result, it is possible to maintain the positions of the needles 8 positioned relative to the lifting device 10 in a readily detachable state.

[0091] In the embodiments described above, the base member 2 of the lifting head 1 is positioned relative to the attachment member 16 by the base member positioning pin 16d. In addition, the needle cap 9 of the lifting head 1 is positioned relative to the base member 2 by the needle cap positioning pin 2f. However, it is not necessary for the positioning of the base member relative to the attachment member and the positioning of the needle cap 9 relative to the base member to be achieved with positioning pins.

[0092] In addition, in the embodiments described above, the lifting device 10 converts the rotational motion of the electric motor to a linear motion using the raising/lowering drive mechanism 11. However, the lifting device may be configured to raise and lower the lifting head 1 with a linear actuator, such as a linear motor.

[0093] In addition, in the embodiments described above, the replacement arm 18 of the lifting head replacement mechanism 17 holds the lifting head 1 with the holding portions 18a, which are a pair of rod-like members. However, the replacement arm may hold the lifting head using other forms and structures.

[0094] In addition, in the embodiments described above, the lifting device 10 is configured to be capable of replacing the lifting head 1 in accordance with type of the semiconductor chip C (refer to FIG. 3) using the lifting head replacement mechanism 17. However, it is not necessary for the lifting device 10 to be provided with a lifting head replacement mechanism.

[0095] Embodiments of the present invention have been described above, but the embodiments described above are merely examples for implementing the present invention. Therefore, the present invention is not limited to the embodiments described above, and may be implemented by modifying the embodiments described above as appropriate to the extent of not departing from the essence of the present invention.

DESCRIPTIONS OF THE REFERENCE SYMBOLS

[0096] 1 Lifting head [0097] 2 Base member [0098] 2a Suctioned surface [0099] 2b Base member fitting portion [0100] 2c Base member positioning pin groove [0101] 2d Attachment surface [0102] 2e Needle cap fitting portion [0103] 2f Needle cap positioning pin [0104] 2g Arm engagement portion [0105] 2h Replacement arm contact surface [0106] 2i Projecting portion [0107] 3 Spline nut [0108] 4 Spline shaft [0109] 4a Raising/lowering axial channel [0110] 5 Contact member [0111] 6 Compression spring [0112] 7 Needle support member [0113] 7a Needle support member flow channel [0114] 8 Needle [0115] 9 Needle cap [0116] 9a Stage [0117] 9b Stage through-hole [0118] 9c Fixing flange [0119] 10 Lifting device [0120] 11 Raising/lowering drive mechanism [0121] 13 Power conversion device [0122] 13a Output part [0123] 14 Push-up member [0124] 14a Support portion [0125] 14b Second negative pressure passage [0126] 15 Suction elastic member [0127] 16 Attachment member [0128] 16a Through-hole [0129] 16b Placement surface [0130] 16c Base member fitting hole [0131] 16d Base member positioning pin [0132] 16e First negative pressure passage [0133] 17 Lifting head replacement mechanism [0134] 18 Replacement arm [0135] 18a Holding portion [0136] 18b Upper surface [0137] 18c Inner side surface [0138] 19 Base part