Semiconductor Device and Method of Forming Selective Shielding Using UV Curable Ink
20250218985 ยท 2025-07-03
Assignee
Inventors
Cpc classification
H01L23/552
ELECTRICITY
H01L2224/13007
ELECTRICITY
H01L2224/97
ELECTRICITY
H01L2224/29025
ELECTRICITY
H01L2223/6677
ELECTRICITY
H01L2224/132
ELECTRICITY
H01L24/97
ELECTRICITY
International classification
H01L25/065
ELECTRICITY
Abstract
A semiconductor device has a substrate and an electrical component disposed over a surface of the substrate. An antenna can be formed within the substrate. An encapsulant is deposited over the surface of the substrate. An ink material is deposited over the surface of the substrate. The ink material can be a curable epoxy. The ink material is formed as a straight wall, curved wall, stepped wall, stepped convex wall, and such. The ink material can be stacked with a first ink material deposited on the surface of the substrate and a second ink material deposited over the first ink material. A shielding material is disposed over the encapsulant with the ink material blocking progression of the shielding material. An electrical connector is disposed over the surface of the substrate outside the ink material to avoid contact with the shielding material.
Claims
1. A semiconductor device, comprising: a substrate; an encapsulant deposited over a surface of the substrate; an ink material deposited over the surface of the substrate; a shielding material disposed over the encapsulant with the ink material blocking progression of the shielding material; and an electrical connector disposed over the surface of the substrate outside the ink material to avoid contact with the shielding material.
2. The semiconductor device of claim 1, further including an electrical component disposed over the surface of the substrate.
3. The semiconductor device of claim 1, wherein the ink material is formed as a wall.
4. The semiconductor device of claim 1, wherein a first ink material is deposited on the surface of the substrate and a second ink material is deposited over the first ink material.
5. The semiconductor device of claim 1, wherein the ink material includes a curable epoxy.
6. The semiconductor device of claim 1, further including an antenna formed within the substrate.
7. A semiconductor device, comprising: a substrate; an ink material deposited over the substrate; and a shielding material disposed over the substrate with the ink material blocking progression of the shielding material.
8. The semiconductor device of claim 7, further including: an encapsulant deposited over the substrate; the shielding material disposed over the encapsulant; and an electrical connector disposed over the substrate outside the ink material to avoid contact with the shielding material.
9. The semiconductor device of claim 7, further including an electrical component disposed over the substrate.
10. The semiconductor device of claim 7, wherein the ink material is formed as a wall.
11. The semiconductor device of claim 7, wherein a first ink material is deposited on the substrate and a second ink material is deposited over the first ink material.
12. The semiconductor device of claim 7, wherein the ink material includes a curable epoxy.
13. The semiconductor device of claim 7, further including an antenna formed within the substrate.
14. A method of making a semiconductor device, comprising: providing a substrate; depositing an encapsulant over a surface of the substrate; depositing an ink material over the surface of the substrate; disposing a shielding material over the encapsulant with the ink material blocking progression of the shielding material; and disposing an electrical connector over the surface of the substrate outside the ink material to avoid contact with the shielding material.
15. The method of claim 14, further including disposing an electrical component disposed over the surface of the substrate.
16. The method of claim 14, further including forming the ink material as a wall.
17. The method of claim 14, further including: depositing a first ink material on the surface of the substrate; and depositing a second ink material over the first ink material.
18. The method of claim 14, wherein the ink material includes a curable epoxy.
19. The method of claim 14, further including forming an antenna within the substrate.
20. A method of making a semiconductor device, comprising: providing a substrate; depositing an ink material over the substrate; and disposing a shielding material over the substrate with the ink material blocking progression of the shielding material.
21. The method of claim 20, further including: disposing an encapsulant over a surface of the substrate; and disposing an electrical connector over the substrate outside the ink material to avoid contact with the shielding material.
22. The method of claim 20, further including disposing an electrical component disposed over the surface of the substrate.
23. The method of claim 20, further including forming the ink material as a wall.
24. The method of claim 20, further including: depositing a first ink material on the substrate; and depositing a second ink material over the first ink material.
25. The method of claim 20, wherein the ink material includes a curable epoxy.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE DRAWINGS
[0014] The present invention is described in one or more embodiments in the following description with reference to the figures, in which like numerals represent the same or similar elements. While the invention is described in terms of the best mode for achieving the invention's objectives, it will be appreciated by those skilled in the art that it is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims and their equivalents as supported by the following disclosure and drawings. The term semiconductor die as used herein refers to both the singular and plural form of the words, and accordingly, can refer to both a single semiconductor device and multiple semiconductor devices.
[0015] Semiconductor devices are generally manufactured using two complex manufacturing processes: front-end manufacturing and back-end manufacturing. Front-end manufacturing involves the formation of a plurality of die on the surface of a semiconductor wafer. Each die on the wafer contains active and passive electrical components, which are electrically connected to form functional electrical circuits. Active electrical components, such as transistors and diodes, have the ability to control the flow of electrical current. Passive electrical components, such as capacitors, inductors, and resistors, create a relationship between voltage and current necessary to perform electrical circuit functions.
[0016] Back-end manufacturing refers to cutting or singulating the finished wafer into the individual semiconductor die and packaging the semiconductor die for structural support, electrical interconnect, and environmental isolation. To singulate the semiconductor die, the wafer is scored and broken along non-functional regions of the wafer called saw streets or scribes. The wafer is singulated using a laser cutting tool or saw blade. After singulation, the individual semiconductor die are disposed on a package substrate that includes pins or contact pads for interconnection with other system components. Contact pads formed over the semiconductor die are then connected to contact pads within the package. The electrical connections can be made with conductive layers, bumps, stud bumps, conductive paste, or wirebonds. An encapsulant or other molding material is deposited over the package to provide physical support and electrical isolation. The finished package is then inserted into an electrical system and the functionality of the semiconductor device is made available to the other system components.
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[0019] An electrically conductive layer 112 is formed over active surface 110 using PVD, CVD, electrolytic plating, electroless plating process, or other suitable metal deposition process. Conductive layer 112 can be one or more layers of aluminum (Al), copper (Cu), tin (Sn), nickel (Ni), gold (Au), silver (Ag), or other suitable electrically conductive material. Conductive layer 112 operates as contact pads electrically connected to the circuits on active surface 110.
[0020] An electrically conductive bump material is deposited over conductive layer 112 using an evaporation, electrolytic plating, electroless plating, ball drop, or screen printing process. The bump material can be Al, Sn, Ni, Au, Ag, Pb, Bi, Cu, solder, and combinations thereof, with an optional flux solution. For example, the bump material can be eutectic Sn/Pb, high-lead solder, or lead-free solder. The bump material is bonded to conductive layer 112 using a suitable attachment or bonding process. In one embodiment, the bump material is reflowed by heating the material above its melting point to form balls or bumps 114. In one embodiment, bump 114 is formed over an under bump metallization (UBM) having a wetting layer, barrier layer, and adhesive layer. Bump 114 can also be compression bonded or thermocompression bonded to conductive layer 112. Bump 114 represents one type of interconnect structure that can be formed over conductive layer 112. The interconnect structure can also use bond wires, conductive paste, stud bump, micro bump, or other electrical interconnect.
[0021] In
[0022]
[0023] In another embodiment, a cross-sectional view of substrate 200 is shown including core material 202, as shown in
[0024] Conductive layer 206 is formed over or within surface 208. Conductive layer 206 can be one or more layers of Al, Cu, Sn, Ni, Au, Ag, or other suitable electrically conductive material. Conductive layer 206 can be formed using PVD, CVD, electrolytic plating, electroless plating process, or other suitable metal deposition process. Conductive layer 206 provides horizontal electrical interconnect across substrate 200. Portions of conductive layer 206 can be electrically common or electrically isolated depending on the design and function of semiconductor die 104 and other electrical components. Conductive layer 212 is formed over or within surface 210 of substrate 200 and electrically connected to conductive vias 204 and conductive layer 206. Conductive layer 212 can be one or more layers of Al, Cu, Sn, Ni, Au, Ag, or other suitable electrically conductive material. In one embodiment, conductive layer 212 operates as antenna area 214a and 214b to transmit and receive RF signals for later-mounted electrical components. The electrical components will be electrically connected to antenna areas 214a-214b by way of the vertical and horizontal segments of conductive layer 206 and conductive vias 204. Portions of conductive layers 212 can be electrically common or electrically isolated depending on the design and function of semiconductor die 104 and other electrical components. With antenna areas 214a-214b, substate 200 constitutes an AiP substrate.
[0025]
[0026] Continuing from
[0027] Electrical components 130a-130b are brought into contact with surface 126 of substrate 120. Conductive paste 134 bonds electrical components 130a to conductive layer 122. Bumps 114 are reflowed to mechanically and electrically connect electrical components 130b to conductive layer 122.
[0028] In
[0029] In
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[0031] Continuing from
[0032] The build-up of wall 154 can take a variety of forms and shapes, by adding rows or lines of ink material to previous layers of ink material.
[0033] Electrical components 130a-130b may contain IPDs that are susceptible to or generate EMI, RFI, harmonic distortion, and inter-device interference. For example, the IPDs contained within electrical components 130a-130b provide the electrical characteristics needed for high-frequency applications, such as resonators, high-pass filters, low-pass filters, band-pass filters, symmetric Hi-Q resonant transformers, and tuning capacitors. In another embodiment, electrical components 130a-130b contain digital circuits switching at a high frequency, which could interfere with the operation of IPDs in RF AOP module 176a.
[0034] To address EMI, RFI, harmonic distortion, and inter-device interference, shielding material 170 is deposited over encapsulant 140 of assembly 138 with dispenser 172, as shown in
[0035] In
[0036] The location of ink material wall 154 within open area 142 is easy to control with dispenser 146. Ink material wall 154 can be directly adjacent to encapsulant 170 or spaced further away from the encapsulant. UV light source 148 rapidly cures and solidifies the liquid ink material to control its final location. Ink material wall 154 may leave an overhang of shielding material 170 on surface 126, but the overhang is controllable and manageable.
[0037] In
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[0040] Electrical device 400 can be a stand-alone system that uses the semiconductor packages to perform one or more electrical functions. Alternatively, electrical device 400 can be a subcomponent of a larger system. For example, electrical device 400 can be part of a tablet, cellular phone, digital camera, communication system, or other electrical device. Alternatively, electrical device 400 can be a graphics card, network interface card, or other signal processing card that can be inserted into a computer. The semiconductor package can include microprocessors, memories, ASIC, logic circuits, analog circuits, RF circuits, discrete devices, or other semiconductor die or electrical components. Miniaturization and weight reduction are essential for the products to be accepted by the market. The distance between semiconductor devices may be decreased to achieve higher density.
[0041] In
[0042] In some embodiments, a semiconductor device has two packaging levels. First level packaging is a technique for mechanically and electrically attaching the semiconductor die to an intermediate substrate. Second level packaging involves mechanically and electrically attaching the intermediate substrate to the PCB. In other embodiments, a semiconductor device may have the first level packaging where the die is mechanically and electrically disposed directly on the PCB. For the purpose of illustration, several types of first level packaging, including bond wire package 406 and flipchip 408, are shown on PCB 402. Additionally, several types of second level packaging, including ball grid array (BGA) 410, bump chip carrier (BCC) 412, land grid array (LGA) 416, multi-chip module (MCM) or SIP module 418, quad flat non-leaded package (QFN) 420, quad flat package 422, embedded wafer level ball grid array (eWLB) 424, and wafer level chip scale package (WLCSP) 426 are shown disposed on PCB 402. In one embodiment, eWLB 424 is a fan-out wafer level package (Fo-WLP) and WLCSP 426 is a fan-in wafer level package (Fi-WLP). Depending upon the system requirements, any combination of semiconductor packages, configured with any combination of first and second level packaging styles, as well as other electrical components, can be connected to PCB 402. In some embodiments, electrical device 400 includes a single attached semiconductor package, while other embodiments call for multiple interconnected packages. By combining one or more semiconductor packages over a single substrate, manufacturers can incorporate pre-made components into electrical devices and systems. Because the semiconductor packages include sophisticated functionality, electrical devices can be manufactured using less expensive components and a streamlined manufacturing process. The resulting devices are less likely to fail and less expensive to manufacture resulting in a lower cost for consumers.
[0043] While one or more embodiments of the present invention have been illustrated in detail, the skilled artisan will appreciate that modifications and adaptations to those embodiments may be made without departing from the scope of the present invention as set forth in the following claims.