ELECTRONIC DEVICE PACKAGING WITH GALVANIC ISOLATION
20250233055 ยท 2025-07-17
Assignee
Inventors
- Maria Cristina ESTACIO (Lapulapu City, AZ, US)
- Marlon BARTOLO (Lapulapu City, PH)
- Maria Clemens Ypil QUINONES (Cebu City, PH)
- Chung-Lin WU (San Jose, CA, US)
Cpc classification
H01L23/5384
ELECTRICITY
H01L23/48
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L23/538
ELECTRICITY
H01L2924/00012
ELECTRICITY
International classification
Abstract
In a general aspect, an electronic device assembly can include a dielectric substrate having a first surface and a second surface opposite the first surface and a leadframe including a first leadframe portion including a first plurality of signal leads, and a second leadframe portion including a second plurality of signal leads. The substrate can be coupled with a subset of the first plurality of signal leads and a subset of the second plurality of signal leads. Signal leads of the first plurality, other than the subset of the first plurality of signal leads, can be spaced from the dielectric substrate. Signal leads of the second plurality, other than the subset of the second plurality of signal leads, can be spaced from the dielectric substrate. The assembly can further include one or more semiconductor die that are electrically coupled with the substrate and the leadframe portions.
Claims
1. A method for producing an electronic device assembly, the method comprising: coupling a leadframe with a dielectric substrate, the leadframe having a first leadframe portion including a first plurality of signal leads and a second leadframe portion including a second plurality of signal leads, and the dielectric substrate having a first unidirectional isolation channel and a second unidirectional isolation channel defined thereon; coupling the leadframe with the dielectric substrate including: coupling, with an adhesive, a first signal lead of the first plurality of signal leads to a first corner of a first surface of the dielectric substrate; coupling a second signal lead with the dielectric substrate; coupling, with the adhesive, a first signal lead of the second plurality of signal leads to a second corner of the first surface of the dielectric substrate; coupling a second signal lead with the dielectric substrate; and disposing a semiconductor die on, and coupling the semiconductor die with at least one of: the first signal lead or a second signal lead of the first plurality of signal leads; and electrically coupling, via respective wire bonds, the semiconductor die with: at least one signal lead of the first plurality of signal leads; an input terminal of the first unidirectional isolation channel, and an output terminal of the second unidirectional isolation channel.
2. The method of claim 1, wherein the semiconductor die is a first semiconductor die and respective wire bonds are first respective wire bonds, the method further comprising: coupling a second semiconductor die with at least one of: the first signal lead of the second plurality of signal leads; or the second signal lead of the second plurality of signal leads, electrically coupling, via second respective wire bonds, the second semiconductor die being electrically with: at least one signal lead of the second plurality of signal leads; an output terminal of the first unidirectional isolation channel; and an input terminal of the second unidirectional isolation channel.
3. The method of claim 2, wherein: the first semiconductor die is disposed on the at least one of the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads on respective same surfaces of the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads that are coupled with the dielectric substrate; and the second semiconductor die is disposed on the at least one of the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads on respective same surfaces of the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads that are coupled with the dielectric substrate.
4. The method of claim 2, wherein: the first semiconductor die is disposed on the at least one of the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads on respective first surfaces of the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads that are opposite respective second surfaces of the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads that are coupled with the dielectric substrate; and the second semiconductor die is disposed on the at least one of the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads on respective first surfaces of the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads that are opposite respective second surfaces of the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads that are coupled with the dielectric substrate.
5. The method of claim 2, wherein: the first semiconductor die is coupled with the at least one of the first signal lead of the first plurality of signal leads or the second signal lead of the first plurality of signal leads with a non-conductive adhesive; and the second semiconductor die is coupled with the at least one of the first signal lead of the second plurality of signal leads or the second signal lead of the second plurality of signal leads with the non-conductive adhesive.
6. The method of claim 2, further comprising electrically coupling, via third respective wire bonds, a third semiconductor die with at least one signal lead of the second plurality of signal leads and with the dielectric substrate.
7. The method of claim 6, further comprising, prior to forming the third respective wire bonds, coupling the third semiconductor die with on one of the first signal lead of the first plurality of signal leads, the second signal lead of the first plurality of signal leads, the first signal lead of the second plurality of signal leads, or the second signal lead of the second plurality of signal leads.
8. The method of claim 6, encapsulating, in a molding compound, the first semiconductor die, the second semiconductor die, the third semiconductor die, the first respective wire bonds, the second respective wire bonds, the third respective wire bonds, at least a portion of the first leadframe portion, and at least a portion of the second leadframe portion.
9. The method of claim 1, wherein the first plurality of signal leads are linearly arranged along a first edge of the electronic device assembly and the second plurality of signal leads are linearly arranged along a second edge of the electronic device assembly, the first signal lead of the first plurality of signal leads being disposed at a first end of the first plurality of signal leads on the first edge of the electronic device assembly, the second signal lead of the first plurality of signal leads being disposed at a second end of the first plurality of signal leads on the first edge of the electronic device assembly, the first signal lead of the second plurality of signal leads being disposed at a first end of the second plurality of signal leads on the second edge of the electronic device assembly, and the second signal lead of the second plurality of signal leads being disposed at a second end of the second plurality of signal leads on the second edge of the electronic device assembly.
10. The method of claim 1, wherein the first plurality of signal leads are linearly arranged along a first edge of the electronic device assembly and the second plurality of signal leads are linearly arranged along a second edge of the electronic device assembly, the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads being adjacent to one another and centrally disposed in the first plurality of signal leads on the first edge of the electronic device assembly, and the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads being adjacent to one another and centrally disposed in the second plurality of signal leads on the second edge of the electronic device assembly.
11. The method of claim 1, wherein: signals lead of the first plurality of signal leads, other than the first signal lead of the first plurality of signal leads and the second signal lead of the first plurality of signal leads, are spaced from the dielectric substrate; and signals lead of the second plurality of signal leads, other than the first signal lead of the second plurality of signal leads and the second signal lead of the second plurality of signal leads, are spaced from the dielectric substrate.
12. The method of claim 1, wherein the dielectric substrate is coupled with the first signal lead of the first plurality of signal leads, the second signal lead of the first plurality of signal leads, the first signal lead of the second plurality of signal leads, and the second signal lead of the second plurality of signal leads via respective electrically isolated copper traces disposed on the first surface of the dielectric substrate.
13. An method for producing an electronic device assembly, the method comprising: coupling a dielectric substrate with a leadframe having a first leadframe portion including a first plurality of signal leads, and a second leadframe portion including a second plurality of signal leads, wherein: the dielectric substrate is coupled with a subset of the first plurality of signal leads and a subset of the second plurality of signal leads; signal leads of the first plurality of signal leads, other than the subset of the first plurality of signal leads, being spaced from the dielectric substrate, and signal leads of the second plurality of signal leads, other than the subset of the second plurality of signal leads, being spaced from the dielectric substrate; coupling a first semiconductor die with the subset of the first plurality of signal leads; electrically coupling the first semiconductor die, via first respective wire bonds, with at least one signal lead of the first plurality of signal leads and the dielectric substrate; coupling a second semiconductor die with the subset of the second plurality of signal leads; and electrically coupling the second semiconductor die, via second respective wire bonds, with at least one signal lead of the second plurality of signal leads and the dielectric substrate.
14. The method of claim 13, encapsulating, in a molding compound encapsulating, the first semiconductor die, the second semiconductor die, the first respective wire bonds, the second respective wire bonds, at least a portion of the first leadframe portion, and at least a portion of the second leadframe portion.
15. The method of claim 13, wherein: the first semiconductor die is disposed on the subset of the first plurality of signal leads; and the second semiconductor die is disposed on the subset of the second plurality of signal leads.
16. The method of claim 13, further comprising electrically coupling, via third respective wire bonds, a third semiconductor die with at least one signal lead of the second plurality of signal leads and with the dielectric substrate.
17. The method of claim 16, further comprising, prior to forming the third respective wire bonds, disposing the third semiconductor die, and coupling the third semiconductor die with one of the subset of the first plurality of signal leads, or the subset of the second plurality of signal leads.
18. The method of claim 13, wherein: the first semiconductor die is coupled with the subset of the first plurality of signal leads with a non-conductive adhesive; and the second semiconductor die is coupled with the subset of the second plurality of signal leads with the non-conductive adhesive.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0016] This disclosure is directed to electronic device assemblies (assemblies) and methods for producing such assemblies. The example assemblies describe herein can be used to implement electronic devices that bi-directionally communicate data (e.g., for multiple data channels) using unidirectional, galvanically isolated channels (e.g., two unidirectional differential isolation channels per bi-directional channel). For instance, the assemblies described herein can be used for devices that communicate data between different power domains, such as in industrial and or automotive applications, including power conversion, gate drivers, motor control, etc. For instance, data can be communicated from a first circuit (e.g., such as a first integrated circuit (IC) in a first power domain) to a second circuit (e.g., a second integrated circuit (IC) in a second power domain) using a first unidirectional isolation channel, while data from the second circuit to the first circuit can be communicated using a second unidirectional isolation channel.
[0017] In the approaches described herein, galvanic isolation between data communication circuits (and associated power domains) can be achieved using a plurality of capacitors defined on a common dielectric substrate (substrate), such as a printed circuit substrate (e.g., ceramic, FR4, etc.). For instance, in some implementations, capacitors can be defined on the substrate for each of two unidirectional differential isolation channels (e.g., four total capacitors, including one for each of the positive differential signals and one for each of the negative differential signals). In some implementations, additional circuits (integrated circuits) and isolation channels can be included. Using the approaches described herein, high distance through insulation can be achieved due to the thickness of the substrate used to implement the isolation capacitors. Such isolation channels can be formed using printed circuit traces and vias (through the substrate), to form and interconnect capacitor electrodes.
[0018]
[0019] As shown in
[0020] As shown in
[0021] In the device 100, the TX 132, the capacitors 112 and 114, and the RX 144 can be referred to as being included in the first (unidirectional) isolation channel, while the TX 142, the capacitors 116 and 118, and the RX 134 can be referred to as being in the second (unidirectional) isolation channel. In some implementations, such as the device 100, data can be respectively communicated in the first isolation channel and in the second isolation channel in a similar or same way. The specific approach used for data communication between the primary circuit 130 and the secondary circuit 140 will depend on the particular implementation.
[0022]
[0023] Similar to the data communication device 100, the primary circuit 230 and the secondary 240 can be implemented on respective integrated circuits (ICs). In contrast to the circuits 130 and 140 of the device 100, the primary circuit 230 (e.g., a first IC) and the secondary circuit 240 (e.g., a second IC), as shown in
[0024] As shown in
[0025] As shown in
[0026]
[0027] In
[0028] As shown in
[0029] As shown in
[0030] As shown in
[0031] As shown in
[0032] As shown in
[0033] As shown in
[0034] As shown in
[0035] As shown in
[0036] As shown in
[0037] As indicated above, the assembly 300 corresponds with the assembly 600 in
[0038]
[0039] As shown in
[0040]
[0041] In
[0042]
[0043] As shown in
[0044]
[0045] As shown in
[0046]
[0047] As shown in
[0048] The signal leads 1022 and 1024 also define a die attach paddle for the first semiconductor die 1030, while the signal leads 1026 and 1028 define a die attach paddle for the second semiconductor die 1040. As shown in
[0049]
[0050] The signal leads 1122 and 1124 also define a die attach paddle for the first semiconductor die 1030, while the signal lead 1126 defines a die attach paddle for the second semiconductor die 1140a, and the signal lead 1128 defines a die attach paddle for the third semiconductor die 1140b. As shown in
[0051]
[0052] As further shown in
[0053] The wire bonds 1050 of the device 1000 can be used to electrically couple the semiconductor die 1030 and 1040 with the substrate 1010 and with signal leads of the leadframe portions 1020a and 1020b, such as in the arrangement shown in
[0054]
[0055] As shown in
[0056]
[0057] In some implementations, the process flows 1400-1700, or similar process flows, can be used to produce other electronic device assemblies. That is, while specific examples of assemblies are referenced with respect to the process flows 1400-1700, other electronic device assemblies can be produced using the process flows 1400-1700, or similar process flows. Accordingly, the process flows 1400-1700 are given by way of example. Also, in
[0058] Referring to
[0059] At operation 1425, a non-conductive epoxy can be dispensed on the substrate, where the non-conductive epoxy will be used for coupling (attaching, etc.) semiconductor die to the substrate. In some implementations, a conductive adhesive (epoxy, solder, etc.) can be used. In some implementations, a die attach film (conductive or non-conductive) can be used, and operation 1425 can be omitted. At operation 1430, in this example, a first semiconductor die can be attached to (coupled with, disposed on, etc.) the substrate using the non-conductive epoxy of operation 1425. At operation 1435, in this example, a second semiconductor die can be attached to (coupled with, disposed on, etc.) the substrate using the non-conductive epoxy of operation 1425. At operation 1440, a die attach cure (e.g., a bake) can be performed, to cure the non-conductive epoxy of operation 1425 and fixedly couple (attach, etc.) the first and second semiconductor die with the substrate.
[0060] At operation 1445, thermosonic wire bonding can be performed to electrically couple the first and second semiconductor die with the substrate (e.g., with isolation channels formed on the substrate) and with signal leads of the leadframe. At operation 1450, a plasma clean process can be performed prior to performing a transfer molding and post mold cure process. The molding process of operation 1450 can encapsulate the assembly, other than exposed portions of the leadframe, in a molding compound, such as an epoxy molding compound. At operation 1455, a deflashing process can be performed to prepare the exposed portions of the leadframe for plating (e.g., to remove burrs, etc.). Also at operation, 1455 the exposed portions of the leadframe can be plated (e.g., solder plated) and a stress relief bake can be performed.
[0061] At operation 1460, degate-deflash-dejunk (DDD), trim and form of signal leads and singulation of individual assemblies, e.g., from a leadframe strip, can be performed. At operation 1465, functional and electrical testing (e.g., high voltage and direct current testing) can be performed on the assembly, and the assembly can be marked (e.g., with a part number, etc.). At operation 1470, a finishing process can be performed, including packaging the produced assembly for shipment (e.g., using a tape and reel).
[0062] Referring to
[0063] At operation 1525, a first semiconductor die can be attached to (coupled with, disposed on, etc.) the leadframe using a (conductive or non-conductive) die attach film. At operation 1530, in this example, a second semiconductor die can be attached to (coupled with, disposed on, etc.) the leadframe using a (conductive or non-conductive) die attach film. At operation 1535, a die attach cure (e.g., a bake) can be performed, to cure the die attach films (of operations 1525 and 1530) and fixedly couple (attach, etc.) the first and second semiconductor die with the leadframe.
[0064] At operation 1540, thermosonic wire bonding can be performed to electrically couple the first and second semiconductor die with the substrate (e.g., with isolation channels formed on the substrate) and with signal leads of the leadframe. At operation 1545, a plasma clean process can be performed prior to performing a transfer molding and post mold cure process. The molding process of operation 1545 can encapsulate the assembly, other than exposed portions of the leadframe, in a molding compound, such as an epoxy molding compound.
[0065] At operation 1550, a deflashing process can be performed to prepare the exposed portions of the leadframe for plating (e.g., to remove burrs, etc.). Also at operation 1550, the exposed portions of the leadframe can be plated (e.g., solder plated) and a stress relief bake can be performed. At operation 1555, DDD, trim and form of signal leads and singulation of individual assemblies, e.g., from a leadframe strip, can be performed. At operation 1560, functional and electrical testing (e.g., high voltage and direct current testing) can be performed on the assembly, and the assembly can be marked (e.g., with a part number, etc.). At operation 1565, a finishing process can be performed, including packaging the produced assembly for shipment (e.g., using a tape and reel).
[0066] Referring to
[0067] In the process flow 1600, at process operation (operation) 1605, a solder print can be performed on a leadframe, where the solder will be used to couple (attach, etc.) a substrate to the leadframe, as well as to couple (attach, etc.) the low-side MOSFET IC and the high-side MOSFET IC to the leadframe. At operation 1610, a ceramic substrate (or other dielectric substrate) can be attached to (disposed on, etc.) the solder from operation 1605. At operation 1615, the low-side MOSFET IC (or, alternatively, the high-side MOSFET IC) can be attached to (disposed on, etc.) the solder from operation 1605. At operation 1620, the high-side MOSFET IC (or, alternatively, the low-side MOSFET IC) can be attached to (disposed on, etc.) the solder from operation 1605. At operation 1625, a solder reflow process can be performed to reflow the solder from operation 1605, e.g., to fixedly couple the substrate, the high-side MOSFET IC and the low-side MOSFET IC with the leadframe. A flux clean can be performed at operation 1630 to remove residual solder flux from the solder reflow operation 1625.
[0068] At operation 1635, the control IC can be couple with (attached to, disposed on, etc.) the leadframe using, for example a (conductive or non-conductive) die attach film or adhesive. At operation 1640, a die attach cure (e.g., a bake) can be performed, to cure the die attach film or adhesive of operation 1635, and fixedly couple (attach, etc.) the control IC with the leadframe.
[0069] At operation 1645, thermosonic wire bonding can be performed to electrically couple the low-side MOSFET, the high-side MOSFET and the control IC with the substrate (e.g., with isolation channels formed on the substrate) and with signal leads of the leadframe. At operation 1650, a plasma clean process can be performed prior to performing a transfer molding and post mold cure process. The molding process of operation 1650 can encapsulate the assembly, other than exposed portions of the leadframe, in a molding compound, such as an epoxy molding compound.
[0070] At operation 1655, a deflashing process can be performed to prepare the exposed portions of the leadframe for plating (e.g., to remove burrs, etc.). Also at operation 1655, the exposed portions of the leadframe can be plated (e.g., solder plated) and a stress relief bake can be performed. At operation 1660, DDD, trim and form of signal leads and singulation of individual assemblies, e.g., from a leadframe strip, can be performed. At operation 1665, functional and electrical testing (e.g., high voltage and direct current testing) can be performed on the assembly, and the assembly can be marked (e.g., with a part number, etc.). At operation 1670, a finishing process can be performed, including packaging the produced assembly for shipment (e.g., using a tape and reel).
[0071] Referring to
[0072] In the process flow 1700, at operation 1705, a solder print (or other adhesive print) can be performed on a leadframe, where the solder or adhesive will be used to attach a substrate to the leadframe. At operation 1710, a ceramic substrate (or other dielectric substrate) can be attached to (disposed on, etc.) the solder or adhesive from operation 1705. At operation 1715, a solder reflow or adhesive cure process can be performed to reflow the solder or cure the adhesive from operation 1705, e.g., to fixedly couple the substrate with the leadframe. A flux clean can be performed at operation 1720 to remove residual solder flux from the solder reflow operation 1715. In some implementations, such as implementations using an adhesive other than solder, operation 1720 can be omitted.
[0073] At operation 1725, the control IC can be coupled with (attached to, disposed on, etc.) the leadframe using a (conductive or non-conductive) die attach film. At operation 1730, in this example, the low-side MOSFET IC can be attached to (coupled with, disposed on, etc.) the leadframe using a, for example, a (conductive or non-conductive) die attach film or other die attach adhesive. At operation 1735, in this example, the high-side MOSFET IC can be attached to (coupled with, disposed on, etc.) the leadframe using a, for example, a (conductive or non-conductive) die attach film or other die attach adhesive. In some implementations, the order the IC are coupled with the leadframe can vary. At operation 1740, a die attach cure (e.g., a bake) can be performed, to cure the die attach films and/or other die attach adhesives (of operations 1725, 1730 and 1735) and fixedly couple (attach, etc.) the control IC, the low-side MOSFET IC and the high-side MOSFET IC with the leadframe.
[0074] At operation 1745, thermosonic wire bonding can be performed to electrically couple the low-side MOSFET, the high-side MOSFET and the control IC with the substrate (e.g., with isolation channels formed on the substrate) and with signal leads of the leadframe. At operation 1750, a plasma clean process can be performed prior to performing a transfer molding and post mold cure process. The molding process of operation 1750 can encapsulate the assembly, other than exposed portions of the leadframe, in a molding compound, such as an epoxy molding compound.
[0075] At operation 1755, a deflashing process can be performed to prepare the exposed portions of the leadframe for plating (e.g., to remove burrs, etc.). Also at operation 1755, the exposed portions of the leadframe can be plated (e.g., solder plated) and a stress relief bake can be performed. At operation 1760, DDD, trim and form of signal leads and singulation of individual assemblies, e.g., from a leadframe strip, can be performed. At operation 1765, functional and electrical testing (e.g., high voltage and direct current testing) can be performed on the assembly, and the assembly can be marked (e.g., with a part number, etc.). At operation 1770, a finishing process can be performed, including packaging the produced assembly for shipment (e.g., using a tape and reel).
[0076] The various apparatus and techniques described herein may be implemented using various semiconductor processing and/or packaging techniques. Some embodiments may be implemented using various types of semiconductor processing techniques associated with semiconductor substrates including, but not limited to, for example, Silicon (Si), Gallium Arsenide (GaAs), Gallium Nitride (GaN), Silicon Carbide (SiC), and/or so forth.
[0077] It will also be understood that when an element, such as a layer, a region, or a substrate, is referred to as being on, connected to, electrically connected to, coupled to, or electrically coupled to another element, it may be directly on, connected or coupled to the other element, or one or more intervening elements may be present. In contrast, when an element is referred to as being directly on, directly connected to or directly coupled to another element or layer, there are no intervening elements or layers present.
[0078] Although the terms directly on, directly connected to, or directly coupled to may not be used throughout the detailed description, elements that are shown as being directly on, directly connected or directly coupled can be referred to as such. The claims of the application may be amended to recite exemplary relationships described in the specification or shown in the figures.
[0079] As used in this specification, a singular form may, unless definitely indicating a particular case in terms of the context, include a plural form. Spatially relative terms (e.g., over, above, upper, under, beneath, below, lower, and so forth) are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. In some implementations, the relative terms above and below can, respectively, include vertically above and vertically below. In some implementations, the term adjacent can include laterally adjacent to or horizontally adjacent to.
[0080] While certain features of the described implementations have been illustrated as described herein, many modifications, substitutions, changes and equivalents will now occur to those skilled in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the scope of the embodiments. It should be understood that they have been presented by way of example only, not limitation, and various changes in form and details may be made. Any portion of the apparatus and/or methods described herein may be combined in any combination, except mutually exclusive combinations. The embodiments described herein can include various combinations and/or sub-combinations of the functions, components and/or features of the different embodiments described.