SEMICONDUCTOR CIRCUIT
20250300653 ยท 2025-09-25
Inventors
Cpc classification
H02M1/0009
ELECTRICITY
H03K17/162
ELECTRICITY
H03K2217/0072
ELECTRICITY
H03K2217/0045
ELECTRICITY
H03K2217/0063
ELECTRICITY
H03K2217/0027
ELECTRICITY
International classification
Abstract
A semiconductor circuit includes: a switching circuit having at least one switching element Q; a ground wiring; and a current detection circuit connected between the switching circuit and the ground wiring. A noise eliminating circuit is connected between the switching circuit and the ground wiring in a parallel relationship with respect to the current detection circuit.
Claims
1. A semiconductor circuit comprising: a switching circuit having at least one switching element; a ground wiring; and a current detection circuit connected between the switching circuit and the ground wiring, wherein a noise eliminating circuit is connected between the switching circuit and the ground wiring in a parallel relationship with respect to the current detection circuit.
2. The semiconductor circuit according to claim 1, wherein the noise eliminating circuit is an RC series circuit where a resistor and a capacitor are connected in series.
3. The semiconductor circuit according to claim 1, wherein the switching circuit is a circuit that includes a half bridge circuit having a high-side switching element and a low-side switching element, and the noise eliminating circuit is connected between the low-side switching element and the ground wiring.
4. The semiconductor circuit according to claim 3, wherein the switching circuit is a full bridge circuit where the two half bridge circuits are connected in parallel to each other.
5. The semiconductor circuit according to claim 3, wherein both of the high-side switching element and the low-side switching element are each formed of a transistor.
6. The semiconductor circuit according to claim 3, wherein the high-side switching element is formed of a diode, and the low-side switching element is formed of a transistor.
7. The semiconductor circuit according to claim 3, wherein the switching circuit is a circuit where the three or more half bridge circuits are connected in parallel to each other.
8. The semiconductor circuit according to claim 1, wherein the switching circuit is accommodated in a package, and both of the current detection circuit and the noise eliminating circuit are disposed outside the package.
9. The semiconductor circuit according to claim 2, wherein the semiconductor circuit has a structure where the switching circuit and either one of the resistor and the capacitor that constitute the RC series circuit are accommodated inside the package, and the current detection circuit and an other out of the resistor and the capacitor that constitute the RC series circuit are disposed outside the package.
10. The semiconductor circuit according to claim 1, wherein the semiconductor circuit has a structure where both the switching circuit and the noise eliminating circuit are accommodated in the package, and the current detection circuit is disposed outside the package.
11. The semiconductor circuit according to claim 1, wherein the semiconductor circuit has a structure where all of the switching circuit, the noise eliminating circuit and the current detection circuit are accommodated in one package.
Description
BRIEF DESCRIPTION OF DRAWINGS
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[0041]
DESCRIPTION OF EMBODIMENTS
[0042] Hereinafter, a semiconductor circuit according to the present invention is described based on respective embodiments illustrated in the drawings. In the respective embodiments described hereinafter, with respect to constitutional elements that have substantially the same functions, even when the constitutional elements differ from each other more or less in shape or the like, there may be a case that the same symbols are used over the embodiments, and the repeated explanation is omitted. The embodiments described hereinafter are not intended to limit the present invention called for in claims. Further, it is not always the case that all of various elements described in the embodiments and combinations of these elements are indispensable as a means to solve the problems of the present invention.
Embodiment 1
[0043]
[0044] In the semiconductor circuit 1 according to the embodiment 1, the switching circuit 10 uses a transistor Q formed of a MOSFET that functions as a switching element. As a transistor Q, a transistor formed of a wide bandgap semiconductor (for example, SiC, GaN, diamond or the like) is used.
[0045] In the semiconductor circuit 1 according to the embodiment 1, as the noise eliminating circuit 40, an RC series circuit formed by connecting a resistor R and a capacitor C in series is used.
[0046] In the semiconductor circuit 1 according to the embodiment 1, symbol 12 indicates a gate terminal, symbol 14 indicates a power terminal, symbol 16 indicates a ground terminal, symbol 20 indicates a noise eliminating circuit terminal 20, and symbol 24 indicates a source sense terminal. The noise eliminating circuit terminal 20 and the source sense terminal 24 may be used in common thus forming one terminal. Symbol 60 indicates a package formed by molding using a mold resin.
[0047] In the semiconductor circuit 1 according to the embodiment 1, the current detection circuit 30 is connected between the ground terminal 30 and the ground wiring 50 in a region outside the package 60. The noise eliminating circuit 40 is connected between the noise eliminating circuit terminal 20 and the ground wiring 50 also in a region outside the package 60.
Advantageous Effects of Embodiment 1
[0048] According to the semiconductor circuit 1 of the embodiment 1, the noise eliminating circuit 40 is connected between the switching circuit 10 and the ground wiring 50 in a parallel relationship with respect to the current detection circuit 30. Accordingly, it is possible to suppress ringing that occurs in the switching circuit 10 (in this case, between the source S of the transistor Q and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in the gate G of the switching element.
[0049] According to the semiconductor circuit 1 of the embodiment 1, the noise eliminating circuit 40 is the RC series circuit where the resistor R and the capacitor C are connected in series. Accordingly, with the relatively simple configuration, it is possible to suppress ringing that occurs between the switching circuit 10 and the ground wiring 50 and hence, it is possible to suppress ringing that occurs in the gate G of the switching element.
[0050] According to the semiconductor circuit 1 of the embodiment 1, the structure is adopted where the current detection circuit 30 and the noise eliminating circuit 40 are disposed outside the package 60. Accordingly, a characteristic of the noise eliminating circuit 40 can be easily optimized and hence, it is possible to further effectively suppress ringing that occurs in the switching element.
[Modifications 1 to 3 of Embodiment 1]
[0051]
[Modification 1 of Embodiment 1]
[0052] As illustrated in
[0053] According to the semiconductor circuit 1A of the modification 1 of the embodiment 1, as described above, by accommodating either one of the resistor R and the capacitor C that constitute the RC series circuit of the noise eliminating circuit 40 in the package 60, the number of parts mounted outside the package 60 can be reduced and hence, wiring of the noise eliminating circuit 40 is shortened so that impedance is lowered whereby it is possible to more effectively suppress ringing that occurs in the gate G of the switching element.
[Modification 2 of Embodiment 1]
[0054] As illustrated in
[0055] According to the semiconductor circuit 1B of the modification 2 of the embodiment 1, as described above, by accommodating the noise eliminating circuit 40 in the package 60, among parts that constitute the noise eliminating circuit 40, no part is mounted outside the package 60 and hence, wiring of the noise eliminating circuit 40 is further shortened so that impedance is lowered whereby it is possible to acquire an advantageous effect that ringing that occurs in a gate G of a switching element can be more effectively suppressed.
[Modification 3 of embodiment 1]
[0056] As illustrated in
[0057] According to the semiconductor circuit 1C of the modification 3 of the embodiment 1, a mounting area can be reduced and hence, it is also possible to acquire an advantageous effect that a more compact semiconductor circuit can be provided.
Embodiment 2
[0058]
[0059] In the semiconductor circuit 2 according to the embodiment 2, symbols 12H, 12L indicate gate terminals, symbol 18 indicates a middle point terminal, and symbol 24H, 24L indicate source sense terminals. The noise eliminating circuit terminal 20 and the source sense terminal 24 on a low side may be shared in common thus forming one terminal. In this specification, symbol H indicates a high side and symbol L indicates a low side.
[0060] According to the semiconductor circuit 2 of the embodiment 2, the configuration of the switching circuit 10 differs from the configuration of the corresponding switching circuit 10 in the semiconductor circuit 1 according to the embodiment 1. However, in the same manner as the case of the semiconductor circuit 1 according to the embodiment 1, the noise eliminating circuit 40 is connected between the switching circuit 10 and the ground wiring 50 in a parallel relationship with respect to a current detection circuit 30. Accordingly, in the same manner as the advantageous effects of the semiconductor circuit 1 according to the embodiment 1, it is possible to suppress ringing that occurs in the switching circuit 10 (in this case, between a source S of the transistor QL and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in a gate G of the switching element.
[0061] Further, according to the semiconductor circuit 2 of the embodiment 2, the noise eliminating circuit 40 is an RC series circuit where a resistor R and a capacitor C are connected in series and hence, in the same manner as the advantageous effects acquired by the semiconductor circuit 1 according to the embodiment 1, it is possible to suppress ringing that occurs between the switching circuit 10 and the ground wiring 50 with the relatively simple configuration whereby ringing that occurs in the gate G of the switching element can be suppressed.
[0062] Further, the semiconductor circuit 2 according to the embodiment 2 has the structure where the current detection circuit 30 and the noise eliminating circuit 40 are disposed outside the package 60. Accordingly, in the same manner as the advantageous effects acquired by the semiconductor circuit 1 of the embodiment 1, a characteristic of the noise eliminating circuit 40 can be easily optimized and hence, it is possible to more effectively suppress ringing that occurs in the switching element.
[Modifications 1 to 3 of the Embodiment 2]
[0063]
[Modification 1 of Embodiment 2]
[0064] The semiconductor circuit 2A according to the modification 1 of the embodiment 2 has basically substantially the same configuration as the semiconductor circuit 2 according to the embodiment 2. However, the semiconductor circuit 2A according to the modification 1 of the embodiment 2 differs from the semiconductor circuit 2 according to the embodiment 2 with respect to the arrangement position of a noise eliminating circuit 40. That is, as illustrated in
[0065] According to the semiconductor circuit 2A of the modification 1 of the embodiment 2, as described above, either one of the resistor R and the capacitor C that constitute the RC series circuit of the noise eliminating circuit 40 is accommodated in the package 60. Accordingly, the number of parts mounted outside the package 60 can be reduced and hence, wiring of the noise eliminating circuit 40 is shortened so that impedance is lowered whereby it is possible to more effectively suppress ringing that occurs in a gate G of a switching element.
[Modification 2 According to Embodiment 2]
[0066] As illustrated in
[0067] As described above, according to the semiconductor circuit 2B of the modification 2 of the embodiment 2, the noise eliminating circuit 40 is accommodated in the package 60. Accordingly, among parts that constitute the noise eliminating circuit 40, no part is externally mounted outside the package 60 and hence, wiring of the noise eliminating circuit 40 is further shortened so that impedance is lowered whereby it is possible to acquire an advantageous effect that ringing that occurs in a gate G of a switching element can be more effectively suppressed.
[Modification 3 of Embodiment 2]
[0068] As illustrated in
[0069] According to the semiconductor circuit 2C of the modification 3 of the embodiment 2, it is also possible to acquire an advantageous effect that a mounting area can be reduced and hence, it is possible to provide a more compact semiconductor circuit.
Embodiment 3
[0070]
[0071] In the semiconductor circuit 3 according to the embodiment 3, symbols 12H-1, 12H-2, 12L-1, 12L-2 indicate gate terminals, symbols 18-1, 18-2 indicate middle point terminals, symbols 24H-1, 24H-2, 24L-1, 24L-2 indicate source sense terminals, and symbols QH1, QH2, QL1, QL2 indicate transistors (MOSFETs). A noise eliminating circuit terminal 20 and a low-side the source sense terminal 24L-1 may be shared in common thus forming one terminal, and the noise eliminating circuit terminal 20 and the low-side source sense terminal 24L-2 may be shared in common thus forming one terminal.
[0072] The semiconductor circuit 3 according to the embodiment 3 differs from the semiconductor circuit 2 according to the embodiment 2 with respect to the configuration of the switching circuit 10. However, the configuration of the semiconductor circuit 3 according to the embodiment 3 is substantially equal to the configuration of the semiconductor circuit 2 according the embodiment 2 except for the configuration of the switching circuit 10. Accordingly, in the same manner as the semiconductor circuit 2 of the embodiment 2, a noise eliminating circuit 40 is connected between the switching circuit 10 and the ground wiring 50 in a parallel relationship with respect to a current detection circuit 30. Accordingly, in the same manner as the advantageous effects of the semiconductor circuit 2 according to the embodiment 2, it is possible to suppress ringing that occurs in the switching circuit 10 (in this case, between sources S of the transistors QL1, QL2 and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of switching elements.
[0073] Further, according to the semiconductor circuit 3 of the embodiment 3, the noise eliminating circuit 40 is an RC series circuit formed by connecting a resistor R and a capacitor C in series. Accordingly, in the same manner as the advantageous effects of the semiconductor circuit 1 according to the embodiment 1, with the relatively simple configuration, it is possible to suppress ringing that occurs between the switching circuit 10 and the ground wiring 50 and hence, it is possible to suppress ringing that occurs in the gates G of the switching elements.
[0074] The semiconductor circuit 3 according to the embodiment 3 has the structure where the current detection circuit 30 and the noise eliminating circuit 40 are disposed outside the package 60. Accordingly, in the same manner as the advantageous effects of the semiconductor circuit 1 according to the embodiment 1, characteristic of the noise eliminating circuit 40 can be easily optimized and hence, it is possible to more effectively suppress ringing that occurs in the switching element.
[Modifications 1 to 6 of Embodiment 3]
[0075]
[Modification 1 of Embodiment 3]
[0076] The semiconductor circuit 3A according to the modification 1 of the embodiment 3 has basically substantially the same configuration as the semiconductor circuit 3 according to the embodiment 3. However, the semiconductor circuit 3A according to the modification 1 of the embodiment 3 differs from the semiconductor circuit 3 according to the embodiment 3 with respect to the arrangement position of a noise eliminating circuit 40. That is, as illustrated in
[0077] According to the semiconductor circuit 3A of the modification 1 of the embodiment 3, as described above, either one of the resistor R and the capacitor C that constitute the RC series circuit of the noise eliminating circuit 40 is accommodated in the package 60. Accordingly, the number of parts mounted outside the package 60 can be reduced and hence, wiring of the noise eliminating circuit 40 is shortened so that impedance is lowered whereby the optimization can be easily performed by adjusting a characteristic of the noise eliminating circuit 40 whereby it is possible to more effectively suppress ringing that occurs in the gate G of the switching element.
[Modification 2 of Embodiment 3]
[0078] As illustrated in
[0079] According to the semiconductor circuit 3B of the modification 2 of the embodiment 3, as described above, by accommodating the noise eliminating circuit 40 in the package 60, out of parts that constitute the noise eliminating circuit 40, no part is mounted outside the package 60. Accordingly, the wiring of the noise eliminating circuit 40 is further shortened so that impedance is lowered whereby it is possible to more effectively suppress ringing that occurs in gates G of switching elements.
[Modification 3 of Embodiment 3]
[0080] As illustrated in
[0081] According to the semiconductor circuit 3C of the modification 3 of the embodiment 3, a mounting area can be reduced and hence, it is also possible to acquire an advantageous effect that a more compact semiconductor circuit can be provided.
[Modification 4 of Embodiment 3]
[0082] The semiconductor circuit 3D according to the modification 4 of the embodiment 3 basically has substantially the same configuration as the semiconductor circuit 3 according to the embodiment 3. However, the semiconductor circuit 3D according to the modification 4 of the embodiment 3 differs from the semiconductor circuit 3 of the embodiment 3 with respect to the configuration of a current detection circuit and the configuration of a noise eliminating circuit. The is, as illustrated in
[0083] In the semiconductor circuit 3D according to the modification 4 of the embodiment 3, a noise eliminating circuit terminal 20-1 and a source sense terminal 24L-1 on a low side may be shared in common thus forming one terminal, or a noise eliminating circuit terminal 20-2 and a source sense terminal 24L-2 on a low side may be shared in common thus forming one terminal.
[0084] In this manner, the semiconductor circuit 3D according to the modification 4 of the embodiment 3 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the configuration of the current detection circuit and the configuration of the noise eliminating circuit. However, respective noise eliminating circuits 40-1, 40-2 are disposed between the respective low-side switching elements (transistors QL1, QL2) and a ground wiring 50. Accordingly, in the same manner as the case of the semiconductor circuit 3 according to the embodiment 3, it is possible to suppress ringing that occurs between a switching circuit 10 (in this case, between sources S of the transistors QL1, QL2 and ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of switching elements.
[Modification 5 of Embodiment 5]
[0085] A semiconductor circuit 3E according to the modification 5 of the embodiment 3 basically has substantially the same configuration as the semiconductor circuit 3 according to the embodiment 3. However, the semiconductor circuit 3E according to the modification 5 of the embodiment 3 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the configuration of a noise eliminating circuit. That is, as illustrated in
[0086] In this manner, the semiconductor circuit 3E according to the modification 5 of the embodiment 3 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the configuration of the noise eliminating circuit. However, respective noise eliminating circuits 40-1, 40-2 are disposed between the respective low-side switching elements (transistors QL1, QL2) and a ground wiring 50. Accordingly, in the same manner as the case of the semiconductor circuit 3 according to the embodiment 3, it is possible to suppress ringing that occurs between a switching circuit 10 (in this case, between the sources S of the transistors QL1, QL2 and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of switching elements.
[Modification 6 of Embodiment 3]
[0087] The semiconductor circuit 3F according to the modification 6 of the embodiment 3 basically has substantially the same configuration as the semiconductor circuit 3 according to the embodiment 3. However, the semiconductor circuit 3F according to the modification 6 of the embodiment 3 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the configuration of a current detection circuit. That is, as illustrated in
[0088] In this manner, the semiconductor circuit 3F according to the modification 6 of the embodiment 3 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the current detection circuit. However, a noise eliminating circuit 40 is connected to the current detection circuits 30-1, 30-2 in a parallel relationship between the respective low-side switching elements (transistors QL1, QL2) and a ground wiring 50. Accordingly, in the same manner as the semiconductor circuit 3 according to the embodiment 3, it is possible to suppress ringing that occurs in a switching circuit 10 (in this case, between the sources S of the transistors QL1, QL2 and the ground wiring 50) and hence, it possible to suppress ringing that occurs in gates of the switching elements.
Embodiment 4
[0089]
[0090] In this manner, the semiconductor circuit 4 according to the embodiment 4 differs from the case of the semiconductor circuit 3D according to the modification 4 of the embodiment 3 with respect to the configuration of the high-side switching element. However, between respective low-side switching elements (transistor QL1, QL2) and a ground wiring 50, a noise eliminating circuit 40-1 is connected in a parallel relationship with a current detection circuit 30-1, and a noise eliminating circuit 40-2 is connected in a parallel relationship with a current detection circuit 30-2. Accordingly, in the same manner as the case of the semiconductor circuit 3D according to the modification 4 of the embodiment 3, it is possible to suppress ringing that occurs in a switching circuit 10 (in this case, between the sources S of the transistors QL1, QL2 and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of the switching elements.
Embodiment 5
[0091]
[0092] In this manner, the semiconductor circuit 5 according to the embodiment 5 differs from the case of the semiconductor circuit 3 according to the embodiment 3 with respect to the configuration of the switching circuit 10. However, between respective low-side switching elements (transistors QL1, QL2, QL3) and a ground wiring 50, a noise eliminating circuit (first noise eliminating circuit 40-1) is connected in a parallel relationship with respect to a current detection circuit (first current detection circuit 30-1), a noise eliminating circuit (second noise eliminating circuit 40-2) is connected in a parallel relationship with respect to a current detection circuit (second current detection circuit 30-2), and a noise eliminating circuit (third noise eliminating circuit 40-3) is connected in a parallel relationship with a current detection circuit (third current detection circuit 30-3). Accordingly, in the same manner as the case of the semiconductor circuit 3 according to the embodiment 3, it is possible to suppress ringing that occurs in the switching circuit 10 (in this case, between the sources S of the transistors QL1, QL2, QL3 and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of the switching elements.
[Planar Layout of Modification 5 of Embodiment 3]
[0093]
[0094] In the semiconductor circuit 3E according to the modification 5 of the embodiment 3, the first noise eliminating circuit 40-1 is connected with the noise eliminating circuit terminal 20-1 shared in common with the source sense terminal 24L-1 of the transistor QL1, and the second noise eliminating circuit 40-2 is connected with the noise eliminating circuit terminal 20-2 shared in common with the source sense terminal 24L-2 of the transistor QL2. Further, the current detection circuit 30 is connected with the ground terminal 16.
[0095] The semiconductor circuit 3E according to the modification 5 of the embodiment 3 has the planar layout illustrated in
[Modification 7 of Embodiment 3]
[0096]
[0097] The semiconductor circuit 3G according to the modification 7 of the embodiment 3 basically has substantially the same configuration as the semiconductor circuit 3E according to the modification 5 of the embodiment 3. However, the semiconductor circuit 3G according to the modification 7 of the embodiment 3 differs from the semiconductor circuit 3E according to the modification 5 of the embodiment 3 with respect to the arrangement positions of noise eliminating circuits. That is, as illustrated in
[0098] In this manner, in the semiconductor circuit 3G according to the modification 7 of the embodiment 3, the noise eliminating circuits 40-1, 40-2 are accommodated in the package 60. On the other hand, between respective low-side switching elements (transistors QL1, QL2) and a ground wiring 50 not illustrated in the drawing, the noise eliminating circuits 40-1, 40-2 are connected in a parallel relationship with respect to a current detection circuit 30. Accordingly, in the same manner as the case of the semiconductor circuit 3E according to the modification 5 of the embodiment 3, it is possible to suppress ringing that occurs in the switching circuit 10 (in this case, between the sources S of the transistors QL1, QL2 and the ground wiring 50) and hence, it is possible to suppress ringing that occurs in gates G of switching elements.
[0099] Further, in the semiconductor circuit 3G according to the modification 7 of the embodiment 3, the noise eliminating circuits 40-1, 40-2 are accommodated in the package 60. Accordingly, the wirings of the noise eliminating circuits 40-1, 40-2 are further shortened so that impedance is lowered whereby it is possible to more effectively suppress ringing that occurs in the gates of the switching elements.
[Modification 8 of Embodiment 3]
[0100]
TEST EXAMPLE
[0101] Following test examples were performed to confirm the advantageous effects of the present invention.
1. Semiconductor Circuits Used in Test Examples
[0102] In the test example, the semiconductor circuit 3E according to the modification 5 of the embodiment 3 is used as a test example 1 (embodiment example) (see
2. Testing Method of Test Examples
[0103] The test was performed with respect to the test example 1 (embodiment example) and the test example 2 (comparison example) respectively on the following condition. The test was performed in such a manner that, a drain-source voltage Vds, a gate-source voltage Vgs and a drain-source current Id were simulated by a circuit simulator in a state where a direct current voltage of 400 V was applied between the ground wiring 50 (not illustrated in the drawing) and the power terminals 14-1, 14-2, and gate voltages for enabling a full bridge operation were applied to gate terminals 12H-1, 12H-2, 12L-1, 12L-2 of four transistors QH1, QH2, QL1, QL2 at suitable timing.
3. Test Results in Test Examples
[0104]
[0105] In the test example 2 (comparison example), as can be understood from
[0106] Accordingly, if cut-off frequency is decided to be equal to or below the frequency of noise, a resistance value R1 can be decided, and capacitance C1 of a capacitor can be decided by the following formula.
[0107] As can be understood from
[0108] With respect to the frequency of noise, it is necessary that the cutoff frequency is equal to or below the frequency of noise. Further, it is necessary that that the cutoff frequency is equal to or more than switching frequency of the bridge circuit. To ease the gradient of the rising and the falling of a switching waveform as the cutoff frequency approaches closer to switching frequency, it is desirable that the cutoff frequency is higher than the switching frequency. The cutoff frequency is set to a value between the noise frequency and the switching frequency. It is necessary to decide the cutoff frequency by taking into account these conditions.
[0109]
[0110] As can be understood by comparing
[0111] The present invention is not limited to the above-mentioned respective embodiments, and various modifications can be carried out without departing from the gist of the present invention. For example, the following modifications are conceivable. [0112] (1) The shapes, the numbers, the sizes, the positions and the like of the configurational elements in the semiconductor element of the present invention are not limited to the values illustrated in the respective drawings, and can be suitably changed provided that the technical features of the present invention are not impaired. [0113] (2) In the respective modifications, the MOSFET is used as the transistor. However, the present invention is not limited to such a configuration. An IGBT can be used as the transistor. [0114] (3) In the modification 1 of each of the embodiments 1 to 3, out of the resistor R and the capacitor C that constitute the RC series circuit of the noise eliminating circuit 40, the resistor R is accommodated in the package 60, and the capacitor C is disposed outside the package 60. However, the present invention is not limited to such a configuration. Out of the resistor R and the capacitor C that constitute the RC series circuit of the noise eliminating circuit 40, the capacitor C may be accommodated in the package 60, and the resistor R may be disposed outside the package 60.