MANUFACTURING METHOD OF VAPOR CHAMBER

Abstract

The present application relates to a manufacturing method of a vapor chamber, including processing an upper cover and a lower cover into predetermined shapes; fixing a capillary structure on a surface of an inner chamber of the lower cover; injecting a working liquid into the capillary structure; and fixing the upper cover and the lower cover in a vacuum environment. The present application has an effect of more accurately control of a quality of the working liquid.

Claims

1. A manufacturing method of a vapor chamber, comprising the following steps: processing an upper cover and a lower cover into predetermined shapes; fixing a capillary structure on a surface of an inner chamber of the lower cover; injecting a working liquid into the capillary structure; and fixing the upper cover and the lower cover in a vacuum environment.

2. The manufacturing method of the vapor chamber according to claim 1, wherein the step of injecting the working liquid into the capillary structure is completed in the vacuum environment, wherein a temperature of the vacuum environment is maintained at or below 30 C.

3. The manufacturing method of the vapor chamber according to claim 2, wherein in the step of injecting the working liquid into the capillary structure, when an area occupied by the capillary structure is larger than an area where the working liquid diffuses once dropped: when the capillary structure is distributed in a rectangular shape, the working liquid is injected sequentially along a length direction of the capillary structure, and when the capillary structure is distributed in a square shape, the working liquid is injected gradually away from a center of the capillary structure.

4. The manufacturing method of the vapor chamber according to claim 1, wherein the step of fixing the upper cover and the lower cover in the vacuum environment comprises: placing the upper cover relative to the lower cover at a predetermined position; positioning the upper cover and the lower cover; and welding the upper cover and the lower cover.

5. The manufacturing method of the vapor chamber according to claim 4, wherein in the step of positioning the upper cover and the lower cover, a joint between the upper cover and the lower cover is divided into a clamping area and a welding area, and the clamping area is closer to a center of a shape of the upper cover and the lower cover than the welding area.

6. The manufacturing method of the vapor chamber according to claim 5, wherein in the step of positioning the upper cover and the lower cover, a lower clamping block of a fixture is provided with a lower limiting groove, the lower limiting groove is configured for arranging the lower cover, a side wall of the lower limiting groove abuts against a peripheral side of the lower cover, an upper clamping block of the fixture is provided with an upper limiting groove, and the upper limiting groove is configured for arranging the upper cover in an area inside the clamping area to form a matching stepped portion at the clamping area of the upper cover.

7. The manufacturing method of the vapor chamber according to claim 5, wherein in the step of welding the upper cover and the lower cover, a laser welding is used for welding treatment.

8. The manufacturing method of the vapor chamber according to claim 5, wherein in the step of welding the upper cover and the lower cover, two welding positions at a front and rear are symmetrically provided relative to the center of the shape of the upper cover.

9. The manufacturing method of the vapor chamber according to claim 6, wherein a surface of a side of the lower clamping block away from the upper clamping block is exposed outside the vacuum environment, the surface of the side exposed outside the vacuum environment is in contact with a cooling water, and the cooling water seals a gap between the lower clamping block and a box containing the vacuum environment.

10. The manufacturing method of the vapor chamber according to claim 6, wherein after the step of welding the upper cover and the lower cover, the manufacturing method comprises releasing a clamping and positioning of a product after a temperature of the product drops below 30 C.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] FIG. 1 is a schematic view of liquid injection in an embodiment of the present application with a capillary structure distributed in a rectangular shape.

[0039] FIG. 2 is a schematic view of liquid injection in the embodiment of the present application with the capillary structure distributed in a square shape.

[0040] FIG. 3 is a schematic view shows how an upper cover and a lower cover are positioned in the embodiment of the present application.

DETAILED DESCRIPTION

[0041] The present application is further described in detail below with reference to FIGS. 1-3.

[0042] A manufacturing method of a vapor chamber is disclosed in the embodiment of the present application. The manufacturing method of the vapor chamber includes the following steps:

[0043] Firstly, processing an upper cover 1 and a lower cover 2 into predetermined shapes, specifically, which can be processed through stamping, etching, and CNC, the upper cover 1 and lower cover 2 can be made of stainless steel, copper, and titanium, but not limited to these three materials; secondly, fixing a capillary structure 3 on a surface of an inner chamber of the lower cover 2.

[0044] Thirdly, dropping a working liquid into the capillary structure 3, the working liquid is deionized water; if an injection is not completed in a vacuum environment, the capillary structure 3 and the lower cover 2 need to be transferred to the vacuum environment after the injection is completed, therefore, the capillary structure 3 needs to be firmly fixed on the lower cover 2; if the injection is completed in the vacuum environment, the capillary structure 3 can be detachably fixed to the lower cover 2 by directly placing the capillary structure 3 on the lower cover 2 through a supporting column structure of the lower cover 2 before injection, at the same time, considering that an evaporation of the working liquid will accelerate, it is necessary to make the capillary structure 3 absorb the working liquid more quickly, according to different size and specifications of product, there will be corresponding different dripping methods. Specifically, referring to FIGS. 1 and 2, if the capillary structure 3 is distributed in a rectangular shape, the working liquid is injected sequentially along a length direction of the capillary structure 3, if the capillary structure 3 is distributed in a square shape, the working liquid is injected gradually away from a center of a shape of the capillary structure 3, so that the capillary structure 3 at different positions can more fully adsorb the working liquid, in addition, it should be noted that a temperature also affects the evaporation of the working liquid, so the temperature of the vacuum environment needs to be kept below 30 C.

[0045] Fourthly, fixing the upper cover 1 and the lower cover 2 in the vacuum environment; specifically, if a liquid injection is completed in a non-vacuum environment, the lower cover 2 needs to be fixed at a predetermined position in the vacuum environment first, if the liquid injection is completed in the vacuum environment, the lower cover 2 is fixed at the predetermined position in the vacuum environment during a liquid injection process, therefore, after the liquid injection is completed, only placing the upper cover 1 to the lower cover 2 first, then positioning the upper cover 1 and the lower cover 2, and then welding the upper cover 1 and the lower cover 2; when positioning, it is not only necessary to maintain stability of positions of the upper cover 1 and the lower cover 2, but also to prevent a leakage of the working liquid evaporated during a welding process, therefore, special provisions are required for positioning methods of the product.

[0046] Referring to FIG. 3, a joint between the upper cover 1 and lower cover 2 is divided into a clamping area 4 and a welding area 5, both the clamping area 4 and the welding area 5 are provided in a circular distribution, and the clamping area 4 is closer to a center of a shape of the upper cover 1 and the lower cover 2 than the welding area 5, the clamping area 4 can directly subjected to a clamping force applied by clamping, the welding area 5 needs to provide sufficient area for welding, so it can achieve inner clamping and outer welding, thereby better preventing the leakage of the working liquid and more accurately controlling a quality of the working liquid.

[0047] Referring to FIG. 3, in order to achieve a special positioning method mentioned above, a lower clamping block 6 of a fixture is provided with a lower limiting groove 61, which can be used to accommodate the lower cover 2, a peripheral side of the lower cover 2 is abut against a side wall of the lower limiting groove 61 to achieve a position positioning of the lower cover 2, an upper clamping block 7 of the fixture is provided with an upper limiting groove 71, and a part of the upper cover 1 located inside the clamping area 4 is in the upper limiting groove 71, therefore, the upper cover 1 will form a matching stepped portion 11 with a stepped structure close to the clamping area 4 to achieve positioning of the upper cover 1, a gap between the upper clamping block 7 and the lower clamping block 6 will align with a position of the welding area 5. Thus, a positioning fixture that meets requirements of inner clamping and outer welding is formed.

[0048] In addition, in this embodiment, a structure of this positioning fixture further has the following advantages: firstly, the fixture is wrapped around the product, so the fixture can utilize material characteristics to better dissipate heat for the product during the welding process, in order to maintain a yield of the product; secondly, the upper limiting groove 71 completely presses a center position of the upper cover 1, so that when the working liquid evaporates during welding, the product can be prevented from deformation by a clamping of the upper cover 1.

[0049] When welding, it is necessary to consider an impact of heat generated by welding on the product and a box containing the vacuum environment, there are corresponding optimization settings. Firstly, welding treatment can be carried out through a laser welding, specifically, installing a laser head inside the box containing the vacuum environment can achieve this, therefore, a size of the box containing the vacuum environment does not need to be very large, which can more stably maintain a vacuum sealing of the box.

[0050] Secondly, if a thickness of the joint between the upper cover 1 and the lower cover 2 is large, resulting in a longer welding time per unit area, if product specifications are large, welding positions are not provided continuously, specifically, referring to FIG. 1, two welding positions of a front and rear are symmetrically provided at the center of the shape of the upper cover 1, so as to balance a temperature difference at different positions in the vacuum environment and maintain an uniformity of air pressure in a closed vacuum environment, at the same time, during the welding process, a direction of movement of the working liquid inside the product can constantly change after evaporation, the different positions of the capillary structure 3 can fully adsorb the working liquid, thereby improving the yield of the product, in addition, if the product specifications are small, the front and rear weldings need to be separated for a period of time, to prevent the product from overheating.

[0051] Thirdly, heat dissipation in the vacuum environment is mainly achieved through solid conduction, therefore, in order to efficiently dissipate heat from the product while stability maintaining the product in the vacuum environment, a surface of a side of the lower clamping block 6 away from the upper clamping block 7 is exposed on an outer surface of the box containing the vacuum environment, that is, a lower surface of the lower clamping block 6 is exposed outside the vacuum environment, and the surface of the side exposed outside the vacuum environment is in contact with a cooling water to achieve more efficient heat dissipation for the product, in addition, considering that a gap between the lower clamping block 6 and the box containing the vacuum environment can also affect a vacuum sealing performance, so the cooling water needs to seal the gap between the lower clamping block 6 and the box containing the vacuum environment.

[0052] After the welding is completed, the temperature of the product is not immediately decrease, so it is necessary to wait for the working liquid inside the product to stop evaporating before releasing the clamping and positioning of the product, specifically, the temperature generally needs to be lowered to below 30 C.

[0053] An implementation principle of the manufacturing method of the vapor chamber in the present application is as followings: injecting the working liquid and fixing the upper cover 1 and lower cover 2 in the vacuum environment, so there is no need to exhaust the air inside the inner chamber of the product through pumping and heating, which can more accurately control the quality of the working liquid and simplify the production process of the product, in addition, designs of an injection port and an injection tube are also eliminated, thereby reducing production costs.

[0054] The above are the preferred embodiments of the present application, which are not intended to limit the protection scope of the present application. Therefore, all equivalent changes made according to the structure, shape and principle of the present application should be covered within the protection scope of the present application.

LIST OF REFERENCE SIGNS

[0055] 1 upper cover [0056] 11 matching stepped portion [0057] 2 lower cover [0058] 3 capillary structure [0059] 4 clamping area [0060] 5 welding area [0061] 6 lower clamping block [0062] 61 lower limiting groove [0063] 7 upper clamping block [0064] 71 upper limiting groove