APPARATUS AND METHOD FOR BONDING SUBSTRATES

Abstract

A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the substrates includes a device in which the first substrate is mounted on a first chuck and the second substrate is mounted on a second chuck. A plate is arranged between the second substrate and the second chuck. The second substrate with the plate is deformed with respect to the second chuck before and/or during the bonding.

Claims

1. A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the substrates, the first substrate being mounted on a first chuck, the second substrate being mounted on a second chuck, a plate being arranged between the second substrate and the second chuck, the method comprising: deforming the plate to deform the second substrate with respect to the second chuck before and/or during the bonding; and determining, using distance sensors distributed along a surface of the second chuck, a curvature of the second substrate and/or the plate, the curvature being determined from a distance between the second substrate and the second chuck or a distance between the plate and the second chuck.

2. The method according to claim 1, further comprising: deforming another plate arranged between the first substrate and the first chuck to deform the first substrate with respect to the first chuck before and/or during the bonding.

3. The method according to claim 1, further comprising: setting and/or controlling the deforming of the plate prior to contact of the contact surfaces.

4. The method according to claim 1, wherein, due to fluid pressure loading, at least one deformation is set and/or controlled by bending means that loads the plate.

5. The method according to claim 2, wherein a first fixing means arranged annularly on a circumference of the first chuck and the second chuck fixes the first plate, the second plate, or the first and second plates.

6. The method according to claim 5, wherein a second fixing means of the plate and the other plate is connected to the first fixing means and fixes the first substrate, the second substrate, or the first substrate and the second substrate.

7. The method according to claim 2, wherein the deforming of the plate to deform the second substrate and the deforming of the other plate to deform the first substrate is detected by the distance sensors.

8. The method according to claim 1, wherein a curvature radius of the plate is adjustable.

9. A device for bonding a first substrate to a second substrate at mutually facing contact surfaces of the first and second substrates, said device comprising: a first chuck configured to mount the first substrate; a second chuck configured to mount the second substrate, the second chuck comprising a plate arranged between the second substrate and a surface of the second chuck; bend-changing means configured to control a deforming of the plate during the bonding to deform the second substrate with respect to the second chuck; and distance sensors distributed along a surface of the second chuck, the distance sensors being configured to determine a curvature of the second substrate and/or the plate, the curvature being determined from a distance between the second substrate and the second chuck or a distance between the plate and the second chuck.

10. The device according to claim 9, further comprising: another plate arranged between the first substrate and the first chuck, wherein the first substrate with the other plate is constructed in a deformable manner with respect to the first chuck for deformation thereof before and/or during the bonding.

11. The device according to claim 9, wherein the first chuck and/or the second chuck have bending means and/or fluid-pressure loading means for setting and/or controlling the deforming.

12. The device according to claim 10, wherein the first chuck and/or the second chuck have an annularly arranged first fixing means for fixing the plate and/or the other plate.

13. The device according to claim 12, wherein the plate, the other plate, or the plate and the other plate has second fixing means connected to the first fixing means of the first and/or second chuck.

14. The device according to claim 10, wherein the plate, the other plate, or the plate and the other plate has a Young's modulus of between 0.01 GPa and 1100 GPa.

15. The device according to claim 10, wherein the distance sensors detect deformations of the plate and the substrates.

16. The device according to claim 9, wherein a curvature radius of the plate is adjustable.

17. The method according to claim 2, wherein the plate, the other plate, or the plate and the other plate is fixed by a first fixing means arranged in a plate-shaped manner on a circumference of the first and second chucks exclusively in a region of a circumferential edge of the plates.

18. The method according to claim 5, wherein the first substrate, the second substrate, or the first substrate and the second substrate is fixed by a second fixing means of a same type connected to the first fixing means.

19. The device according to claim 12, wherein the first substrate, the second substrate, or the first substrate and the second substrate is fixed by a second fixing means of a same type connected to the first fixing means.

20. The method according to claim 1, wherein the distance sensors are used as curvature measuring means to interpolate or calculate a curvature between support points.

21. The device according to claim 9, wherein the distance sensors are used as curvature measuring means to interpolate or calculate a curvature between support points.

22. A plate, comprising: a first plate side fixable on a chuck of a device using a first fixing means; a second plate side arranged opposite the first plate side to fix a first substrate or a second substrate on the plate using a second fixing means; and at least one fixing-element connection configured to connect the second fixing means to the chuck, wherein distance sensors are used as curvature measuring means for determining a curvature of the substrate or the plate from a distance between the substrate and the chuck or from a distance between the plate and the chuck, the distance sensors being distributed along a surface of the chuck.

23. The plate according to claim 22, wherein the first substrate is fixed on the plate, wherein the plate is arranged between the first substrate and the chuck, and wherein the first substrate with the plate is constructed in a deformable manner with respect to the first chuck before and/or during the bonding.

24. The plate according to claim 22, wherein the chuck has mechanical, bending means and/or fluid-pressure loading means for setting and/or controlling the deformations.

25. The plate according to claim 23, wherein the chuck has the first fixing means annularly arranged thereon for fixing the plate.

26. The plate according to claim 25, further comprising the second fixing means connected to the first fixing means.

27. The plate according to claim 22, wherein the plate has a Young's modulus of between 0.01 GPa and 1100 GPa.

28. The plate according to claim 22, wherein the distance sensors detect deformations of the plate and the substrates.

29. The plate according to claim 22, wherein a curvature radius of the plate is adjustable.

30. The plate according to claim 22, wherein the first substrate, the second substrate, or the first substrate and the second substrate is fixed by a second fixing means of a same type connected to the first fixing means.

31. The plate according to claim 22, wherein the distance sensors are used as curvature measuring means to interpolate or calculate a curvature between support points.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0187] FIG. 1 shows a first embodiment according to the invention with graphs for pressure and deflection curves,

[0188] FIG. 2a shows the first embodiment of a device according to the invention in a first process step of a method according to the invention,

[0189] FIG. 2b shows the first embodiment in a second process step,

[0190] FIG. 2c shows the first embodiment in a third process step,

[0191] FIG. 2d shows the first embodiment in a fourth process step,

[0192] FIG. 2e shows the first embodiment in a fifth process step,

[0193] FIG. 3 shows a second embodiment of the device according to the invention,

[0194] FIG. 4a shows a third embodiment of the device according to the invention in a first process step, and

[0195] FIG. 4b shows the third embodiment in a second process step.

[0196] In the figures, the same components or components with the same function are labelled with the same reference numbers.

DETAILED DESCRIPTION OF THE INVENTION

[0197] The FIG. 1 shows a bonder 13 according to the invention in a process step according to the invention, wherein of the bonder 13, only a lower chuck 1u and an upper chuck 1o arranged opposite the lower chuck 1u are illustrated by way of illustration. The remaining conventional constituents of the bonder 13 are not illustrated.

[0198] On the lower chuck 1u, a lower plate 17u is fixed on a first plate side 20 by means of annularly running first fixing elements 2 of the lower chuck 1u. The fixing elements 2 can be loaded in a fluid-technical manner in particular, preferably using channels which can be loaded by means of pressure and which penetrate the chuck 1u.

[0199] The lower plate 17u has second fixing elements 2 on a plate side 21 opposite the first plate side 20, which fixing elements can preferably be controlled directly by means of the lower chuck 1u and/or are connected to the first fixing elements 2. Likewise, the upper chuck 1o has an upper plate 17o, which can be fixed by means of annularly running fixing elements 2 of the upper chuck 1o.

[0200] In all of the embodiments shown, the second fixing elements 2 of the plates 17u, 17o are connected by means of fixing-element connections 6 to the chuck 1o, 1u. If the fixing elements 2, 2 are vacuum fixings, the fixing-element connections 6 are preferably constructed as channels which penetrate the plates 17u, 17o in particular. In the case of the evacuation of the channels of the lower chuck 1u, the fixing-element connections 6 of the lower plate 17u are also evacuated, automatically in particular. The same is true for the upper plate 17o and the upper chuck 1o.

[0201] The plates 17u, 17o are in a curved state, because inside the annularly running fixing elements 2, bending elements 5 effect a curvature, whilst the fixing elements 2 fix the plates 17u, 17o.

[0202] A first (upper) substrate 4o is fixed on the upper plate 17o by means of the fixing elements 2. A second (lower) substrate 4u is fixed on the lower plate 17u by means of the fixing elements 2.

[0203] First graphs in the FIG. 1 above and below the bonder 13 illustrate an actual curvature 14u, 14o of the substrates 4u, 4o and/or the plates 17u, 17o and also a desired curvature 15u, 15o of the substrates 4u, 4o and/or the plates 17u, 17o as a function of the x position. In addition to the first graphs, second graphs are shown in FIG. 1, which illustrate a pressure pr, which falls by means of the fixing-element connections 6 constructed as lines and fixes the substrates 4u, 4o on the plates 17u, 17o. In the illustration, there is only one fixing element 2, realized in particular as a circular groove, on each chuck 17u, 17o. The third graphs finally show the pressure p.sub.1, which is applied at the periphery of the plates 4u, 4o.

[0204] Two types of limiting elements can be seen in the figure. First limiting elements 19, which limit a purely translational displacement of the plate 17u according to the invention, are located on the lower chuck 1u. It is conceivable for example, that in a process step, all fixings 2 are disconnected and the lower plate 17u floats freely on an air cushion, which is created by means of a fluid, which is discharged from the bending element 5 in particular.

[0205] Second limiting elements 19 are located on the upper chuck 1o, which are shaped in such a manner that they prevent a falling down of the plate 17o, particularly using the substrate 4o fixed thereon.

[0206] In a preferred embodiment of an upper chuck 1o according to FIG. 3, a control of the second fixing elements 2 independent of the first fixing elements 2 (channel loaded with pressure p.sub.1) of the chuck 1u takes place with the aid of an, in particular extendable fixing-element connection 6 (not entered in FIG. 1). This can be loaded with a pressure pr by means of a pressure line.

[0207] In the following series of figures, a process flow according to the invention is illustrated in detail on the basis of a plurality of process steps according to the above-described first embodiment. For the sake of clarity, the illustration of the graphs for the pressure and deflection curves is dispensed with. The desired and actual curvatures 15u, 15o, 14u, 14o are not entered in the further figures, as no graphs are present. The schematic curve thereof can be drawn from FIG. 1.

[0208] The FIG. 2a shows a bonder 13 according to the invention for contacting and for bonding oppositely arranged contact surfaces 4k of a first/upper substrate 4o and a second/lower substrate 4u. The bonder 13 comprises a lower chuck 1u and an upper chuck 1o. The chucks 1u, 1o can in particular be realized for mounting a first/upper substrate 4o and/or a first/upper plate 17o and a second/lower substrate 4u and/or a second/lower plate 17u, wherein the lower chuck 1u can be designed or equipped differently from the upper chuck 1o.

[0209] The upper chuck 1o preferably has measuring holes 12, through which a measurement of the plate 17o and/or the substrate 4o can take place, particularly from a rear side of the substrate holder 10. If the substrate 4o is measured, the plate 17o in particular also has corresponding measuring holes 12. Alternatively, sensors can also be arranged in the measuring holes 12, 12. The measuring holes 12, 12 are in particular arranged between the bend-changing means and the fixing means. Alternatively or additionally, the lower substrate holder 1u and/or the lower plate 17u can have corresponding measuring holes 12, 12. The measuring holes penetrate the chuck 1 and in particular run orthogonally to the mounting surface 1s. Preferably, the measuring holes 12 are arranged in a distributed manner on the surface at a spacing of 180 or 120 to one another.

[0210] The chucks 1u, 1o have a mounting surface 1s with a plurality of fixing elements 2 and sensors 3, 3. The fixing elements 2 are evacuated by means of channels constructed as fluid lines and fix the plates 17u, 17o. The distance sensors are arranged in a distributed manner directly on the bend-changing means 5 up to the fixing means. The distance sensors therefore extend over a part surface of the mounting surface 1s.

[0211] Sensors 3 constructed as pressure sensors are arranged in the region of the fixing means, using which the pressures p.sub.1 are measured along the x position of the sensors 3 between the plates 17u, 17o and chucks 1u, 1o.

[0212] The upper substrate 4o has an actual curvature 14o, present due to gravity in particular, whilst the lower substrate 1u lies in a planar manner and therefore in the sense of the present invention does not have an actual curvature 14u (in reality it has a vanishingly small actual curvature). However, it is also conceivable that the gravitatively set actual curvature 14o is insignificantly small.

[0213] The FIG. 2b shows the bonder 13 in a further process step. The two substrates 4u and 4o were brought closer to one another by means of a relative movement of the two substrate holders 1u, 1o. Otherwise, nothing has changed compared to the situation according to FIG. 2a.

[0214] The FIG. 2c shows the bonder 13 in a further process step. Due to the use of the bending elements 5, in the case shown a gas-outlet opening, through which a gas flows with a pressure p2, the two plates 17u, 17o and thus the substrates 4u, 4o are brought into a desired curvature, wherein the pressure is preferably regulated by means of the distance sensors. For the control/regulation, the pressures of the fixing elements 2 can also be used, so that the same also take on tasks of the bending means 5, 5 or bend-changing means 5, 5 and thus in the sense of the invention may be included among the same. The pressure values are in particular controllable/regulatable continuously and/or steadily, preferably separately in zones.

[0215] The FIG. 2d shows the bonder 13 in a further process step. The two substrates 4u, 4o form a bond wave, by bringing the substrates 4u, 4o closer to one another, which bond wave propagates radially outwards, wherein the curvature of the substrates 4u, 4o changes continuously (bend-changing means). In this case, the bend change of the lower and/or upper plate 17u, 17o or the lower and/or upper substrate 1u, 1o is monitored continuously by means of the distance sensors and if necessary corrected by means of the bending element 5 and/or the fixing elements 2 in such a manner that the respectively desired or set desired curvature is achieved (bend-changing means). Important parameters represent the radii of curvature R1, of the upper plate 17o or the upper substrate 4o, and R2, of the lower plate 17u or lower substrate 4u, at the point of the bond wave.

[0216] The pressures of the four inner circumferential rows of fixing elements 2 are simultaneously reduced to p0 at the upper chuck 1o and the lower chuck 1u. As a result, the substrates 1u, 1o or the plates 17u, 17o lose the fixing to the mounting surface 1o, particularly continuously from the inside outwards, as a result of which the pressure p2 can propagate further from the bending element 5.

[0217] As the control takes account of the curvatures and bend changes of the substrates, run-out errors are minimized. In particular, in contrast to the prior art, run-out errors are minimized further, as the plate/substrate system has a higher bending resistance and the substrate therefore bonds to the opposite substrate in a more stable manner.

[0218] The FIG. 2e shows the bonder 13 in a further process step. The two substrates 1u, 1o have been bonded to one another in a controlled manner, in that the pressure of the outermost row of fixing elements 2 of the upper chuck 1o has been reduced to p0. In particular, the upper plate 17o has been left on the upper chuck 1o. It is also conceivable that the upper plate 17o remains on the upper substrate 4o. In this case, limiting elements 19 must not be present.

[0219] Further embodiments of the chuck according to the invention are illustrated in the further images.

[0220] The FIG. 3 shows an improved and more preferred embodiment according to the invention of a chuck 1u and a plate 17u, in which the fixing is transferred from the chuck 1u onto the plate 17u by means of a fixing-element connection 6, which is constructed as a bellows or lip in particular. The fixing-element device 6 is extendable in particular, without interrupting the fixing of a substrate 4u to the plate 17u. In the case of an electrostatic fixing, the fixing-element connection 6 could for example be wires, which maintain the potential between the chuck 1u and the plate 17u. In the case of the illustrated vacuum fixing, the fixing-element connection 6 is an extendable bellows, which is as vacuum-tight as possible in particular. If the fixing-element connection 6 is mounted centrally in particular, possible bending elements 5 are located to the side of the fixing-element connection 6.

[0221] The FIG. 4a shows a chuck 1u, which is structured similarly to the chuck 1u, in a first process step according to the invention. The sealing rings 18, which are arranged particularly annularly on the chuck 1u, constitute a differentiating feature.

[0222] The plate 17u is mounted on the sealing rings 18.

[0223] In this embodiment, a pin is arranged at the centre of the chuck 1u as bending element 5. The pin penetrates the chuck 1u at the centre and can be moved in a z direction relatively to the same. At a first time, the plate 17u is laid with the substrate 4u onto the tip of the bending element 5 which is already lifted. At the same time, the plate is still lying on non-deformed sealing rings 18. The plate 17u is essentially not yet bent.

[0224] The FIG. 4b shows the chuck 1u in a second process step. The plate 17u is pulled downwards at the edge by means of the switching on of the vacuum along a vacuum track (channels, fixing elements 2, fixing-element connections 6, 6, fixing elements 2). As a result, the slightly deformable, elastic sealing rings 18 are deformed and seal the plate against the chuck 1u. During the bonding process according to the invention, after the contacting of the substrate 4u with the substrate 4o (not shown), the vacuum track is flooded again and therefore allows an improved and optimized bonding process of the substrate 4u.

[0225] The embodiment of FIGS. 4a, 4b can be considered as a kinematic reversal for the embodiments from FIGS. 1-2e. In particular, this embodiment is characterized in that the plate 17u is also pulled downwards at the periphery by means of the creation of a vacuum acting at the periphery in particular, whilst in preceding embodiments it was described how the application of force by means of the bending element 5 leads to the plate 17u being deformed in the region of the bending element 5 by means of the distribution of the fluid flowing in through the bending element 5.

TABLE-US-00001 Reference List 1o Upper chuck 1u, 1u Lower chuck 1s Mounting surface 2, 2 Fixing elements 3 Sensors 4o First/upper substrate 4u Second/lower substrate 4a Substrate mounting surface 4k Contact surfaces 5, 5 Bending element 6, 6 Fixing-element connection 12 Measuring holes 13 Bonder 14u, 14o Actual curvature 15u, 15o Desired curvature 16u, 16o Pressure curve 17o Upper plate 17u Lower plate 18 Sealing ring 19, 19 Limiting element 20 First plate side 21 Second plate side p.sub.1, p.sub.1 Pressure