X-RAY GENERATION APPARATUS AND X-RAY IMAGING APPARATUS
20250349488 ยท 2025-11-13
Assignee
Inventors
Cpc classification
H01J35/025
ELECTRICITY
H05G1/06
ELECTRICITY
International classification
Abstract
X-ray generation apparatus includes X-ray generation tube having insulating tube, cathode, and anode having target for generating X-rays; driving circuit for driving the X-ray generation tube; and accommodating container accommodating the X-ray generation tube and the driving circuit. The accommodating container has opening end and the X-ray generation tube closes the opening end. The accommodating container is filled with insulating liquid. The accommodating container has first space storing the driving circuit, and second space protruding from the first space and storing the X-ray generation tube. The accommodating container includes protrusion portion surrounding the second space, and one end of the second space forms the opening end, the entire insulating tube is stored in the second space, and the protrusion portion is made of insulating material.
Claims
1. An X-ray generation apparatus comprising: an X-ray generation tube including an insulating tube, a cathode including an electron emitting portion, and an anode including a target that generates X-rays when electrons from the electron emitting portion collide; a driving circuit configured to drive the X-ray generation tube; and an accommodating container configured to accommodate the X-ray generation tube and the driving circuit, wherein the accommodating container has an opening end, and the X-ray generation tube is arranged to close the opening end, the accommodating container is filled with an insulating liquid such that the insulating liquid contacts the insulating tube, the accommodating container has a first space storing the driving circuit, and a second space protruding from the first space and storing the X-ray generation tube, the accommodating container includes a protrusion portion surrounding the second space, and one end of the second space forms the opening end, the entire insulating tube is stored in the second space, the protrusion portion is made of an insulating material, at least the entire side surface of the cathode is covered with a member, and the member is charged to negative polarity by friction with the insulating liquid.
2. The X-ray generation apparatus according to claim 1, wherein the protrusion portion is in contact with the insulating liquid.
3. The X-ray generation apparatus according to claim 1, wherein the protrusion portion is surrounded by an X-ray shielding member.
4. The X-ray generation apparatus according to claim 1, wherein the protrusion portion includes an X-ray shielding member.
5. The X-ray generation apparatus according to claim 3, wherein the X-ray shielding member is attached to the protrusion portion.
6. The X-ray generation apparatus according to claim 3, wherein the X-ray shielding member is formed as an integral member with the protrusion portion.
7. The X-ray generation apparatus according to claim 3, wherein the X-ray shielding member is electrically connected to the anode.
8. The X-ray generation apparatus according to claim 1, wherein the protrusion portion is made of one of polytetrafluoroethylene, PMMA (polymethyl methacrylate resin), a glass material, a ceramic material, an epoxy resin, and polycarbonate.
9. An X-ray generation apparatus comprising: an X-ray generation tube including an insulating tube, a cathode including an electron emitting portion, and an anode including a target that generates X-rays when electrons from the electron emitting portion collide; an accommodating container configured to accommodate the X-ray generation tube; and a driving circuit configured to drive the X-ray generation tube, wherein the accommodating container has an opening end, and the X-ray generation tube is arranged to close the opening end, the accommodating container is filled with an insulating liquid to contact the insulating tube, the accommodating container has a first space storing the driving circuit, and a second space protruding from the first space and storing the X-ray generation tube, the accommodating container includes a protrusion portion surrounding the second space, and one end of the second space forms the opening end, the entire insulating tube is stored in the second space, the protrusion portion is made of a conductor, and an insulating member is provided to cover an inner surface of the protrusion portion, at least the entire side surface of the cathode is covered with a member, and the member is charged to negative polarity by friction with the insulating liquid.
10. The X-ray generation apparatus according to claim 9, wherein the insulating member is provided to cover the entire inner surface of the protrusion portion.
11. The X-ray generation apparatus according to claim 9, wherein the insulating member is formed by mold forming.
12. The X-ray generation apparatus according to claim 9, wherein the protrusion portion includes a conductor.
13. The X-ray generation apparatus according to claim 9, wherein the insulating liquid is an insulating oil.
14. The X-ray generation apparatus according to claim 9, wherein the insulating liquid is a fluorine-based inert liquid.
15. The X-ray generation apparatus according to claim 9, wherein the member is made of an insulating material.
16. An X-ray imaging apparatus comprising: an X-ray generation apparatus defined in claim 9; and an X-ray detector configured to detect X-rays emitted from the X-ray generation apparatus.
17. The X-ray generation apparatus according to claim 1, wherein the insulating liquid is an insulating oil.
18. The X-ray generation apparatus according to claim 1, wherein the insulating liquid is a fluorine-based inert liquid.
19. The X-ray generation apparatus according to claim 1, the member is made of an insulating material.
20. An X-ray imaging apparatus comprising: an X-ray generation apparatus defined in claim 1; and an X-ray detector configured to detect X-rays emitted from the X-ray generation apparatus.
Description
BRIEF DESCRIPTION OF DRAWINGS
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DESCRIPTION OF EMBODIMENTS
[0028] Hereinafter, embodiments will be described in detail with reference to the attached drawings. Note, the following embodiments are not intended to limit the scope of the claimed invention. Multiple features are described in the embodiments, but limitation is not made to an invention that requires all such features, and multiple such features may be combined as appropriate. Furthermore, in the attached drawings, the same reference numerals are given to the same or similar configurations, and redundant description thereof is omitted.
[0029] The basic arrangement of an X-ray generation apparatus 100 according to the present disclosure will be described first with reference to
[0030] The X-ray generation tube 1 can include an insulating tube 10, a cathode 30, and the anode 20. A vacuum is maintained in the internal space of the X-ray generation tube 1. The insulating tube 10 can have a first opening end OP1 and a second opening end OP2. The insulating tube 10 can have a tubular shape such as a cylindrical shape. The insulating tube 10 can be configured to provide vacuum airtightness and insulating properties of the internal space of the insulating tube 10. The insulating tube 10 can be made of, for example, a ceramic material mainly containing alumina or zirconia. Alternatively, the insulating tube 10 can be made of a glass material such as borosilicate glass.
[0031] The cathode 30 can be arranged to close the first opening end OP1 of the insulating tube 10. The cathode 30 includes an electron emitting portion 32. The cathode 30 may be arranged so as not to contact the insulating liquid 60. The X-ray generation apparatus 100 may be configured such that a member having the same potential as the cathode 30 does not contact the insulating liquid 60. The anode 20 can be arranged to close the second opening end OP2 of the insulating tube 10. The anode 20 can include a target 23 that generates X-rays when electrons from the electron emitting portion 32 collide therewith. The anode 20 can include a target holding plate 22 that holds the target 23, and an electrode 21 that supports the target holding plate 22. The electrode 21 is formed by a conductor, and is electrically connected to the target 23 to apply a potential to the target 23. The anode 20 can be maintained at, for example, the ground potential but may be maintained at another potential. The target 23 can be made of a material having a high melting point and high generation efficiency of X-rays, such as tungsten, tantalum, or molybdenum. The target holding plate 22 can be made of, for example, a material that can easily transmit X-rays, such as beryllium or diamond.
[0032] The accommodating container 50 can have a third opening end OP3. The accommodating container 50 can include, for example, a first portion 52, a second portion 53, a third portion 54, a fourth portion 55, and a fifth portion 56. The first portion 52 can have a tubular shape such as a cylindrical shape. The first portion 52 can define the third opening end OP3 of the accommodating container 50. In other words, the first portion 52 can include the third opening end OP3. The second portion 53 is formed by a conductor, and is electrically connected to the anode 20 of the X-ray generation tube 1. It may be understood that the second portion 53 forms the anode together with the electrode 21. The second portion 53 can have a ring shape or a frame shape. The second portion 53 can be arranged to contact the insulating liquid 60. Alternatively, a conductive member including the electrode 21 and the second portion 53 can be arranged to contact the insulating liquid 60. The electrode 21 and the second portion 53 may be formed as a single piece of the same material. The fourth portion 55 can have a tubular shape such as a cylindrical shape or a rectangular tubular shape. The third portion 54 is connected to one end of the fourth portion 55, and can have a ring shape or a frame shape. The first portion 52 can be connected to the third portion 54 to project from the third portion 54. The fifth portion 56 can be connected to the other end of the fourth portion 55. Alternatively, the third portion 54, the fourth portion 55, and the fifth portion 56 may be integrated to have a hollow spherical shape, except for the joint portion with the first portion 52.
[0033] The insulating liquid 60 can cause convection in the internal space of the accommodating container 50. When an entire outer surface 14 of the insulating tube 10 contacts the insulating liquid 60, the insulating tube 10 and the insulating liquid 60 can be charged by friction between the insulating liquid 60 and the outer surface 14 of the insulating tube 10. This charging is called triboelectrification. In general, triboelectrification indicates a phenomenon that friction between two different types of materials causes charges to move between the two types of materials, and thus one material is charged to positive polarity and the other material is charged to negative polarity. The present inventor performed an experiment of measuring the potential of the outer surface of the insulating tube by a surface electrometer after leaving the insulating tube in a convecting insulating oil (insulating liquid). As a result, it was confirmed that the outer surface of the insulating tube was charged to positive polarity and the amount of charge increased in proportion to the time. Charging polarity by friction depends on the characteristics of materials that are rubbed together. Examples of the characteristics of the materials are a triboelectric series and relative permittivity.
[0034] When the outer surface 14 of the insulating tube 10 is charged to positive polarity, the insulating performance between the cathode 30 and the anode 20 may lower. The insulating performance between the cathode 30 and the anode 20 may depend on a potential difference between the cathode 30 and the anode 20, resistance between the cathode 30 and the anode 20, a distance between the cathode 30 and the anode 20, and the like. As a result of the experiment, it was found that when the insulating tube 10 was charged to positive polarity, the cathode 30 and the anode 20 were short-circuited via the outer surface 14 of the insulating tube 10, as schematically indicated by a thick arrow in
[0035] The X-ray generation apparatus 100 of the present disclosure will exemplarily be described below through a plurality of embodiments shown in
[0036]
[0037] To reduce abnormal discharge between the cathode 30 and the anode 20 via the insulating tube 10, the material of the member 72 is decided so that triboelectrification between the member 72 and the insulating liquid 60 causes the member 72 to be charged to negative polarity and the insulating liquid 60 to be charged to positive polarity. In a case where an insulating oil is adopted as the insulating liquid 60, for example, the material of the member 72 can be selected so that triboelectrification between the member 72 and the insulating oil causes the member 72 to be charged to negative polarity in accordance with the triboelectric series exemplified in
[0038] To reduce abnormal discharge between the cathode 30 and the anode 20 via the insulating tube 10, the material of the member 72 can be decided so that a difference in relative permittivity between the member 72 and the insulating liquid 60 is smaller than a difference in relative permittivity between the member 72 and the insulating tube 10. For example, the member 72 is made of Viton having relative permittivity of 3 or polytetrafluoroethylene having relative permittivity of 2.1, and the insulating tube 10 is made of borosilicate glass having relative permittivity of 4.9 or alumina having relative permittivity of 9. The fact that a difference in relative permittivity between the member 72 and the insulating liquid 60 is smaller than a difference in relative permittivity between the member 72 and the insulating tube 10 may be evaluated at a temperature when generating X-rays or at room temperature (for example, 25 C.). However, there is no large difference between the former case and the latter case.
[0039] A mold method preferable to form the member 72 so as to cover an X-ray generation tube 1 (the outer surface 14 of the insulating tube 10 and the outer surface 34 of the cathode 30) will now be described. The material of the member 72, that is, the covering material is obtained by kneading a principal agent and a curing assistant in advance by a kneading device so as not to contain bubbles, and can be held at a constant temperature to maintain an appropriate flow. In a case of an epoxy-based resin, the temperature is, for example, about 100 C. but the temperature can appropriately be decided in accordance with the material to be used. The covering material can be poured into a container having a size larger than the X-ray generation tube 1 to be covered. At this time, the covering material can be cooled rapidly due to the temperature difference between the container and the covering material, thereby degrading liquidity of the covering material. To prevent this, the container is desirably heated in advance. After the covering material poured into the container is caused to overflow from the container, the covering material can be solidified at an appropriate cooling rate and temperature distribution not to cause a problem such as shrinkage.
[0040] In the X-ray generation tube 1, a high voltage is applied between the anode 20 and the cathode 30. Therefore, if a bubble having a small dielectric constant exists in the member 72 made of the covering material, the electric field is concentrated on the bubble, thereby inducing abnormal discharge. To avoid this, a space where processing of filling the covering material is performed can be exhausted in advance using a vacuum pump to obtain a vacuum degree of about several hundred to several thousand Pa. Furthermore, to improve adhesion between the covering material and the X-ray generation tube 1, the X-ray generation tube 1 may be covered with the member 72 after applying a primer material to the surface of the X-ray generation tube 1 or forming unevenness by blast processing. The thickness of the member 72 is desirably small from a viewpoint of heat dissipation of the X-ray generation tube 1. For example, the thickness of the member 72 is preferably 5 mm or less, and more preferably 3 mm or less. For example, the thickness of the member 72 is preferably 0.3 mm or more, and more preferably 0.5 mm or more.
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[0045] An accommodating container 50 can define a first space SP1 storing a driving circuit 40, and a second space SP2 protruding from the first space SP1 and storing the X-ray generation tube 1. More specifically, a third portion 54, a fourth portion 55, and a fifth portion 56 of the accommodating container 50 can define the first space SP1. On the other hand, a first portion 520 and a second portion 53 of the accommodating container 50 can define the second space SP2. One end of the second space SP2 can form a third opening end OP3. The first portion 520 can form a protrusion portion protruding from the third portion 54.
[0046] The insulating tube 10 can be arranged such that its entirety is stored in the second space SP2. In other words, in a direction D in which an electron beam is emitted from the electron emitting portion 32, the length of the insulating tube 10 is smaller than the length of the first portion 520. Furthermore, in other words, in the direction D in which an electron beam is emitted from the electron emitting portion 32, the length of the insulating tube 10 is smaller than the length of the second space SP2. In this case, a cable 42 exists on a boundary between the first space SP1 and the second space SP2.
[0047] Here, in a case where the first portion 520 is made of a conductor, since the distance between the first portion 520 and the cathode 30, the insulating tube 10, or a triple point (to be described later) is small, abnormal discharge can occur. According to one aspect of PTL 2, to prevent abnormal discharge, it is necessary to increase the distance between the X-ray generation tube 1 and the first portion 52 (protrusion portion) as shown in
[0048] In the X-ray generation apparatus 100 shown in
[0049] In a case where the first portion 520 is made of an insulating material, the first portion 520 does not provide a function of electrically connecting the second portion 53 to the third portion 54, the fourth portion 55, and the fifth portion 56. If the potential of the second portion 53, which forms the anode 20 together with an electrode 21, is unstable, it is difficult to stably generate X-rays. Therefore, the second portion 53 can be grounded via a member other than the first portion 520.
[0050] Compared to the X-ray generation apparatus 100 shown in
[0051]
[0052] In a virtual plane including the direction D in which an electron beam is emitted (
[0053] For example, the thickness of the member 72 is preferably 15 mm or less if the tube voltage of the X-ray generation tube 1 is 100 keV, preferably 50 mm or less if the tube voltage is 300 keV, and more preferably 3 mm or less. For example, the thickness of the member 72 is preferably 0.3 mm or more, and more preferably 0.5 mm or more.
[0054]
[0055] The X-ray transmission amount decreases exponentially with respect to the increase of the density and thickness of the shielding material. According to an experiment performed by the present inventor, for an X-ray generation apparatus (a tube voltage of about 50 to 300 keV) used for an industrial non-destructive inspection, if the X-ray shielding member 521 is made of a metal such as SUS or lead, it need only have a thickness of 1 mm or more, and preferably 3 mm or more.
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[0060] In the fifth embodiment, an insulation measure may also be taken between the cathode 30 and the anode 20, as in the first and fourth embodiments.
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[0062] The present invention is not limited to the above embodiments and various changes and modifications can be made within the spirit and scope of the present invention. Therefore, to apprise the public of the scope of the present invention, the following claims are made.