Array substrate and display panel
12471373 ยท 2025-11-11
Assignee
Inventors
- Lizhong Wang (Beijing, CN)
- Ce Ning (Beijing, CN)
- Tianmin Zhou (Beijing, CN)
- Wei YANG (Beijing, CN)
- Yunping Di (Beijing, CN)
- Rui Huang (Beijing, CN)
- Binbin TONG (Beijing, CN)
- Liping LEI (Beijing, CN)
Cpc classification
G02F1/1368
PHYSICS
H10D86/471
ELECTRICITY
H10D86/421
ELECTRICITY
H10D30/6757
ELECTRICITY
H10D86/423
ELECTRICITY
International classification
G02F1/1368
PHYSICS
Abstract
An array substrate and a display panel, relating to the technical field of display. The array substrate includes a base substrate, and a thin film transistor group which is provided on one side of the base substrate and includes at least two thin film transistors, the thin film transistors being stacked in a direction perpendicular to the base substrate.
Claims
1. An array substrate, comprising: a base substrate; and a thin film transistor group arranged on a side of the base substrate, wherein the thin film transistor group comprises at least two thin film transistors, and the thin film transistors are stacked in a direction perpendicular to the base substrate, wherein the thin film transistor group comprises a first thin film transistor and a second thin film transistor, the first thin film transistor comprises a first active layer and a first source and drain layer, and the second thin film transistor comprises a second active layer and a second source and drain layer; and wherein the first source and drain layer comprises a first pole and a second pole, the first active layer comprises a first subsection and a second subsection, the first subsection and the second subsection have a first included angle, the first subsection is connected to the first pole, and the second subsection is connected to the second pole.
2. The array substrate according to claim 1, wherein the first thin film transistor is arranged on a side of the base substrate, and the second thin film transistor is arranged on a side of the first thin film transistor away from the base substrate.
3. The array substrate according to claim 2, wherein the first thin film transistor further comprises: a first gate layer arranged on a side of the base substrate, wherein the first gate layer comprises a first gate; and a first gate insulating layer arranged on a side of the first gate layer away from the base substrate, wherein the first gate insulating layer covers a surface of the first gate layer; wherein the first active layer is arranged on a side of the first gate insulating layer away from the base substrate, the first pole covers one end of the first active layer, and the second pole covers the other end of the first active layer.
4. The array substrate according to claim 3, wherein the second thin film transistor further comprises: a second gate layer arranged on a side of the first thin film transistor away from the base substrate, wherein the second gate layer comprises a second gate; and a second gate insulating layer arranged on a side of the second gate layer away from the base substrate, wherein the second gate insulating layer covers a surface of the second gate layer; wherein the second active layer is arranged on a side of the second gate insulating layer away from the base substrate, and the second source and drain layer comprises a third pole covering one end of the second active layer and a fourth pole covering the other end of the second active layer, and wherein orthographic projections of the third pole and the first pole on the base substrate at least partially overlap, orthographic projections of the fourth pole and the second pole on the base substrate at least partially overlap, and the orthographic projection of the second pole on the base substrate is located at least partially outside an orthographic projection of the second thin film transistor on the base substrate.
5. The array substrate according to claim 2, wherein the first thin film transistor further comprises: a shielding layer arranged on a side of the base substrate, wherein the first active layer is arranged on a side of the shielding layer away from the base substrate; a first gate insulating layer arranged on a side of the first active layer away from the base substrate; a first gate layer arranged on a side of the first gate insulating layer away from the base substrate, wherein the first gate layer comprises a first gate; and a first interlayer insulating layer arranged on a side of the first gate layer away from the base substrate, wherein the first interlayer insulating layer covers a surface of the first gate layer away from the base substrate, and the first interlayer insulating layer covers side surfaces of the first gate layer and the first gate insulating layer; wherein the first source and drain layer comprises a first pole and a second pole, wherein the first pole covers a part of a surface of the first interlayer insulating layer away from the base substrate, passes through the first interlayer insulating layer, and is connected to one end of the first active layer; and wherein the second pole covers a part of the surface of the first interlayer insulating layer away from the base substrate, passes through the first interlayer insulating layer, and is connected to the other end of the first active layer.
6. The array substrate according to claim 5, wherein the second active layer is arranged on a side of the first thin film transistor away from the base substrate, and the second thin film transistor further comprises: a second gate insulating layer arranged on a side of the second active layer away from the base substrate; a second gate layer arranged on a side of the second gate insulating layer away from the base substrate, wherein the second gate layer comprises a second gate; and a second interlayer insulating layer arranged on a side of the second gate layer away from the base substrate, wherein the second interlayer insulating layer covers a surface of the second gate layer away from the base substrate, and the second interlayer insulating layer covers side surfaces of the second gate layer and the second gate insulating layer; wherein the second source and drain layer comprises a third pole and a fourth pole, wherein the third pole covers a part of a surface of the second interlayer insulating layer away from the base substrate, passes through the second interlayer insulating layer, and is connected to one end of the second active layer; and the fourth pole covers a part of the surface of the second interlayer insulating layer away from the base substrate, passes through the second interlayer insulating layer, and is connected to the other end of the second active layer; and wherein projections of the third pole and the first pole on the base substrate at least partially overlap, and an orthographic projection of the second pole on the base substrate is located at least partially outside an orthographic projection of the second thin film transistor on the base substrate.
7. The array substrate according to claim 4, wherein the thin film transistor group further comprises: a first passivation layer arranged between the first thin film transistor and the second thin film transistor, and arranged on a side of the first source and drain layer away from the base substrate; and a first planarization layer arranged on a side of the first passivation layer away from the base substrate.
8. The array substrate according to claim 4, wherein the thin film transistor group further comprises: a second passivation layer arranged on a side of the second source and drain layer away from the base substrate; and a second planarization layer arranged on a side of the second passivation layer away from the base substrate.
9. The array substrate according to claim 4, wherein the array substrate further comprises: a first scan line arranged in the same layer as the first gate layer, and connected to the first gate; a second scan line arranged in the same layer as the second gate layer, and connected to the second gate; a first data line arranged in the same layer as the first source and drain layer, and connected to the first pole; and a second data line arranged in the same layer as the second source and drain layer, and connected to the third pole or the fourth pole.
10. The array substrate according to claim 9, wherein orthographic projections of the first scan line and the second scan line on the base substrate at least partially overlap, and orthographic projections of the first data line and the second data line on the base substrate at least partially overlap.
11. The array substrate according to claim 10, wherein the first scan line, the second scan line, the first data line or the second data line are transparent metal lines.
12. The array substrate according to claim 1, wherein the second source and drain layer comprises a third pole and a fourth pole, the second active layer comprises a third subsection and a fourth subsection, the third subsection and the fourth subsection have a second included angle, the third subsection is connected to the third pole, the fourth subsection is connected to the fourth pole, and orthographic projections of the second active layer and the first active layer on the base substrate at least partially overlap.
13. The array substrate according to claim 4, wherein materials of the first active layer and the second active layer comprise IGZO.
14. A display panel, comprising: an array substrate comprising: a base substrate; and a thin film transistor group arranged on a side of the base substrate, wherein the thin film transistor group comprises at least two thin film transistors, and the thin film transistors are stacked in a direction perpendicular to the base substrate; a plurality of pixel electrodes arranged on a side of the thin film transistor group away from the base substrate, wherein each of the pixel electrodes is connected to one of the thin film transistors; a liquid crystal layer arranged on a side of the pixel electrodes away from the base substrate; and a color film substrate arranged on a side of the liquid crystal layer away from the base substrate; wherein the thin film transistor group comprises a first thin film transistor and a second thin film transistor, the first thin film transistor comprises a first active layer and a first source and drain layer, and the second thin film transistor comprises a second active layer and a second source and drain layer; and wherein the first source and drain layer comprises a first pole and a second pole, the first active layer comprises a first subsection and a second subsection, the first subsection and the second subsection have a first included angle, the first subsection is connected to the first pole, and the second subsection is connected to the second pole.
15. A display panel, comprising: an array substrate comprising: a base substrate; and a thin film transistor group arranged on a side of the base substrate, wherein the thin film transistor group comprises at least two thin film transistors, and the thin film transistors are stacked in a direction perpendicular to the base substrate; and a light-emitting device layer arranged on a side of the thin film transistor group away from the base substrate, wherein the light-emitting device layer comprises a plurality of light-emitting devices, and each of the light-emitting devices is connected to one of the thin film transistors; wherein the thin film transistor group comprises a first thin film transistor and a second thin film transistor, the first thin film transistor comprises a first active layer and a first source and drain layer, and the second thin film transistor comprises a second active layer and a second source and drain layer; and wherein the first source and drain layer comprises a first pole and a second pole, the first active layer comprises a first subsection and a second subsection, the first subsection and the second subsection have a first included angle, the first subsection is connected to the first pole, and the second subsection is connected to the second pole.
16. The display panel according to claim 14, wherein the first thin film transistor is arranged on a side of the base substrate; and the second thin film transistor is arranged on a side of the first thin film transistor away from the base substrate; wherein the first thin film transistor further comprises: a first gate layer arranged on a side of the base substrate, wherein the first gate layer comprises a first gate; and a first gate insulating layer arranged on a side of the first gate layer away from the base substrate, wherein the first gate insulating layer covers a surface of the first gate layer; wherein the first active layer is arranged on a side of the first gate insulating layer away from the base substrate, the first pole covers one end of the first active layer, and the second pole covers the other end of the first active layer.
17. The display panel according to claim 16, wherein the second thin film transistor further comprises: a second gate layer arranged on a side of the first thin film transistor away from the base substrate, wherein the second gate layer comprises a second gate; and a second gate insulating layer arranged on a side of the second gate layer away from the base substrate, wherein the second gate insulating layer covers a surface of the second gate layer; wherein the second active layer is arranged on a side of the second gate insulating layer away from the base substrate, and the second source and drain layer comprises a third pole covering one end of the second active layer and a fourth pole covering the other end of the second active layer, and wherein orthographic projections of the third pole and the first pole on the base substrate at least partially overlap, orthographic projections of the fourth pole and the second pole on the base substrate at least partially overlap, and the orthographic projection of the second pole on the base substrate is located at least partially outside an orthographic projection of the second thin film transistor on the base substrate.
18. The display panel according to claim 14, wherein the first thin film transistor is arranged on a side of the base substrate, and the second thin film transistor is arranged on a side of the first thin film transistor away from the base substrate; and wherein the first thin film transistor further comprises: a shielding layer arranged on a side of the base substrate, wherein the first active layer is arranged on a side of the shielding layer away from the base substrate; a first gate insulating layer arranged on a side of the first active layer away from the base substrate; a first gate layer arranged on a side of the first gate insulating layer away from the base substrate, wherein the first gate layer comprises a first gate; and a first interlayer insulating layer arranged on a side of the first gate layer away from the base substrate, wherein the first interlayer insulating layer covers a surface of the first gate layer away from the base substrate, and the first interlayer insulating layer covers side surfaces of the first gate layer and the first gate insulating layer; wherein the first source and drain layer comprises a first pole and a second pole, wherein the first pole covers a part of a surface of the first interlayer insulating layer away from the base substrate, passes through the first interlayer insulating layer, and is connected to one end of the first active layer; and wherein the second pole covers a part of the surface of the first interlayer insulating layer away from the base substrate, passes through the first interlayer insulating layer, and is connected to the other end of the first active layer.
19. The display panel according to claim 18, wherein the second active layer is arranged on a side of the first thin film transistor away from the base substrate, and the second thin film transistor further comprises: a second gate insulating layer arranged on a side of the second active layer away from the base substrate; a second gate layer arranged on a side of the second gate insulating layer away from the base substrate, wherein the second gate layer comprises a second gate; and a second interlayer insulating layer arranged on a side of the second gate layer away from the base substrate, wherein the second interlayer insulating layer covers a surface of the second gate layer away from the base substrate, and the second interlayer insulating layer covers side surfaces of the second gate layer and the second gate insulating layer; wherein the second source and drain layer comprises a third pole and a fourth pole, wherein the third pole covers a part of a surface of the second interlayer insulating layer away from the base substrate, passes through the second interlayer insulating layer, and is connected to one end of the second active layer; and the fourth pole covers a part of the surface of the second interlayer insulating layer away from the base substrate, passes through the second interlayer insulating layer, and is connected to the other end of the second active layer; and wherein projections of the third pole and the first pole on the base substrate at least partially overlap, and an orthographic projection of the second pole on the base substrate is located at least partially outside an orthographic projection of the second thin film transistor on the base substrate.
20. The display panel according to claim 14, wherein the second source and drain layer comprises a third pole and a fourth pole, the second active layer comprises a third subsection and a fourth subsection, the third subsection and the fourth subsection have a second included angle, the third subsection is connected to the third pole, the fourth subsection is connected to the fourth pole, and orthographic projections of the second active layer and the first active layer on the base substrate at least partially overlap.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and serve together with the specification to explain the principles of the present disclosure. It is apparent that the drawings in the following description are only some embodiments of the present disclosure, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative efforts.
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(16) The main components in the figure are described as follows: 1base substrate; 2thin film transistor group; 100first gate layer; 200first gate insulating layer; 300first active layer; 310first subsection; 320second subsection; 410first pole; 420second pole; 500second gate layer; 600second gate insulating layer; 700second active layer; 710third subsection; 720fourth subsection; 810third pole; 820fourth pole; 900shielding layer; 10first passivation layer; 20first planarization layer; 30second passivation layer; 40second planarization layer; 50first scan line; 60second scan line; 70first data line; 80second data line; 3pixel electrode; 4liquid crystal layer; 5color film substrate; 6light emitting device.
DETAILED DESCRIPTION
(17) Example embodiments will now be described more comprehensively with reference to the drawings. However, the example embodiments can be implemented in various ways and should not be construed as limited to the embodiments set forth herein. Instead, these embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference signs in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted. Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale.
(18) In the drawings, a thickness of a region or a layer may be exaggerated for clarity. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.
(19) The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following descriptions, many specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that technical solutions of the present disclosure may be practiced without one or more of these specific details, or other methods, components, materials, etc., may be employed. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring the main technical concept of the present disclosure.
(20) When a structure is on an other structure, it may mean that the structure is integrally formed on the other structure, or that the structure is directly arranged on the other structure, or that the structure is indirectly arranged on the other structure through another structure.
(21) Terms a, an, the are used to indicate presence of one or more elements/components/etc. Terms include and have are used to indicate an open-ended inclusion and refer to presence of additional elements/components/etc., in addition to the listed elements/components/etc. Terms first and second, etc., are used only as labels and are not intended to limit the number of objects.
(22) A liquid crystal displays (LCD) and an organic electroluminescence display (OLED) are commonly used displays today. In the related art, both the liquid crystal display and the organic electroluminescence display include an array substrate. The array substrate includes a multiple layers of driving circuit layers, each drive circuit layer includes multiple driving circuits, and each driving circuit drives a liquid crystal pixel or a light-emitting device correspondingly. Each driving circuit includes a driving transistor for driving the liquid crystal pixel or the light-emitting device. In the related art, the driving transistors in different driving circuits corresponding to different pixels or light-emitting devices are all designed in the same layer, resulting in large occupied area, and high light blocking rate, which is not conducive to the improvement of the aperture ratio.
(23) As shown in
(24) The array substrate provided by embodiments of the present disclosure includes a thin film transistor group 2, and the thin film transistor group 2 includes at least two thin film transistors. The thin film transistors are stacked in a direction perpendicular to the base substrate 1, that is, orthographic projections of a plurality of thin film transistors on the base substrate 1 at least partially overlap. In embodiments of the present disclosure, the thin film transistors are designed in stacked layers to reduce the occupied area of the thin film transistors on a plane, thereby facilitating improving the light transmittance and the aperture ratio.
(25) The array substrate provided by embodiments of the present disclosure can be used in liquid crystal displays, organic electroluminescence displays, and the like. Each thin film transistor stacked in the thin film transistor group 2 drives different liquid crystal pixels or light emitting devices respectively. Compared with the arrangement in the same layer in the related art, the light transmittance and the aperture ratio of the array substrate provided by embodiments of the present disclosure are higher.
(26) The components of the array substrate provided by embodiments of the present disclosure will be described in detail in the following with reference to the drawings.
(27) As shown in
(28) The thin film transistor group 2 is arranged on a side of the base substrate 1, the thin film transistor group 2 includes at least two thin film transistors, and the thin film transistors are stacked in a direction perpendicular to the base substrate 1. The number of thin film transistors included in the thin film transistor group 2 is not limited. In some embodiments, the thin film transistor group 2 includes two thin film transistors, so as to improve the aperture ratio of the display panel without increasing the thickness of the display panel. The thin film transistor group 2 is used to drive the pixels of the LCD display panel or the light-emitting device 6 of the OLED display panel. The thin film transistors stacked in the thin film transistor group 2 are driving transistors, and each driving transistor can drive different pixels or light-emitting devices. For example, when the thin film transistor group 2 includes two stacked thin film transistors, the two thin film transistors can drive two adjacent pixels or light-emitting devices.
(29) In some exemplary embodiments of the present disclosure, the thin film transistor group 2 includes a first thin film transistor and a second thin film transistor. The first thin film transistor is arranged on a side of the base substrate 1, and the second thin film transistor is arranged on a side of the first thin film transistor away from the base substrate 1. Orthographic projections of the second thin film transistor and the first thin film transistor on the base substrate 1 at least partially overlap. The first thin film transistor and the second thin film transistor are driving transistors in the driving circuit of the array substrate. The first thin film transistor is used to drive one pixel or one light-emitting device, and the second thin film transistor is used to drive another pixel or light-emitting device. The first thin film transistor and the second thin film transistor may have a bottom gate structure or a top gate structure.
(30) As shown in
(31) The second thin film transistor includes a second gate layer 500, a second gate insulating layer 600, a second active layer 700 and a second source and drain layer. The second gate layer 500 is arranged on a side of the first thin film transistor away from the base substrate 1, and the second gate layer 500 includes a second gate. The second gate can be made of metal materials such as aluminum, copper, or molybdenum. The second gate insulating layer 600 is arranged on a side of the second gate layer 500 away from the base substrate 1, and the second gate insulating layer 600 covers a surface of the second gate layer 500. The second gate insulating layer 600 may be a single film layer made of silicon nitride, silicon oxide, aluminum oxide, etc., or a multi-film layer formed by a combination of above. The second active layer 700 is arranged on a side of the second gate insulating layer 600 away from the base substrate 1. The second active layer 700 may be made of IGZO (Indium Gallium Zinc Oxide). The second source and drain layer includes a third pole 810 covering one end of the second active layer 700 and a fourth pole 820 covering the other end of the second active layer 700. The third pole 810 and the fourth pole 820 are a source and a drain. The third pole 810 may be a source or a drain, and the fourth pole 820 may be correspondingly a drain or a source. The third pole 810 and the first pole 410 are located opposite to each other, and the fourth pole 820 and the second pole 420 are located opposite to each other. Orthographic projections of the third pole 810 and the first pole 410 on the base substrate 1 at least partially overlap, orthographic projections of the fourth pole 820 and the second pole 420 on the base substrate 1 at least partially overlap, and the orthographic projection of the second pole 420 on the base substrate 1 is located at least partially outside an orthographic projection of the second thin film transistor on the base substrate 1. The second pole 420 (i.e., the drain) of the first thin film transistor is configured to be connected to the pixel electrode of the LCD display panel or the anode of the OLED display panel. In such structure, the orthographic projection of the second pole 420 on the base substrate 1 is located outside the orthographic projection of the second thin film transistor on the base substrate 1, so that the second pole 420 cannot be blocked when the second pole 420 is connected to the pixel electrode of the LCD display panel or the anode of the OLED display panel.
(32) As shown in
(33) The second thin film transistor includes a second active layer 700, a second gate insulating layer 600, a second gate layer 500, a second interlayer insulating layer 1100, and a second source and drain layer. The second active layer 700 is arranged on a side of the first thin film transistor away from the base substrate 1. The second active layer 700 can be made of materials such as IGZO (Indium Gallium Zinc Oxide). The second gate insulating layer 600 is arranged on a side of the second active layer 700 away from the base substrate 1. The second gate insulating layer 600 may be a single film layer made of silicon nitride, silicon oxide, aluminum oxide, etc. or a multi-film layer formed by a combination of above. The second gate layer 500 is arranged on a side of the second gate insulating layer 600 away from the base substrate 1, and the second gate layer 500 includes a second gate. The second gate can be made of metal materials such as aluminum, copper, or molybdenum. The second interlayer insulating layer 1100 is arranged on a side of the second gate layer 500 away from the base substrate 1, the second interlayer insulating layer 1100 covers a surface of the second gate layer 500 away from the base substrate 1, and the second interlayer insulating layer 1100 covers side surfaces of the second gate layer 500 and the second gate insulating layer 600. The second interlayer insulating layer 1100 can be a single film layer made of silicon nitride, silicon oxide, aluminum oxide, etc., or a multi-film layer formed by a combination of above. The second source and drain layer includes a third pole 810 and a fourth pole 820, and the third pole 810 and the fourth pole 820 are a source and a drain. The third pole 810 and the first pole 410 are located opposite to each other, and the fourth pole 820 and the second pole 420 are located opposite to each other. The third pole 810 covers a part of a surface of the second interlayer insulating layer 1100 away from the base substrate 1, passes through the second interlayer insulating layer 1100 and is connected to one end of the second active layer 700. The fourth pole 820 covers a part of a surface of the second interlayer insulating layer 1100 away from the base substrate 1, passes through the second interlayer insulating layer 1100 and is connected to the other end of the second active layer 700. Orthographic projections of the third pole 810 and the first pole 410 on the base substrate 1 at least partially overlap, and the orthographic projection of the second pole 420 on the base substrate 1 is located at least partially outside the orthographic projection of the second thin film transistor on the base substrate 1. The second pole 420 (i.e., the drain) of the first thin film transistor is configured to be connected to the pixel electrode 3 of the LCD display panel or the anode of the OLED display panel. In such structure, the orthographic projection of the second pole 420 on the base substrate 1 is located outside the orthographic projection of the second thin film transistor on the base substrate 1, so that the second pole 420 cannot be blocked when the second pole 420 is connected to the pixel electrode 3 of the LCD display panel or the anode of the OLED display panel.
(34) As shown in
(35) The thin film transistor group 2 further includes a second passivation layer 30 and a second planarization layer 40. The second passivation layer 30 is arranged on a side of the second source and drain layer away from the base substrate 1. The second passivation layer 30 can be made of silicon oxide, silicon oxynitride and other materials. The second planarization layer 40 is arranged on a side of the second passivation layer 30 away from the base substrate 1. The second planarization layer 40 can be made of resin materials.
(36) As shown in
(37) As shown in
(38) As shown in
(39) As shown in
(40) In connection manners shown in
(41) As shown in
(42) In some embodiments of the present disclosure, the display panel includes the array substrate mentioned above, as well as a pixel electrode 3, a liquid crystal layer 4 and a color film substrate 5. The number of pixel electrode 3 is multiple, and the multiple pixel electrodes 3 are arranged on a side of the thin film transistor group 2 away from the base substrate 1. Each pixel electrode 3 is connected to a thin film transistor. For example, the number of pixel electrodes 3 is two, among which, one pixel electrode 3 is connected to the second pole 420, and the other pixel electrode 3 is connected to the third pole 810 or the fourth pole 820. In this way, different thin film transistors in the thin film transistor group 2 can drive different pixels. The liquid crystal layer 4 is arranged on a side of the pixel electrode 3 away from the base substrate 1. The color film substrate is arranged on a side of the liquid crystal layer 4 away from the base substrate 1. The display panel has any of the array substrates described in the foregoing array substrate embodiments, specifically.
(43) In the planar structures of the display panels shown in
(44) As shown in
(45) The array substrate provided by embodiments of the present disclosure can be used in liquid crystal displays, organic electroluminescence displays, and the like. Each thin film transistor stacked in the thin film transistor group 2 drives a liquid crystal pixel or a light-emitting device respectively. Compared with the arrangement in the same layer in the related art, the light transmittance and aperture ratio of the array substrate provided by the present disclosure are higher. For example, a 1500 PPI display formed by a glass substrate is taken as an example, the array substrate provided by the present disclosure can increase the aperture ratio by more than 20%.
(46) As shown in
(47) In a step S10, a base substrate 1 is provided.
(48) In a step S20, a thin film transistor group 2 is formed on a side of the base substrate 1, the thin film transistor group 2 includes at least two thin film transistors, and the thin film transistors are stacked in a direction perpendicular to the base substrate 1.
(49) In the method, forming the thin film transistor group 2 on a side of the base substrate 1 includes following steps.
(50) In a step S100, a first thin film transistor is formed on a side of the base substrate 1.
(51) In a step S200, a second thin film transistor is formed on a side of the first thin film transistor away from the base substrate 1.
(52) The structures of the first thin film transistor and the second thin film transistor may be any one of the above-mentioned embodiments. That is, the first thin film transistor and the second thin film transistor may have a bottom gate structure or a top gate structure.
(53) In some embodiments of the present disclosure, when the first thin film transistor and the second thin film transistor are bottom gate structures, a step of forming the first thin film transistor on a side of the base substrate 1 includes following steps.
(54) In a step S110, a first gate layer 100 is formed on a side of the base substrate 1.
(55) In a step S120, a first gate insulating layer 200 is formed on a side of the first gate layer 100 away from the base substrate 1, and the first gate insulating layer 200 covers a surface of the first gate layer 100.
(56) In a step S120, a first active layer 300 is formed on a side of the first gate insulating layer 200 away from the base substrate 1.
(57) In a step S120, a first source and drain layer is formed on a side of the first active layer 300 away from the base substrate. The first source and drain layer includes a first pole 410 covering one end of the first active layer 300 and a second pole 420 covering the other end of the first active layer 300.
(58) A step of forming the second thin film transistor on a side of the first thin film transistor away from the base substrate 1 includes following steps.
(59) In a step S210, a second gate layer 500 is formed on a side of the first thin film transistor away from the base substrate 1, and the second gate layer 500 includes a second gate.
(60) In a step S220, a second gate insulating layer 600 is formed on a side of the second gate layer 500 away from the base substrate 1, and the second gate insulating layer 600 covers a surface of the second gate layer 500.
(61) In a step S230, a second active layer 700 is formed on a side of the second gate insulating layer 600 away from the base substrate 1.
(62) In a step S240, a second source and drain layer is formed on a side of the second active layer 700 away from the base substrate 1. The second source and drain layer includes a third pole 810 covering one end of the second active layer 700 and a fourth pole 820 covering the other end of the second active layer 700. Orthographic projections of the third pole 810 and the first pole 410 on the base substrate 1 at least partially overlap, orthographic projections of the fourth pole 820 and the second pole 420 on the base substrate 1 at least partially overlap, and the orthographic projection of the second pole 420 on the base substrate 1 is located at least partially outside the orthographic projection of the second thin film transistor on the base substrate 1.
(63) When the first thin film transistor and the second thin film transistor have a top gate structure, similar preparation methods and preparation principles as described above can be used, which will not be described in detail herein.
(64) The method for preparing an array substrate provided by embodiments of the present disclosure can prepare any of the array substrates provided in the above-mentioned embodiments of the array substrate. The principles, effects and details of the preparation method are described in detail in the above-mentioned embodiments of the array substrate, or can be reasonably deduced according to the description in the above array substrate, which will not be described in detail herein.
(65) It should be noted that although the various steps of the methods of the present disclosure are depicted in a particular order in the drawings, this does not require or imply that the steps must be performed in that particular order, or that all illustrated steps must be performed in order to achieve the desired result. Additionally or alternatively, certain steps may be omitted, multiple steps may be combined into one step for execution, and/or one step may be decomposed into multiple steps for execution, etc., all of which should be considered as part of the present disclosure.
(66) It should be understood that the present disclosure does not limit its application to the detailed structure and arrangement of components set forth in this specification. The present disclosure can have other embodiments and can be implemented and carried out in various ways. Variations and modifications of the foregoing fall within the scope of the present disclosure. It will be understood that the disclosure disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident in the text and/or drawings. All of these different combinations constitute various alternative aspects of the present disclosure. The embodiments of this specification illustrate the best mode known for carrying out the disclosure, and will enable those skilled in the art to utilize the disclosure.