Quasi global cathode contact method for advanced patterning
11626569 · 2023-04-11
Assignee
Inventors
- Jungmin Lee (Santa Clara, CA, US)
- Yu Hsin Lin (Zhubei, TW)
- Chung-Chia Chen (Hsinchu, TW)
- Ji Young Choung (Hwaseong-si, KR)
- Dieter Haas (San Jose, CA, US)
- Si Kyoung Kim (Gwangju-si, KR)
Cpc classification
H10K71/00
ELECTRICITY
H10K71/621
ELECTRICITY
International classification
Abstract
Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The sub-pixel circuit includes a plurality of contact overhangs. The plurality of contact overhangs are disposed between adjacent sub-pixels of a sub-pixel circuit to be formed. The contact overhangs are formed over a metal grid exposed through a PDL structure. A cathode is deposited via evaporation deposition to be in contact with the contact overhang. The metal grid is perpendicular to a plurality of metal layers disposed on the substrate.
Claims
1. A sub-circuit comprising: a metal grid disposed on an anode-defining layer (ADL), the ADL exposing anodes disposed over a substrate; inorganic overhang structures disposed over the metal grid, adjacent ADLs defining a plurality of sub-pixels of the sub-circuit, each sub-pixel of the plurality of sub-pixels comprising: an anode defined by the ADL; an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and a cathode disposed over the OLED material; at least one contact overhang disposed on a respective assistant cathode line of the metal grid, the contact overhang disposed between two sub-pixels of the plurality of sub-pixels, wherein the cathode contacts the contact overhang; and pixel-defining layer (PDL) structures disposed over the ADL, wherein adjacent PDL structures further define the plurality of sub-pixels of the sub-circuit, and wherein the at least one contact overhang is disposed in exposed portions of the PDL structures to expose the metal grid.
2. The sub-circuit of claim 1, wherein each sub-pixel of the plurality of sub-pixels further comprises an encapsulation layer disposed over the cathode, the contact overhang, the at least one contact overhang, and the inorganic overhang structures.
3. The sub-circuit of claim 2, wherein the encapsulation layer contacts a structure stem portion and a structure bottom surface of the inorganic overhang structures.
4. The sub-circuit of claim 2, further comprising an intermediate layer and a global passivation layer disposed over the inorganic overhang structures, the at least one contact overhang, and the encapsulation layer.
5. The sub-circuit of claim 1, wherein the cathode of the sub-circuit is in contact with a stem portion of the at least one contact overhang.
6. The sub-circuit of claim 1, wherein the sub-circuit is operable to be activated by applying a current to the respective assistant cathode line contacting the at least one contact overhang.
7. A device, comprising: a substrate; a plurality of metal layers disposed over the substrate and an anode-defining layer (ADL) disposed over the plurality of metal layers and the substrate, the ADL defining anodes of the device; a metal grid disposed over the ADL, adjacent ADLs defining sub-pixels of the device; a plurality of sub-circuits, each sub-circuit comprising: the metal grid disposed on the ADL; inorganic overhang structures disposed on the metal grid; a first plurality of sub-pixels, each sub-pixel of the first plurality of sub-pixels comprising: an anode defined by the ADL; an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and a cathode disposed over the OLED material; at least one contact overhang disposed on a respective assistant cathode line of the metal grid, the contact overhang disposed between two sub-pixels of the first plurality of sub-pixels, wherein the cathode contacts the contact overhang; and pixel-defining layer (PDL) structures disposed over the ADL, wherein adjacent PDL structures further define the first plurality of sub-pixels of the sub-circuit, and wherein the metal grid is exposed through exposed portions of the PDL structures, the at least one contact overhang disposed on the metal grid in the exposed portions.
8. The device of claim 7, wherein each sub-pixel of the first plurality of sub-pixels further comprises an encapsulation layer disposed over the cathode, the contact overhang, the at least one contact overhang, and the inorganic overhang structures.
9. The device of claim 8, wherein the encapsulation layer contacts a structure stem portion and a structure bottom surface of the inorganic overhang structures.
10. The device of claim 8, further comprising an intermediate layer and a global passivation layer disposed over the inorganic overhang structures, the at least one contact overhang, and the encapsulation layer.
11. The device of claim 7, wherein the cathode contacts at least a stem portion of the at least one contact overhang.
12. The device of claim 7, wherein the inorganic overhang structures have an overhang structure ratio defined as a ratio of an overhang structure height to an overhang structure depth, wherein the overhang structure ratio is about 1.0:1.2 to about 1.0:1.3.
13. The device of claim 7, wherein the at least one contact overhang has a contact overhang ratio defined as a ratio of an overhang height to an overhang depth, wherein the contact overhang ratio is about 1.0:1.0 to about 1.0:1.5.
14. The device of claim 7, wherein the at least one contact overhang includes a stem portion and an overhang portion, wherein the overhang portion is wider than the stem portion to form a first overhang.
15. The device of claim 7, wherein the plurality of metal layers are perpendicular to the metal grid.
16. A device, comprising: a substrate; a plurality of metal layers disposed over the substrate and an anode-defining layer (ADL) disposed over the plurality of metal layers and the substrate, the ADL defining anodes of the device; a metal grid disposed over the ADL, adjacent ADLs defining sub-pixels of the device; a plurality of sub-circuits, each sub-circuit comprising: the metal grid disposed on the ADL; inorganic overhang structures disposed over the metal grid; a first plurality of sub-pixels, each sub-pixel of the first plurality of sub-pixels comprising: an anode defined by the ADL; an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and a cathode disposed over the OLED material; and at least one contact overhang disposed on a respective assistant cathode line of the metal grid, the contact overhang disposed between two sub-pixels of the first plurality of sub-pixels, wherein the cathode contacts at least a stem portion of the at least one contact overhang, wherein the at least one contact overhang includes a contact overhang ratio defined as a ratio of an overhang height to an overhang depth, and wherein the contact overhang ratio is about 1.0:1.0 to about 1.0:1.5.
17. The device of claim 16, further comprising pixel-defining layer (PDL) structures disposed over the ADL, wherein adjacent PDL structures further define the first plurality of sub-pixels of the sub-circuit and the metal grid is exposed through exposed portions of the PDL structures, the at least one contact overhang disposed on the metal grid in the exposed portions.
18. The device of claim 16, wherein each sub-pixel of the first plurality of sub-pixels further comprises an encapsulation layer disposed over the cathode, the contact overhang, the at least one contact overhang, and the inorganic overhang structures and wherein the encapsulation layer contacts a structure stem portion and a structure bottom surface of the inorganic overhang structures.
19. A device, comprising: a substrate; a plurality of metal layers disposed over the substrate and an anode-defining layer (ADL) disposed over the plurality of metal layers and the substrate, the ADL defining anodes of the device; a metal grid disposed over the ADL, adjacent ADLs defining sub-pixels of the device; a plurality of sub-circuits, each sub-circuit comprising: the metal grid disposed on the ADL; inorganic overhang structures disposed on the metal grid; a first plurality of sub-pixels, each sub-pixel of the first plurality of sub-pixels comprising: an anode defined by the ADL; an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and a cathode disposed over the OLED material; and at least one contact overhang disposed on a respective assistant cathode line of the metal grid, the contact overhang disposed between two sub-pixels of the first plurality of sub-pixels, wherein the cathode contacts the contact overhang, wherein the inorganic overhang structures have an overhang structure ratio defined as a ratio of an overhang structure height to an overhang structure depth, and wherein the overhang structure ratio is about 1.0:1.2 to about 1.0:1.3.
20. A device, comprising: a substrate; a plurality of metal layers disposed over the substrate and an anode-defining layer (ADL) disposed over the plurality of metal layers and the substrate, the ADL defining anodes of the device; a metal grid disposed over the ADL, adjacent ADLs defining sub-pixels of the device; a plurality of sub-circuits, each sub-circuit comprising: the metal grid disposed on the ADL; inorganic overhang structures disposed on the metal grid; a first plurality of sub-pixels, each sub-pixel of the first plurality of sub-pixels comprising: an anode defined by the ADL; an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and a cathode disposed over the OLED material; and at least one contact overhang disposed on a respective assistant cathode line of the metal grid, the contact overhang disposed between two sub-pixels of the first plurality of sub-pixels, wherein the cathode contacts the contact overhang, wherein the at least one contact overhang has a contact overhang ratio defined as a ratio of an overhang height to an overhang depth, and wherein the contact overhang ratio is about 1.0:1.0 to about 1.0:1.5.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of its scope, and may admit to other equally effective embodiments.
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(10) To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
DETAILED DESCRIPTION
(11) Embodiments described herein generally relate to a display. More specifically, embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. In one embodiment, which can be combined with other embodiments described herein, the display is a top emission (TE) OLED display. In another embodiment, which can be combined with other embodiments described herein, the display is a passive-matrix (PM) or an active matrix (AM) OLED display. Each sub-pixel has the OLED material configured to emit a white, red, green, blue or other color light when energized. For example, the OLED material of a first sub-pixel emits a red light when energized, the OLED material of a second sub-pixel emits a green light when energized, and the OLED material of a third sub-pixel emits a blue light when energized.
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(13) An anode-defining layer (ADL) 108 is disposed on the metal layers 104 and the substrate 102. Openings in the ADL 108 expose an anode 114 of the metal layer 104. Each respective sub-pixel 118 of the sub-pixel circuit 100 includes the anode 114. In one embodiment, the ADL 108 includes, but is not limited to, a polyimide material. In another embodiment, the ADL 108 includes a first inorganic insulator material. The first inorganic insulator material includes, but is not limited to, silicon oxide (SiO.sub.2), silicon nitride (Si.sub.3N.sub.4), silicon oxynitride (Si.sub.2N.sub.2O), magnesium fluoride (MgF.sub.2), or combinations thereof.
(14) In one embodiment, as shown in
(15) Prior to the deposition of the PDL structure 110 (if needed) over the ADL 108, a metal grid 112 is disposed over the ADL 108. The PDL structure 110 is subsequently disposed over the ADL 108 and the metal grid 112, as shown in
(16) A contact overhang 122 is formed on the metal grid 112. The contact overhang 122 includes, but it not limited to, a conductive, metal-containing material. For example, the metal-containing material includes copper, titanium, aluminum, molybdenum, silver, indium tin oxide, indium zinc oxide, or combinations thereof. The contact overhang 122 includes a stem portion 128 and an overhang portion 130. The overhang portion 130 includes a bottom surface 132, a side surface 134, and a top surface 136. The bottom surface 132 of the overhang portion 130 is wider than the stem portion 128 to form a first overhang 138. The first overhang 138 allows for the overhang portion 130 of the contact overhang 122 to create a shadowing effect over the stem portion 128. In one embodiment, which can be combined with other embodiments described herein, the metal-containing material of stem portion 128 and the overhang portion 130 is the same. In another embodiment, which can be combined with other embodiments described herein, the metal-containing material of stem portion 128 and the overhang portion 130 is different.
(17) The sub-pixel circuit 100 includes the plurality of sub-pixels 118. The sub-pixel circuit 100 of the embodiments described herein may include one or more sub-pixels 118, such as a first and a second sub-pixel. Each sub-pixel 118 has an organic light-emitting diode (OLED) material 120. The OLED material 120 is disposed on the metal layer 104. In one example, as shown in
(18) A cathode 124 is disposed over the OLED material. The cathode 124 includes a conductive material, such as a metal. For example, the cathode 124 includes, but is not limited to, chromium, titanium, aluminum, ITO, or a combination thereof. The cathode 124 is disposed over the OLED material 120 in each sub-pixel 118. The shadowing effect of the first overhang 138 defines an angle of deposition during evaporation deposition of each of the OLED material 120 and the cathode 124. The OLED material 120 does not contact the contact overhang 122 and the metal grid 112. The cathode 124 contacts at least the stem portion 128 of the contact overhang 122 and the metal grid 112. In some embodiments, which can be combined with other embodiments described herein, the cathode 124 contacts the stem portion 128 and the overhang portion 130 of the contact overhang 122.
(19) The contact overhang 122 includes an overhang depth 140. The overhang depth 140 is defined as the distance from the stem portion 128 to the side surface 134. The contact overhang 122 further includes an overhang height 142. In
(20) Each sub-pixel 118 includes include an encapsulation layer 126. The encapsulation layer 126 may be or may correspond to a local passivation layer. The encapsulation layer 126 of a respective sub-pixel 118 is disposed over the cathode 124 (and the OLED material 120) and the PDL structures 110 (if provided). The encapsulation layer 126 includes a non-conductive inorganic material, such as the silicon-containing material. The silicon-containing material may include Si.sub.3N.sub.4 containing materials. In one embodiment, which can be combined with other embodiments described herein, the encapsulation layer 126 extends under at least a portion of the overhang portion 130 of the contact overhang 122 and along the stem portion 128. In some embodiments, which can be combined with other embodiments described herein, the encapsulation layer 126 is disposed over the bottom surface 132 of the contact overhang 122. In some embodiments, which can be combined with other embodiments described herein, the encapsulation layer 126 is disposed over the side surface 134 of the contact overhang 122 and the top surface 136 of the contact overhang 122.
(21) The sub-pixel circuit 100 may further include at least a global passivation layer 144 disposed over the contact overhang 122 and the encapsulation layers 126. An intermediate layer 146 may be disposed between the global passivation layer 144 and the contact overhang 122 and the encapsulation layers 126. The intermediate layer 146 may be an inkjet layer. The inkjet layer may include an acrylic material.
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(23) In one example, as shown in
(24) The inorganic overhang structure 148 includes a structure stem portion 150 and a structure overhang portion 152. The structure overhang portion 152 includes a structure bottom surface 154, a structure side surface 156, and a structure top surface 158. The structure bottom surface 154 is wider than the structure stem portion 150 to form a second overhang 160. The second overhang 160 allows for the structure overhang portion 152 of the contact overhang 122 to shadow the structure stem portion 150. In one embodiment, which can be combined with other embodiments described herein, the structure stem portion 150 and the structure overhang portion 152 include the same material. In another embodiment, which can be combined with other embodiments described herein, the structure stem portion 150 and the structure overhang portion 152 include a different material.
(25) The inorganic overhang structure 148 includes an overhang structure depth 162. The overhang structure depth 162 is defined as the distance from a top point 151 of the structure stem portion 150 to the structure side surface 156. The inorganic overhang structure 148 further includes an overhang structure height 164. In one example, as shown in
(26) In one embodiment, which can be combined with other embodiments described herein, the encapsulation layer 126 extends under at least a portion of the structure overhang portion 152 of the inorganic overhang structure 148 and along the structure stem portion 150. In some embodiments, which can be combined with other embodiments described herein, the encapsulation layer 126 is disposed over the structure bottom surface 154 of the inorganic overhang structure 148. In some embodiments, which can be combined with other embodiments described herein, the encapsulation layer 126 is disposed over the structure side surface 156 of the inorganic overhang structure 148 and the structure top surface 158 of the inorganic overhang structure 148.
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(29) Device leakage occurs due to minimal distance between the anode 114 and the cathode 124. Additionally, device leakage may occur due to the OLED material 120 contacting the inorganic overhang structures 148. The contact overhangs 122 are operable to decrease leakage within the sub-pixel circuit 300 by increasing the distance between cathode contact points (i.e., locations where the cathode 124 contacts the contact overhangs 122) and the anodes 114 of the metal layer 104 in the sub-pixel compared to other approaches. For example, the distance between the cathode contact points (i.e., where the cathode 124 contacts the contact overhangs 122) and the anodes 114 of the metal layer 104 is between about 10 mm and about 5 inches. Increasing the distance will decrease the occurrence of leakage because the contact overhangs 122 reduce the number of cathode contact points, increasing the distance between cathode contact points and the anodes 114.
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(32) The sub-pixel circuit 300 includes sub-circuits C.sub.1, C.sub.2, C.sub.3, C.sub.4, . . . C.sub.N. The sub-circuits C.sub.1-C.sub.N each include a plurality of sub-pixels 118. The sub-circuits C.sub.1-C.sub.N correspond to a plurality of metal layers 104 in through the sub-pixel circuit 300 on a substrate 102. Each sub-circuit C.sub.1-C.sub.N includes one or more contact overhangs 122. The sub-pixel circuit 300 further includes a metal grid 112. The metal grid 112 includes a plurality of assistant cathode lines R.sub.1, R.sub.2, R.sub.3, R.sub.4, . . . R.sub.M. The assistant cathode lines R.sub.1-R.sub.M of the metal grid 112 are perpendicular to the sub-circuits C.sub.1-C.sub.N. The assistant cathode lines R.sub.1-R.sub.M of the metal grid 112 are disposed below an anode defining layer (ADL) 108. The plurality of metal layers 104 are perpendicular to the metal grid 112. Each of the contact overhangs 122 are contacting the respective assistant cathode lines R.sub.1-R.sub.M of the metal grid 112. Increasing the number of the sub-circuits C.sub.1-C.sub.N and the number of the assistant cathode lines R.sub.1-R.sub.M will provide for more sub-pixels 118 on the sub-pixel circuit 300.
(33) The sub-pixel circuit 300 allows for individual activation of each of the sub-circuits C.sub.1-C.sub.N. To activate a specific sub-circuit C.sub.1-C.sub.N, a current is provided through the metal grid 112. The metal grid 112 of the assistant cathode line R.sub.1-R.sub.M with the contact overhang 122 in the corresponding sub-circuit C.sub.1-C.sub.N to be activated is provided the voltage and/or current. The current is supplied through the metal grid 112 and runs to the contact overhang 122. The metal grid 112 is connected to a common ground. In some embodiments, which can be combined with other embodiments described herein, a negative voltage can be applied to the metal grid 112. In one embodiment, which can be combined with other embodiments described herein, each metal grid 112 is electrically connected to a thin film transistor (not shown) on the substrate 102, which provides electrical current and/or voltage to each metal grid 112. The contact overhang 122 is in contact with the cathode 124 (shown in
(34) An example of current flow to activate the plurality of sub-pixels 118 in the sub-circuit C.sub.1 is indicated by a line 301. As shown in
(35) The sub-pixels 118 in the sub-circuit C.sub.1-C.sub.N are operable to emit light. The sub-pixel circuit 300 is operable to activate each sub-circuit C.sub.1-C.sub.N individually and independently. In one embodiment, which can be combined with other embodiments described herein, the sub-pixels 118 in each of the sub-circuits C.sub.1-C.sub.N are mono-colored. In another embodiment, which can be combined with other embodiments described herein, each of the sub-pixels 118 in the sub-circuits C.sub.1-C.sub.N are operable to emit a different colored light. For example, the sub-pixels 118 in a first sub-circuit C.sub.1 emit a red light, the sub-pixels 118 in a second sub-circuit C.sub.2 emit a green light, the sub-pixels 118 in a third sub-circuit C.sub.3 emit a blue light, and the sub-pixels 118 in a fourth sub-circuit C.sub.4 emit a white light.
(36) The contact overhangs 122 may be arranged in the sub-pixel circuit 300 as desired. Each of the sub-circuits C.sub.1-C.sub.N includes at least one contact overhang 122. For example, each of the sub-circuits C.sub.1-C.sub.N may include more than one contact overhang 122. The contact overhangs 122 are positioned such that a distance of about 50 mm to about 7 inches is between adjacent contact overhangs 122.
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(38) At operation 401, as shown in
(39) At operation 402, as shown in
(40) At operation 403, as shown in
(41) At operation 404, as shown in
(42) At operation 405, as shown in
(43) At operation 406, as shown in
(44) At operation 407, as shown in
(45) In summation, embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The sub-pixel circuit includes a plurality of contact overhangs. The plurality of contact overhangs are disposed between adjacent sub-pixels of a sub-pixel circuit to be formed. The contact overhangs are formed over a metal grid disposed through a PDL structure. A cathode is deposited via evaporation deposition to be in contact with the contact overhang. The metal grid is perpendicular to a plurality of metal layers disposed on the substrate. To activate individual sub-circuits of the sub-pixel circuit, a current is applied to the metal grid. The current runs to the contact overhang and to the cathode in the sub-circuit to be activated. The current runs through an OLED material and to one of the plurality of metal layers to activate one of the sub-circuits of sub-pixels. The contact overhangs allow for overhang structures of the sub-circuit to be formed with less precision. The contact overhangs also decrease the occurrence of device leakage and thus, improve performance of the sub-circuit.
(46) While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.