SURFACE ACOUSTIC WAVE FILTER INCLUDING RESONATOR WITH MULTI-STAGED REFLECTOR
20260025123 ยท 2026-01-22
Inventors
Cpc classification
H03H9/25
ELECTRICITY
International classification
Abstract
Aspects and embodiments disclosed herein include a die comprising a plurality of surface acoustic wave resonators. At least one of the plurality of surface acoustic wave resonators has an aperture that at least partially overlaps an aperture of at least one other of the plurality of surface acoustic wave resonators. The at least one of the plurality of surface acoustic wave resonators includes interdigital transducer electrodes with interdigital transducer electrode fingers having a first average pitch and reflector electrodes with reflector electrode fingers having at least two different pitches. Each of the at least two different pitches are greater than the first average pitch.
Claims
1. A die comprising a plurality of surface acoustic wave resonators, at least one of the plurality of surface acoustic wave resonators having an aperture that at least partially overlaps an aperture of at least one other of the plurality of surface acoustic wave resonators, the at least one of the plurality of surface acoustic wave resonators including interdigital transducer electrodes with interdigital transducer electrode fingers having a first average pitch and reflector electrodes with reflector electrode fingers having at least two different pitches, each of the at least two different pitches being greater than the first average pitch.
2. The die of claim 1 wherein the interdigital transducer electrode fingers of the at least one of the plurality of surface acoustic wave resonators have a first constant pitch throughout a center portion of the interdigital transducer electrodes and a second average pitch proximate outer sides of the interdigital transducer electrodes on opposite sides of the center portion.
3. The die of claim 2 wherein the pitches of the interdigital transducer electrode fingers decrease monotonically with distance from outer edges of the center portion to the outer sides of the interdigital transducer electrodes.
4. The die of claim 2 wherein the reflector electrode fingers have a second constant pitch throughout inner portions of the reflector electrodes and a third constant pitch throughout outer portions of the reflector electrodes.
5. The die of claim 4 wherein the third constant pitch is greater than the second constant pitch.
6. The die of claim 5 wherein the second constant pitch is about 1.05 times the first constant pitch.
7. The die of claim 5 wherein the third constant pitch is about 1.1 times the first constant pitch.
8. The die of claim 2 wherein the pitches of the reflector electrode fingers increase with distance from inner sides of the reflector electrodes to outer sides of the reflector electrodes.
9. The die claim 8 wherein the pitches of the reflector electrode fingers increase monotonically with distance from the inner sides of the reflector electrodes to the outer sides of the reflector electrodes.
10. The die of claim 8 wherein the pitch of the reflector electrode fingers is about 1.05 times the first constant pitch at the inner sides of the reflector electrodes.
11. The die of claim 8 wherein the pitch of the reflector electrode fingers is about 1.1 times the first constant pitch at the outer sides of the reflector electrodes.
12. The die of claim 1 wherein each of the plurality of surface acoustic wave resonators include interdigital transducer electrodes with interdigital transducer electrode fingers having a first average pitch and reflector electrodes with reflector electrode fingers having at least two different pitches, each of the at least two different pitches being greater than the first average pitch.
13. The die of claim 1 wherein the at least one of the plurality of surface acoustic wave resonators and the at least one other of the plurality of surface acoustic wave resonators have partially overlapping apertures.
14. The die of claim 13 wherein the at least one of the plurality of surface acoustic wave resonators and the at least one other of the plurality of surface acoustic wave resonators have interdigital transducer electrode fingers with different average pitches.
15. The die of claim 13 wherein the at least one of the plurality of surface acoustic wave resonators and the at least one other of the plurality of surface acoustic wave resonators have reflector electrode fingers with different average pitches.
16. The die of claim 1 wherein the plurality of surface acoustic wave resonators form a radio frequency filter.
17. The die of claim 16 wherein the plurality of surface acoustic wave resonators form a radio frequency ladder filter.
18. An electronics module comprising the radio frequency filter of claim 17.
19. An electronic device including the electronics module of claim 18.
20. A radio frequency filter comprising a plurality of surface acoustic wave resonators disposed on a substrate, at least one of the plurality of surface acoustic wave resonators having an aperture that at least partially overlaps an aperture of at least one other of the plurality of surface acoustic wave resonators, the at least one of the plurality of surface acoustic wave resonators including interdigital transducer electrodes with interdigital transducer electrode fingers having a first average pitch and reflector electrodes with reflector electrode fingers having at least two different pitches, each of the at least two different pitches being greater than the first average pitch.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Embodiments of this disclosure will now be described, by way of non-limiting example, with reference to the accompanying drawings.
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DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS
[0042] The following description of certain embodiments presents various descriptions of specific embodiments. However, the innovations described herein can be embodied in a multitude of different ways, for example, as defined and covered by the claims. In this description, reference is made to the drawings where like reference numerals can indicate identical or functionally similar elements. It will be understood that elements illustrated in the figures are not necessarily drawn to scale. Moreover, it will be understood that certain embodiments can include more elements than illustrated in a drawing and/or a subset of the elements illustrated in a drawing. Further, some embodiments can incorporate any suitable combination of features from two or more drawings.
[0043]
[0044] Acoustic wave resonator 10 is formed on a substrate 12 including a piezoelectric material layer, for example, a lithium tantalate (LiTaO.sub.3) or lithium niobate (LiNbO.sub.3) material layer. In some embodiments, as described with reference to
[0045] The IDT electrodes 14 include a first bus bar electrode 18A and a second bus bar electrode 18B facing the first bus bar electrode 18A. The IDT electrodes 14 further include first IDT electrode fingers 20A extending from the first bus bar electrode 18A toward the second bus bar electrode 18B, and second IDT electrode fingers 20B extending from the second bus bar electrode 18B toward the first bus bar electrode 18A.
[0046] The reflector electrodes 16 (also referred to as reflector gratings or simply reflectors) each include a first reflector bus bar electrode 24A and a second reflector bus bar electrode 24B and reflector electrode fingers 26 extending between and electrically coupling the first bus bar electrode 24A and the second bus bar electrode 24B.
[0047] In other embodiments disclosed herein, as illustrated in
[0048] It should be appreciated that the acoustic wave resonators 10 illustrated in
[0049]
[0050] The substrate 12 is an MPS substrate including a support substrate 12A that may be formed of any of Si, quartz, sapphire, or any other suitable material to provide the substrate 12 with a desired amount of mechanical stability. A trap-rich layer 12B formed of, for example, polysilicon is disposed on top of the support substrate 12A and helps to reduce the generation of parasitic currents at the upper surface of the support substrate 12A. A layer 12C of a dielectric material, for example, a 600 nm thick layer of SiO.sub.2 is disposed on the upper surface of the trap-rich layer 12B. Layer 12C may be referred to herein as a functional layer. A layer 12D of a piezoelectric material, for example, a 1,000 nm thick layer of lithium tantalate (LiTaO.sub.3) or lithium niobate (LiNbO.sub.3) is disposed on the upper surface of the layer 12C of dielectric material. The IDT electrodes 20 are disposed on the upper surface of the layer 12D of piezoelectric material. The piezoelectric material of layer 12D may exhibit a negative temperature coefficient of frequency. This may be compensated for by the positive temperature coefficient of frequency exhibited by the SiO.sub.2 in the functional layer 12C.
[0051] Another example of a substrate structure for a surface acoustic wave device, for example, as illustrated in any of
[0052] In some embodiments, multiple SAW resonators as disclosed herein may be combined into a filter, for example, an RF ladder filter as schematically illustrated in
[0053] In some embodiments, the pitch of IDT electrode fingers 20A, 20B of a SAW resonator may vary across the width of the resonator in the direction of propagation of the main acoustic wave generated by the resonator. Additionally or alternatively, the pitch of the reflector electrode fingers 26 may be different from the pitch of the IDT electrode fingers 20A, 20B. One example of a SAW resonator with IDT electrode fingers that have different pitches and reflector electrode fingers with different pitches than the IDT electrode fingers is illustrated in plan view in
[0054] In the physical layout of the SAW resonators of a ladder filter such as illustrated in
[0055]
[0056] A modification to the resonator pitch profile may help suppress spurious signals in a SAW filter and reduce the magnitude of discontinuities in the filter insertion loss curve. One example of a SAW resonator with a modified pitch profile is illustrated in simplified plan view in
[0057] Another embodiment of a SAW resonator with a modified pitch profile is illustrated in simplified plan view in
[0058] It is to be appreciated that resonators with at least partially overlapping apertures, for example, the resonators labelled as Res1 and Res2 in
[0059] The simulation that produced the results shown in
[0060] The acoustic wave resonators discussed herein can be implemented in a variety of packaged modules. Some example packaged modules will now be discussed in which any suitable principles and advantages of the packaged acoustic wave resonators discussed herein can be implemented.
[0061] As discussed above, embodiments of the surface acoustic wave elements can be configured as or used in filters, for example. In turn, a surface acoustic wave (SAW) filter using one or more surface acoustic wave elements may be incorporated into and packaged as a module that may ultimately be used in an electronic device, such as a wireless communications device, for example.
[0062] Various examples and embodiments of the SAW filter 310 can be used in a wide variety of electronic devices. For example, the SAW filter 310 can be used in an antenna duplexer, which itself can be incorporated into a variety of electronic devices, such as RF front-end modules and communication devices.
[0063] Referring to
[0064] The antenna duplexer 410 may include one or more transmission filters 412 connected between the input node 404 and the common node 402, and one or more reception filters 414 connected between the common node 402 and the output node 406. The passband(s) of the transmission filter(s) are different from the passband(s) of the reception filters. Examples of the SAW filter 310 can be used to form the transmission filter(s) 412 and/or the reception filter(s) 414. An inductor or other matching component 420 may be connected at the common node 402.
[0065] The front-end module 400 further includes a transmitter circuit 432 connected to the input node 404 of the duplexer 410 and a receiver circuit 434 connected to the output node 406 of the duplexer 410. The transmitter circuit 432 can generate signals for transmission via the antenna 510, and the receiver circuit 434 can receive and process signals received via the antenna 510. In some embodiments, the receiver and transmitter circuits are implemented as separate components, as shown in
[0066]
[0067] The front-end module 400 includes a transceiver 430 that is configured to generate signals for transmission or to process received signals. The transceiver 430 can include the transmitter circuit 432, which can be connected to the input node 404 of the duplexer 410, and the receiver circuit 434, which can be connected to the output node 406 of the duplexer 410, as shown in the example of
[0068] Signals generated for transmission by the transmitter circuit 432 are received by a power amplifier (PA) module 450, which amplifies the generated signals from the transceiver 430. The power amplifier module 450 can include one or more power amplifiers. The power amplifier module 450 can be used to amplify a wide variety of RF or other frequency-band transmission signals. For example, the power amplifier module 450 can receive an enable signal that can be used to pulse the output of the power amplifier to aid in transmitting a wireless local area network (WLAN) signal or any other suitable pulsed signal. The power amplifier module 450 can be configured to amplify any of a variety of types of signal, including, for example, a Global System for Mobile (GSM) signal, a code division multiple access (CDMA) signal, a W-CDMA signal, a Long-Term Evolution (LTE) signal, or an EDGE signal. In certain embodiments, the power amplifier module 450 and associated components including switches and the like can be fabricated on gallium arsenide (GaAs) substrates using, for example, high-electron mobility transistors (pHEMT) or insulated-gate bipolar transistors (BiFET), or on a Silicon substrate using complementary metal-oxide semiconductor (CMOS) field effect transistors.
[0069] Still referring to
[0070] The wireless device 500 of
[0071] Aspects of this disclosure can be implemented in various electronic devices. Examples of the electronic devices can include, but are not limited to, consumer electronic products, parts of the consumer electronic products such as packaged radio frequency modules, uplink wireless communication devices, wireless communication infrastructure, electronic test equipment, etc. Examples of the electronic devices can include, but are not limited to, a mobile phone such as a smart phone, a wearable computing device such as a smart watch or an ear piece, a telephone, a television, a computer monitor, a computer, a modem, a hand-held computer, a laptop computer, a tablet computer, a microwave, a refrigerator, a vehicular electronics system such as an automotive electronics system, a stereo system, a digital music player, a radio, a camera such as a digital camera, a portable memory chip, a washer, a dryer, a washer/dryer, a copier, a facsimile machine, a scanner, a multi-functional peripheral device, a wrist watch, a clock, etc. Further, the electronic devices can include unfinished products.
[0072] Unless the context clearly requires otherwise, throughout the description and the claims, the words comprise, comprising, include, including and the like are to be construed in an inclusive sense, as opposed to an exclusive or exhaustive sense; that is to say, in the sense of including, but not limited to. The word coupled, as generally used herein, refers to two or more elements that may be either directly connected, or connected by way of one or more intermediate elements. Likewise, the word connected, as generally used herein, refers to two or more elements that may be either directly connected, or connected by way of one or more intermediate elements. Additionally, the words herein, above, below, and words of similar import, when used in this application, shall refer to this application as a whole and not to any particular portions of this application. Where the context permits, words in the above Detailed Description using the singular or plural number may also include the plural or singular number respectively. The word or in reference to a list of two or more items, that word covers all of the following interpretations of the word: any of the items in the list, all of the items in the list, and any combination of the items in the list.
[0073] Moreover, conditional language used herein, such as, among others, can, could, might, may, e.g., for example, such as and the like, unless specifically stated otherwise, or otherwise understood within the context as used, is generally intended to convey that certain embodiments include, while other embodiments do not include, certain features, elements and/or states. Thus, such conditional language is not generally intended to imply that features, elements and/or states are in any way required for one or more embodiments or that one or more embodiments necessarily include logic for deciding, with or without author input or prompting, whether these features, elements and/or states are included or are to be performed in any particular embodiment.
[0074] While certain embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the disclosure. Indeed, the novel apparatus, methods, and systems described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions and changes in the form of the methods and systems described herein may be made without departing from the spirit of the disclosure. For example, while blocks are presented in a given arrangement, alternative embodiments may perform similar functionalities with different components and/or circuit topologies, and some blocks may be deleted, moved, added, subdivided, combined, and/or modified. Each of these blocks may be implemented in a variety of different ways. Any suitable combination of the elements and acts of the various embodiments described above can be combined to provide further embodiments. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the disclosure.