MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME

Abstract

A MEMS microphone is provided. The MEMS microphone includes a substrate, a membrane, and a backplate. The substrate is with a cavity. The membrane is disposed on the substrate across the cavity. The backplate is disposed over the membrane and separated from the membrane by an air gap. The membrane has a corrugation. The backplate has a portion corresponding to and directly above the corrugation. A step height of the portion is equal to or less than 20% of a step height of the corrugation.

Claims

1. A micro-electro-mechanical systems (MEMS) microphone, comprising: a substrate with a cavity; a membrane disposed on the substrate across the cavity; and a backplate disposed over the membrane and separated from the membrane by an air gap; wherein the membrane has a corrugation, the backplate has a portion corresponding to and directly above the corrugation, and a step height of the portion is equal to or less than 20% of a step height of the corrugation.

2. The MEMS microphone according to claim 1, wherein the membrane comprises two or more of the corrugations.

3. The MEMS microphone according to claim 1, wherein the backplate comprises a plurality of dimples facing the membrane and a plurality of acoustic holes.

4. The MEMS microphone according to claim 1, wherein the step height of the portion is a vertical distance between a highest point and a lowest point of a top surface of the backplate, and the step height of the corrugation is a vertical distance between a highest point and a lowest point of a top surface of the membrane.

5. The MEMS microphone according to claim 1, wherein the step height of the portion is a vertical distance between a highest point and a lowest point of a bottom surface of the backplate, and the step height of the corrugation is a vertical distance between a highest point and a lowest point of a bottom surface of the membrane.

6. The MEMS microphone according to claim 1, wherein the step height of the portion is zero.

7. A method for manufacturing a micro-electro-mechanical systems (MEMS) microphone, comprising: forming a membrane on a substrate, the membrane having a corrugation; forming a stop layer on the membrane, the stop layer having an opening exposing the corrugation; filling a temporary filling material through the opening of the stop layer into the corrugation; and forming a backplate over the temporary filling material and the membrane.

8. The method according to claim 7, wherein before forming the membrane, the method further comprises: forming a dielectric layer on the substrate.

9. The method according to claim 7, wherein after forming the membrane, the method further comprises: forming one or more holes through the membrane; and forming a dielectric layer on the membrane, wherein a material of the dielectric layer seals the one or more holes.

10. The method according to claim 7, wherein forming the stop layer on the membrane comprises: forming a stop layer material on the membrane; forming a first mask on the stop layer material; forming a second mask on the first mask, the second mask having an opening corresponding to the corrugation of the membrane; etching the first mask using the second mask; removing the second mask; etching the stop layer material using the first mask such that the stop layer has the opening exposing the corrugation; and removing the first mask.

11. The method according to claim 7, wherein filling the temporary filling material comprises: providing the temporary filling material on the stop layer; and removing a redundant portion of the temporary filling material by a planarization process using the stop layer.

12. The method according to claim 7, wherein after filling the temporary filling material, the temporary filling material forms a substantially flat top surface over the corrugation.

13. The method according to claim 12, wherein a step height of the substantially flat top surface is equal to or less than 20% of a step height of the corrugation.

14. The method according to claim 7, wherein after filling the temporary filling material and before forming the backplate, the method further comprises: removing the stop layer.

15. The method according to claim 7, wherein after filling the temporary filling material and before forming the backplate, the method further comprises: forming a sacrificial layer on the membrane.

16. The method according to claim 15, further comprising: forming concaves on the sacrificial layer at positions corresponding to dimples of the backplate.

17. The method according to claim 7, wherein after forming the backplate, the method further comprises: forming circuit components for the MEMS microphone.

18. The method according to claim 7, wherein after forming the backplate, the method further comprises: forming a cavity in the substrate; and forming an air gap between the backplate and the membrane.

19. The method according to claim 7, wherein the backplate has a portion corresponding to and directly above the corrugation, and a step height of the portion is equal to or less than 20% of a step height of the corrugation.

20. The method according to claim 19, wherein the step height of the portion is zero.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0008] FIG. 1 illustrates a MEMS microphone according to the disclosure.

[0009] FIG. 2 illustrates another MEMS microphone according to the disclosure.

[0010] FIGS. 3A-3B illustrate details of the MEMS microphone according to the disclosure.

[0011] FIGS. 4A-4P illustrate various stages of a method for manufacturing a MEMS microphone according to the disclosure.

[0012] In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the disclosed embodiments. It will be apparent, however, that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and devices are schematically shown in order to simplify the drawing.

DETAILED DESCRIPTION

[0013] Various embodiments will be described more fully hereinafter with reference to accompanying drawings. The description and the drawings are provided for illustrative only, and not intended to result in a limitation. As used herein, the singular forms are intended to include the plural forms as well, unless the context clearly indicates otherwise. In addition, the elements may not be drawn to scale for clarity. Some elements and/or reference numerals may be omitted from some drawings. It is contemplated that the elements and features of one embodiment can be beneficially incorporated in another embodiment without further recitation.

[0014] Referring to FIG. 1, a MEMS microphone 100 according to the disclosure is shown. The MEMS microphone 100 comprises a substrate 110, a membrane 120, and a backplate 130. The substrate 110 is with a cavity C. The membrane 120 is disposed on the substrate 110 across the cavity C. The backplate 130 is disposed over the membrane 120 and separated from the membrane 120 by an air gap G. The membrane 120 has a corrugation 122. The backplate 130 has a portion 132 corresponding to and directly above the corrugation 122. A step height of the portion 132 is equal to or less than 20% of a step height of the corrugation 122.

[0015] Specifically, a material of the substrate 110 may be, for example, Si. However, the disclosure is not limited thereto. The cavity C penetrates through the substrate 110.

[0016] According to some embodiments, the MEMS microphone 100 may further comprise a dielectric layer 140. The dielectric layer 140 is disposed on the substrate 110. A material of the dielectric layer 140 may be, for example, oxide. A thickness of the dielectric layer 140 may be, for example, 2,000 to 10,000 . However, the disclosure is not limited thereto. In conditions that the dielectric layer 140 is included, the cavity C penetrates through the dielectric layer 140 and the substrate 110.

[0017] In conditions that the dielectric layer 140 is included, the membrane 120 is disposed on the dielectric layer 140. A material of the membrane 120 may be, for example, polysilicon. A thickness of the membrane 120 may be, for example, 2,000 to 10,000 . However, the disclosure is not limited thereto. The corrugation 122 of the membrane 120 is beneficial for improving sensitivity of the MEMS microphone 100. In the MEMS microphone 100 as shown in FIG. 1, the membrane 120 comprise one corrugation 122. However, it can be understood that the membrane 120 may comprise two or more of the corrugations. For example, in the MEMS microphone 100 as shown in FIG. 2, the membrane 120 comprises two corrugations 122.

[0018] According to some embodiments, the MEMS microphone 100 may further comprise a dielectric layer 142. The dielectric layer 142 is disposed on a portion of the membrane 120 that is not exposed by the air gap G and on the dielectric layer 140. A material of the dielectric layer 142 may be, for example, TEOS. A thickness of the dielectric layer 142 may be, for example, 1,000 to 2,000 . However, the disclosure is not limited thereto.

[0019] According to some embodiments, the MEMS microphone 100 may further comprise a dielectric layer 144, which supports the overlying backplate 130 around the air gap G. The dielectric layer 144 is disposed on the dielectric layer 142. A material of the dielectric layer 144 may be, for example, oxide. A thickness of the dielectric layer 144 may be, for example, 15,000 to 30,000 . However, the disclosure is not limited thereto. The air gap G can actually be understood as the hollow part of the dielectric layer 144.

[0020] The backplate 130 is supported on the dielectric layer 144. A material of the backplate 130 may be, for example, polysilicon. A thickness of the backplate 130 may be, for example, 1,000 to 4,000 . However, the disclosure is not limited thereto. The backplate 130 may comprise a plurality of dimples 134. The dimples 134 face the membrane 120. The backplate 130 may comprise a plurality of acoustic holes 136. The acoustic holes 136 penetrate through the backplate 130. According to some embodiments, the MEMS microphone 100 may further comprise a dielectric layer 146 on a bottom side of the backplate 130. A material of the dielectric layer 146 may be, for example, silicon nitride. A thickness of the dielectric layer 146 may be, for example, 1,000 to 3,000 . However, the disclosure is not limited thereto. According to some embodiments, the MEMS microphone 100 may further comprise a protective layer 148 on a top side of the backplate 130. A material of the protective layer 148 may be, for example, silicon nitride. A thickness of the protective layer 148 may be, for example, 1,000 to 3,000 . However, the disclosure is not limited thereto.

[0021] Referring to FIG. 3A, an enlarged view of the corrugation 122 of the membrane 120 and the corresponding portion 132 of the backplate 130 is shown. According to some embodiments, as shown in FIG. 3A, the step height h.sub.b of the portion 132 can be a vertical distance between a highest point and a lowest point of a top surface of the backplate 130, and the step height h.sub.m of the corrugation 122 can be a vertical distance between a highest point and a lowest point of a top surface of the membrane 120. The backplate 130 may be substantially flat at the portion 132. In other words, the step height h.sub.b of the portion 132 may be zero. The highest point of the membrane 120 at the corrugation 122 can be at the flat part of the membrane 120, and the lowest portion can be at the deepest part of the corrugation 122.

[0022] According to some other embodiments, as shown in FIG. 3B, the step height h.sub.b of the portion 132 can be a vertical distance between a highest point and a lowest point of bottom surface of the backplate 130, and the step height h.sub.m of the corrugation 122 can be a vertical distance between a highest point and a lowest point of a bottom surface of the membrane 120. The backplate 130 may be substantially flat at the portion 132. In other words, the step height h.sub.b of the portion 132 may be zero. The highest point of the membrane 120 at the corrugation 122 can be at the flat part of the membrane 120, and the lowest portion can be at the deepest part of the corrugation 122.

[0023] According to some embodiments, the MEMS microphone 100 may further comprise circuit components 150. The circuit components 150 for the MEMS microphone 100 comprise, for example, a conductive contact 152 and a conductive pad 154, but not limited thereto. A material of the contact 152 may be, for example, metal. A thickness of the contact 152 may be, for example, 8,000 to 25,000 . However, the disclosure is not limited thereto. The pad 154 may, for example, comprise polysilicon and metal thereon. A thickness of the polysilicon may be, for example, 1,000 to 4,000 . A thickness of the metal may be, for example, 8,000 to 25,000 . However, the disclosure is not limited thereto.

[0024] Now the disclosure is directed to a method for manufacturing a MEMS microphone as described above. The method according to the disclosure comprises following steps. First, a membrane is formed on a substrate. The membrane has a corrugation. Then, a stop layer is formed on the membrane. The stop layer has an opening exposing the corrugation. A temporary filling material is filled through the opening of the stop layer into the corrugation. A backplate is formed over the temporary filling material and the membrane.

[0025] Referring to FIG. 4A-4P for details, various stages of the method for manufacturing the MEMS microphone 100 are shown.

[0026] As shown in FIG. 4A, a substrate 110 may be provided at first. The substrate 110 may be formed of silicon. However, the disclosure is not limited thereto. A concave 112 is formed on the substrate 110 at a position corresponding to where a corrugation 122 of a membrane 120 is to be formed.

[0027] Then, a dielectric layer 140 may be conformally formed on the substrate 110. The dielectric layer 140 may be formed of oxide. A thickness of the dielectric layer 140 may be 2,000 to 10,000 . In some embodiments, the dielectric layer 140 may be formed not only on a surface of the substrate 110 at a front-side, but also on a surface of the substrate 110 at a backside. However, the disclosure is not limited thereto.

[0028] As shown in FIG. 4B, the membrane 120 is formed on the substrate 110, particularly on the dielectric layer 140 in a conformal manner. The membrane 120 has the corrugation 122. The membrane 120 may be formed of polysilicon. A thickness of the membrane 120 may be 2,000 to 10,000 . In some embodiments, the material of the membrane 120 is provided also on the dielectric layer 140 at the backside of the substrate 110 to form a layer 120A. However, the disclosure is not limited thereto.

[0029] One or more holes 124 are formed through the membrane 120, as shown in FIG. 4C. Then, a dielectric layer 142 may be formed on the membrane 120. A material of the dielectric layer 142 seals the one or more holes 124. The dielectric layer 142 may be formed of TEOS by a low-pressure process. A thickness of the dielectric layer 142 may be 1,000 to 2,000 . However, the disclosure is not limited thereto.

[0030] Thereafter, a stop layer 202 is formed on the membrane 120, particularly on the dielectric layer 142. The stop layer 202 has an opening O exposing the corrugation 122.

[0031] Specifically, as shown in FIG. 4D, a stop layer material is formed on the membrane 120, particularly on the dielectric layer 142. The stop layer material is, for example, silicon nitride. However, the disclosure is not limited thereto.

[0032] As shown in FIG. 4E, a first mask 204 is formed on the stop layer material. The first mask 204 may be formed of oxide. However, the disclosure is not limited thereto. A second mask 206 is formed on the first mask 204. The second mask 206 may be formed of photo resist. However, the disclosure is not limited thereto. The second mask 206 has an opening corresponding to the corrugation 122 of the membrane 120.

[0033] The first mask 204 is etched using the second mask 206. The second mask 206 is removed. Then, the stop layer material is etched using the first mask 204 such that the stop layer 202 has the opening O exposing the corrugation 122. The first mask 204 is removed, as shown in FIG. 4F.

[0034] Thereafter, a temporary filling material 208 is filled through the opening O of the stop layer 202 into the corrugation 122. The temporary filling material 208 is, for example, oxide. However, the disclosure is not limited thereto.

[0035] Specifically, as shown in FIG. 4G, the temporary filling material 208 is provided on the stop layer 202. The temporary filling material 208 may pass through the opening O of the stop layer 202 and go into the corrugation 122.

[0036] Then, as shown in FIG. 4H, a redundant portion of the temporary filling material 208 is removed by a planarization process, such as a CMP process, using the stop layer 202.

[0037] As shown in FIG. 4I, the stop layer 202 is removed. In this step, the temporary filling material 208 at the same height may also be removed.

[0038] After filling the temporary filling material 208, the temporary filling material 208 forms a substantially flat top surface over the corrugation 122 due to the planarization process. A step height of the substantially flat top surface may be equal to or less than 20% of a step height of the corrugation, and even be zero.

[0039] As shown in FIG. 4J, a sacrificial layer 210 is formed on the membrane 120. The sacrificial layer 210 may be formed of oxide. A thickness of the sacrificial layer 210 may be 15,000 to 30,000 . However, the disclosure is not limited thereto.

[0040] As shown in FIG. 4K, concaves 212 are formed on the sacrificial layer 210 at positions corresponding to dimples 134 of a backplate 130. The concaves 212 may be formed by a lithography process and/or an etching process. However, the disclosure is not limited thereto.

[0041] Thereafter, the backplate 130 may be formed over the temporary filling material 208 and the membrane 120, particularly on the sacrificial layer 210.

[0042] Specifically, as shown in FIG. 4L, a dielectric layer 146 may be conformally formed on the sacrificial layer 210. The dielectric layer 146 may be formed of silicon nitride. A thickness of the dielectric layer 146 may be 1,000 to 3,000 . However, the disclosure is not limited thereto. The backplate 130 is formed on the sacrificial layer 210, particularly on the dielectric layer 146. The backplate 130 has a plurality of dimples 134 in the concaves 212 and a plurality of acoustic holes 136 through the backplate 130. The backplate 130 may be formed of polysilicon. A thickness of the backplate 130 may be 1,000 to 4,000 . However, the disclosure is not limited thereto. Then, a protective layer 148 may be conformally formed on the backplate 130. The protective layer 148 may be formed of silicon nitride. A thickness of the protective layer 148 may be 1,000 to 3,000 . In some embodiments, the may be formed also on the layer 120 A at the backside of the substrate 110. However, the disclosure is not limited thereto.

[0043] As shown in FIG. 4M, circuit components 150 for the MEMS microphone 100 may be formed. The circuit components 150 for the MEMS microphone 100 comprise, for example, a conductive contact 152 and a conductive pad 154, but not limited thereto. For example, a hole may be formed around the backplate 130 through the protective layer 148, the sacrificial layer 210, and the dielectric layer 142 to the membrane 120, and metal of 8,000 to 25,000 thick may be deposited on a sidewall of the hole, so as to form the contact 152. A polysilicon layer of 1,000 to 4,000 thick and exposed by the protective layer 148 may be formed around the backplate 130 when the backplate 130 is formed, and metal of 8,000 to 25,000 thick may be deposited on the polysilicon layer, so as to form the pad 154. However, the disclosure is not limited thereto.

[0044] As shown in FIG. 4N, holes 214 are formed extending into the sacrificial layer 210 from the acoustic holes 136. The holes 214 may be formed by a lithography process and/or an etching process. However, the disclosure is not limited thereto.

[0045] As shown in FIG. 4O, the substrate 110 is thinned from the backside of the substrate 110. In this process, the dielectric layer 140, the layer 120A, and the protective layer 148 at the backside of the substrate 110 are also removed. Then, a cavity C is formed in the substrate 110. The cavity C may be formed by a lithography process and/or an etching process. However, the disclosure is not limited thereto.

[0046] As shown in FIG. 4P, an air gap G is formed between the backplate 130 and the membrane 120. Specifically, a portion of the dielectric layer 140 and a portion of the dielectric layer 142 that are between the sacrificial layer 210 and the cavity C, including a portion of the dielectric layer 142 in the holes 124, may be removed from the cavity C using, for example, HF. Then, the HF removes a portion of the sacrificial layer 210 between the backplate 130 and the membrane 120 though the cavity C and the holes 124 to form the air gap G. A redundant portion of the sacrificial layer 210 is the dielectric layer 144 as described above.

[0047] In the method according to the disclosure, the corrugation 122 has been filled with the temporary filling material 208 and thus the contour of the membrane 120 is flatten before forming the sacrificial layer 210. As such, a sharp profile caused due to the process transformation can be prevented from being formed in the backplate. Specifically, the backplate 130 has a portion 132 (shown in FIG. 1) corresponding to and directly above the corrugation 122, and a step height of the portion 132 is equal to or less than 20% of a step height of the corrugation, and even may be zero. Therefore, damage of the device caused by stress concentration can be prevented or at least decreased. In addition, since the backplate 130 is not affected by the corrugation 122 of the membrane 120, the design of the membrane 120 can have more flexibility.

[0048] It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments. It is intended that the specification and examples be considered as exemplary only, with a true scope of the disclosure being indicated by the following claims and their equivalents.