BIAXIAL POSITIONING DEVICE

Abstract

A biaxial positioning device is described. The positioning device includes: a stationary base element; a first positioning element movably mounted relative to the base element along a first direction by means of a first guide device; a second positioning element movably mounted relative to the first positioning element along a second direction, which is different to the first direction, by means of a second guide device; a first drive for adjusting the first positioning element along the first direction of movement; and a second drive for adjusting the second positioning element along the second direction of movement. The stationary base element and the second positioning element each have a printed circuit board, and the first positioning element is a metal support element and is disposed between the base element and the second positioning element.

Claims

1. A two-axis positioning device, comprising a base element, a first positioning element which is movably mounted relative to the base element along a first direction, a second positioning element which is movably mounted relative to the first positioning element along a second direction which deviates from the first direction, a first drive for adjusting the first positioning element along the first direction of movement, a second drive for adjusting the second positioning element along the second direction of movement, wherein the stationary base element and the second positioning element comprise one or more circuit boards, and the first positioning element is realized as a metallic support element and is disposed between the base element and the second positioning element.

2. The two-axis positioning device according to claim 1, wherein at least one of the two drives is realized as an electromagnetic drive which comprises at least one coil element and at least one magnet arrangement.

3. The two-axis positioning device according to claim 2, wherein at least one magnet arrangement is arranged on the metallic support element, and the magnet arrangement co-acts with a coil element which is disposed opposite to the magnet arrangement.

4. The two-axis positioning device according to claim 2, wherein the at least one coil element is integrated in a circuit board of the one or more circuit boards.

5. The two-axis positioning device according to claim 2, wherein a magnet arrangement of the at least one magnet arrangement corresponds to a Halbach array.

6. The two-axis positioning device according to claim 1, wherein a communication module is integrated in at least one of the one or more circuit boards.

7. The two-axis positioning device according to claim 1, wherein at least one of the one or more circuit boards comprises receiving devices for a bearing or for a sensor element.

8. The two-axis positioning device according to claim 1, wherein a circuit board of the base element is electrically connected to a circuit board of the second positioning element via a flexible connection element.

9. The two-axis positioning device according to claim 1, wherein a circuit board of the base element is realized identically with a circuit board of the second positioning element.

10. A computer program product which is configured to produce a digital image of the two-axis positioning device according to claim 1.

11. A two-axis positioning device, comprising a base element, a first positioning element which is movably mounted relative to the base element along a first direction, a second positioning element which is movably mounted relative to the first positioning element along a second direction which deviates from the first direction, a first drive for adjusting the first positioning element along the first direction of movement, a second drive for adjusting the second positioning element along the second direction of movement, wherein the stationary base element and the second positioning element comprise one or more printed circuit boards, and the first positioning element is realized as a metallic support element and is disposed between the base element and the second positioning element, wherein at least one of the two drives is realized as an electromagnetic drive which comprises at least one coil element and at least one magnet arrangement, wherein at least one magnet arrangement is arranged on the metallic carrier element, and the magnet arrangement co-acts with a coil element which is disposed opposite to the magnet arrangement, and wherein that the coil element is integrated in a printed circuit board of the one or more circuit boards.

12. A two-axis positioning device, comprising a base element, a first positioning element which is movably mounted relative to the base element along a first direction, a second positioning element which is movably mounted relative to the first positioning element along a second direction which deviates from the first direction, a first drive for adjusting the first positioning element along the first direction of movement, a second drive for adjusting the second positioning element along the second direction of movement, wherein the stationary base element and the second positioning element comprise one or more printed circuit boards, and the first positioning element is realized as a metallic support element and is disposed between the base element and the second positioning element, wherein at least one of the two drives is realized as an electromagnetic drive which comprises at least one coil element and at least one magnet arrangement, wherein a magnet arrangement of the at least one magnet arrangement is arranged on the metallic carrier element, and the magnet arrangement co-acts with a coil element of the at least one coil element which is disposed opposite to the magnet arrangement, and wherein the magnet arrangement corresponds to a Halbach array.

Description

[0017] In addition, advantages and expediencies of the invention result from the following description of exemplary embodiments and aspects with reference to the figures. These figure show:

[0018] FIG. 1: a perspective view of an two-axis positioning device according to the invention

[0019] FIG. 2: an exploded view of the two-axis positioning device according to FIG. 1

[0020] FIG. 3: a side view of the two-axis positioning device according to FIG. 1 and FIG. 2

[0021] FIG. 4: a representation of details of the two-axis positioning device according to FIGS. 1 to 3 in perspective view

[0022] FIG. 5: a representation of details of the two-axis positioning device according to FIGS. 1 to 3 in perspective view

[0023] FIGS. 6A and 6B: different perspective views of the metallic support element of the two-axis positioning device according to FIGS. 1 to 3

[0024] According to FIG. 1, the two-axis positioning device 1 according to the invention comprises a three-layer or three-layer construction on with a base element 2 which is disposed at the bottom in FIG. 1 and which comprises a metallic support plate 22 and a circuit board 5 which is arranged thereon or connected to the same. The material of the circuit board 5 is a composite material made of epoxy resin and fiberglass fabric (FR-4). The circuit board 5 comprises two connector elements 200 for electrical contacting the two-axis positioning device. The same are partially embedded in the circuit board 5. One of the connector elements 200 is used for electricity supply or power supply for the electromagnetic drives of the two-axis positioning device used here, while the other of the two connector elements 200 functions as an interface (e.g. via USB, CAN, RS232, Ethernet or Ethercat) for the commanding of positioning movements or position targets of the two-axis positioning device. Coil elements are completely embedded in the circuit board 5 of the base element 2 which cannot be seen in FIG. 1. A motor driver integrated in the circuit board 5 of the base element 2 cannot be seen either.

[0025] The base element 2 located at the bottom is followed as a middle layer or ply by the first positioning element 3 in the form of a metallic support element 6 made of aluminium. Both on the upper side of the metallic support element 6 and on its underside, which faces the circuit board 5 of the base element 2, a magnet arrangement (not shown in FIG. 1) is arranged, which in each case corresponds to a Halbach array.

[0026] The top layer or ply of those shown in FIG. 1 the two-axis positioning device forms the second positioning element 4, which is constructed similarly to the base element 2 and, in addition to the circuit board 5, also comprises a metallic support plate 42 which is connected to the circuit board 5. A motor driver which is integrated in the circuit board 5 of the second positioning element 4 cannot be seen. Both the support plate 22 of the base element 2 and the support plate 42 of the second positioning element 4 primarily serve to connect the two-axis positioning device to or with superordinate structures, such as a stationary base and an object to be positioned in relation to the base. Appropriate mounting or connection devices such as threaded holes can easily be inserted into the metal support plates. Further, the metallic support plates 22 and 42 serve to increase the mechanical stability of the base element 2 and the second positioning element 4. This makes it possible, among other things, to realize the circuit boards 5 extremely thin.

[0027] However, constructions are also conceivable in which the support plate 22 of the base element 2 and the support plate 42 of the second positioning element 4 are dispensed with and in which the circuit boards 5 themselves comprise means with which a connection of the two-axis positioning device on higher-level structures is possible, for example by thread elements which are embedded in or pressed in the circuit boards. By means of such holding devices also bearings for moveable support of the positioning elements 3 and 4 can be arranged on the circuit boards 5. Furthermore, such holding devices can serve for holding or mounting of sensor elements on the circuit boards. In addition, the thickness of the circuit boards 5 can be varied or adapted, and circuit board structures of corresponding thickness can be used which themselves already comprise the mechanical stability required for the specific application.

[0028] In order to realize an electrical connection between the circuit board 5 of the base element 2 and the circuit board 5 of the second positioning element 4, a flexible and electrically conductive connection element 9 is provided, wherein the flexibility of which is sufficient to oppose the movements of the two positioning elements 3 and 4 only with very little resistance and wherein connection element 9 allows that the same can be carried along without friction during adjustment movements of the two-axis positioning device, wherein by the electrical connection on the one hand the electricity or power supply to the coil elements which are embedded in the circuit boards 5 and the additional components or elements which are integrated therein, such as motor drivers, sensor elements, communication modules etc., and on the other hand the forwarding of electrical signals, for instance for commanding positioning movements, is made possible.

[0029] For realizing a precisely guided linear movement along the two directions of movement disposed perpendicular to one another, the two-axis positioning device comprises a total of four linear guiding devices 100, two of which are arranged parallel and spaced apart from each other between the base element 2 and the first positioning element 3, and of which the remaining two are arranged parallel and spaced apart from each other between the first positioning element 3 and the second positioning element 4. It is also conceivable, to provide only one linear guiding device in each case for the two movement or adjustment directions which are disposed perpendicular to each other.

[0030] FIG. 2 corresponds to an exploded view of the two-axis positioning device according to FIG. 1. In comparison to the illustration according to FIG. 1, the linear guiding devices 100 can be seen more clearly. In addition, in FIG. 2 the magnet arrangement 8 in the form of a Halbach array is shown which cannot be taken from FIG. 1 and which is used in the electromagnetic drive for the second positioning element 4.

[0031] FIG. 3 corresponds to a side view of the two-axis positioning device 1 according to FIGS. 1 and 2. From FIG. 3 particularly the measurement device 300 can be taken which is additionally disposed between the metallic support element 6 and the second positioning element 4 and which comprises a scale 302 which is arranged on the metallic support element 6 and a sensor 304 which interacts with the scale 302, wherein the sensor 304 is disposed opposite to the scale 302 on the second positioning element 4, wherein the measurement device 300 serves for capturing or measurement of the position of the second positioning element 4 relative to the first positioning element 3 and for the position control of the second positioning element 4 derived from the position capturing. An measurement device 300 which is analogous to the one mentioned before and which cannot be taken from FIG. 3, is arranged on the underside of the metallic support element 6, which, in an analogous manner, is used for the capturing or measurement of the position of the metallic support element 6 in relation to the base element 2 and thus for the position control of the same.

[0032] In FIG. 4 only elements of the two-axis positioning device according to FIGS. 1 to 3 are shown which are individually exposed or cut out. These are the respectively interacting coil elements 7 and magnet arrangements 8 of the two electromagnetic drives. Since the coil elements 7 in the two-axis positioning device according to FIGS. 1 to 3 are completely embedded in the corresponding circuit board 5 and therefore would not be recognizable in the normal representation, they are shown cut out of the circuit board in FIG. 4. The magnet assemblies 8 are each fastened to the metallic support element 6, wherein the coil elements 7 and the magnet assemblies 8 are arranged opposite one another in pairs.

[0033] Each coil element 7 comprises three separate conductor tracks which are nested within one another, so that a three-phase control of the coil elements 7 is enabled. The magnet assemblies 8 each comprise a Halbach array and comprise a I direction of longitudinal extension that coincides with the direction of longitudinal extension of the associated coil element 7.

[0034] In FIG. 4, the total of four linear guiding devices 100 can also be clearly seen, wherein each of which is aligned in pairs parallel to one another and ensures the highly precise guidance of the associated positioning element in the respective guide direction.

[0035] FIG. 5 also shows only a few individually exposed or cut-out elements of the two-axis positioning device according to FIGS. 1 to 3. In particular, FIG. 5 shows the base element 2 and the coil element 7 which integrated or embedded in the circuit board 5 of the base element 2. Furthermore, FIG. 5 shows the magnet arrangement 8 in the form of a Halbach array which is assigned to the coil element 7, which together form the electromagnetic linear drive for the first positioning element 3. The magnet arrangement 8 is here arranged or mounted to the first positioning element 3 in the form of the metallic support element 6 which is not shown. In parallel with the direction of longitudinal extension of the coil element 7 or the magnet assembly 8, which corresponds to the drive direction of the electromagnetic drive, the two linear guiding devices 100 are arranged. These are connected on the one side to the circuit board 5 of the base element 3 and on the other side to the metallic support element 6 of the first positioning element 3.

[0036] FIG. 6 shows in the two representations FIGS. 6A and 6B the metallic support element 6 of the two-axis positioning device according to FIGS. 1 to 3 in different perspective views. FIG. 6A shows the upper side of the support element, while FIG. 6B shows the underside of the metallic support element. On the top of the metallic support element according to FIG. 6A two linear guiding devices 100, which are disposed in parallel alignment to one another, are arranged in corresponding recesses, and, between the same, the magnet arrangement 8 is located in an analogous alignment. In addition, a measuring element 302 of a corresponding measurement device, which comprises a scale 306 and a referencing track 308, is arranged on the upper side of the metallic support element.

[0037] The underside of the metallic support element is, according to FIG. 6B, equipped identically to its upper side and supports, in addition to two linear guiding devices 100, the magnet arrangement 8 and a measuring element 302 of a measurement device comprising a scale 306 and a referencing track 308. The alignment of the linear guiding devices 100 and the magnet arrangement 8 on the underside of the metallic support element is identical and is additionally disposed perpendicular to the alignment of the linear guiding devices 100 and the magnet arrangement 8, which are arranged on the upper side of the metallic support element.

[0038] It is conceivable to combine two or more of the above-described two-axis positioning devices with one another. It is also conceivable to combine one two-axis positioning device described above with a further positioning device, for example a further linear positioning device or a rotation positioning device or a tilt positioning device.

LIST OF REFERENCE SYMBOLS

[0039] 1 two-axis positioning device [0040] 2 base element [0041] 3 first positioning element [0042] 4 second positioning element [0043] 5 circuit board [0044] 6 metallic support element [0045] 7 coil element [0046] 8 magnet arrangement [0047] 9 flexible connector [0048] 22 support plate [0049] 42 support plate [0050] 100 linear guiding device [0051] 200 connector element [0052] 300 measurement device [0053] 302 measuring element (of measurement device 300) [0054] 304 sensor (of measurement device 300) [0055] 306 scale (of measuring element 302) [0056] 308 referencing track (of measuring element 302)