Emitter and device comprising same

Abstract

An emitter includes: an insulator; a pair of conductive terminals attached to the insulator and spaced apart from each other; a heater disposed between tips of the pair of conductive terminals and generating heat when energized; an electron source heated by the heater and made of a first material emitting electrons; a Wehnelt electrode having an inner surface forming an internal space along with a surface of the insulator, and applying a bias voltage across the Wehnelt electrode and the electron source; and a shielding member covering a part of the surface of the insulator in the internal space.

Claims

1. An emitter comprising: an insulator; a pair of conductive terminals attached to the insulator and spaced apart from each other; a heater disposed between tips of the pair of conductive terminals and generating heat when energized; an electron source heated by the heater and made of a first material emitting electrons; a Wehnelt electrode having an inner surface forming an internal space along with a surface of the insulator, and applying a bias voltage across the Wehnelt electrode and the electron source; and a shielding member covering a part of the surface of the insulator in the internal space and spaced apart from the inner surface of the Wehnelt electrode and the pair of conductive terminals.

2. The emitter according to claim 1, wherein the shielding member suppresses a conductive layer from being formed continuously between the pair of conductive terminals and the Wehnelt electrode due to solidification of evaporated matter on the surface of the insulator, the evaporated matter being generated in the internal space by heat from the heater.

3. The emitter according to claim 1, wherein the shielding member is disposed to cover at least a region along the inner surface of the Wehnelt electrode, of the surface of the insulator.

4. The emitter according to claim 1, wherein the shielding member is disposed to cover at least two regions respectively along the pair of conductive terminals, of the surface of the insulator.

5. The emitter according to claim 1, further comprising an intermediate member made of a second material having a lower thermal conductivity than the first material, wherein the tips of the pair of conductive terminals hold the electron source via the intermediate member.

6. A device comprising the emitter according to claim 1.

7. The emitter according to claim 1, wherein the shielding member includes a first portion having a circular cross section.

8. The emitter according to claim 7, wherein the shielding member further includes a second portion having a rectangular cross section and contacting the insulator.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a vertical cross-sectional view schematically showing an embodiment of an emitter according to the disclosure.

(2) FIG. 2 is a plan view schematically showing a state in which a Wehnelt electrode is removed from the emitter shown in FIG. 1.

(3) (a) in FIG. 3 is a perspective view schematically showing an example of a shielding member and (b) in FIG. 3 is a cross-sectional view taken along a line b-b shown in (a) in FIG. 3.

(4) (a) in FIG. 4 is a vertical cross-sectional view schematically showing the configuration of an electron source and other related parts disposed between the tips of a pair of conductive terminals and (b) in FIG. 4 is a horizontal cross-sectional view of the configuration shown in (a) in FIG. 4.

(5) (a) to (c) in FIG. 5 are cross-sectional views schematically showing a process of manufacturing the emitter shown in FIG. 1.

(6) (a) in FIG. 6 is a cross-sectional view schematically showing a state after the emitter shown in FIG. 1 is used for a long period of time and (b) in FIG. 6 is a cross-sectional view schematically showing a state after an emitter without a shielding member is used for a long period of time.

(7) (a) in FIG. 7 is a plan view schematically showing an emitter with a shielding member according to another example and (b) in FIG. 7 is a cross-sectional view of the shielding member shown in (a) in FIG. 7.

(8) (a) in FIG. 8 is a plan view schematically showing an emitter with a shielding member according to another example and (b) in FIG. 8 is a cross-sectional view of the shielding member shown in (a) in FIG. 8.

(9) (a) in FIG. 9 is a vertical cross-sectional view schematically showing another configuration of an electron source and the like disposed between tips of a pair of conductive terminals and (b) in FIG. 9 is a horizontal cross-sectional view of the configuration shown in (a) in FIG. 9.

(10) (a) in FIG. 10 is a vertical cross-sectional view schematically showing another configuration of an electron source and the like disposed between tips of a pair of conductive terminals and (b) in FIG. 10 is a plan view of the configuration shown in (a) in FIG. 10.

(11) FIG. 11 is a vertical cross-sectional view schematically showing another embodiment of the emitter according to the disclosure.

(12) (a) in FIG. 12 is a vertical cross-sectional view schematically showing another configuration of an electron source and the like disposed between tips of a pair of conductive terminals and (b) in FIG. 12 is a horizontal cross-sectional view of the configuration shown in (a) in FIG. 12.

DESCRIPTION OF EMBODIMENTS

(13) Hereinafter, embodiments of the disclosure will be described with reference to the drawings. In the following description, the same components or components having the same functions are designated by the same reference numerals, and duplicated descriptions are omitted. Furthermore, the disclosure is not limited to the following embodiments.

(14) <Emitter>

(15) FIG. 1 is a vertical cross-sectional view schematically showing an emitter according to this embodiment. An emitter 10 shown in this drawing includes an electron source 1, intermediate members 2a and 2b, a pair of heaters 5a and 5b, a pair of conductive terminals 6a and 6b, an insulator 7, a shielding member 8, and a Wehnelt electrode 9. When the heaters 5a and 5b generate heat due to energization thereto, the electron source 1 is heated and electrons emitted from the electron source 1 are emitted from an opening 9a of the Wehnelt electrode 9. The tip of the electron source 1 is located at a position that does not protrude from the opening 9a. The Wehnelt electrode 9 is an electrode disposed between the electron source 1 (cathode) and the anode (not shown), is configured to apply a negative bias voltage to the electron source 1, and serves to control the amount of emitted electrons. With this configuration, it is possible to suppress excess electrons from the side surface of the electron source 1 and to use only the electrons from the tip of the electron source 1. The Wehnelt electrode 9 includes a cylindrical portion 9b and a closing portion 9c which closes one end of the cylindrical portion 9b and has an opening 9a formed at the center of the closing portion 9c. An inner surface 9d of the Wehnelt electrode 9 forms an internal space S along with a surface 7a of the insulator 7. In order to heat the electron source 1, a voltage of, for example, about 1 to 10 V is applied between the pair of conductive terminals 6a and 6b, and a current of about 0.5 to 3 A flows. Examples of devices including the emitter 10 include electron microscopes, semiconductor manufacturing devices, inspection devices, and processing devices.

(16) FIG. 2 is a plan view schematically showing a state in which the Wehnelt electrode 9 is removed from the emitter 10 shown in FIG. 1. The dashed circle in FIG. 2 indicates the position of the inner surface 9d of the Wehnelt electrode 9. As shown in FIGS. 1 and 2, the shielding member 8 is disposed on the surface 7a of the insulator 7. The shielding member 8 serves to suppress a conductive layer Lc (a conductive deposition layer) from being formed continuously between the conductive terminals 6a and 6b and the Wehnelt electrode 9 due to the solidification of evaporated matter on the surface 7a of the insulator 7, which is generated in the internal space S by heat from the heaters 5a and 5b (see (a) in FIG. 6). Since a voltage of, for example, 15 to 1000 V is applied between the conductive terminals 6a and 6b and the Wehnelt electrode 9, it is preferable that a high level of insulation between the conductive terminals 6a and 6b and the Wehnelt electrode 9 is maintained.

(17) As shown in (a) and (b) in FIG. 3, the shielding member 8 according to this embodiment is composed of a raised portion 8a which comes into contact with the surface 7a of the insulator 7 and a protruding portion 8b which has a surface 8s exposed to the internal space S. The raised portion 8a has a rectangular cross section. The length of one side is, for example, about 4 to 10 mm. The thickness of the raised portion 8a is, for example, 0.5 to 2 mm. In a plan view, the protruding portion 8b is provided to protrude laterally beyond the raised portion 8a, and is circular in cross section. The diameter is, for example, about 8 to 20 mm.

(18) The shielding member 8 is made of an insulating material (for example, ceramics). From the viewpoint of workability, the material of the shielding member 8 is preferably a machinable ceramic. The raised portion 8a and the protruding portion 8b may be formed integrally, or may be separable from each other. The shielding member 8 includes a hole 8c for fixing the shielding member 8 to the insulator 7 with a bolt 14 and holes 8d and 8e into which the conductive terminals 6a and 6b are inserted. The bolt hole 8c is provided to penetrate the center of the shielding member 8, and the holes 8d and 8e are provided at positions that sandwich the hole 8c.

(19) (a) in FIG. 4 is a vertical cross-sectional view schematically showing a configuration of the electron source 1 and the like accommodated in the internal space S, and (b) in FIG. 4 is a horizontal cross-sectional view shown in (a) in FIG. 4. As shown in these drawings, the electron source 1 is disposed between the tips of the conductive terminals 6a and 6b. The conductive terminals 6a and 6b are used to hold the electron source 1 and to energize the heaters 5a and 5b. The electron source 1 is sandwiched by the intermediate members 2a and 2b. The heaters 5a and 5b are disposed on the outside of the intermediate members 2a and 2b. The tip of the conductive terminal 6a is in contact with the heater 5a, and the tip of the conductive terminal 6b is in contact with the heater 5b.

(20) The electron source 1 is made of a first material (electron emitting material) having electron emitting properties. The tip 1a of the electron source 1 is formed in a cone shape, and electrons are emitted from the tip. In this embodiment, the side surfaces 1b and 1c of the electron source 1 are exposed to the internal space S.

(21) In this embodiment, the shape of the electron source 1 other than the tip 1a is a square prism. The length of the electron source 1 is, for example, 0.1 to 2 mm, and may be 0.2 to 1.5 mm or 0.2 to 1 mm. The length of 0.1 mm or more tends to improve handling, and the length of 2 mm or less tends to improve uniform heating. The cross-sectional shape of the square prism of the electron source 1 is approximately square. The length of the side is, for example, 0.02 to 1 mm, and may be 0.05 to 0.5 mm or 0.05 to 0.15 mm.

(22) Examples of electron emitting materials include rare earth borides such as lanthanum boride (LaB.sub.6) and cerium boride (CeB.sub.6); high melting point metals such as tungsten, tantalum, and hafnium as well as their oxides, carbides, and nitrides; and precious metal-rare earth alloys such as iridium cerium.

(23) From the viewpoints of electron emission characteristics, strength, and workability, the electron emitting material constituting the electron source 1 is preferably a rare earth boride. When the electron source 1 is made of a rare earth boride, it is preferable that the electron source 1 is a single crystal processed so that the <100> orientation, which is easy to emit electrons, coincides with the electron emission direction. The electron source 1 can be formed into a desired shape by electric discharge machining and the like. The side surface of the electron source 1 is preferably a (100) crystal plane since it is thought that the evaporation rate becomes slower on this side surface.

(24) The material constituting the electron source 1 has a higher thermal conductivity than the material constituting the intermediate members 2a and 2b. The thermal conductivity of the material constituting the electron source 1 is preferably 5 W/m.Math.K or more, and more preferably 10 W/m.Math.K or more. Since the thermal conductivity of this material is 5 W/m.Math.K or more, the entire electron source 1 tends to be heated sufficiently uniformly by the heat from the heaters 5a and 5b. Furthermore, the upper limit of the thermal conductivity of this material is, for example, 200 W/m.Math.K. The thermal conductivities of a plurality of materials are shown below. Lanthanum boride (LaB.sub.6): 60 W/m.Math.K Tungsten: 177 W/m.Math.K

(25) It is preferable that the thermal conductivity value T.sub.E of the electron source 1 is sufficiently larger than the thermal conductivity value T.sub.I of the intermediate members 2a and 2b. The ratio (T.sub.E/T.sub.I) of the thermal conductivity value T.sub.E of the electron source 1 to the thermal conductivity value T.sub.I of the intermediate members 2a and 2b is, for example, 7 to 13, and may be 8 to 12 or 10 to 11. By setting this ratio within this range, the temperature of the heaters 5a and 5b can be appropriately increased when energized. The temperature of the heaters 5a and 5b during energization can be set to be, for example, about 150 to 250 C. higher than the temperature of the electron source 1. Accordingly, it is possible to suppress the material constituting the electron source 1 from being deposited in the vicinity of the heaters 5a and 5b.

(26) The intermediate members 2a and 2b are disposed to contact and cover a pair of surfaces 1d and 1e of the electron source 1 (see (b) in FIG. 4). It is preferable that the length of the shortest path of the intermediate member from the heater to the electron source is 100 m or more. That is, in this embodiment, the thickness of the intermediate member 2a (the distance between the electron source 1 and the heater 5a) is preferably 100 m or more, and may be 100 to 1000 m or 300 to 800 m.

(27) The intermediate members 2a and 2b are made of a material (second material) having a lower thermal conductivity than the material constituting the electron source 1. The thermal conductivity of the material constituting the intermediate members 2a and 2b is, for example, 100 W/m.Math.K or less, preferably 1 to 100 W/m.Math.K, and more preferably 1 to 60 W/m.Math.K. The lower limit of this value may be 2 W/m.Math.K or may be 3 W/m.Math.K. The upper limit of this value may be 45 W/m.Math.K, or may be 40 W/m.Math.K. When the thermal conductivity of this material is 1 W/m.Math.K or more, heat from the heaters 5a and 5b tends to be sufficiently transmitted to the electron source 1, whereas when the thermal conductivity is 100 W/m.Math.K or less, a sufficient temperature difference tends to be generated between the heaters 5a and 5b and the electron source 1.

(28) The material constituting the intermediate members 2a and 2b preferably includes a high melting point metal or a carbide thereof, and preferably includes at least one of metallic tantalum, metallic titanium, metallic zirconium, metallic tungsten, metallic molybdenum, metallic rhenium, tantalum carbide, titanium carbide, and zirconium carbide. Further, the material may also include at least one of boron carbide and graphite (carbon material), and may also include at least one of niobium, hafnium, and vanadium. As this material, glassy carbon (for example, Glassy Carbon (product name, manufactured by Rayho Manufacturing Co., Ltd.)) may be used. Boron nitride may be used as this material. The thermal conductivities of a plurality of materials are shown below. Metallic rhenium: 48 W/m.Math.K Boron carbide: 35 W/m.Math.K Graphite: 80 to 250 W/m.Math.K Glassy carbon: 5.8 W/m.Math.K

(29) The material constituting the intermediate members 2a and 2b is electrically conductive. From the viewpoint of suppressing the intermediate members 2a and 2b from excessively heating due to energization, it is preferable that the material constituting the intermediate members 2a and 2b has a lower electrical resistivity than the material constituting the heaters 5a and 5b. The electrical resistivity of the material constituting the intermediate members 2a and 2b is preferably 300 .Math.m or less, and more preferably 100 .Math.m or less. Since the electrical resistivity of this material is 300 .Math.m or less, it is possible to suppress the intermediate members 2a and 2b from generating excessive heat when energized. Furthermore, the lower limit of the electrical resistivity of this material is, for example, 0.1 .Math.m, and may be 0.3 .Math.m or 1.0 .Math.m. The electrical resistivities of a plurality of materials are shown below. Metallic rhenium: 0.2 .Math.m Graphite: 5 to 15 .Math.m Glassy carbon: 42 .Math.m

(30) The heaters 5a and 5b are made of a material having high electrical resistivity and generate heat when energized. The electrical resistivity of the material constituting the heaters 5a and 5b is preferably 500 to 1000 .Math.m, and more preferably 600 to 900 .Math.m. When the electrical resistivity of this material is 500 .Math.m or more, the electron source 1 tends to be able to be heated sufficiently by energization, whereas when the electrical resistivity of this material is 1000 .Math.m or less, the electron source 1 tends to be able to be sufficiently energized. Examples of materials constituting the heaters 5a and 5b include pyrolytic graphite and hot-pressed carbon. Furthermore, the electrical resistivity (typical value) of pyrolytic graphite is 800 .Math.m.

(31) It is preferable that the electrical resistivity value R.sub.H of the heaters 5a and 5b is sufficiently larger than the electrical resistivity value R.sub.I of the intermediate members 2a and 2b. The ratio (R.sub.H/R.sub.I) of the electrical resistivity value R.sub.H of the heaters 5a and 5b to the electrical resistivity value R.sub.I of the intermediate members 2a and 2b is, for example, 12 to 20, and may be 13 to 19 or 14 to 18. When this ratio is 12 or more, the temperature of the heaters 5a and 5b can be sufficiently high when energized, and there is a tendency that deposition of the material constituting the electron source 1 in the vicinity of the heaters 5a and 5b can be suppressed. On the other hand, when this ratio is 20 or less, the loss of power required to heat the heaters 5a and 5b tends to be reduced.

(32) The emitter 10 can be manufactured through the following steps. First, the conductive terminals 6a and 6b are fixed to holes 7b and 7c of the insulator 7 by, for example, brazing ((a) in FIG. 5). Subsequently, the shielding member 8 is fixed to the insulator 7 with the bolt 14 while the conductive terminals 6a and 6b pass through holes 8d and 8e of the insulator 7 ((b) in FIG. 5). Then, the conductive terminals 6a and 6b are bent so that the tips of the conductive terminals 6a and 6b move close to each other ((c) in FIG. 5). Thereafter, the electron source 1, the intermediate members 2a and 2b, and the heaters 5a and 5b are disposed between the tips of the conductive terminals 6a and 6b. After adjusting the position of the electron source 1, the Wehnelt electrode 9 is attached, and the emitter 10 shown in FIG. 1 is obtained.

(33) According to the above-described embodiment, it is possible to maintain the reliability of the emission current of the emitter 10 for a sufficiently long period of time. That is, as shown in (a) in FIG. 6, since the shielding member 8 is disposed to cover a part of the surface 7a of the insulator 7 (particularly, an annular region R1 that follows the inner surface 9d of the Wehnelt electrode 9), it is possible to sufficiently suppress the conductive layer Lc from being continuously formed between the conductive terminals 6a and 6b and the Wehnelt electrode 9 even when the emitter 10 is used for a long period of time. Therefore, it is possible to maintain a high level of insulation between the conductive terminals 6a and 6b and the Wehnelt electrode 9. On the other hand, when an emitter 100 without the shielding member 8 shown in (b) in FIG. 6 is used for a long period of time, the conductive layer Lc is continuously formed between the conductive terminals 6a and 6b and the Wehnelt electrode 9, and the insulation between the conductive terminals 6a and 6b and the Wehnelt electrode 9 may deteriorate.

(34) Although the embodiment of the disclosure has been described in detail above, the disclosure is not limited to the above-described embodiment. For example, the shielding member may be in the following form. An emitter 20 shown in (a) in FIG. 7 includes an annular shielding member 18. The shielding member 18 selectively covers the annular region R1 that follows the inner surface 9d of the Wehnelt electrode 9 in the surface 7a of the insulator 7. As shown in (b) in FIG. 7, the shielding member 18 is composed of a raised portion 18a which comes into contact with the surface 7a of the insulator 7 and a protruding portion 18b which has a surface 18s exposed to the internal space S. The thickness of the raised portion 18a is, for example, 0.5 to 2 mm. In plan view, the protruding portion 18b is provided to protrude further to the side than the raised portion 18a. A groove (not shown) may be provided in the insulator 7, the shielding member 18 may be fitted to this groove, and the shielding member 18 may be fixed to the insulator 7 by brazing.

(35) An emitter 30 shown in (a) in FIG. 8 includes a pair of shielding members 28 and 29. The pair of shielding members 28 and 29 are both annular and selectively cover two annular regions Ra and Rb that respectively follow the outer surfaces of the conductive terminals 6a and 6b in the surface 7a of the insulator 7. The shielding member 28 is composed of a raised portion 28a which comes into contact with the surface 7a of the insulator 7 and a protruding portion 28b which has a surface 28s exposed to the internal space S. The thickness of the raised portion 28a is, for example, 0.5 to 2 mm. In plan view, the protruding portion 28b is provided to protrude further to the side than the raised portion 28a. The configuration of the shielding member 29 may be the same as the shielding member 28. A plurality of holes (not shown) may be provided in the insulator 7, the shielding members 28 and 29 may be respectively fitted into these holes, and the shielding members 28 and 29 may be fitted and fixed to the conductive terminals 6a and 6b.

(36) In the above-described embodiment, an aspect is shown in which the electron source 1 is sandwiched by the intermediate members 2a and 2b, but the following aspect may be used. (a) and (b) in FIG. 9 are diagrams showing a first modified example. In the electron source 1 according to this modified example, four side surfaces of the columnar portion are covered with the intermediate member 2. Since four side surfaces of the columnar portion of the electron source 1 are covered with the intermediate member 2, this has the effect of suppressing the diffusion of the evaporated matter from the electron source and of making the electron source 1 uniformly heated. The material of the intermediate member 2 may be the same as that of the intermediate members 2a and 2b according to the above-described embodiment.

(37) (a) and (b) in FIG. 10 are diagrams showing a second modified example. An intermediate member 3 according to this modified example is composed of a columnar portion 3a and a conical portion 3b. An opening 4 is provided at the tip of the conical portion 3b, and the electron source 1 is inserted into the opening 4. In this modified example, the shape of the electron source 1 is a square prism. The length of the electron source 1 is, for example, 0.1 to 1 mm, and may be 0.2 to 0.6 mm or 0.3 mm. The length of 0.1 mm or more tends to improve handling, and the length of 1 mm or less tends to reduce the risk of cracks. The cross-sectional shape of the electron source 1 is approximately square. The length of the side is, for example, 20 to 300 m, and may be 50 to 150 m or 100 m. The shape of the columnar portion 3a of the intermediate member 3 is a square prism. The cross-sectional shape of the columnar portion 3a is approximately square. The length of the side is, for example, 0.5 to 2 mm, and may be 0.6 to 1 mm or 0.7 to 0.9 mm. Since the surfaces of the electron source 1 other than the electron emission surface are covered with the intermediate member 3, emission of electrons from the surfaces other than the electron emission surface is suppressed. The material of the intermediate member 3 may be the same as that of the intermediate members 2a and 2b according to the above-described embodiment.

(38) As shown in (a) and (b) in FIG. 10, in the case of the configuration in which the electron source 1 is embedded in the intermediate member 3 and the surfaces of the electron source 1 other than the electron emission surface are covered with the intermediate member 3, the tip of the electron source 1 may protrude from the opening 9a as shown in FIG. 11. In this case, the amount of electrons emitted from the electron source 1 can be increased by applying a positive bias voltage to the electron source 1. On the other hand, since the electron source 1 is embedded in the intermediate member 3, it is possible to suppress the emission of excess electrons from the side surface of the electron source 1. Even in this case, in order to heat the electron source 1, the voltage applied across the pair of conductive terminals 6a and 6b is, for example, about 1 to 10 V, whereas the voltage applied across the conductive terminals 6a and 6b and the Wehnelt electrode 9 is, for example, 15 to 1000 V.

(39) (a) and (b) in FIG. 12 are diagrams showing a third modified example. In this modified example, the intermediate members 2a and 2b are not disposed, and the electron source 1 are directly sandwiched by the heaters 5a and 5b.

(40) The disclosure includes the following invention. [1] An emitter including: an insulator; a pair of conductive terminals attached to the insulator and spaced apart from each other; a heater disposed between tips of the pair of conductive terminals and generating heat when energized; an electron source heated by the heater and made of a first material emitting electrons; a Wehnelt electrode having an inner surface forming an internal space along with a surface of the insulator, and applying a bias voltage across the Wehnelt electrode and the electron source; and a shielding member covering a part of the surface of the insulator in the internal space. [2] The emitter according to [1], wherein the shielding member suppresses a conductive layer from being formed continuously between the pair of conductive terminals and the Wehnelt electrode due to solidification of evaporated matter on the surface of the insulator, the evaporated matter being generated in the internal space by heat from the heater. [3] The emitter according to [1] or [2], wherein the shielding member is spaced apart from the inner surface of the Wehnelt electrode. [4] The emitter according to any one of [1] to [3], wherein the shielding member is spaced apart from the pair of conductive terminals. [5] The emitter according to any one of [1] to [4], wherein the shielding member is disposed to cover at least a region along the inner surface of the Wehnelt electrode, of the surface of the insulator. [6] The emitter according to any one of [1] to [5], wherein the shielding member is disposed to cover at least two regions respectively along the pair of conductive terminals, of the surface of the insulator. [7] The emitter according to any one of [1] to [6], further including an intermediate member made of a second material having a lower thermal conductivity than the first material, wherein the tips of the pair of conductive terminals hold the electron source via the intermediate member. [8] A device including the emitter according to any one of [1] to [7].

REFERENCE SIGNS LIST

(41) 1: Electron source, 2, 2a, 2b, 3: Intermediate member, 5a, 5b: Heater, 6a, 6b: Conductive terminal, 7: Insulator, 8, 18, 28, 29: Shielding member, 9: Wehnelt electrode, 10, 20, 30: Emitter, R1, Ra, Rb: Region