SPECIMEN OBSERVATION APPARATUS AND SPECIMEN OBSERVATION METHOD
20230152566 · 2023-05-18
Assignee
Inventors
Cpc classification
G02B21/365
PHYSICS
G02B21/36
PHYSICS
G02B21/367
PHYSICS
International classification
Abstract
The present invention provides a technology whereby relative positioning in the horizontal direction between a specimen observation area in a specimen container and an imaging field of view can be reliably performed, even prior to adjusting the focal position in the vertical direction using an auto-focus system. This specimen observation apparatus: obtains a luminance value for an image at a plurality of locations in the specimen container, prior to performing auto-focus; and uses the number of high-luminance regions and the width of those regions and identifies a central position, in the horizontal direction, in the specimen container or uses the number of low-luminance regions and the width of those regions and identifies the central position, in the horizontal direction, in the specimen container.
Claims
1. A specimen observation apparatus for observing a specimen contained in a specimen container, the specimen observation apparatus comprising: an XY stage configured to move the specimen container in a horizontal direction; a light source configured to emit light in a direction perpendicular to the specimen container; an objective lens configured to collect the light transmitted through the specimen container; an imaging unit configured to capture an image of the specimen container by using the light collected by the objective lens; an auto-focus mechanism configured to adjust a focal position of the objective lens; and a controller configured to control an operation of the specimen observation apparatus, wherein the specimen container has a shape in which a bottom surface of the specimen container and a side surface of the specimen container are connected by an inclined surface, the controller obtains a luminance value for the image at a plurality of locations in the specimen container, prior to adjusting the focal position by the auto-focus mechanism, and the controller uses the number of a high-luminance region, in which the luminance value is equal to or higher than a threshold value on the image, and a width of the high-luminance region in the horizontal direction to identify a central position of the specimen container in the horizontal direction, or uses the number of a low-luminance region, in which the luminance value is less than the threshold value on the image, and a width of the low-luminance region in the horizontal direction to identify the central position of the specimen container in the horizontal direction.
2. The specimen observation apparatus according to claim 1, wherein the controller obtains the luminance value at each of the locations while moving each of the locations along a first scanning line in the horizontal direction, the controller searches for the first scanning line on which there are two or more of the low-luminance regions and a width of the high-luminance region interposed between two of the low-luminance regions is within a first allowable range, and the controller uses the width of the high-luminance region on the first scanning line obtained by the search to identify the central position in a first direction parallel to the first scanning line.
3. The specimen observation apparatus according to claim 2, wherein the controller identifies, as the central position, an average value of coordinate points of the high-luminance region on the first scanning line obtained by the search.
4. The specimen observation apparatus according to claim 2, wherein the controller uses, as the first allowable range, a value that is equal to or higher than an interval between the respective locations along the first scanning line and equal to or less than a diameter of the bottom surface of the specimen container.
5. The specimen observation apparatus according to claim 2, wherein the controller obtains the luminance value at each of the locations while moving each of the locations along a second scanning line orthogonal to the first scanning line in the horizontal direction, the controller searches for the second scanning line on which there are two or more of the low-luminance regions and a width of the high-luminance region interposed between two of the low-luminance regions is within a second allowable range, and the controller uses the width of the high-luminance region on the second scanning line obtained by the search to identify the central position in a second direction parallel to the second scanning line.
6. The specimen observation apparatus according to claim 1, wherein the controller identifies a position and a width of a refracted light image obtained by imaging the light refracted by the inclined surface of the specimen container, and the controller uses the position and the width of the identified refracted light image to identify the central position.
7. The specimen observation apparatus according to claim 1, wherein the controller obtains the luminance value at each of the locations while moving each of the locations along a third scanning line in the horizontal direction, the controller searches for the third scanning line on which there are one or two of the low-luminance regions and a width of each low-luminance region is within a third allowable range, and the controller uses the width of the low-luminance region on the third scanning line obtained by the search to identify the central position in a third direction parallel to the third scanning line.
8. The specimen observation apparatus according to claim 7, wherein the controller identifies, as the central position, an average value of coordinate points of the low-luminance region on the third scanning line obtained by the search.
9. The specimen observation apparatus according to claim 7, wherein when there is only one low-luminance region on the third scanning line, the controller uses, as the third allowable range, a value that is equal to or higher than an interval between the respective locations along the third scanning line and equal to or less than a maximum length along which the low-luminance region is continuous without interruption in a direction along the third scanning line.
10. The specimen observation apparatus according to claim 7, wherein when there are two low-luminance regions on the third scanning line, the controller uses, as the third allowable range, a value that is equal to or higher than an interval between the respective locations along the third scanning line and equal to or less than a width of each of the two low-luminance regions.
11. The specimen observation apparatus according to claim 1, wherein the controller obtains the luminance value at each of the locations while moving each of the locations along a fourth scanning line in the horizontal direction, the controller searches for the fourth scanning line on which there are two or more of the high-luminance regions and a width of one of the high-luminance regions is within a fourth allowable range while widths of the other high-luminance regions are not within the fourth allowable range, and the controller uses the width of the one high-luminance region on the fourth scanning line obtained by the search to identify the central position in a fourth direction parallel to the fourth scanning line.
12. The specimen observation apparatus according to claim 11, wherein the controller uses, as the fourth allowable range, a value that is equal to or higher than (a design value of a diameter of the bottom surface of the specimen container−a lower limit tolerance of the design value) and equal to or less than (the design value+an upper limit tolerance of the design value).
13. The specimen observation apparatus according to claim 1, wherein the controller identifies the central position after setting the focal position inside the specimen container, the controller obtains, as the image, an image of a range narrower than an imaging field of view of the imaging unit, and the controller obtains, as the image, an image of a range narrower than the bottom surface of the specimen container.
14. The specimen observation apparatus according to claim 1, wherein the bottom surface has a circular shape, and the inclined surface is formed so as to concentrically surround a periphery of the bottom surface, the controller adds up luminance values of pixels in the image obtained at each of the locations to obtain the luminance value for the image at each of the locations, and after identifying the central position, the controller adjusts the focal position by the auto-focus mechanism at the identified central position.
15. A specimen observation method for observing a specimen by using a specimen observation apparatus configured to observe the specimen contained in a specimen container, in which the specimen observation apparatus includes an XY stage configured to move the specimen container in a horizontal direction, a light source configured to emit light in a direction perpendicular to the specimen container, an objective lens configured to collect the light transmitted through the specimen container, an imaging unit configured to capture an image of the specimen container by using the light collected by the objective lens, and an auto-focus mechanism configured to adjust a focal position of the objective lens, in which the specimen container has a shape in which a bottom surface of the specimen container and a side surface of the specimen container are connected by an inclined surface, the specimen observation method comprising: obtaining a luminance value for the image at a plurality of locations in the specimen container, prior to adjusting the focal position by the auto-focus mechanism; and identifying a central position of the specimen container in the horizontal direction, wherein the identifying of the central position of the specimen container in the horizontal direction, includes using the number of a high-luminance region, in which the luminance value is equal to or higher than a threshold value on the image, and a width of the high-luminance region in the horizontal direction, to identify the central position of the specimen container in the horizontal direction, or using the number of a low-luminance region, in which the luminance value is less than the threshold value on the image, and a width of the low-luminance region in the horizontal direction to identify the central position of the specimen container in the horizontal direction.
Description
BRIEF DESCRIPTION OF DRAWINGS
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DESCRIPTION OF EMBODIMENTS
Embodiment 1
[0030]
[0031] The specimen container holder 108 holds one or more specimen containers 101. Although each specimen container 101 in
[0032] The specimen container holder 108 is connected to the XY stage 109. The XY stage 109 is a drive mechanism capable of moving the specimen container holder 108 in an X direction and a Y direction (two directions along the horizontal direction). Since an imaging field of view and the specimen container 101 may move relative to each other, an imaging system including the objective lens 102 and the imaging element 106 may move instead of moving the specimen container holder 108. In the operation schematic diagram used in Embodiment 1, for convenience of description, the imaging field of view is shown as moving relative to the position of the fixed specimen container 101. The imaging element 106 has 5 million pixels (2500×2000).
[0033] After a user of the apparatus or another automatic transport apparatus places the specimen container 101 on the specimen container holder 108, the controller 200 performs an imaging operation. The controller 200 drives the XY stage 109 to adjust the position of the specimen container holder 108 in the X direction and the Y direction, aligns the imaging field of view with the well bottom surface, and positions a focal point of the objective lens 102 in the vicinity of the well bottom surface by the objective lens actuator 103 that is driven in a Z direction. By the above procedure, an image of the well bottom surface can be obtained.
[0034] The optical pickup 105 is incorporated with a laser diode and a photodiode, and drives the objective lens actuator 103 such that the focal point of the objective lens 102 is positioned in the vicinity of the well bottom surface when the photodiode in the optical pickup 105 detects reflected light of laser irradiated to the well bottom surface. As a result, the optical pickup 105 and the objective lens actuator 103 operate as an auto-focus mechanism of the objective lens 102. Since auto-focus cannot be performed unless an XY position of the imaging field of view is aligned with the well bottom surface, an image that can be captured before auto-focus is executed is defocused, in principle. The auto-focus method is not limited to a method using the laser, and may also be a method of evaluating image contrast or a method using a phase difference. It is assumed that a height of the specimen in the Z direction is about several microns, and a target position of the auto-focus is on the well bottom surface or above the well bottom surface by several microns.
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[0039] An actual operation of the apparatus will be described. First, a focal position of the objective lens 102 is moved above the well bottom surface such that a defocus image of the well bottom surface can be reliably obtained. Alternatively, the apparatus is set in advance such that the focal position of the objective lens 102 is located above the well bottom surface in a state in which the auto-focus is not performed (at an origin of the objective lens actuator 103). Although the actual central position of the well can be subjected to image determination even if a captured image is an in-focus image, erroneous determination may occur due to an influence of minute damage on the well bottom surface or the like. Therefore, in Embodiment 1, the actual central position of the well is determined using the defocus image.
[0040] The XY stage 109 moves the imaging field of view within the operation region (X0+bx, Y0+by) with the operation start point (X0, Y0) serving as a start point. The imaging element 106 performs imaging at regular intervals, and obtains images of the whole or a part of the imaging field of view. A series of operations of obtaining the images at regular intervals while driving the XY stage 109 is referred to as scanning.
[0041] The operation of the XY stage 109 may or may not be stopped during exposure. In the case of not stopping, in order to prevent image blur, it is desirable that the time for moving over a distance corresponding to one pixel is shorter than an exposure time for obtaining the image. As a specific example, when the exposure time is 500 μs and pixel resolution is 0.345 μm/pixel, it is considered that no image blur will occur if a moving speed of the XY stage 109 is 0.69 mm/s or less. However, in Embodiment 1, since the well central position is identified by the defocus image, there is a high possibility that image blur of several pixels will not cause any problem.
[0042] The controller 200 analyzes information on a luminance value of the obtained image (hereinafter, referred to as image information) to derive XY stage coordinates that allow the actual well central position and the center of the imaging field of view to coincide with each other. A specific procedure will be described later. The term “image information” as used herein refers to coordinates where the image is obtained, a sum of luminance values in the image, an average of the luminance values, a mode value of the luminance values, and the like.
[0043]
(FIG. 6: Step S601)
[0044] The controller 200 sets the center of the imaging field of view to the operation start point (X0, Y0). A planar image of this step is shown in
(FIG. 6: Step S602)
[0045] The controller 200 moves the imaging field of view by bx along a scanning line in the X direction. That is, the center of the imaging field of view is moved from (X0, Y0) to (X0+bx, Y0). A planar image after the movement is shown in
(FIG. 6: Step S603)
[0046] The controller 200 analyzes the profile obtained in S602 and determines whether the following two conditions are satisfied. However, condition (2) is determined only for a profile that satisfies condition (1). An example of a planar image in a case where the conditions are satisfied is shown in
[0047] Condition (1): in the profile, there are two or more low-luminance regions below a determination threshold value.
[0048] Condition (2): in the profile, a width ΔH of a high-luminance region interposed between the two low-luminance regions is within a set allowable range.
(FIG. 6: Step S604)
[0049] The controller 200 moves the imaging field of view in the Y direction by ΔY, returns to S602, and repeats the same process. In order to shorten the scanning time, it is desirable to alternately switch a scanning direction between a +X direction and a −X direction each time when S602 is performed. An example of scanning in the −X direction is shown in
(FIG. 6: Step S605)
[0050] The controller 200 sets a center of the width ΔH of the high-luminance region interposed between the two low-luminance regions as a coordinate Xc of an actual center of the well in the X direction. Xc corresponds to an average value of X coordinate points in the high-luminance region. A specific example of this step is shown in
(FIG. 6: Steps S606 to S608)
[0051] The controller 200 moves the imaging field of view to (Xc, Y0) (S606). In the same manner as S602, the controller 200 obtains a profile by moving the imaging field of view by “by” along a scanning line in the Y direction (S607). In the same manner as S605, the controller 200 sets the center of the width ΔH of the high-luminance region interposed between the two low-luminance regions as a coordinate Yc of the actual center of the well in the Y direction (S608). An example of a state in which S606 to S608 are performed is shown in
[0052] According to this flowchart, the actual central position and the center of the imaging field of view can coincide with each other. After this flowchart is performed, the controller 200 executes auto-focus, and images the specimen by the imaging element 106. The obtained image is used for observation and analysis of the specimen.
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[0062] Here, the allowable range of ΔH is set to ΔX≤ΔH≤(the diameter of the well bottom surface). That is, it is confirmed that the high-luminance region in the profile is continuous at two or more points, and the width is equal to or shorter than the diameter of the well bottom surface. By excluding cases where the high-luminance region includes only one point, an effect of reducing erroneous determination and increasing calculation accuracy of the central position can be achieved. If a lower limit value of the allowable range is further increased, the calculation accuracy can be expected to be improved, while the time taken until the determination is completed increases.
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Embodiment 1: Calculation Example
[0066] Specific numerical values are used to estimate the time required for the series of operations. The diameter of the well bottom surface is 1.5 mm, ΔS is 0.5 mm, tolerance of the position of the well is±1 mm in the X and Y directions, ax is 1.8 mm, ay is 1.7 mm, bx is 3.6 mm, by is 3.6 mm, ΔX is 0.2 mm, ΔYs is 1.2 mm, and ΔY is 0.2 mm. Assuming that an expected value of the actual central position of the well bottom surface coincides with a design central position, an average processing time is calculated.
[0067]
Embodiment 1: Summary
[0068] The specimen observation apparatus 100 according to Embodiment 1 identifies the central position (Xc, Yc) of the bottom surface of the specimen container 101 by using the number of the high-luminance regions interposed between the low-luminance regions and the width ΔH thereof, prior to performing the auto-focus of the objective lens 102. Since it is not necessary to align the focal position with a specimen surface when the central position is identified, the central position can be identified even if the specimen observation area and the imaging field of view are deviated to such an extent that the auto-focus becomes impossible. Since the defocus image is evaluated, the image can be analyzed without being affected by disturbance elements (for example, damage, scratches, or micro-cracks generated at the time of manufacturing the specimen container) present on an actual specimen observation surface. In addition, since it is not necessary to detect the shape of the bottom surface of the specimen container 101, image blur of about several pixels can be allowed. Therefore, the operation speed of the XY stage 109 can be increased relative to the exposure time, and the time required for the determination can be shortened.
[0069] Since the specimen observation apparatus 100 according to Embodiment 1 analyzes only a part of the imaging field of view as the obtained image, even if the scanning range (bx x by) is widened, an amount of data to be subjected to image processing is small, and thus an image processing time can be shortened. Therefore, image processing capacity can be kept small, which is advantageous in terms of cost.
Embodiment 2
[0070] In Embodiment 2 of the disclosure, a method of identifying the central position of the well bottom surface by detecting a position and a width of the annular low-luminance region S will be described. In Embodiment 2, the following conditions are used as the determination conditions (1) and (2). Regardless of the condition (1), the central position is an average of coordinate points in the low-luminance region. Other items such as the configuration and the operation flow of the specimen observation apparatus 100 are the same as those of Embodiment 1.
[0071] Condition (1): in the profile, there is one or two low-luminance regions below the determination threshold value.
[0072] Condition (2): Widths ΔL of all the low-luminance regions in the profile are within a set allowable range.
[0073]
[0074] When there is only one low-luminance region on the scanning line (condition (1)), the scanning line passes through the low-luminance region without crossing the well bottom surface. For example, the scanning line on an upper side of
[0075] When there are two low-luminance regions on the scanning line (condition (2)), the scanning line passes through the low-luminance region=>the high-luminance region (well bottom surface)=>the low-luminance region in this order. For example, the scanning line on a lower side of
Embodiment 2: Summary
[0076] The specimen observation apparatus 100 according to Embodiment 2 can identify the well central position particularly even if there is one low-luminance region under the condition (1). That is, the central position can be identified at a relatively early stage when scanning the range (bx, by) to be scanned. As a result, a distance by which the imaging field of view is moved in order to identify the central position can be shortened, which is advantageous since the central position can be identified more quickly.
Embodiment 3
[0077] In Embodiment 3 of the disclosure, a method of directly detecting the well bottom surface will be described. In Embodiment 2, the following conditions are used as the determination conditions (1) and (2). Regardless of the condition (1), the central position is an average of coordinate points in the high-luminance region. Other items such as the configuration and the operation flow of the specimen observation apparatus 100 are the same as those of Embodiment 1.
[0078] Condition (1): in the profile, there are N high-luminance regions exceeding the determination threshold value (N≥1).
[0079] Condition (2): The width ΔH of a high-luminance region at one location on the profile is within a set allowable range, while the widths ΔH of high-luminance regions at (N−1) locations are not within the set allowable range.
[0080] In the examples of the upper scanning lines in
[0081]
[0082] However, this method is suitable for a case where a well position error is relatively small and a possibility of erroneous detection is small even if the range (bx, by) to be scanned is set to be small to some extent. This is because, when the well position error is large, depending on the size of the range (bx, by) to be scanned and an initial position, there is a possibility that a high-luminance region located on the outer side of the low-luminance regions is erroneously recognized as the well bottom surface.
Embodiment 3: Summary
[0083] The specimen observation apparatus 100 according to Embodiment 3 detects the high-luminance region, and distinguishes whether the high-luminance region is the well bottom surface according to the preset allowable range. As a result, the well bottom surface to be searched can be directly found, and thus a determination algorithm can become relatively simple.
Embodiment 4
[0084] In Embodiment 4 of the disclosure, an example in which the entire imaging field of view is set as an image to be obtained will be described. The configuration of the specimen observation apparatus 100 is the same as that of
[0085] It is assumed that the imaging element 106 has 5 million pixels of 2500×2000, and the pixel resolution is 0.345 μm/pixel. An actual field of view is 0.86 mm×0.69 mm. Each of bx and by is an integer multiple of 0.86 mm and 0.69 mm, respectively, ΔX is 0.86 mm and ΔYs is 0.69 mm. A region of bx×by is scanned to stack images. The stacked images are combined as shown in
[0086] However, when the well position error is large, that is, when bx and by are large, a high-luminance region outside the well may be recognized as the well bottom surface. In this case, the well bottom surface can be determined by evaluating shape feature values such as an aspect ratio and circularity of the high-luminance-value region. A geometric center of the determined high-luminance region is calculated, and Xc and Yc are determined at the same time.
<Modification of Disclosure>
[0087] The disclosure is not limited to the embodiments described above, and has various modifications. For example, the embodiments described above have been described in detail for easy understanding of the disclosure, and the invention is not necessarily limited to those including all the configurations described above. In addition, a part of the configurations of one embodiment can be replaced with the configurations of another embodiment, and the configurations of the other embodiment can be added to the configurations of the one embodiment. In addition, a part of the configurations of each embodiment may be added, deleted, or replaced with other configurations.
[0088] In the embodiments described above, the controller 200 may be implemented by hardware such as a circuit device on which the functions are implemented, or may be implemented by executing software in which the functions are implemented by an arithmetic apparatus such as a central processing unit (CPU).
[0089] In the embodiments described above, the imaging element 106 may be disposed on a transmission side of the dichroic mirror 104, and the optical pickup 105 may be disposed on a reflection side. In addition, an appropriate optical component such as an optical filter (not shown) may be disposed on the optical path.
[0090] In the embodiments described above, the focal position of the objective lens 102 is set above the well bottom surface (inside the specimen container 101). In a case where a central axis deviation between a well outer bottom surface and the well bottom surface (see
[0091] Although the central position coordinates are determined in the order of Xc and Yc in the embodiments described above, this order may be changed.
[0092] Although it has been described in Embodiment 4 that the threshold value for determining the high-luminance region is set in advance, the threshold value may be automatically set for each observation image by using any known method of automatically setting the threshold value.
[0093] In the embodiments described above, an example has been described in which the well bottom surface is circular, and the inclined portion around the well bottom surface is also arranged concentrically relative to the well bottom surface. The well shape whose central position can be identified by the invention is not limited thereto, and the invention can also be applied to other shapes in which the low-luminance region is formed around the well bottom surface by the inclined portion. For example, when the well bottom surface and the low-luminance region around the well bottom surface are line-symmetric along the X direction (relative to the Y axis), a coordinate average of the high-luminance region or the low-luminance region can be regarded as Xc. Similarly, in the case of being line-symmetric along the Y direction (relative to the X axis), the coordinate average of the high-luminance region or the low-luminance region can be regarded as Yc.
[0094] The embodiments described above may be used in combination. For example, it is conceivable to finally identify the central position by averaging central position coordinates identified in the case where there is only one low-luminance region under the condition (1) described in Embodiment 2 and central position coordinates identified in Embodiment 1. Alternatively, it is conceivable that a reliability coefficient may be determined in advance for each embodiment, and the central position may be finally identified by adding up results of multiplying the central position coordinates identified in each embodiment by the reliability coefficient. Other appropriate methods may be used in combination with the embodiments.
REFERENCE SIGNS LIST
[0095] 100: specimen observation apparatus
[0096] 101: specimen container
[0097] 102: objective lens
[0098] 103: objective lens actuator
[0099] 104: dichroic mirror
[0100] 105: optical pickup
[0101] 106: imaging element
[0102] 107: illumination
[0103] 108: specimen container holder
[0104] 109: XY stage